CN105334707A - Multistage focusing device and method - Google Patents
Multistage focusing device and method Download PDFInfo
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- CN105334707A CN105334707A CN201510928932.7A CN201510928932A CN105334707A CN 105334707 A CN105334707 A CN 105334707A CN 201510928932 A CN201510928932 A CN 201510928932A CN 105334707 A CN105334707 A CN 105334707A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
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Abstract
The invention provides a multistage focusing device and method and belongs to the technical field of laser direct imaging. The multistage focusing device is applied to a laser imaging system. The multistage focusing device comprises a wedge-shaped prism module, an echelon prism, a first power mechanism and a second power mechanism for driving the wedge-shaped prism module. The wedge-shaped prism module comprises a first prism module and a second prism module. The first power mechanism is used for driving the echelon prism to move so that the focal plane of a laser beam is located at a first preset position. The second power mechanism is used for driving the first prism module and the second prism module to move oppositely so as to adjust the focal plane of the laser beam from the first preset position to a second preset position, wherein the second preset position coincides with the image plane of the laser imaging system. The rough adjustment and fine adjustment of the focal plane position of the laser imaging system are achieved, the focusing range is increased on the basis of guaranteeing focal plane position control accuracy, and the market demand is satisfied effectively.
Description
Technical field
The present invention relates to laser direct imaging technical field, in particular to the multistage focus control of one and method.
Background technology
Laser direct imaging photoetching technique combines high-power laser optical fiber coupling technique and the image scanning techniques based on Digital Micromirror Device, is an advanced dynamic Laser imaging technique (LaserDynamicImaging, LDI).LDI is the data directly utilizing CAM workstation to export, driving laser imaging system, to be coated with the printed circuit board of photoresist as image planes, is transferred in image planes by preset pattern.
At present, the focus control of laser imaging system can not meet printed circuit board (PrintedCircuitBoard, the PCB) product that the thickness of slab on market is 0.025mm-5mm.Needing when processing the PCB product of different thickness of slab to add sucker backing plate to arrive exposure position of focal plane, also existing and wasting time and energy, expending the problems such as large.
Summary of the invention
The object of the present invention is to provide a kind of multistage focus control and method, increase focusing range, and the multistage focusing of finely tuning after realizing the first coarse adjustment in position of focal plane, effectively to improve the problems referred to above.
The present invention is achieved in that
A kind of multistage focus control, be applied to laser imaging system, described system comprises laser instrument, described multistage focus control comprises: prism wedge assembly, echelon prism, the first actuating unit and for driving the second actuating unit of described prism wedge component movement, and described prism wedge assembly comprises the first prism assemblies and the second prism assemblies;
Described first actuating unit, for the light path size of laser beam in described laser imaging system driving described echelon prism to move to change described laser instrument to send, is positioned at the first predeterminated position to make the focal plane of described laser beam;
Described second actuating unit is for driving described first prism assemblies and the second prism assemblies relative movement, to change the light path size of described laser beam in described laser imaging system, the second predeterminated position is become from described first predeterminated position to regulate the focal plane of described laser beam, wherein, described second predeterminated position overlaps with the image planes of described laser imaging system.
Preferably, along described echelon prism moving direction, the thickness increasing or decreasing of multiple cascaded surfaces of described echelon prism.
Preferably, the thickness gradient of adjacent two cascaded surfaces of described echelon prism is constant.
Preferably, the width of each cascaded surface of described echelon prism is equal with the bore of described laser beam.
Preferably, described multistage focus control also comprises the first back up pad and the second back up pad, described first back up pad is positioned in described second back up pad, described prism wedge assembly, described first actuating unit and described second actuating unit are all arranged in described first back up pad, described echelon prism is arranged in described second back up pad, and described first actuating unit moves in parallel relative to described first back up pad for driving described second back up pad.
Preferably, comprise motor and leading screw, described first back up pad is provided with leading screw fixture and leading screw support member, one end of described leading screw is rotatably connected on described leading screw fixture, and be connected with the rotating shaft of described motor, and the other end of described leading screw and described leading screw support member are rotatably connected, described leading screw is arranged with interconnective feed screw nut and the second back up pad contiguous block, described second back up pad contiguous block is connected with described second back up pad.
Preferably, described first prism assemblies is mobile prism wedge, described second prism assemblies is be fixedly mounted on the stationary wedge prism in described second back up pad, described mobile prism wedge is connected with described second actuating unit, the dip plane of described mobile prism wedge contacts with the dip plane of described stationary wedge prism, and described mobile prism wedge slides along direction, dip plane relative to described stationary wedge prism under the driving of described second actuating unit.
Preferably, described second back up pad is provided with slide rail in the one side of described first back up pad, and the length direction of described slide rail is consistent with the direction of motion of described second back up pad contiguous block.
Preferably, described second actuating unit comprises micromotion platform, described micromotion platform is connected with described mobile prism wedge, described micromotion platform tilts to install relative to described first back up pad, and described micromotion platform is all consistent with the key groove of the key groove of described mobile prism wedge and described stationary wedge prism relative to the angle of inclination of described first back up pad.
A kind of multistage focus adjustment method, be applied to the laser imaging system comprising described multistage focus control, described method comprises:
The light path size of laser beam in described laser imaging system driving described echelon prism to move to change described laser instrument to send, is positioned at the first predeterminated position to make the focal plane of described laser beam;
Drive described first prism assemblies and described second prism assemblies relative movement, to change the light path size of described laser beam in described laser imaging system, the second predeterminated position is become from described first predeterminated position to regulate the focal plane of described laser beam, wherein, described second predeterminated position overlaps with the image planes of described laser imaging system.
The present invention by change laser beam through the thickness of echelon prism, have effectively achieved the coarse adjustment of the position of focal plane of laser imaging system, further, again by change laser beam through the thickness of prism wedge assembly, have effectively achieved the fine setting of the position of focal plane of laser imaging system, namely achieve the multistage focusing of laser imaging system.
Compared with the focalizer of existing laser imaging, based on the multistage focus control of echelon prism and prism wedge assembly on the basis ensureing position of focal plane control accuracy, increase focusing range, coarse adjustment and fine setting can be carried out according to required position of focal plane, be applicable to wider, effectively meet the market demand.In addition, also there is the advantage that project organization is compact, can expand use.
Other features and advantages of the present invention are set forth at instructions subsequently, and, partly become apparent from instructions, or understand by implementing the embodiment of the present invention.Object of the present invention and other advantages realize by structure specifically noted in write instructions, claims and accompanying drawing and obtain.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.Shown in accompanying drawing, above-mentioned and other object of the present invention, Characteristics and advantages will be more clear.Reference numeral identical in whole accompanying drawing indicates identical part.Deliberately do not draw accompanying drawing by physical size equal proportion convergent-divergent, focus on purport of the present invention is shown.
Fig. 1 shows the one-piece construction schematic diagram of a kind of multistage focus control that the embodiment of the present invention provides;
Fig. 2 shows the focusing principle schematic diagram of a kind of multistage focus control that the embodiment of the present invention provides;
Fig. 3 shows the method flow diagram of a kind of multistage focus adjustment method that the embodiment of the present invention provides.
Wherein, Reference numeral comprises:
Echelon prism 100; Prism wedge assembly 200; First prism assemblies 210; Second prism assemblies 220; Motor 310; Shaft coupling 320; Leading screw fixture 330; Leading screw 340; Second back up pad contiguous block 350; Feed screw nut 360; Leading screw support member 370; Second actuating unit 400; First back up pad 500; Second back up pad 600; Lens barrel bottom lens 700.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, carry out clear, complete description to the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Laser imaging system in dynamic Laser imaging technique (LaserDynamicImaging, LDI) generally comprises laser instrument, focus control, image planes and the lens barrel etc. for placing lens subassembly.What LDI technology is applied to circuit board adds man-hour, can will be coated with the printed circuit board of photoresist as image planes, and the exposure focal plane of laser beam laser instrument being sent by described focus control can be positioned at the printed circuit board surface being coated with photoresist of different thickness of slab.
At present, the focus control of laser imaging system can only reach certain focusing amount, can not meet the need of market, and needs to add sucker backing plate to arrive exposure position of focal plane when working thickness is the printed circuit panel products of 0.025mm-5mm, also exist and waste time and energy, expend the problems such as large.Therefore, embodiments provide a kind of multistage focus control, can be applied in laser imaging system, to realize the multistage focusing of laser imaging system, effectively increase the focusing range of laser imaging system.
Described multistage focus control comprises: prism wedge assembly 200, echelon prism 100, first actuating unit and the second actuating unit 400 for driving prism wedge assembly 200 to move.Prism wedge assembly 200 comprises the first prism assemblies 210 and the second prism assemblies 220.
Wherein, described first actuating unit, for the light path size of laser beam in described laser imaging system driving echelon prism 100 to move to change laser instrument to send, is positioned at the first predeterminated position to make the focal plane of described laser beam; Described second actuating unit 400 is for driving described first prism assemblies 210 and the second prism assemblies 220 relative movement, to change the light path size of described laser beam in described laser imaging system, the second predeterminated position is become from the first predeterminated position to regulate the focal plane of described laser beam, wherein, described second predeterminated position overlaps with the image planes of described laser imaging system.
In the embodiment of the present invention, described echelon prism 100, for there is the prism structure of thickness gradient, is moved under the driving of described first actuating unit.In moving process, the light path of the laser beam that described laser instrument sends in described laser imaging system changes, and namely makes the position of focal plane of laser imaging system change.Wherein, the first actuating unit can be manual control adjusting knob and drive disk assembly, also can be that the driving member such as motor drive echelon prism 100 to move.Because the variation in thickness scope of echelon prism 100 is larger, therefore, the light path of laser beam in described laser imaging system that the movement of echelon prism 100 makes described laser instrument send changes scope comparatively greatly, and namely the range of adjustment of focusing plane position is comparatively large, but degree of regulation is lower.Therefore, in the embodiment of the present invention, the adjustment of the position of focal plane of echelon prism 100 pairs of laser imaging systems is called focal plane coarse adjustment.Obviously, the major influence factors of the range of adjustment of described focal plane coarse adjustment is the variation in thickness scope of echelon prism 100, and the thickness gradient of the major influence factors of the degree of regulation of focal plane coarse adjustment adjacent two cascaded surfaces that are echelon prism 100.
And described prism wedge assembly 200 comprises the first prism assemblies 210 and the second prism assemblies 220, and the first prism assemblies 210 and the second prism assemblies 220 can relative movements under the driving of described second actuating unit 400.In moving process, the light path of the laser beam that described laser instrument sends in described laser imaging system changes, and namely makes the position of focal plane of described laser imaging system change.Due in the process of the first prism assemblies 210 and the second prism assemblies 220 relative movement, the light path of described laser beam in described laser imaging system occurs to connect change, degree of regulation for position of focal plane is higher, therefore, in the embodiment of the present invention, the adjustment of the position of focal plane of prism wedge assembly 200 pairs of laser imaging systems is called that focal plane is finely tuned.Obviously, the described range of adjustment of focal plane fine setting and the major influence factors of degree of regulation are the key groove of described prism wedge assembly 200.
Wherein, the first prism assemblies 210 can be made up of one or more prism wedge, and the second prism assemblies 220 also can be made up of one or more prism wedge, and the first prism assemblies 210 and the second prism assemblies 220 can form a parallel plate structure.The relative movement of described first prism assemblies 210 and the second prism assemblies 220, make within the scope of the bore of the laser beam projected in laser imaging system on prism wedge assembly 200, the thickness of described parallel plate structure changes.Described second actuating unit 400 can be manually operated adjusting knob and drive disk assembly, also can be that the electric drive components such as motor drive the first prism assemblies 210 and the second prism assemblies 220 relative movement, certain described relative movement can be two-way relative movement also can be unidirectional relative movement.
In laser imaging system, the laser beam that laser instrument sends is by after lens barrel bottom lens 700, and the multistage focus control through described prism wedge assembly 200, described echelon prism 100, first actuating unit and the second actuating unit 400 composition focuses on image planes.Wherein, the use step of multistage focus control that the embodiment of the present invention provides can be: coarse adjustment: described first actuating unit drives echelon prism 100 to move to make the focal plane of described laser beam be positioned at the first predeterminated position; Fine setting: described second actuating unit 400 drives described first prism assemblies 210 and the second prism assemblies 220 relative movement to become the second predeterminated position to regulate the focal plane of described laser beam from the first predeterminated position.It should be noted that, but the higher adjustable extent of precision of fine setting is less, and the adjustable extent of coarse adjustment is comparatively large still, and degree of regulation is lower, therefore, can first through coarse adjustment by near position of focal plane quick adjustment to image planes, i.e. the first predeterminated position, then through fine setting, position of focal plane is adjusted in image planes, i.e. the second predeterminated position.
The multistage focus control that the embodiment of the present invention provides, coarse tuning process adopts echelon prism 100 structure effectively to expand focusing range, trim process adopts the precise control of prism wedge assembly 200, precision high, both with the use of, on the basis ensureing position of focal plane control accuracy, increase focusing range, effectively meet the market demand.
Thickness gradient due to echelon prism 100 is the key factor of the degree of regulation determining described focal plane coarse tuning process.Therefore, for the ease of regulating, along described echelon prism 100 moving direction, the thickness increasing or decreasing of multiple cascaded surfaces of echelon prism 100.Further, in order to increase the controllability of degree of regulation, the thickness gradient of adjacent two cascaded surfaces of echelon prism 100 can be designed as constant.
Fig. 1 shows the one-piece construction schematic diagram of a kind of multistage focus control that the embodiment of the present invention provides.As shown in Figure 1, described multistage focus control also comprises the first back up pad 500 and the second back up pad 600, first back up pad 500 is positioned in the second back up pad 600.Prism wedge assembly 200, first actuating unit and the second actuating unit 400 are all arranged in the first back up pad 500, and echelon prism 100 is arranged in the mounting groove in the second back up pad 600.The object of such design is, can decrease installing space and weight, make structure more lightly compact on the basis ensureing space structure layout.
As shown in Figure 1, the concrete structure of described first actuating unit can be: comprise motor 310 and leading screw 340, described first back up pad 500 is provided with leading screw fixture 330 and leading screw support member 370, one end of described leading screw 340 is rotatably connected on leading screw fixture 330, and is connected with the rotating shaft of described motor 310 by shaft coupling 320.The other end and the described leading screw support member 370 of described leading screw 340 are rotatably connected.Described leading screw 340 is arranged with interconnective feed screw nut 360 and the second back up pad contiguous block 350, described first back up pad 500 is positioned in described second back up pad 600, and described second back up pad contiguous block 350 is connected with described second back up pad 600.Wherein, feed screw nut 360 is preferably fixedly connected with the connected mode of the second back up pad contiguous block 350; And motor 310 is preferably stepper motor 310.
The rotation of described motor 310 drives described leading screw 340 to rotate, the rotation of described leading screw 340 drives described feed screw nut 360 to move, described feed screw nut 360 moves and drives described second back up pad contiguous block 350 synchronizing moving, also drives the second back up pad 600 to move further.Because echelon prism 100 is arranged in the second back up pad 600, therefore finally achieve the driving to echelon prism 100.Wherein, the stroke range of feed screw nut 360 or the second back up pad contiguous block 350 is the moving range of echelon prism 100.
Further, in the embodiment of the present invention, described first prism assemblies 210 is designed to mobile prism wedge, and described second prism assemblies 220 is designed to stationary wedge prism.Preferably, described first prism assemblies 210 and described second prism assemblies 220 all can adopt right-angle wedge prism.Described mobile prism wedge is connected with described second actuating unit 400, the dip plane of described mobile prism wedge contacts with the dip plane of described stationary wedge prism, and described mobile prism wedge slides along direction, dip plane relative to described stationary wedge prism under the driving of described second actuating unit 400.
Conveniently echelon prism 100 moves, namely the movement of the second back up pad 600 is facilitated, in the embodiment of the present invention, described second back up pad 600 is provided with slide rail in the one side of described first back up pad 500, and the length direction of described slide rail is consistent with the direction of motion of described second back up pad contiguous block 350.
In the embodiment of the present invention, described second actuating unit 400 can adopt micromotion platform.Described micromotion platform is connected with described mobile prism wedge, described micromotion platform tilts to install relative to described first back up pad 500, and described micromotion platform is all consistent with the key groove of the key groove of described mobile prism wedge and described stationary wedge prism relative to the angle of inclination of described first back up pad 500.Under micromotion platform drives, described mobile prism wedge moves along direction, dip plane relative to described stationary wedge prism, the thickness of the parallel flat of described mobile prism wedge and described stationary wedge prism composition in projection imaging region is changed in moving process, thus change the focal position of laser imaging system, finally realize the object of focal plane fine setting.Wherein, described projection imaging region is the shadow region in Fig. 2, and the width in described projection imaging region is equal with the aperture for the hole by laser beam bottom lens barrel, is the bore of the laser beam incided on prism wedge assembly 200.
Fig. 2 shows the principle schematic of a kind of multistage focus control that the embodiment of the present invention provides.The laser beam that laser instrument in laser imaging system sends, by after lens barrel bottom lens 700, can focus in image planes successively after prism wedge assembly 200 and echelon prism 100 are focused.Preferably, along the moving direction of echelon prism 100, the length of each cascaded surface of echelon prism 100 is equal with the width in described projection imaging region, namely equal with the bore inciding laser beam on prism wedge assembly 200.In Fig. 2, shown in (a), position is the adjustment initial position of echelon prism 100 and mobile prism wedge in described multistage focus control, and echelon prism 100 and mobile prism wedge move in parallel along the direction of arrow shown in (b) respectively.When moving in (b) process, can find out significantly, in projection imaging region, the thickness of echelon prism 100 and prism wedge assembly 200 increases, thus adds the light path of laser beam in laser imaging system, makes position of focal plane far away.Otherwise, when echelon prism 100 and mobile prism wedge respectively with the direction of arrow shown in (b) antiparallel mobile time, in projection imaging region, the thickness of echelon prism 100 and prism wedge assembly 200 will reduce, thus reduce the light path of laser beam in laser imaging system, make position of focal plane nearer, be beneficial to the processing of the printed circuit panel products of different-thickness.C position shown in () is the adjustment final position of echelon prism 100 and mobile prism wedge in described multistage focus control.
It should be noted that, in the embodiment of the present invention, the design of echelon prism 100 and prism wedge assembly 200, can make the adjustable extent of the position of focal plane of laser imaging system reach 0-5mm even more than 5mm, meet the demand in market.Such as, the key groove of mobile prism wedge and stationary wedge prism is all designed to 14.74 degree, and echelon prism 100 is designed to the echelon prism with three cascaded surfaces as shown in Figure 2, and wherein the thickness of three cascaded surfaces is followed successively by 11.46mm, 7.66mm and 3.86mm.
As shown in Figure 3, the embodiment of the present invention additionally provides a kind of multistage focus adjustment method, and be applied in the laser imaging system comprising above-mentioned multistage focus control, described method comprises:
S101: drive described echelon prism to move to change the light path size of described laser beam in described laser imaging system, be positioned at the first predeterminated position to make the focal plane of laser beam;
S102: drive described first prism assemblies and described second prism assemblies relative movement, to change the light path size of laser beam in described laser imaging system, the second predeterminated position is become from the first predeterminated position to regulate the focal plane of laser beam, wherein, described second predeterminated position overlaps with the image planes of described laser imaging system.
Those skilled in the art can be well understood to, and for convenience and simplicity of description, the specific works process of the method for foregoing description, with reference to the corresponding process in aforementioned system, device and unit embodiment, can not repeat them here.
It should be noted that, in this article, the such as relational terms of first and second grades and so on is only used for an entity or operation to separate with another entity or operational zone, and not necessarily requires or imply the relation that there is any this reality between these entities or operation or sequentially.And, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thus make to comprise the process of a series of key element, method, article or equipment and not only comprise those key elements, but also comprise other key elements clearly do not listed, or also comprise by the intrinsic key element of this process, method, article or equipment.When not more restrictions, the key element limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment comprising described key element and also there is other identical element.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a multistage focus control, it is characterized in that, be applied to laser imaging system, described system comprises laser instrument, described multistage focus control comprises: prism wedge assembly, echelon prism, the first actuating unit and for driving the second actuating unit of described prism wedge component movement, and described prism wedge assembly comprises the first prism assemblies and the second prism assemblies;
Described first actuating unit, for the light path size of laser beam in described laser imaging system driving described echelon prism to move to change described laser instrument to send, is positioned at the first predeterminated position to make the focal plane of described laser beam;
Described second actuating unit is for driving described first prism assemblies and the second prism assemblies relative movement, to change the light path size of described laser beam in described laser imaging system, the second predeterminated position is become from described first predeterminated position to regulate the focal plane of described laser beam, wherein, described second predeterminated position overlaps with the image planes of described laser imaging system.
2. multistage focus control according to claim 1, is characterized in that, along described echelon prism moving direction, and the thickness increasing or decreasing of multiple cascaded surfaces of described echelon prism.
3. multistage focus control according to claim 2, is characterized in that, the thickness gradient of adjacent two cascaded surfaces of described echelon prism is constant.
4. multistage focus control according to claim 3, is characterized in that, along described echelon prism moving direction, the length of each cascaded surface of described echelon prism is equal with the bore of described laser beam.
5. the multistage focus control according to any one of claim 1-4, it is characterized in that, also comprise the first back up pad and the second back up pad, described first back up pad is positioned in described second back up pad, described prism wedge assembly, described first actuating unit and described second actuating unit are all arranged in described first back up pad, described echelon prism is arranged in described second back up pad, and described first actuating unit moves in parallel relative to described first back up pad for driving described second back up pad.
6. multistage focus control according to claim 5, it is characterized in that, comprise motor and leading screw, described first back up pad is provided with leading screw fixture and leading screw support member, one end of described leading screw is rotatably connected on described leading screw fixture, and be connected with the rotating shaft of described motor, and the other end of described leading screw and described leading screw support member are rotatably connected, described leading screw is arranged with interconnective feed screw nut and the second back up pad contiguous block, described second back up pad contiguous block is connected with described second back up pad.
7. multistage focus control according to claim 6, it is characterized in that, described first prism assemblies is mobile prism wedge, described second prism assemblies is be fixedly mounted on the stationary wedge prism in described second back up pad, described mobile prism wedge is connected with described second actuating unit, the dip plane of described mobile prism wedge contacts with the dip plane of described stationary wedge prism, and described mobile prism wedge slides along direction, dip plane relative to described stationary wedge prism under the driving of described second actuating unit.
8. multistage focus control according to claim 7, is characterized in that, described second back up pad is provided with slide rail in the one side of described first back up pad, and the length direction of described slide rail is consistent with the direction of motion of described second back up pad contiguous block.
9. multistage focus control according to claim 8, it is characterized in that, described second actuating unit comprises micromotion platform, described micromotion platform is connected with described mobile prism wedge, described micromotion platform tilts to install relative to described first back up pad, and described micromotion platform is all consistent with the key groove of the key groove of described mobile prism wedge and described stationary wedge prism relative to the angle of inclination of described first back up pad.
10. a multistage focus adjustment method, be applied to the laser imaging system of the multistage focus control comprised as described in any one of claim 1-9, it is characterized in that, described method comprises:
The light path size of laser beam in described laser imaging system driving described echelon prism to move to change described laser instrument to send, is positioned at the first predeterminated position to make the focal plane of described laser beam;
Drive described first prism assemblies and described second prism assemblies relative movement, to change the light path size of described laser beam in described laser imaging system, the second predeterminated position is become from described first predeterminated position to regulate the focal plane of described laser beam, wherein, described second predeterminated position overlaps with the image planes of described laser imaging system.
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Application publication date: 20160217 |