CN105397632B - A kind of control method and device of air-flotation type rotary table Switch of working position - Google Patents
A kind of control method and device of air-flotation type rotary table Switch of working position Download PDFInfo
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- CN105397632B CN105397632B CN201511000127.4A CN201511000127A CN105397632B CN 105397632 B CN105397632 B CN 105397632B CN 201511000127 A CN201511000127 A CN 201511000127A CN 105397632 B CN105397632 B CN 105397632B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
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Abstract
The present invention provides a kind of control method and device of air-flotation type rotary table Switch of working position, control method includes：The position for detecting zero position switch anti-dazzling screen, when zero position switch anti-dazzling screen and the position of null pick-up to it is corresponding when the corresponding position of zero position switch anti-dazzling screen is set as reference position；Obtain current absolute location of the station relative to reference position in rotating disk；According to the current absolute location of station, the rotational angle that station turns to default station is calculated；According to rotational angle, first control signal is sent to servo motor, the station rotary rotational angle in servo motor driving rotating disk is made to switch to default station.In addition, send second control signal to air source control mechanism before rotating disc spins, start air source control mechanism, when Switch of working position to default station on the rotating pan, sends third to air source control mechanism and control signal, air source control mechanism is made to be stopped.This invention ensures that when worktable rotary Switch of working position precision and reliability.
Description
Technical field
The present invention relates to the control systems that machine is thinned in full-automatic wafer, more particularly, to a kind of air-flotation type rotary table work
The control method and device of position switching.
Background technology
In the control system that machine is thinned in full-automatic wafer, the positioning of workbench and Switch of working position are one and ensure control system
The critical issue for the automatic running and grinding accuracy of uniting.In the rotary course of workbench, due to place and remove wafer, corase grinding and
The position of the techniques such as fine grinding is fixed, it is therefore desirable to which rotary table simultaneously switches station, so that the same station on workbench can
It is completed at the same time placement and removes the technological processes such as wafer, corase grinding and fine grinding.It can thus be seen that Switch of working position is determined on workbench
Position precision directly influences the grinding quality of crystal circle center position.
Invention content
The precision and reliability of Switch of working position when in order to ensure worktable rotary, the present invention provides a kind of rotations of air-flotation type
The control method and device of revolving worktable Switch of working position.
To achieve the goals above, the present invention provides a kind of control method of air-flotation type rotary table Switch of working position,
Applied to air-flotation type rotary table, the air-flotation type rotary table includes：Workbench is provided with zero-bit on the workbench
Sensor；Rotating disk on the workbench is provided with multiple stations in the rotating disk, and is set at a wherein station
It is equipped with zero position switch anti-dazzling screen；Servo motor for driving the rotating disk rotation；For controlling the rotating disk lifting
Air source control mechanism；Encoder for servo motor for reading station position；For control servomotor and air source control mechanism
Controller, and the input terminal of controller is connect with null pick-up and encoder for servo motor respectively；The control method packet
It includes：
The position for detecting zero position switch anti-dazzling screen, when the position pair of the zero position switch anti-dazzling screen and the null pick-up
At once, the corresponding position of the zero position switch anti-dazzling screen is set as reference position；
Obtain current absolute location of the station relative to the reference position in rotating disk；
According to the current absolute location of the station, the rotational angle that the station turns to default station is calculated；
According to the rotational angle, first control signal is sent to servo motor, makes the servo motor driving rotating disk
On the station rotary described in rotational angle switch to the default station.
Optionally, current absolute location of the station relative to the reference position in the acquisition rotating disk, specially：
Receive current absolute position of the station in the rotating disk that the encoder for servo motor is read in real time relative to the reference position
It sets.
Optionally, when the number of station is three, and three stations with the angular distribution at 120 degree of interval on the rotating pan
When, the current absolute location according to the station calculates the rotational angle that the station turns to default station, specific to wrap
It includes：When the current absolute location of the station is the reference position, the rotation that the station turns to default station is calculated
Angle is 120 degree clockwise；When the current absolute location of the station is to rotate clockwise 120 on the basis of the reference position
When spending corresponding first position, it is 120 degree clockwise to calculate the station and turn to the rotational angle of default station；When the work
The current absolute location of position is when rotating clockwise 240 degree of corresponding second positions on the basis of the reference position, to calculate institute
It is 240 degree counterclockwise to state station and turn to the rotational angle of default station.
Optionally, first control signal is sent to servo motor according to the rotational angle described, makes the servo electricity
Before machine drives the Switch of working position to the default station in rotating disk, the control method further includes：To the air source
Control mechanism sends second control signal, so that the air source control mechanism is controlled the rotating disk and floats from the workbench.
Optionally, first control signal is sent to servo motor according to the rotational angle described, makes the servo electricity
After machine drives the Switch of working position to the default station in rotating disk, the control method further includes：To the air source
Control mechanism sends third and controls signal, and the air source control mechanism is made to be stopped；The is sent to the air source control mechanism
Four control signals make the air source control mechanism control the rotating disk and drop back to the workbench.
Other side according to the present invention, the present invention also provides a kind of controls of air-flotation type rotary table Switch of working position
Device processed, is applied to air-flotation type rotary table, and the air-flotation type rotary table includes：Workbench is set on the workbench
It is equipped with null pick-up；Rotating disk on the workbench is provided with multiple stations, and wherein one in the rotating disk
Zero position switch anti-dazzling screen is provided at station；Servo motor for driving the rotating disk rotation；For controlling the rotation
The air source control mechanism of disk lifting；Encoder for servo motor for reading station position；For control servomotor and air source
The controller of control mechanism, and the input terminal of controller is connect with null pick-up and encoder for servo motor respectively；The control
Device processed includes：
Detection module, the position for detecting zero position switch anti-dazzling screen, when the zero position switch anti-dazzling screen and the zero-bit
The corresponding position of the zero position switch anti-dazzling screen is set as reference position when the position of sensor is to corresponding to；
Acquisition module, for obtaining current absolute location of the station relative to the reference position in rotating disk；
Computing module calculates the station and turns to default station for the current absolute location according to the station
Rotational angle；
First sending module makes described watch for according to the rotational angle, first control signal to be sent to servo motor
It takes rotational angle described in the station rotary in motor driving rotating disk and switches to the default station.
Optionally, the acquisition module is specifically used for, and receives in the rotating disk that the encoder for servo motor is read in real time
Current absolute location of the station relative to the reference position.
Optionally, when the number of station is three, and three stations with the angular distribution at 120 degree of interval on the rotating pan
When, the computing module is specifically used for, and when the current absolute location of the station is the reference position, calculates the station
The rotational angle for turning to default station is 120 degree clockwise；When the current absolute location of the station is with the benchmark position
When being set to benchmark and rotating clockwise 120 degree of corresponding first positions, the rotational angle that the station turns to default station is calculated
It is 120 degree clockwise；When the current absolute location of the station is to rotate clockwise 240 degree pairs on the basis of the reference position
When the second position answered, it is 240 degree counterclockwise to calculate the station and turn to the rotational angle of default station.
Optionally, the control device further includes：Second sending module, for sending second to the air source control mechanism
Signal is controlled, so that the air source control mechanism is controlled the rotating disk and floats from the workbench.
Optionally, the control device further includes：Third sending module, for sending third to the air source control mechanism
Signal is controlled, the air source control mechanism is made to be stopped；4th sending module, for sending the to the air source control mechanism
Four control signals make the air source control mechanism control the rotating disk and drop back to the workbench.
The beneficial effects of the invention are as follows：
The control method of air-flotation type rotary table Switch of working position provided by the invention is applied to air-flotation type rotary work
Platform detects the position of zero position switch anti-dazzling screen first when controlling air-flotation type rotary table Switch of working position, when zero position switch hides
Mating plate and the position of null pick-up to it is corresponding when the corresponding position of zero position switch anti-dazzling screen is set as reference position, then root
Current absolute location according to the station of acquisition relative to reference position calculates the rotational angle that station turns to default station, most
Afterwards according to rotational angle, first control signal is sent to servo motor, makes the station rotary meter in servo motor driving rotating disk
After obtained rotational angle, default station is switched to.The present invention is by setting reference position, and benchmark position and a work
The current absolute location of position sends the first control signal of the station rotary rotational angle in driving rotating disk to servo motor,
Make Switch of working position to default station, the precision and reliability of Switch of working position when ensure that the rotation of air-flotation type rotary table.
Description of the drawings
Fig. 1 shows the structure diagrams of air-flotation type rotary table in the embodiment of the present invention；
Fig. 2 indicates the step flow of the control method of air-flotation type rotary table Switch of working position in the embodiment of the present invention
Figure；
Fig. 3 indicates the station distribution map of air-flotation type rotary table in the embodiment of the present invention；
Fig. 4 indicates the switching schematic diagram of station in rotating disk in the embodiment of the present invention；
Fig. 5 indicates the structure diagram of the control device of air-flotation type rotary table Switch of working position in the embodiment of the present invention.
Wherein in figure：
1, servo motor；2, air source control mechanism；3, controller；4, encoder for servo motor；5, null pick-up；6, it revolves
Turntable；7, lifting workpiece station, 8, corase grinding station, 9, fine grinding station；
Specific implementation mode
The exemplary embodiment of the disclosure is more fully described below with reference to accompanying drawings.Although showing the disclosure in attached drawing
Exemplary embodiment, it being understood, however, that may be realized in various forms the disclosure without should be by embodiments set forth here
It is limited.On the contrary, these embodiments are provided to facilitate a more thoroughly understanding of the present invention, and can be by the scope of the present disclosure
Completely it is communicated to those skilled in the art.
In one embodiment of the invention, as shown in Figure 1, air-flotation type rotary table includes workbench, servo motor
1, air source control mechanism 2, for the controller 3 and encoder for servo motor 4 of control servomotor 1 and air source control mechanism 2.
Wherein, null pick-up 5 is provided on workbench, the output end of null pick-up 5 is connect with the input terminal of controller 3, in addition
It is additionally provided with rotating disk 6 on workbench, multiple stations are provided in rotating disk 6, and zero position switch is provided at a wherein station
Anti-dazzling screen.Servo motor 1 is for driving rotating disk 6 to rotate, and the input terminal of servo motor 1 is connect with the output end of controller 3.
Air source control mechanism 2 is for controlling the lifting of rotating disk 6, and the input terminal of air source control mechanism 2 and the output end of controller 3 connect
It connects.Optionally, controller 3 can be programmable controller.Encoder for servo motor 4 is for reading a station in rotating disk 6
Position, and the output end of encoder for servo motor 4 is connect with the input terminal of controller 3.
Specifically, air source control mechanism 2 includes the first gas circuit and the second gas circuit.Wherein, the first gas circuit is rotated for controlling
Disk floats from workbench, and the second gas circuit is dropped back to for controlling rotating disk to workbench.It optionally, can in air source control mechanism
To use the lifting of solenoid valve control rotating disk.
As described in Figure 2, it is the control method of air-flotation type rotary table Switch of working position in the embodiment of the present invention, the control
Method is applied to the air-flotation type rotary table in Fig. 1, which includes the following steps：
Step 101, the position for detecting zero position switch anti-dazzling screen, when the position pair of zero position switch anti-dazzling screen and null pick-up
At once, the corresponding position of zero position switch anti-dazzling screen is set as reference position.
In this step, the position of the zero position switch anti-dazzling screen at controller detection station, the zero position switch at station
Anti-dazzling screen and the position of the null pick-up on workbench to it is corresponding when corresponding position by zero position switch anti-dazzling screen on the table
It is set as reference position.
Specifically, as shown in figure 3, being the station distribution map of air-flotation type rotary table.As seen from Figure 3, station
Number is three, and three stations with the angular distribution at 120 degree of interval on the rotating pan.Assuming that three works being arranged in rotating disk
Position is respectively lifting workpiece station, corase grinding station and fine grinding station, i.e. 120 degree of the angular distribution in interval clockwise on the rotating pan
There are lifting workpiece station, corase grinding station and fine grinding station.It is provided with zero position switch anti-dazzling screen at station assuming that refining, then rotating disk
In clockwise manner or counter-clockwise rotates so that zero position switch anti-dazzling screen is corresponding with the null pick-up on workbench, when
It is to refine the correspondence of station on the table by zero position switch anti-dazzling screen when zero position switch anti-dazzling screen is corresponding with null pick-up
Position is set as reference position.
Or, it is assumed that zero position switch anti-dazzling screen is located at any position on turntable, i.e., is defined on turntable incessantly
Station position, rotating disk is in clockwise manner or counter-clockwise rotates, the zero-bit on zero position switch anti-dazzling screen and workbench
It is to refine the corresponding position of station on the table to be set as reference position by zero position switch anti-dazzling screen when sensor is corresponding.
At this point, since the station on turntable is not corresponding with reference position, it is therefore desirable to according to the position tune of station on turntable
A station in whole rotating disk and the angle between reference position, and controller obtains the position of the station after adjustment, so
Afterwards using the position of the station after adjustment as final reference position.
Step 102, current absolute location of the station relative to reference position in rotating disk is obtained.
In this step, controller obtains current absolute location of the station relative to reference position in rotating disk.Specifically
, controller can be by receiving station the working as relative to reference position in the rotating disk that encoder for servo motor is read in real time
Preceding absolute position.
Step 103, according to the current absolute location of station, the rotational angle that station turns to default station is calculated.
In this step, specifically, controller is according to the current absolute location of the station of acquisition, calculating station turns to pre-
If the rotational angle of station.
Specifically, when the station arrangement in rotating disk is as shown in Figure 3, i.e., when the number of station is three, and three
Station with the angular distribution at 120 degree of interval on the rotating pan when, according to the current absolute location of the station of acquisition, calculate station and turn
Moving to the rotational angle at default station to be, on the basis of the current absolute location of station when position, calculate station rotation
Rotational angle to default station is 120 degree clockwise；When the current absolute location of station is the up time on the basis of reference position
When needle rotates 120 degree of corresponding first positions, it is 120 degree clockwise to calculate station and turn to the rotational angle of default station；When
The current absolute location of station is when rotating clockwise 240 degree of corresponding second positions on the basis of reference position, to calculate station
The rotational angle for turning to default station is 240 degree counterclockwise.
Step 104, according to rotational angle, first control signal is sent to servo motor, servo motor is made to drive rotating disk
On station rotary rotational angle switch to default station.
In this step, according to the rotational angle being calculated, controller sends first control signal to servo motor, makes
Station rotary rotational angle in servo motor driving rotating disk switches to default station.
Specifically, as shown in figure 4, being the switching schematic diagram of station in rotating disk.Reference position it can be seen from Fig. 4
The station at place rotates clockwise 120 degree according to rotational angle, switches on the basis of reference position and rotates clockwise 120 degree of correspondences
First position；The station at 120 degree of corresponding first positions is rotated clockwise on the basis of reference position according to rotational angle
120 degree are rotated clockwise, switches on the basis of reference position and rotates clockwise 240 degree of corresponding second positions；With benchmark position
It is set to benchmark and rotates clockwise the stations of 240 degree of corresponding second places and rotate 240 degree counterclockwise according to rotational angle, switching
To reference position.It is revolved clockwise it should be noted that controller can control the station in rotating disk according to actual conditions
Turn or rotation counterclockwise, the i.e. present invention do not limit the rotation direction of rotating disk specifically.
In the present embodiment, the position for detecting zero position switch anti-dazzling screen first, when zero position switch anti-dazzling screen and zero-bit sense
The corresponding position of zero position switch anti-dazzling screen is set as reference position when the position of device is to corresponding to, then according to the station phase of acquisition
For the current absolute location of reference position, the rotational angle that station turns to default station is calculated, finally according to rotational angle,
First control signal is sent to servo motor, the rotational angle for making the station rotary in servo motor driving rotating disk be calculated
Afterwards, default station is switched to.The present embodiment is by setting reference position, and the current absolute position of benchmark position and a station
It sets, the first control signal of the station rotary rotational angle in driving rotating disk is sent to servo motor, makes Switch of working position to pre-
If station, the precision and reliability of Switch of working position when ensure that worktable rotary.
Further, according to rotational angle, first control signal is sent to servo motor, makes servo motor driving rotation
Before Switch of working position to default station on disk, can second control signal first be sent to air source control mechanism, make air source control
Mechanism controls rotating disk floats from workbench.Specifically, after air source control mechanism is started to work, controller can also be according to gas
Whether the air pressure of source control mechanism detection workbench is normal, if abnormal, then can be with output working table air pressure failures.In addition,
Controller sends first control signal according to rotational angle, to servo motor, and the station in servo motor driving rotating disk is made to cut
Shift to after default station, to air source control mechanism send third control signal, so that air source control mechanism is stopped, then to
Air source control mechanism sends the 4th control signal, and air source control mechanism control rotating disk is made to drop back to workbench.
In this way, when station on the rotating pan switches over, controller can control rotating disk and be in suspended state, and
After Switch of working position in rotating disk finishes, controller can control rotating disk and drop back to workbench, to on station
Workpiece is processed.The control method has distinguished the handoff procedure of station and the process of workpiece well, is further ensured that
Precision when Switch of working position and reliability, and reliability when further ensuring work pieces process.
As shown in figure 5, for the structure of the control device of air-flotation type rotary table Switch of working position in the embodiment of the present invention
Block diagram, the control device are applied to air-flotation type rotary table, and air-flotation type rotary table includes：Workbench is set on workbench
It is equipped with null pick-up；Rotating disk on workbench is provided with multiple stations in rotating disk, and is set at a wherein station
It is equipped with zero position switch anti-dazzling screen；Servo motor for driving rotating disk to rotate；Air source control for controlling rotating disk lifting
Mechanism；Encoder for servo motor for reading station position；For the controller of control servomotor and air source control mechanism,
And the input terminal of controller is connect with null pick-up and encoder for servo motor respectively；Control device includes：
Detection module 201, the position for detecting zero position switch anti-dazzling screen, when zero position switch anti-dazzling screen and null pick-up
Position to it is corresponding when the corresponding position of zero position switch anti-dazzling screen is set as reference position；
Acquisition module 202, for obtaining current absolute location of the station relative to reference position in rotating disk；
Computing module 203 calculates the angle of rotation that station turns to default station for the current absolute location according to station
Degree；
First sending module 204 keeps servo electric for according to rotational angle, first control signal to be sent to servo motor
Station rotary rotational angle in machine driving rotating disk switches to default station.
Optionally, acquisition module 202 is specifically used for, and receives the station in the rotating disk that encoder for servo motor is read in real time
Current absolute location relative to reference position.
Optionally, when the number of station is three, and three stations with the angular distribution at 120 degree of interval on the rotating pan
When, computing module 203 is specifically used for, and on the basis of the current absolute location of station when position, calculates station and turns to default work
The rotational angle of position is 120 degree clockwise；When the current absolute location of station is to rotate clockwise 120 on the basis of reference position
When spending corresponding first position, it is 120 degree clockwise to calculate station and turn to the rotational angle of default station；It is current when station
Absolute position is when rotating clockwise 240 degree of corresponding second positions on the basis of reference position, and calculating station turns to default
The rotational angle of station is 240 degree counterclockwise.
Optionally, control device further includes：Second sending module, for sending the second control letter to air source control mechanism
Number, so that air source control mechanism control rotating disk is floated from workbench.
Optionally, control device further includes：Third sending module, for sending third control letter to air source control mechanism
Number, so that air source control mechanism is stopped；4th sending module makes for sending the 4th control signal to air source control mechanism
Air source control mechanism control rotating disk is dropped back to workbench.
Above-described is the preferred embodiment of the present invention, it should be pointed out that the ordinary person of the art is come
It says, can also make several improvements and retouch under the premise of not departing from principle of the present invention, these improvements and modifications also exist
In protection scope of the present invention.
Claims (10)
1. a kind of control method of air-flotation type rotary table Switch of working position is applied to air-flotation type rotary table, the air supporting
Formula rotary table includes：Workbench is provided with null pick-up on the workbench；Rotation on the workbench
Disk is provided with multiple stations in the rotating disk, and is provided with zero position switch anti-dazzling screen at a wherein station；For driving
State the servo motor of rotating disk rotation；Air source control mechanism for controlling the rotating disk lifting, wherein the air source controls
Mechanism includes the first gas circuit and the second gas circuit, and first gas circuit rises for controlling the rotating disk from the workbench, institute
The second gas circuit is stated to drop back to the workbench for controlling the rotating disk；Servo motor encoder for reading station position
Device；For the controller of control servomotor and air source control mechanism, and the input terminal of controller respectively with null pick-up and
Encoder for servo motor connects；It is characterized in that, the control method includes：
The position for detecting zero position switch anti-dazzling screen, when the zero position switch anti-dazzling screen is corresponding with the position of the null pick-up
When, the corresponding position of the zero position switch anti-dazzling screen is set as reference position；
Obtain current absolute location of the station relative to the reference position in rotating disk；
According to the current absolute location of the station, the rotational angle that the station turns to default station is calculated；
According to the rotational angle, first control signal is sent to servo motor, is made in the servo motor driving rotating disk
Rotational angle described in the station rotary switches to the default station.
2. control method according to claim 1, which is characterized in that a station is relative to described in the acquisition rotating disk
The current absolute location of reference position, specially：
The station in the rotating disk that the encoder for servo motor is read in real time is received relative to the current exhausted of the reference position
To position.
3. control method according to claim 1, which is characterized in that when station number be three, and three stations with
When being spaced 120 degree of angular distribution on the rotating pan, the current absolute location according to the station calculates the station and turns
It moves to the rotational angle of default station, specifically includes：
When the current absolute location of the station is the reference position, the rotation that the station turns to default station is calculated
Angle is 120 degree clockwise；
When the current absolute location of the station is to rotate clockwise 120 degree corresponding first on the basis of the reference position
When setting, it is 120 degree clockwise to calculate the station and turn to the rotational angle of default station；
When the current absolute location of the station is to rotate clockwise 240 degree of corresponding seconds on the basis of the reference position
When setting, it is 240 degree counterclockwise to calculate the station and turn to the rotational angle of default station.
4. control method according to claim 1, which is characterized in that described according to the rotational angle, to servo electricity
Machine sends first control signal, make the Switch of working position in servo motor driving rotating disk to the default station it
Before, the method further includes：
Second control signal is sent to the air source control mechanism, the air source control mechanism is made to control the rotating disk from described
Float on workbench.
5. control method according to claim 1, which is characterized in that described according to the rotational angle, to servo electricity
Machine sends first control signal, make the Switch of working position in servo motor driving rotating disk to the default station it
Afterwards, the method further includes：
Third is sent to the air source control mechanism and controls signal, and the air source control mechanism is made to be stopped；
Send the 4th control signal to the air source control mechanism, make the air source control mechanism control the rotating disk drop back to
On the workbench.
6. a kind of control device of air-flotation type rotary table Switch of working position is applied to air-flotation type rotary table, the air supporting
Formula rotary table includes：Workbench is provided with null pick-up on the workbench；Rotation on the workbench
Disk is provided with multiple stations in the rotating disk, and is provided with zero position switch anti-dazzling screen at a wherein station；For driving
State the servo motor of rotating disk rotation；Air source control mechanism for controlling the rotating disk lifting, wherein the air source controls
Mechanism includes the first gas circuit and the second gas circuit, and first gas circuit rises for controlling the rotating disk from the workbench, institute
The second gas circuit is stated to drop back to the workbench for controlling the rotating disk；Servo motor encoder for reading station position
Device；For the controller of control servomotor and air source control mechanism, and the input terminal of controller respectively with null pick-up and
Encoder for servo motor connects；It is characterized in that, the control device includes：
Detection module, the position for detecting zero position switch anti-dazzling screen, when the zero position switch anti-dazzling screen and the zero-bit sense
The corresponding position of the zero position switch anti-dazzling screen is set as reference position when the position of device is to corresponding to；
Acquisition module, for obtaining current absolute location of the station relative to the reference position in rotating disk；
Computing module calculates the rotation that the station turns to default station for the current absolute location according to the station
Angle；
First sending module makes the servo electricity for according to the rotational angle, first control signal to be sent to servo motor
Rotational angle switches to the default station described in the station rotary in machine driving rotating disk.
7. control device according to claim 6, which is characterized in that the acquisition module is specifically used for, and is watched described in reception
Take current absolute location of the station relative to the reference position in the rotating disk that motor encoder is read in real time.
8. control device according to claim 6, which is characterized in that when station number be three, and three stations with
When being spaced 120 degree of angular distribution on the rotating pan, the computing module is specifically used for, when the current absolute location of the station
For the reference position when, calculate the station turn to default station rotational angle be 120 degree clockwise；When the station
Current absolute location be when rotating clockwise 120 degree of corresponding first positions on the basis of the reference position, described in calculating
The rotational angle that station turns to default station is 120 degree clockwise；When the current absolute location of the station is with the base
When level is set to benchmark and rotates clockwise 240 degree of corresponding second positions, the rotation that the station turns to default station is calculated
Angle is 240 degree counterclockwise.
9. control device according to claim 6, which is characterized in that the control device further includes：Second sending module,
For sending second control signal to the air source control mechanism, the air source control mechanism is made to control the rotating disk from described
Float on workbench.
10. control device according to claim 6, which is characterized in that the control device further includes：
Third sending module controls signal for sending third to the air source control mechanism, the air source control mechanism is made to stop
Only work；
4th sending module makes the air source control mechanism control for sending the 4th control signal to the air source control mechanism
The rotating disk is made to drop back to the workbench.
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| CN201511000127.4A CN105397632B (en) | 2015-12-28 | 2015-12-28 | A kind of control method and device of air-flotation type rotary table Switch of working position |
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| CN201511000127.4A CN105397632B (en) | 2015-12-28 | 2015-12-28 | A kind of control method and device of air-flotation type rotary table Switch of working position |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110609532A (en) * | 2019-09-30 | 2019-12-24 | 苏州精濑光电有限公司 | Turntable control system and method |
| CN110597215A (en) * | 2019-09-30 | 2019-12-20 | 苏州精濑光电有限公司 | Rotary disc communication system |
| CN111054656A (en) * | 2019-12-28 | 2020-04-24 | 湖南省水稻研究所 | Automatic seed sorting equipment |
| CN111421412B (en) * | 2020-05-20 | 2022-03-04 | 清华大学 | Grinding workbench and wafer thinning equipment |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3636602A1 (en) * | 1985-11-29 | 1987-06-04 | Ve Wissenschaftlich Tech Betri | Grinding installation for fine-ceramic products |
| CN2832744Y (en) * | 2005-06-20 | 2006-11-01 | 欣端机电股份有限公司 | Improved structure of feeding device |
| CN201017864Y (en) * | 2007-03-28 | 2008-02-06 | 沈阳芯源先进半导体技术有限公司 | Wafer automatic position setting control device |
| CN102270595A (en) * | 2010-06-03 | 2011-12-07 | 北京中电科电子装备有限公司 | Rotary air floating system |
| CN102717395A (en) * | 2011-03-30 | 2012-10-10 | 北京理工大学 | A Hall-switch-based system for accurately positioning the initial position of the joint of a robot |
| CN202567090U (en) * | 2012-01-19 | 2012-12-05 | 北京华康诚信医疗科技有限公司 | Accurate flat bed positioning device for rotational cabinet |
| CN203554572U (en) * | 2013-10-11 | 2014-04-16 | 李国伟 | Wirelessly-controlled automatically rotatable multifunctional camera |
| CN203875688U (en) * | 2014-05-19 | 2014-10-15 | 九江精达检测技术有限公司 | Inversion device for automatic control of multi-tooth division table |
| CN104723170A (en) * | 2015-03-31 | 2015-06-24 | 烟台环球机床附件集团有限公司 | Zero-position searching device for numerical control turret head and zero-position searching method of zero-position searching device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6336845B1 (en) * | 1997-11-12 | 2002-01-08 | Lam Research Corporation | Method and apparatus for polishing semiconductor wafers |
-
2015
- 2015-12-28 CN CN201511000127.4A patent/CN105397632B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3636602A1 (en) * | 1985-11-29 | 1987-06-04 | Ve Wissenschaftlich Tech Betri | Grinding installation for fine-ceramic products |
| CN2832744Y (en) * | 2005-06-20 | 2006-11-01 | 欣端机电股份有限公司 | Improved structure of feeding device |
| CN201017864Y (en) * | 2007-03-28 | 2008-02-06 | 沈阳芯源先进半导体技术有限公司 | Wafer automatic position setting control device |
| CN102270595A (en) * | 2010-06-03 | 2011-12-07 | 北京中电科电子装备有限公司 | Rotary air floating system |
| CN102717395A (en) * | 2011-03-30 | 2012-10-10 | 北京理工大学 | A Hall-switch-based system for accurately positioning the initial position of the joint of a robot |
| CN202567090U (en) * | 2012-01-19 | 2012-12-05 | 北京华康诚信医疗科技有限公司 | Accurate flat bed positioning device for rotational cabinet |
| CN203554572U (en) * | 2013-10-11 | 2014-04-16 | 李国伟 | Wirelessly-controlled automatically rotatable multifunctional camera |
| CN203875688U (en) * | 2014-05-19 | 2014-10-15 | 九江精达检测技术有限公司 | Inversion device for automatic control of multi-tooth division table |
| CN104723170A (en) * | 2015-03-31 | 2015-06-24 | 烟台环球机床附件集团有限公司 | Zero-position searching device for numerical control turret head and zero-position searching method of zero-position searching device |
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