CN105359248B - 改进的金属蒸气给料器 - Google Patents

改进的金属蒸气给料器 Download PDF

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Publication number
CN105359248B
CN105359248B CN201480037424.3A CN201480037424A CN105359248B CN 105359248 B CN105359248 B CN 105359248B CN 201480037424 A CN201480037424 A CN 201480037424A CN 105359248 B CN105359248 B CN 105359248B
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China
Prior art keywords
surface area
metal
metal vapor
terminals
feeder
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CN201480037424.3A
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English (en)
Chinese (zh)
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CN105359248A (zh
Inventor
迭戈·迪詹彼得罗
安东尼奥·博努奇
詹尼·圣泰拉
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K11/00—Resistance welding; Severing by resistance heating
    • B23K11/0013—Resistance welding; Severing by resistance heating welding for reasons other than joining, e.g. build up welding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H01J9/395—Filling vessels

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Physical Vapour Deposition (AREA)
  • Resistance Heating (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Electroluminescent Light Sources (AREA)
CN201480037424.3A 2013-07-11 2014-07-02 改进的金属蒸气给料器 Active CN105359248B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI2013A001171 2013-07-11
IT001171A ITMI20131171A1 (it) 2013-07-11 2013-07-11 Erogatore migliorato di vapori metallici
PCT/IB2014/062788 WO2015004574A1 (en) 2013-07-11 2014-07-02 Improved metal vapour dispenser

Publications (2)

Publication Number Publication Date
CN105359248A CN105359248A (zh) 2016-02-24
CN105359248B true CN105359248B (zh) 2017-07-07

Family

ID=49085124

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480037424.3A Active CN105359248B (zh) 2013-07-11 2014-07-02 改进的金属蒸气给料器

Country Status (7)

Country Link
US (1) US20160340769A1 (cg-RX-API-DMAC7.html)
EP (1) EP3001879B8 (cg-RX-API-DMAC7.html)
JP (1) JP2016525631A (cg-RX-API-DMAC7.html)
KR (1) KR20160030119A (cg-RX-API-DMAC7.html)
CN (1) CN105359248B (cg-RX-API-DMAC7.html)
IT (1) ITMI20131171A1 (cg-RX-API-DMAC7.html)
WO (1) WO2015004574A1 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109920711B (zh) * 2017-12-13 2021-06-15 有研工程技术研究院有限公司 一种碱金属释放剂所用释放器的制备方法
CN109950787B (zh) * 2019-03-08 2020-04-21 山西大学 一种可精确控制原子密度的碱金属蒸汽池

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3598384A (en) * 1968-09-13 1971-08-10 Getters Spa Metal vapor generators
US3636302A (en) * 1968-09-13 1972-01-18 Getters Spa Metal vapor generators
US4112290A (en) * 1976-10-27 1978-09-05 Denki Kagaku Kogyo Kabushiki Kaisha Evaporation vessel for use in vacuum evaporation
CN1026040C (zh) * 1988-09-02 1994-09-28 菲利浦光灯制造公司 碱金属蒸气发放器
CN1981066A (zh) * 2004-09-10 2007-06-13 工程吸气公司 用于蒸发锂的混合物和锂分配器
EP1967605A1 (en) * 2007-03-08 2008-09-10 Applied Materials, Inc. Evaporation tube and evaporation apparatus with adapted evaporation characteristic
CN102138197A (zh) * 2008-12-11 2011-07-27 工程吸气公司 用于荧光灯的汞分配系统
CN102473566A (zh) * 2009-07-15 2012-05-23 工程吸气公司 用于包含活性材料的丝状元件的支撑件

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2557530A (en) * 1946-09-07 1951-06-19 Eastman Kodak Co Electric heating element
US3579459A (en) 1966-12-13 1971-05-18 Getters Spa Metal vapor generating compositions
US3678246A (en) * 1970-06-24 1972-07-18 Oster Mfg Co John Liquid heating vessel
NL7208146A (cg-RX-API-DMAC7.html) * 1972-06-15 1973-12-18
NL7802116A (nl) 1977-03-14 1978-09-18 Getters Spa Alkalimetaaldampgenerator.
ITMI20010995A1 (it) * 2001-05-15 2002-11-15 Getters Spa Dispensatori di cesio e processo per il loro uso
JP2004353085A (ja) * 2003-05-08 2004-12-16 Sanyo Electric Co Ltd 蒸発装置
ITMI20042279A1 (it) 2004-11-24 2005-02-24 Getters Spa Sistema dispensatore di metalli alcalini in grado di dispensare quantita' elevate di metalli
JP2007238967A (ja) * 2006-03-03 2007-09-20 Sharp Corp 気相成長装置、気相成長方法、基板加熱装置、および基板加熱方法
EP1967606A1 (en) * 2007-03-08 2008-09-10 Applied Materials, Inc. Evaporation crucible and evaporation apparatus with adapted evaporation characteristic
DE102007035593B4 (de) * 2007-07-30 2018-05-09 Ledvance Gmbh Elektrische Lampe mit einem Außenkolben, einem Tellerfuß und einer Einbaulampe
US8052310B2 (en) * 2009-05-14 2011-11-08 Tyco Electronics Corporation Lighting device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3598384A (en) * 1968-09-13 1971-08-10 Getters Spa Metal vapor generators
US3636302A (en) * 1968-09-13 1972-01-18 Getters Spa Metal vapor generators
US4112290A (en) * 1976-10-27 1978-09-05 Denki Kagaku Kogyo Kabushiki Kaisha Evaporation vessel for use in vacuum evaporation
CN1026040C (zh) * 1988-09-02 1994-09-28 菲利浦光灯制造公司 碱金属蒸气发放器
CN1981066A (zh) * 2004-09-10 2007-06-13 工程吸气公司 用于蒸发锂的混合物和锂分配器
EP1967605A1 (en) * 2007-03-08 2008-09-10 Applied Materials, Inc. Evaporation tube and evaporation apparatus with adapted evaporation characteristic
CN102138197A (zh) * 2008-12-11 2011-07-27 工程吸气公司 用于荧光灯的汞分配系统
CN102473566A (zh) * 2009-07-15 2012-05-23 工程吸气公司 用于包含活性材料的丝状元件的支撑件

Also Published As

Publication number Publication date
KR20160030119A (ko) 2016-03-16
EP3001879A1 (en) 2016-04-06
US20160340769A1 (en) 2016-11-24
EP3001879B8 (en) 2017-04-12
JP2016525631A (ja) 2016-08-25
WO2015004574A1 (en) 2015-01-15
EP3001879B1 (en) 2016-12-07
ITMI20131171A1 (it) 2015-01-11
CN105359248A (zh) 2016-02-24

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