CN105413769A - Microfluidic chip aligning and bonding apparatus - Google Patents
Microfluidic chip aligning and bonding apparatus Download PDFInfo
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- CN105413769A CN105413769A CN201510973898.5A CN201510973898A CN105413769A CN 105413769 A CN105413769 A CN 105413769A CN 201510973898 A CN201510973898 A CN 201510973898A CN 105413769 A CN105413769 A CN 105413769A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/001—Bonding of two components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/002—Aligning microparts
- B81C3/004—Active alignment, i.e. moving the elements in response to the detected position of the elements using internal or external actuators
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The present application discloses a microfluidic chip aligning and bonding apparatus. The apparatus comprises a support assembly, a chip positioning and adjusting assembly, and a CCD observing assembly. The chip positioning and adjusting assembly comprises an XYtheta precise mobile platform, a surface light source, a transparent support plate, and a Z-axis mobile platform. The surface light source is supported and fixed on the XYtheta precise mobile platform. The transparent support plate is mounted on the Z-axis mobile platform. The transparent support plate is exactly above the surface light source, and is disposed opposite to the surface light source. An upper surface of the surface light source and a lower surface of the transparent support plate are respectively used for mounting the microfluidic chip. The CCD observing assembly comprises two identical observing apparatuses mounted on the support assembly. Each observing apparatus comprises a CCD camera and an XYZ-axis precise mobile platform. The XYZ-axis precise mobile platform is mounted on the support assembly. The CCD camera is fixed on the XYZ-axis precise mobile platform, and is located above the transparent support plate. The microfluidic chip aligning and bonding apparatus disclosed by the present invention solves the error problem of manually aligning chips.
Description
Technical field
The application relates to a kind of aligning bonding techniques based on micro-fluidic chip, particularly relates to a kind of micro-fluidic chip alignment keys locking device.
Background technology
Microfluidic chip technology (Microfluidics) is that biological, chemistry, medical analysis process the basic operation unit such as sample preparation, reaction, separation, detection is integrated on the chip of one piece of micro-meter scale, automatically completes analysis overall process.Because it is in the great potential in the field such as biology, chemistry, medical science, develop into the brand-new research field of the subject crossing such as biology, chemistry, medical science, fluid, electronics, material, a machinery.
PDMS (Polydimethylsiloxane, dimethyl silicone polymer) chip, because its cost is low, process is simple, and has the features such as good chemical inertness, becomes the polymeric material being widely used in micro-fluidic field.PDMS chip becomes the first-selected chip of biological tissue's cultivations such as organ-on-chip and detection field in recent years.Cell or tissue cultures usually need micro-structural chip with 3D, and traditional diamond-making technique is difficult to process the PDMS chip with 3D structure, is difficult to the demand meeting the research fields such as organ-on-chip.Therefore researcher propose upper and lower two panels with micro-structural PDMS chip bonding together, form the method for 3D structure.Micro-structural on PDMS chip, usually between several microns to tens microns, even if by microscope, if need manual adjustments position, also cannot realize accurate aligning.
Summary of the invention
The object of the present invention is to provide a kind of micro-fluidic chip alignment keys locking device, by two CCD cameras and fine adjustment platform, realize the accurate bonding with the two-layer PDMS chip of micro-structural.
For achieving the above object, the invention provides following technical scheme:
The embodiment of the present application discloses a kind of micro-fluidic chip alignment keys locking device, comprise supporting component, chip positioning adjusting part and CCD observe assembly, described chip positioning adjusting part and CCD observe assembly be installed on described supporting component, described chip positioning adjusting part comprises XY θ precise mobile platform, area source, transparent support plate and Z axis mobile platform, described area source supports and is fixed on described XY θ precise mobile platform, described transparent support plate is installed on Z axis mobile platform, described transparent support plate to be positioned at directly over described area source and to be oppositely arranged with described area source, the upper surface of described area source and the lower surface of transparent support plate are respectively used to install micro-fluidic chip, described CCD observes assembly comprise the identical observation device of two of being installed on supporting component, each observation device comprises a CCD camera and an XYZ axle precise mobile platform respectively, described XYZ axle precise mobile platform is installed on described supporting component, described CCD camera to be fixed on described XYZ axle precise mobile platform and to be positioned at the top of described transparent support plate.
Preferably, in above-mentioned micro-fluidic chip alignment keys locking device, the support that described supporting component comprises horizontally disposed base plate and is installed on described plate upper surface, the top of described support is extended with the gripper shoe of level, described XYZ axle precise mobile platform is detachably installed on the upper surface of described gripper shoe by screw, described chip positioning adjusting part is between described gripper shoe and base plate.
Preferably, in above-mentioned micro-fluidic chip alignment keys locking device, described Z axis mobile platform is detachably installed on the sidewall of described support, and described XY θ precise mobile platform is fixed on the upper surface of described base plate.
Preferably, in above-mentioned micro-fluidic chip alignment keys locking device, described area source is fixed on XY θ precise mobile platform by bottom support frame, described bottom support frame is formed with the slot of U-shaped, and the corresponding detachable interposing in edge of described area source is placed in the slot of described U-shaped.
Preferably, in above-mentioned micro-fluidic chip alignment keys locking device, described transparent support plate is fixed on described Z axis mobile platform by top supporting frame, described top supporting frame comprises the main part of U-shaped, the recessed formation slot of inwall of this main part, the edge correspondence of described transparent support plate is inserted in described slot.
Preferably, in above-mentioned micro-fluidic chip alignment keys locking device, described transparent support plate is two throwing glass plates.
Preferably, in above-mentioned micro-fluidic chip alignment keys locking device, each described observation device also comprises a CCD pilot pin, a CCD backstay and a CCD positioning head respectively, described CCD pilot pin extends from the upper horizontal of described XYZ axle precise mobile platform, described CCD backstay is vertically arranged, its two ends are fixed with the end of described CCD pilot pin and CCD positioning head respectively, and described CCD camera and described CCD positioning head are detachably installed.
Preferably, in above-mentioned micro-fluidic chip alignment keys locking device, the relatively described CCD backstay of described CCD positioning head is rotatable.
Preferably, in above-mentioned micro-fluidic chip alignment keys locking device, described CCD pilot pin is provided with multiple screw along its bearing of trend array.
Compared with prior art, the invention has the advantages that:
1. solve the error problem of manual alignment chip;
2. the introducing of two cameras, reduce θ shaft alignement error, general alignment error is below 10 microns;
3. aim at PDMS chip by three displacement platforms, large-sized PDMS chip can be aimed at;
4. equipment operating is simple, and extensibility is strong, can aim at the chips such as PDMS/PDMS, PDMS/ glass-chip, PDMS/PMMA;
5. equipment aligning and key function are integrated in one.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present application or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, the accompanying drawing that the following describes is only some embodiments recorded in the application, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Figure 1 shows that the perspective view of micro-fluidic chip alignment keys locking device in the specific embodiment of the invention;
Figure 2 shows that the decomposition texture schematic diagram of micro-fluidic chip alignment keys locking device in the specific embodiment of the invention.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be described in detail the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite not making creative work, all belongs to the scope of protection of the invention.
Shown in ginseng Fig. 1 and Fig. 2, micro-fluidic chip alignment keys locking device, comprise supporting component 1, chip positioning adjusting part 2 and CCD observe assembly 3, chip positioning adjusting part 2 and CCD observe assembly 3 be installed on supporting component 1, chip positioning adjusting part 2 comprises XY θ precise mobile platform 201, area source 202, transparent support plate 203 and Z axis mobile platform 204, area source 202 supports and is fixed on XY θ precise mobile platform 201, transparent support plate 203 is installed on Z axis mobile platform 204, transparent support plate 203 to be positioned at directly over area source 202 and to be oppositely arranged with area source 202, the upper surface of area source 202 and the lower surface of transparent support plate 203 are respectively used to install micro-fluidic chip, CCD observes assembly 3 comprise the identical observation device 301 of two of being installed on supporting component, each observation device comprises CCD camera 3011 and an XYZ axle precise mobile platform 3012 respectively, XYZ axle precise mobile platform 3012 is installed on supporting component 1, CCD camera 3011 to be fixed on XYZ axle precise mobile platform 3012 and to be positioned at the top of transparent support plate 203.
Further, the support 102 that supporting component 1 comprises horizontally disposed base plate 101 and is installed on plate upper surface, the top of support 102 is extended with the gripper shoe 1021 of level, XYZ axle precise mobile platform 3012 is detachably installed on the upper surface of gripper shoe 1021 by screw, chip positioning adjusting part 2 is between gripper shoe 1021 and base plate 101.Z axis mobile platform 204 is detachably installed on the sidewall of support, and XY θ precise mobile platform 201 is fixed on the upper surface of base plate 101.
In this technical scheme, base plate and support are preferably metal material, and the two can be connected by screw, also can be processed into one.Wherein the side of plate upper surface and support all needs to process some screwed holes, so that fixing fine adjustment platform etc.Base plate and support material are not limited to metal, can also be the polymerizable material that intensity is higher, as according to polymerizable material, then need the weight increasing base plate, avoid single unit system in use procedure to topple over.
In this technical scheme, XY θ precise mobile platform adopts commercially available prod, 60*60mm table top product, but is not limited to this size.Other parameter is as follows: moving direction: X, Y, θ axle one degree of freedom; Stroke: ± 12.5mm; Rail types: V-type decussation roller guide rail; Minimum scale: 10um; Precision: 0.01mm.
Further, area source 202 is fixed on XY θ precise mobile platform 201 by bottom support frame 205, bottom support frame 205 is formed with the slot 2051 of U-shaped, and the corresponding detachable interposing in edge of area source 202 is placed in the slot 2051 of U-shaped.
In this technical scheme, XY θ precise mobile platform is connected with base plate by screw, plays fixation.Fix a bottom support frame on platform, bottom support frame material is metal or polymerizable material.This bottom support frame is processed with a slot 2051, and the size of slot 2051 size and area source is corresponding, thus is fixed on top supporting frame by area source, and can change at any time and clean area source.Bottom support frame and area source can adopt various ways to be connected, and comprise screw and gluing etc.Light source adopts commercially available LED area light source, and brightness can regulate.
Further, transparent support plate 203 is fixed on Z axis mobile platform 204 by top supporting frame 206, and top supporting frame 206 comprises the main part of U-shaped, and the recessed formation slot of inwall of this main part, the edge correspondence of transparent support plate is inserted in slot.Transparent support plate is preferably two throwing glass plate.
In this technical scheme, top supporting frame is metal or polymerizable material material, is processed with slot, and wherein slot can place two throwing glass, so that the replacing of two throwing glass and cleaning.The two of usual employing 4 inches throw glass, but as long as ensure that two glass size of throwing is greater than target bonding chip size.Top supporting frame is fixed on Z axis precise mobile platform by top supporting frame positioner, and Z axis precise mobile platform is then fixed on metallic support side, and the connection of multiple parts all adopts screw.
Further, each observation device 301 also comprises a CCD pilot pin 3013, CCD backstay 3014 and a CCD positioning head 3015 respectively, CCD pilot pin 3013 extends from the upper horizontal of XYZ axle precise mobile platform, CCD backstay 3014 is vertically arranged, its two ends are fixed with the end of CCD pilot pin 3013 and CCD positioning head 3015 respectively, and CCD camera 3011 and CCD positioning head 3015 are detachably installed.
Preferably, CCD positioning head is rotatable relative to CCD backstay.CCD pilot pin is provided with multiple screw along its bearing of trend array.The position of CCD backstay can be regulated as required by screw.
In this technical scheme, adopt commercially available multiplication factor 200 times, the CCD camera of 5,000,000 pixels.Camera physical dimension is diameter 2.5cm, height 9cm, is controlled by software observation, is simple and easy to use.
Camera and localization part respectively have two covers, can reduce single cover camera in θ shaft alignement error by two cover cameras.By regulating XYZ axle precision surface plate in use procedure, the relative position of two cameras can be regulated, the relative position of camera and chip can also be regulated, solve the limited problem of bottom XY θ precise mobile platform operating distance with this.
In use procedure, two panels PDMS chip manufacture has corresponding micro-structural, needs to aim at.Each PDMS chip manufacture has two align structures, respectively corresponding two CCD cameras, and the spacing of two align structures will be similar to the spacing of two cameras, otherwise is unfavorable for observation; Or by the micro-structural of diverse location on two CCD camera observation PDMS chips, also need the spacing between the spacing between guarantee two micro-structurals and camera similar.
In use procedure, chip and CCD camera relative position can realize correspondence by regulating two XYZ shaft platforms, obtain the best observation visual field and multiplication factor.
Two panels has the PDMS chip of counter structure, and a slice is positioned over area source top, and a slice utilizes the soft and characterization of adsorption of PDMS chip, sticks in two throwing bottom glass plate.Chip normally PDMS chip wherein on two throwing glass, the chip on area source can place PDMS, PMMA or glass-chip according to the actual requirements.
Two panels PDMS chip is positioned over respectively on area source and under two throwing glass, the observation picture of two CCD cameras is shown by software, by regulating XY θ precise mobile platform, driving the change in location of bottom PDMS chip, finally making the micro-structural of upper and lower two PDMS chips realize aiming at.Now, start to regulate Z axis platform, the PDMS chip below two throwing glass and the chip above area source are realized aiming at laminating, completes the aligning of layers of chips.If fruit chip is through process means such as plasmas, aim at the bonding that laminating also completes chip simultaneously.
It should be noted that, in this article, the such as relational terms of first and second grades and so on is only used for an entity or operation to separate with another entity or operating space, and not necessarily requires or imply the relation that there is any this reality between these entities or operation or sequentially.And, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thus make to comprise the process of a series of key element, method, article or equipment and not only comprise those key elements, but also comprise other key elements clearly do not listed, or also comprise by the intrinsic key element of this process, method, article or equipment.When not more restrictions, the key element limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment comprising described key element and also there is other identical element.
The above is only the detailed description of the invention of the application; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the application's principle; can also make some improvements and modifications, these improvements and modifications also should be considered as the protection domain of the application.
Claims (9)
1. a micro-fluidic chip alignment keys locking device, it is characterized in that, comprise supporting component, chip positioning adjusting part and CCD observe assembly, described chip positioning adjusting part and CCD observe assembly be installed on described supporting component, described chip positioning adjusting part comprises XY θ precise mobile platform, area source, transparent support plate and Z axis mobile platform, described area source supports and is fixed on described XY θ precise mobile platform, described transparent support plate is installed on Z axis mobile platform, described transparent support plate to be positioned at directly over described area source and to be oppositely arranged with described area source, the upper surface of described area source and the lower surface of transparent support plate are respectively used to install micro-fluidic chip, described CCD observes assembly comprise the identical observation device of two of being installed on supporting component, each observation device comprises a CCD camera and an XYZ axle precise mobile platform respectively, described XYZ axle precise mobile platform is installed on described supporting component, described CCD camera to be fixed on described XYZ axle precise mobile platform and to be positioned at the top of described transparent support plate.
2. micro-fluidic chip alignment keys locking device according to claim 1, it is characterized in that: the support that described supporting component comprises horizontally disposed base plate and is installed on described plate upper surface, the top of described support is extended with the gripper shoe of level, described XYZ axle precise mobile platform is detachably installed on the upper surface of described gripper shoe by screw, described chip positioning adjusting part is between described gripper shoe and base plate.
3. micro-fluidic chip alignment keys locking device according to claim 2, it is characterized in that: described Z axis mobile platform is detachably installed on the sidewall of described support, described XY θ precise mobile platform is fixed on the upper surface of described base plate.
4. micro-fluidic chip alignment keys locking device according to claim 1, it is characterized in that: described area source is fixed on XY θ precise mobile platform by bottom support frame, described bottom support frame is formed with the slot of U-shaped, the corresponding detachable interposing in edge of described area source is placed in the slot of described U-shaped.
5. micro-fluidic chip alignment keys locking device according to claim 1, it is characterized in that: described transparent support plate is fixed on described Z axis mobile platform by top supporting frame, described top supporting frame comprises the main part of U-shaped, the recessed formation slot of inwall of this main part, the edge correspondence of described transparent support plate is inserted in described slot.
6. micro-fluidic chip alignment keys locking device according to claim 1, is characterized in that: described transparent support plate throws glass plate for two.
7. micro-fluidic chip alignment keys locking device according to claim 1, it is characterized in that: each described observation device also comprises a CCD pilot pin, a CCD backstay and a CCD positioning head respectively, described CCD pilot pin extends from the upper horizontal of described XYZ axle precise mobile platform, described CCD backstay is vertically arranged, its two ends are fixed with the end of described CCD pilot pin and CCD positioning head respectively, and described CCD camera and described CCD positioning head are detachably installed.
8. micro-fluidic chip alignment keys locking device according to claim 7, is characterized in that: the relatively described CCD backstay of described CCD positioning head is rotatable.
9. micro-fluidic chip alignment keys locking device according to claim 7, is characterized in that: described CCD pilot pin is provided with multiple screw along its bearing of trend array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510973898.5A CN105413769A (en) | 2015-12-22 | 2015-12-22 | Microfluidic chip aligning and bonding apparatus |
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| CN201510973898.5A CN105413769A (en) | 2015-12-22 | 2015-12-22 | Microfluidic chip aligning and bonding apparatus |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106219482A (en) * | 2016-08-08 | 2016-12-14 | 中国科学院光电研究院 | The sealing-in device of a kind of micro-fluidic chip and method for sealing |
| CN108408684A (en) * | 2018-04-17 | 2018-08-17 | 大连理工大学 | A kind of alignment bonding apparatus made for MEMS device |
| CN109416300A (en) * | 2016-11-23 | 2019-03-01 | 伊鲁米那股份有限公司 | Flow cell assemblies fixed system and method |
| CN112802788A (en) * | 2020-12-28 | 2021-05-14 | 西南技术物理研究所 | High-precision chip positioning device |
| CN112973814A (en) * | 2021-03-03 | 2021-06-18 | 北京理工大学 | Interlayer automatic alignment bonding device and method for multilayer microfluidic chip |
| CN113457755A (en) * | 2021-04-12 | 2021-10-01 | 清华大学 | Micro-fluidic chip bonding equipment integrating alignment and hot baking based on microscopic imaging |
| CN116913855A (en) * | 2023-09-08 | 2023-10-20 | 广州市艾佛光通科技有限公司 | Chip bonding device and fixing assembly thereof |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002162206A (en) * | 2000-11-22 | 2002-06-07 | Toray Eng Co Ltd | Method and device for alignment |
| CN1558217A (en) * | 2004-02-02 | 2004-12-29 | 北京航空航天大学 | Automatic alignment apparatus for plastic microflow control chip |
| CN2733393Y (en) * | 2004-09-21 | 2005-10-12 | 中国科学院力学研究所 | Micro-alignment apparatus for transparent micro-flow control chip assembly |
| US20050255666A1 (en) * | 2004-05-11 | 2005-11-17 | Miradia Inc. | Method and structure for aligning mechanical based device to integrated circuits |
| EP2181961A2 (en) * | 2008-10-28 | 2010-05-05 | Honeywell International | MEMS devices and methods of assembling micro electromechanical systems (MEMS) |
| CN102886281A (en) * | 2012-10-18 | 2013-01-23 | 哈尔滨工业大学 | Micro-fluidic chip bonding device based on PMMA (polymethyl methacrylate) and other polymers |
| CN104023897A (en) * | 2011-11-08 | 2014-09-03 | 皮科塞斯公司 | Room temperature glass-to-glass, glass-to-plastic and glass-to-ceramic/semiconductor bonding |
| CN205235993U (en) * | 2015-12-22 | 2016-05-18 | 苏州汶颢芯片科技有限公司 | Micro -fluidic chip aims at bonded device |
-
2015
- 2015-12-22 CN CN201510973898.5A patent/CN105413769A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002162206A (en) * | 2000-11-22 | 2002-06-07 | Toray Eng Co Ltd | Method and device for alignment |
| CN1558217A (en) * | 2004-02-02 | 2004-12-29 | 北京航空航天大学 | Automatic alignment apparatus for plastic microflow control chip |
| US20050255666A1 (en) * | 2004-05-11 | 2005-11-17 | Miradia Inc. | Method and structure for aligning mechanical based device to integrated circuits |
| CN2733393Y (en) * | 2004-09-21 | 2005-10-12 | 中国科学院力学研究所 | Micro-alignment apparatus for transparent micro-flow control chip assembly |
| EP2181961A2 (en) * | 2008-10-28 | 2010-05-05 | Honeywell International | MEMS devices and methods of assembling micro electromechanical systems (MEMS) |
| CN104023897A (en) * | 2011-11-08 | 2014-09-03 | 皮科塞斯公司 | Room temperature glass-to-glass, glass-to-plastic and glass-to-ceramic/semiconductor bonding |
| CN102886281A (en) * | 2012-10-18 | 2013-01-23 | 哈尔滨工业大学 | Micro-fluidic chip bonding device based on PMMA (polymethyl methacrylate) and other polymers |
| CN205235993U (en) * | 2015-12-22 | 2016-05-18 | 苏州汶颢芯片科技有限公司 | Micro -fluidic chip aims at bonded device |
Non-Patent Citations (1)
| Title |
|---|
| J.Y. KIMA,ET AL.: "Automatic aligning and bonding system of PDMS layer for the fabrication of 3D microfluidic channels", 《SENSORS AND ACTUATORS A》 * |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106219482A (en) * | 2016-08-08 | 2016-12-14 | 中国科学院光电研究院 | The sealing-in device of a kind of micro-fluidic chip and method for sealing |
| CN109416300A (en) * | 2016-11-23 | 2019-03-01 | 伊鲁米那股份有限公司 | Flow cell assemblies fixed system and method |
| CN109416300B (en) * | 2016-11-23 | 2022-03-15 | 伊鲁米那股份有限公司 | Flow cell assembly securing systems and methods |
| CN108408684A (en) * | 2018-04-17 | 2018-08-17 | 大连理工大学 | A kind of alignment bonding apparatus made for MEMS device |
| CN108408684B (en) * | 2018-04-17 | 2020-06-16 | 大连理工大学 | Alignment bonding device for manufacturing MEMS (micro-electromechanical system) device |
| CN112802788A (en) * | 2020-12-28 | 2021-05-14 | 西南技术物理研究所 | High-precision chip positioning device |
| CN112973814A (en) * | 2021-03-03 | 2021-06-18 | 北京理工大学 | Interlayer automatic alignment bonding device and method for multilayer microfluidic chip |
| CN112973814B (en) * | 2021-03-03 | 2022-03-18 | 北京理工大学 | Interlayer automatic alignment bonding device and method for multilayer microfluidic chip |
| CN113457755A (en) * | 2021-04-12 | 2021-10-01 | 清华大学 | Micro-fluidic chip bonding equipment integrating alignment and hot baking based on microscopic imaging |
| CN116913855A (en) * | 2023-09-08 | 2023-10-20 | 广州市艾佛光通科技有限公司 | Chip bonding device and fixing assembly thereof |
| CN116913855B (en) * | 2023-09-08 | 2023-12-19 | 广州市艾佛光通科技有限公司 | Chip bonding device and fixing assembly thereof |
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