CN105474057A - 紧凑光波导阵列与光波导螺旋 - Google Patents
紧凑光波导阵列与光波导螺旋 Download PDFInfo
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
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Abstract
通过使各个波导的宽度的变化,可以减少光波导束中的串扰。通过使用不同宽度的波导,减少了光波导间串扰的增长,从而使得波导可以邻近放置以增加芯片上的波导密集度和/或减小波导束所需的路由空间。同时,通过使波导螺旋宽度的变化可以减少串扰,并且在盘绕或折合的波导热光(TO)设备中实现时能够增加功率效率。
Description
优先权信息
本申请要求于2013年8月13日递交的发明名称为“紧凑光波导阵列与光波导螺旋”的第61/865499号美国临时申请案的在先申请优先权,以及于2013年11月1日递交的发明名称为“紧凑光波导阵列与光波导螺旋”的第14/070108号美国专利申请的优先权,该在先申请的内容以引入的方式并入本文。
技术领域
本发明涉及光波导,在实施例中尤其涉及紧凑光波导阵列与光波导螺旋。
技术背景
光波导是引导光谱中电磁波的物理结构,并经常为了在集成电路组件间路由多个信号而捆绑在一起。尤其是,邻近放置的光波导间往往会产生串扰,进而可能限制芯片上光波导的密集度,同时限制芯片上的布局灵活性和/或连通空间要求。换言之,具有大量器件的芯片可能需要在芯片上专门为光波导路由设定很大的区域。进一步地,波导螺旋的紧密度可能限制光延迟线,可能要求最小波导间隙以减低串扰。光波导螺旋的紧密度也限制了涉及换热器的螺旋热光设备的效率。因此,需要能实现更紧凑的波导束而又不增加串扰的技术。
发明内容
本发明实施例描述了紧凑光波导阵列和光波导螺旋,通过本发明实施例一般可实现技术上的优势。
根据一实施例,提供了一种容纳光波导的装置。该例中,所述装置包括基板层和波导束。所述波导束包括多个横跨在所述基板层上延伸的波导。所述波导互相平行,同时包括具有三个或三个以上不同宽度的波导。
根据另一实施例,提供了另一种容纳光波导的装置。该例子中,所述装置包括基板层和在所述基板层上延伸的连续波导结构。所述连续波导结构的宽度随着所述连续波导结构的长度变化。
附图说明
为了更完整地理解本发明及其优点,现在参考下文结合附图进行的描述,其中:
图1示出了一种波导束图。
图2示出了一种螺旋波导结构图。
图3示出了一种在热光设备中实现的波导螺旋图。
图4示出了一种包括阵列波导(AWG)结构的波导束图。
图5示出了一种传统波导束图。
图6示出了一对平行波导的图。
图7示出了一种说明平行波导间串扰的图。
图8示出了另一种说明平行波导间串扰的图。
图9示出了一实施例的波导束图。
图10示出了另一实施例的波导束图。
图11示出了又一实施例的波导束图。
图12示出了一实施例的波导螺旋图。
图13示出了一实施例的运算平台的图。
具体实施方式
下文将详细地论述本发明实施例的组成和使用。然而,应当了解的是,本发明提供的许多适用的发明构思可在各种具体环境中得以体现。所论述的具体实施例仅仅示出了用以实施和使用本发明的具体方式,而不限制本发明的范围。
传统的波导束通常可由具有相同宽度的波导组成。在本发明的各方面中,通过各个波导的宽度的变化,减少光波导束中的串扰。更具体地,通过使用不同宽度的波导,减少了光波导间串扰的滋长,从而使得波导可以邻近放置以增加芯片上的波导密集度和/或减少波导束所需的路由空间。相应地,本发明实施例,实现了更灵活和/或更紧凑的波导路由,并且在盘绕或折合的波导热光(TO)设备中实现时能够增加功率效率。
波导束可以包括多个波导。图1示出了包括波导束110的芯片100,其中波导束110包括111至161的多个波导。波导束也可以包括螺旋结构中设置的单一波导。图2示出了包括螺旋波导结构210的芯片200。螺旋波导结构210包括从起点290延伸至终点297的单一波导211。据述,螺旋波导结构210外部尺寸为8毫米(mm)×8毫米(8×8mm),本发明的各方面可以应用于具有任何尺寸的螺旋波导。热光设备也可以实现波导束。图3示出了通过电阻加热器310实现波导螺旋395以形成的热光设备300。如述,电阻加热器310位于覆盖波导螺旋395的包层顶部。电阻加热器可以位于包层上面5微米至100微米之间。本发明的各方面中,改变波导的宽度,可以减少串扰和/或增加热光设备的功率效率。
波导束也可以阵列波导(AWG)结构实现。图4示出了包括作为阵列波导(AWG)415实现的波导束410的芯片400。如图所述,波导束410包括输入波导411、输入耦合器413、AWG415、输出耦合器417和多个输出波导419。输入波导411与输入耦合器413耦合。AWG415从输入耦合器413延伸至输出耦合器417。输出耦合器417与输出波导419耦合。在一些实施例中,输入耦合器413和/或输出耦合器417可以包括星形耦合器结构。在这些或其他的实施例中,AWG415可以是选择性形成的波导阵列。
如上所述,传统的波导束包括相同宽度的波导。图5示出了包括多个具有相同宽度(Wu)的波导511至517的传统波导束510。
在本发明的各方面,通过波导束中各个波导的宽度的变化,减少了光波导束间的串扰。平行波导所产生的串扰量在很大程度上受到波导各自宽度的影响。图6示出了包括一对波导611和612的平行波导结构610,其中波导611和612分别为第一宽度(宽度-1)和第二宽度(宽度-2)。如图所述,由波导611输入的信号会在波导612中产生串扰。波导612中所产生的串扰量取决于多个因素,其中包括波导内间隙、波导611和612宽度的相对差异(例如,宽度-1:宽度-2)和波导611和612的长度等。图7示出了图700,其中描述了当宽度-1等于宽度-2时,通过波导611传播信号时波导612产生的串扰。图8示出了图800,其中描述了波导612的宽度-2变化(第一宽度保持恒定)时,波导612产生的串扰。该例子中,宽度-1恒定为5微米(μm),宽度-2在5μm至6μm之间变化,波导内间隙恒定为5μm,波导611和612的长度恒定为100μm。如图所述,当设定宽度-1等于宽度-2时,串扰大概在–10分贝。然而,当第二宽度从5μm增加至6μm时,串扰量也大幅度减少。该运算主要与高度大概在220纳米(nm)的绝缘体硅片波导相关。然而,由该运算所建模的原理(例如,当波导宽度间的相对差异增加时,产生的串扰也变小)也适用于其他材料系统,例如,硅基二氧化硅、氮化硅和III-IV半导体等。串扰减少的最大值可与长度无关。
在一些实施例中,波导束可包括具有交替宽度的波导。图9示出了一实施例的包括具有交替宽度的波导911至917的波导束910。如图所述,波导911、913、915和917为第一宽度(w1),而波导912、914和916为第二宽度(w2)。在一些实施例中,波导束可以包括具有三种或以上按照重复模式变化的不同宽度的波导。图10示出了一实施例的包括波导1011至1016的波导束1010。如图所述,波导1011和1014为第一宽度(w1),波导1012和1015为第二宽度(w2),波导1013和1016为第三宽度(w3)。在其他实施例中,波导束可具有三种或以上按照非重复模式变化的波导宽度。
在一些实施例中,波导束可包括宽度随机的波导。图11示出了一实施例的波导束1110,其中波导束1110包括宽度随机的波导1111至1116。如图所述,波导1111和1115为第一宽度(w1),波导1113为第二宽度(w2),波导1112和1116为第三宽度(w3),波导1114为第四宽度(w4)。该实施例的波导束1100展现了按照随机模式分散的四种宽度,其他实施例可以包括按照随机模式分散的任意数量的宽度。例如,一实施例的波导束中的每个波导可以为不同的宽度,从而不存在两个宽度相同的波导。
本发明各方面也提供了波导宽度随着波导长度逐渐地(或渐增地)变化的螺旋波导结构,可减少螺旋波导的背反射和/或光回损(ORL)。图12示出了螺旋波导1210,其中螺旋波导1210包括宽度随着长度变化的波导1211。如图所述,螺旋波导1210在不同的点有不同的宽度(例如,w1、w2、w3、w4和w5等)。在一些例子中,螺旋波导1210的宽度始终随着长度变化(例如,按照一个绝对的比率)。在另一些例子中,螺旋波导1210的宽度按照一个动态的比率而变化,其中动态的比率随着螺旋波导1210的长度变化。在其他实施例中,螺旋波导1210在不同阶段中宽度不同。例如,螺旋波导1210中不同的链路可具有不同的宽度。再例如,螺旋波导1210中不同的链路可具有按照不同比率变化的宽度。
本发明的各方面中,通过改变波导束中波导的宽度,以减少串扰和/或波导间隙。在一些实施例中,波导束中使用了一系列的宽度以减少串扰和/或波导内间隙。本发明的各方面中,同样在盘绕或螺旋波导结构中利用了递增的或变化的波导宽度。由此可实现邻近“环”有不同的宽度,可减少盘绕或螺旋波导结构中的串扰和/或减少盘绕或螺旋波导结构的占用空间。此外,在通过热光波导设备实现的盘绕或螺旋波导结构中利用递增的或变化的波导宽度,可以增加这些设备的散热效率。
通过选择不同的宽度,可以减少邻近波导的串扰。一实施例中,波导束可以有两种交替的宽度,或不同宽度的重复序列。一实施例的波导束可包括不同宽度的非重复序列,或范围内的宽度随机的序列。一实施例的波导螺旋可以包括沿着螺旋凝视增的波导宽度,以减少背反射和/或光回损(ORL)。本发明实施例可增加基于盘绕波导的设备的功率效率,例如,盘绕波导热光移相器。本发明的各方面中,可实现更紧凑的盘绕波导。
图13是一个可用于实现在此公开的设备和方法的处理系统的框图。特定的设备可以利用示的所有组件或只是组件的子组件,并且随着设备的不同,集成水平也不同。进一步地,设备可以包括一个组件的多个实例,例如多个处理单元、处理器、存储器、发射器和接收器等。处理系统可以包括配备有一个或多个输入输出设备的处理单元,如扬声器、麦克风、鼠标、触摸屏、小键盘、键盘、打印机和显示器等。处理单元可以包括中央处理器(CPU)、存储器、海量存储设备、视频适配器和连接总线的I/O接口。
总线可以是一个或多个任意种类的几个总线架构,包括内存总线或内存控制器、外围总线和视频总线等。CPU可以包括任何种类的电子数据处理器。存储器可以包括任何种类的系统内存,例如静态随机存取存储器(SRAM)、动态随机存取存储器(DRAM)、同步DRAM(SDRAM)、只读存储器(ROM)和以上组合等。在一实施例中,存储器可以包括启动时使用的ROM和执行程序时使用的程序DRAM、数据存储。
海量存储设备可以包括任何种类的用于存储数据、程序和其他信息并使所述数据、程序和其他信息可通过总线存取的存储设备。海量存储设备例如可以包括固态磁盘、硬盘驱动器、磁盘驱动器和光盘驱动器等中的一个或多个。
视频适配器和I/O接口提供接口耦合外部输入输出设备与处理单元。如示例所述,输入输出设备包括与视频适配器耦合的显示器和与I/O接口耦合的鼠标/键盘/打印机。其他设备可以与处理单元耦合,同时可以利用附加的或更少的接口卡。例如,串行接口,如通用串行总线(USB)(未示出),可以用于为打印机提供接口。
处理单元也包括一个或多个网络接口,可以包括如以太网线缆等有线链路和/或接入节点或不同网络的无线链路。网络接口允许处理单元通过网络与远端机通信。例如,网络接口可以通过一个或多个发射器或发射天线和一个或多个接收器/接收天线提供无线通信。在一实施例中,处理单元耦合至局域网或广域网以处理数据并与远端设备通信,比如与其他处理单元、互联网和远端存储设施等通信。
虽然本发明已结合说明性实施例进行了描述,但此描述不应理解为是对本发明的限制。所属领域的技术人员在参考该描述后,能够理解说明性实施例的各种修改和组合,以及本发明其他实施例。因此所附权利要求应涵盖任何此类修改或实施例。
Claims (20)
1.一种装置,其特征在于,包括:
基板层;
波导束,包括多个横跨在所述基板层上延伸的波导,其中所述多个波导互相平行,所述多个波导包括具有三个或以上不同的宽度的波导。
2.根据权利要求1所述的装置,其特征在于,所述多个波导至少包括第一波导、第二波导和第三波导,其中所述第一波导、所述第二波导和所述第三波导中均具有不同宽度。
3.根据权利要求1所述的装置,其特征在于,所述多个波导包括三个或以上交替宽度的波导。
4.根据权利要求3所述的装置,其特征在于,所述多个波导包括具有第一宽度的第一波导集合、具有第二宽度的第二波导集合和具有第三宽度的第三波导集合。
5.根据权利要求4所述的装置,其特征在于,所述第二波导集合的每个波导都正好位于所述第一波导集合的相应波导与所述第二波导集合的相应波导之间。
6.根据权利要求1所述的装置,其特征在于,所述多个波导包括宽度随机的波导。
7.根据权利要求6所述的装置,其特征在于,所述波导束包括至少一个在所述波导束中宽度与任意其他波导不同的唯一的波束。
8.根据权利要求6所述的装置,其特征在于,所述波导束的每个波导都包括一个在所述波导束中宽度与其他任意波导不同的惟一的波束。
9.根据权利要求1所述的装置,其特征在于,所述多个波导包括:
具有第一宽度的第一波导;
具有与所述第一宽度不同的第二宽度的第二波导;
具有与所述第一宽度和所述第二宽度都不同的第三宽度的第三波导。
10.根据权利要求9所述的装置,其特征在于,所述第二波导正好位于所述第一波导与所述第二波导之间。
11.根据权利要求10所述的装置,其特征在于,所述第一波导与所述第二波导由第一间隙隔开,第二间隙将所述第二波导与所述第三波导隔开。
12.根据权利要求11所述的装置,其特征在于,所述第一间隙与所述第二间隙宽度相同。
13.根据权利要求11所述的装置,其特征在于,所述第一间隙与所述第二间隙宽度不同。
14.一种装置,其特征在于,包括:
基板层;
在所述基板层上延伸的连续波导结构,其中所述连续波导结构的宽度随着所述连续波导结构的长度变化。
15.根据权利要求14所述的装置,其特征在于,所述连续波导结构的宽度随着所述连续波导结构的长度递增性地变化。
16.根据权利要求15所述的装置,其特征在于,所述连续波导结构的宽度按照一个绝对的比率随着所述连续波导结构的整体长度变化。
17.根据权利要求15所述的装置,其特征在于,所述连续波导结构的宽度按照一个动态的比率变化,其中所述动态的比率随着所述连续波导结构的长度变化。
18.根据权利要求14所述的装置,其特征在于,所述连续波导结构的宽度包括多个连续的长度,其中多个连续的链路中至少有一些宽度不同的链路。
19.根据权利要求18所述的装置,其特征在于,所述连续波导结构至少包括第一链路和第二链路,其中所述连续波导结构的第一链路具有第一统一宽度,所述连续波导结构的第二链路具有不同于所述第一统一宽度的第二统一宽度。
20.根据权利要求18所述的装置,其特征在于,所述连续波导结构至少包括第一链路和第二链路,其中所述波导结构的宽度随着所述第一链路与随着所述第二链路变化的比率不同。
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US14/070,108 | 2013-11-01 | ||
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CN114265150B (zh) * | 2021-12-16 | 2022-09-06 | 浙江大学 | 一种支持片上远距离低损耗传输的紧凑线圈光波导 |
Also Published As
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EP3033642A4 (en) | 2016-08-31 |
JP2016530561A (ja) | 2016-09-29 |
WO2015021923A1 (en) | 2015-02-19 |
EP3033642A1 (en) | 2016-06-22 |
KR20160034395A (ko) | 2016-03-29 |
US20150049998A1 (en) | 2015-02-19 |
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