CN105415511A - Steel wire sand-carrying amount detection equipment and silicon slice cutting system with same - Google Patents

Steel wire sand-carrying amount detection equipment and silicon slice cutting system with same Download PDF

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Publication number
CN105415511A
CN105415511A CN201510827815.1A CN201510827815A CN105415511A CN 105415511 A CN105415511 A CN 105415511A CN 201510827815 A CN201510827815 A CN 201510827815A CN 105415511 A CN105415511 A CN 105415511A
Authority
CN
China
Prior art keywords
steel wire
mortar
storage box
carrying capacity
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510827815.1A
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Chinese (zh)
Inventor
郭博涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yingli Energy China Co Ltd
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Yingli Energy China Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yingli Energy China Co Ltd filed Critical Yingli Energy China Co Ltd
Priority to CN201510827815.1A priority Critical patent/CN105415511A/en
Publication of CN105415511A publication Critical patent/CN105415511A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064Devices for the automatic drive or the program control of the machines
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid

Abstract

The invention provides steel wire sand-carrying amount detection equipment and a silicon slice cutting system with the same. The steel wire sand-carrying amount detection equipment comprises a weight measuring device which is fixedly arranged, a mortar storing box and a controller, wherein the weight measuring device is used for measuring the weight of mortar in the mortar storing box; the mortar storing box is provided with a conveying pump and a steel wire conveyor; a steel wire conveyed through the steel wire conveyor is opposite to an outlet of the conveying pump; the controller is electrically connected with the weight measuring device; the controller calculates the variable quantity of the mortar in the mortar storing box according to a weight signal detected by the weight measuring device. The steel wire sand-carrying amount detection equipment can solve the problem that the sand-carrying amount of the steel wire during silicon slice cutting cannot be detected accurately in the prior art.

Description

Steel wire silt carrying capacity checkout equipment and there is its silicon chip diced system
Technical field
The present invention relates to field of silicon chip production, in particular to a kind of steel wire silt carrying capacity checkout equipment and the silicon chip diced system with it.
Background technology
In silicon chip cutting field, current manufacturer's great majority adopt the steel wire carrying mortar to cut silico briquette, and the amount of steel wire carrying mortar directly affects the cut quality of silicon chip.If the silt carrying capacity of steel wire is poor, in the process of steel wire cutting silico briquette, can cause silicon chip surface kerf, more seriously, because steel wire silt carrying capacity is little, in the process of steel wire cutting silico briquette, the wear extent of steel wire increases, and causes the situation that steel wire broken string occurs.
But do not have effective means and the silt carrying capacity of equipment to steel wire to measure at present, and, steel wire being subject to different tension force, run with different speed and different steel wire wire diameter condition under, the silt carrying capacity of steel wire can change, thus has an impact to the quality of cutting silicon wafer.If the Changing Pattern of the silt carrying capacity of steel wire can be found, thus the processing technology of cutting silicon wafer is set according to the silt carrying capacity of steel wire, the quality of silicon chip product can be improved like this, as the index detecting steel wire quality, this index can also be utilized to produce steel wire and make guidance simultaneously.
Summary of the invention
Main purpose of the present invention is the silicon chip diced system providing a kind of steel wire silt carrying capacity checkout equipment and have it, to solve the problem that accurately cannot detect the silt carrying capacity of steel wire in cutting silicon wafer process in prior art.
To achieve these goals, according to an aspect of the present invention, provide a kind of steel wire silt carrying capacity checkout equipment, comprising: weight-measuring device, weight-measuring device is fixedly installed; Mortar storage box, weight-measuring device is for measuring the weight of the mortar in mortar storage box, and wherein, mortar storage box is provided with delivery pump and steel wire conveyer, the steel wire transmitted by steel wire conveyer and the delivery outlet of delivery pump are oppositely arranged; Controller, controller is electrically connected with weight-measuring device, and controller calculates the variable quantity of the mortar in mortar storage box according to the weight signal that weight-measuring device detects.
Further, weight-measuring device comprises: base; Pressure sensor, pressure sensor is arranged on base, and mortar storage box is arranged on pressure sensor, and pressure sensor is electrically connected with controller.
Further, weight-measuring device comprises fixed mount and pulling force sensor, and pulling force sensor is arranged on fixed mount, and the hanging of mortar storage box is in the below of pulling force sensor, and pulling force sensor is electrically connected with controller.
Further, steel wire conveyer comprises: multiple pulley, and multiple pulley room is every setting, and the delivery outlet of each delivery pump is between adjacent two pulleys, and the delivery outlet of delivery pump is positioned at the top of steel wire; Pulley support frame, one end of pulley support frame is fixedly connected with mortar storage box, and the other end of pulley support frame is connected with pulley.
Further, the delivery outlet of each delivery pump is mortar nozzle.
Further, steel wire silt carrying capacity checkout equipment also comprises electrical control cubicles, and electrical control cubicles is fixedly installed in mortar storage box, and controller is arranged in electrical control cubicles.
Further, steel wire silt carrying capacity checkout equipment also comprises display unit, and display unit is fixedly installed in electrical control cubicles, and display unit is electrically connected with controller.
Further, mortar storage box is also provided with buffer structure, buffer structure is arranged on the below of steel wire, and the delivery outlet of the input port of buffer structure and delivery pump is oppositely arranged.
Further, buffer structure is long neck funnel, and long neck funnel is fixedly connected with mortar storage box by fixed bar, and the output of long neck funnel contacts with the bottom inside of mortar storage box.
According to a further aspect in the invention, provide a kind of silicon chip diced system, this silicon chip diced system comprises aforesaid steel wire silt carrying capacity checkout equipment.
Apply technical scheme of the present invention, this steel wire silt carrying capacity checkout equipment comprises the weight-measuring device, mortar storage box and the controller that are fixedly installed, wherein, weight-measuring device is for measuring the weight of the mortar in mortar storage box, and mortar storage box is provided with delivery pump and steel wire conveyer, the steel wire transmitted by steel wire conveyer and the delivery outlet of delivery pump are oppositely arranged, and controller is electrically connected with weight-measuring device, controller calculates mortar variable quantity in mortar storage box according to stressing weight signal that device detects.Steel wire silt carrying capacity checkout equipment of the present invention is weighed to mortar by weight-measuring device, thus show that the mortar amount walked in abrasive band taken by steel wire, and then passes through the associated change amount of controller computational analysis mortar, to draw the Changing Pattern of steel wire silt carrying capacity.
Accompanying drawing explanation
The Figure of description forming a application's part is used to provide a further understanding of the present invention, and schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 shows the main TV structure schematic diagram of the first embodiment according to steel wire silt carrying capacity checkout equipment of the present invention;
Fig. 2 shows the left TV structure schematic diagram of the steel wire silt carrying capacity checkout equipment of Fig. 1;
Fig. 3 shows the main TV structure schematic diagram of the second embodiment according to steel wire silt carrying capacity checkout equipment of the present invention.
Wherein, above-mentioned accompanying drawing comprises the following drawings mark:
10, weight-measuring device; 11, base;
12, pressure sensor; 20, mortar storage box;
41, delivery pump; 42, steel wire conveyer;
421, pulley; 422, pulley support frame;
43, buffer structure; 50, electrical control cubicles.
Detailed description of the invention
It should be noted that, when not conflicting, the embodiment in the application and the feature in embodiment can combine mutually.Below with reference to the accompanying drawings and describe the present invention in detail in conjunction with the embodiments.
As depicted in figs. 1 and 2, the first embodiment of the present invention provides a kind of steel wire silt carrying capacity checkout equipment, this steel wire silt carrying capacity checkout equipment comprises weight-measuring device 10, mortar storage box 20 and controller, wherein, weight-measuring device 10 is fixedly installed, weight-measuring device 10 is for measuring the weight of the mortar in mortar storage box 20, wherein, mortar storage box 20 is provided with delivery pump 41 and steel wire conveyer 42, the delivery outlet of the steel wire transmitted by steel wire conveyer 42 and delivery pump 41 is oppositely arranged, controller is electrically connected with weight-measuring device 10, controller calculates the variable quantity of the mortar in mortar storage box 20 according to the weight signal that weight-measuring device 10 detects.
Steel wire silt carrying capacity checkout equipment of the present invention is weighed by weight-measuring device 10 pairs of mortars, thus show that the mortar amount walked in abrasive band taken by steel wire, and then pass through the associated change amount of controller computational analysis mortar, to draw the Changing Pattern of steel wire silt carrying capacity, set the machined parameters of silicon chip cutting according to the Changing Pattern of steel wire silt carrying capacity, thus improve silicon chip cut quality.
In a first embodiment, weight-measuring device 10 comprises base 11 and pressure sensor 12, and pressure sensor 12 is installed on the pedestal 11, and mortar storage box 20 is arranged on pressure sensor 12, and pressure sensor 12 is electrically connected with controller.Base 11 is directly placed on the ground.When mortar storage box 20 is empty, pressure sensor 12 detects the weight A of mortar storage box 20, then in the controller this weight A input is recorded as the gross weight of mortar storage box 20.When mortar storage box 20 is built with mortar, pressure sensor 12 detects the weight B of mortar storage box 20 now, and this weight B signal is sent in controller and compares with weight A by pressure sensor 12, thus draws the mortar weight in mortar storage box 20.Run at steel wire conveyer 42 and transmit steel wire, and steel wire carries in the engineering of mortar operation, pressure sensor 12 detects the mortar weight C of change in mortar storage box 20 in real time, by mortar weight C compared with weight A, thus draws mortar surplus C in each time point mortar storage box 20 x(work as x=1,2,3 ... time, C accordingly xmortar weight for each time point), then controller is to the C of each continuous print time point xanalyze, thus draw the Changing Pattern of steel wire silt carrying capacity.
In the embodiment that another kind is feasible, weight-measuring device 10 comprises fixed mount and pulling force sensor, and pulling force sensor is arranged on fixed mount, and mortar storage box 20 hangs the below at pulling force sensor, and pulling force sensor is electrically connected with controller.In this embodiment, fixed mount is installed and on the ceiling or with supporting fixed mount is increased to certain height, and then applies pulling force sensor and hoist cable mortar storage box 20 is installed.This embodiment is compared with above-mentioned first embodiment, and this embodiment utilizes the mode of pull force calculation to carry out detection computations to the mortar weight in mortar storage box 20, and all the other are all identical with the first embodiment, thus do not repeat them here.
In a first embodiment, steel wire conveyer 42 comprises multiple pulley 421 and pulley support frame 422, multiple pulley 421 interval is arranged, each delivery outlet is between adjacent two pulleys, and the delivery outlet of delivery pump 41 is positioned at the top of steel wire, one end of pulley support frame 422 is fixedly connected with mortar storage box 20, and the other end of pulley support frame 422 is connected with pulley 421.Preferably, be provided with two pulleys 421 in the first embodiment, steel wire is across between two pulleys 421.Two pulleys can stablize the transport process of steel wire, prevent steel wire from the process transmitted, steel wire occurring and pulley 421 departs from, and carry out transmission to steel wire exactly and lead.
Particularly, each delivery outlet of delivery pump 41 is mortar nozzle.Utilize mortar nozzle to carry out the operation of sandblasting slurry to steel wire, avoid existing the situation (particle loaded fluid scatters) that loose spray occurs when mortar sprays from general delivery outlet.
Preferably, steel wire silt carrying capacity checkout equipment also comprises electrical control cubicles 50, and electrical control cubicles 50 is fixedly installed in mortar storage box 20, and controller is arranged in electrical control cubicles 50.Electrical control cubicles 50 protection controller not by the impact of dust, and can avoid controller spattered with water by the particle loaded fluid spilt and damage controller.
In order to can display controller is to the analytical structure of the mortar in mortar storage box 20 intuitively, therefore, steel wire silt carrying capacity checkout equipment also comprises display unit, and display unit is fixedly installed in electrical control cubicles 50, and display unit is electrically connected with controller.So just can by controller to the analytical structure display of mortar variable quantity on the display apparatus.
As shown in Figure 3, it illustrates the structural representation of the second embodiment of steel wire silt carrying capacity checkout equipment of the present invention.In a second embodiment, mortar storage box 20 is also provided with buffer structure 43, buffer structure 43 is arranged on the below of steel wire, and the delivery outlet of the input port of buffer structure 43 and delivery pump 41 is oppositely arranged.Undertaken cushioning the process accepted by the particle loaded fluid of buffer structure 43 pairs of mortar nozzle ejections, thus prevent particle loaded fluid from sputtering.
Preferably, buffer structure 43 is long neck funnel, and long neck funnel is fixedly connected with mortar storage box 20 by fixed bar, and the output of long neck funnel contacts with the bottom inside of mortar storage box 20.After particle loaded fluid is caught by the top of long neck funnel, particle loaded fluid enters mortar storage box 20 and mixes with the particle loaded fluid in mortar storage box 20 after long neck funnel flow to the bottom of mortar storage box 20.Certainly, buffer structure 43 can also be open slipping through the net of setting.
According to a further aspect in the invention, provide a kind of silicon chip diced system, this silicon chip diced system comprises aforesaid steel wire silt carrying capacity checkout equipment.
Explain and illustrate:
Mortar: be the mixture that a kind of silicon-carbide particle and PEG liquid mix according to a certain percentage.
Steel wire: be a kind of that there is certain length with diameter, use the steel wire of carbon steel drawing.The effect of mortar carrier is played in the scroll saw for silico briquette being processed as silicon chip.
Silt carrying capacity: mortar is adsorbed on the amount on steel wire, the transmission speed of silt carrying capacity and steel wire, tension force, steel wire quality are relevant with mortar quality.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (10)

1. a steel wire silt carrying capacity checkout equipment, is characterized in that, comprising:
Weight-measuring device (10), described weight-measuring device (10) is fixedly installed;
Mortar storage box (20), described weight-measuring device (10) is for measuring the weight of the mortar in described mortar storage box (20), wherein, described mortar storage box (20) is provided with delivery pump (41) and steel wire conveyer (42), the steel wire transmitted by described steel wire conveyer (42) and the delivery outlet of described delivery pump (41) are oppositely arranged;
Controller, described controller is electrically connected with described weight-measuring device (10), and described controller calculates the variable quantity of the mortar in described mortar storage box (20) according to the weight signal that described weight-measuring device (10) detects.
2. steel wire silt carrying capacity checkout equipment according to claim 1, is characterized in that, described weight-measuring device (10) comprising:
Base (11);
Pressure sensor (12), described pressure sensor (12) is arranged on described base (11), described mortar storage box (20) is arranged on described pressure sensor (12), and described pressure sensor (12) is electrically connected with described controller.
3. steel wire silt carrying capacity checkout equipment according to claim 1, it is characterized in that, described weight-measuring device (10) comprises fixed mount and pulling force sensor, described pulling force sensor is arranged on described fixed mount, described mortar storage box (20) hanging is in the below of described pulling force sensor, and described pulling force sensor is electrically connected with described controller.
4. steel wire silt carrying capacity checkout equipment according to any one of claim 1 to 3, is characterized in that, described steel wire conveyer (42) comprising:
Multiple pulley (421), multiple described pulley (421) interval is arranged, the delivery outlet of each described delivery pump (41) is between adjacent two described pulleys, and the delivery outlet of described delivery pump (41) is positioned at the top of described steel wire;
Pulley support frame (422), one end of described pulley support frame (422) is fixedly connected with described mortar storage box (20), and the other end of described pulley support frame (422) is connected with described pulley (421).
5. steel wire silt carrying capacity checkout equipment according to claim 4, is characterized in that, the delivery outlet of each described delivery pump (41) is mortar nozzle.
6. steel wire silt carrying capacity checkout equipment according to claim 4, it is characterized in that, described steel wire silt carrying capacity checkout equipment also comprises electrical control cubicles (50), described electrical control cubicles (50) is fixedly installed on described mortar storage box (20), and described controller is arranged in described electrical control cubicles (50).
7. steel wire silt carrying capacity checkout equipment according to claim 6, it is characterized in that, described steel wire silt carrying capacity checkout equipment also comprises display unit, and described display unit is fixedly installed in described electrical control cubicles (50), and described display unit is electrically connected with described controller.
8. steel wire silt carrying capacity checkout equipment according to claim 4, it is characterized in that, described mortar storage box (20) is also provided with buffer structure (43), described buffer structure (43) is arranged on the below of described steel wire, and the delivery outlet of the input port of described buffer structure (43) and described delivery pump (41) is oppositely arranged.
9. steel wire silt carrying capacity checkout equipment according to claim 8, it is characterized in that, described buffer structure (43) is long neck funnel, described long neck funnel is fixedly connected with described mortar storage box (20) by fixed bar, and the output of described long neck funnel contacts with the bottom inside of described mortar storage box (20).
10. a silicon chip diced system, is characterized in that, this silicon chip diced system comprises the steel wire silt carrying capacity checkout equipment according to any one of claim 1 to 9.
CN201510827815.1A 2015-11-24 2015-11-24 Steel wire sand-carrying amount detection equipment and silicon slice cutting system with same Pending CN105415511A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510827815.1A CN105415511A (en) 2015-11-24 2015-11-24 Steel wire sand-carrying amount detection equipment and silicon slice cutting system with same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510827815.1A CN105415511A (en) 2015-11-24 2015-11-24 Steel wire sand-carrying amount detection equipment and silicon slice cutting system with same

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CN105415511A true CN105415511A (en) 2016-03-23

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107703048A (en) * 2017-11-20 2018-02-16 南京三超新材料股份有限公司 Diamond fretsaw on-line synchronous monitoring device

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CN202029256U (en) * 2011-04-02 2011-11-09 宁波钜德精工机械有限公司 Solar-powered polycrystalline silicon multi-line slicer
CN102241083A (en) * 2011-07-12 2011-11-16 浙江德圣龙新材料科技有限公司 Isoviscous mortar cutting method and device used for wire-electrode cutting of solar silicon wafer
CN103293082A (en) * 2013-05-30 2013-09-11 河海大学 Testing device and method for measuring sandy soil moving states under different liquefaction degrees
CN103419139A (en) * 2012-05-25 2013-12-04 宝山钢铁股份有限公司 Sand supply amount control system for post-mixing type high-pressure jet cleaning, and method thereof
CN203414152U (en) * 2013-08-20 2014-01-29 中钢连云港石英材料有限公司 Mortar metering device

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Publication number Priority date Publication date Assignee Title
JPH05177546A (en) * 1991-12-24 1993-07-20 Kawasaki Heavy Ind Ltd Polish feeding method with abrasive water jet
GB2315556B (en) * 1996-07-23 2000-08-23 Tokyo Seimitsu Co Ltd Wire saw having wire breaking detection equipment
KR100525034B1 (en) * 2005-05-31 2005-11-01 (주)수림건설 Sand level real time automatic measuring method and equipment
CN2761542Y (en) * 2005-06-01 2006-03-01 南京天印专用汽车有限公司 Dry mixing mortar storage tank having weighing device
CN100999109A (en) * 2006-12-31 2007-07-18 三一重工股份有限公司 Weighing device for mortar car powder material and its method
CN101108511A (en) * 2006-12-31 2008-01-23 三一重工股份有限公司 Additive metering device for mixing mortar for construction
CN101251395A (en) * 2008-04-02 2008-08-27 罗放明 Mineral slurry flux on-line detecting device and multi-parameter on-line detecting integrated system
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107703048A (en) * 2017-11-20 2018-02-16 南京三超新材料股份有限公司 Diamond fretsaw on-line synchronous monitoring device
CN107703048B (en) * 2017-11-20 2023-08-22 南京三超新材料股份有限公司 Online synchronous monitoring device for diamond wire saw

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