JP5654625B2 - Digital micromirror positioning device - Google Patents

Description

  The present invention relates to a position adjusting device for a digital micromirror, and more particularly, can adjust a position of a digital micromirror attached to an exposure apparatus to supply a beam modulated by the digital micromirror to a desired location. The present invention relates to a position adjusting device for a digital micromirror.

  The recent Printed Circuit Board (PCB) industry is entering a turning point in which it expands from existing hard PCBs to various fields including flexible PCBs in order to meet further performance improvements of various digital devices. Accordingly, there is a demand for significant performance improvement of the PCB.

  In order to positively respond to such a need for significant performance improvement of PCB, an exposure engine of a new system capable of realizing an ultra fine circuit line width on PCB is required.

  In addition to technological innovation by shifting the exposure engine from low resolution to high resolution, it can flexibly handle high-mix low-volume production and mass production systems, while dramatically shortening the exposure process and improving productivity. Causes the necessity of applying new technologies that require improvement.

  For this purpose, various exposure methods have been developed, one of which is a maskless system using laser direct imaging (LDI).

  The problem with the existing mask-type exposure engine is that it is difficult to perform high-resolution exposure because the mask manufacturing cost and the management cost increase during exposure of a high-resolution fine circuit pattern.

  In order to solve such problems of the existing mask method, recently, an exposure engine of a high resolution maskless method that has realized an ultra fine circuit line width and can greatly reduce the number of processes has been highlighted. I'm bathing.

  An exposure engine equipped with a digital micromirror device (DMD) has been developed. This is because light beams incident at a predetermined angle by a number of micromirrors are transmitted at a desired angle, and other beams are transmitted. Is an engine that uses the principle that a single screen is created using only the required light by sending it at another angle.

  That is, a conventional exposure engine that transmits light generated by a light source to a substrate on a stage has a diffractive optical element and Fourier transfer lens 101, a mirror 102, a DMD 103, and a first projection optical as shown in FIG. A system 104, a beam moving device 105, a second projection optical system 106, and the like are included.

  In the conventional exposure engine having the above-described configuration, when designing a path through which light from the light source travels, restrictions such as the strength and length of the lens are generated. was there.

  Further, in order to widen the path through which the light from the light source travels, it is necessary to increase the strength of the lens. However, in this case, the overall exposure engine strength is too high, which is not preferable. As a related technique, there is a beam position error measuring method of an exposure apparatus and an exposure apparatus using the same (for example, refer to Patent Document 1 below).

Korean Published Patent No. 10-2009-0124179

  The present invention has been made to solve the above-described problems, and an object of the present invention is to easily adjust the position of a digital micromirror attached to an exposure apparatus using a rotation adjusting means and a horizontal adjusting means. A digital micromirror positioning device is being provided.

  Another object of the present invention is to attach a cooling means between the digital micromirror and the rotation adjusting means to reduce an error between the rotation adjusting means and the level adjusting means due to heat while cooling the digital micromirror. There is a need to provide a position adjustment device for a digital micromirror that can be eliminated.

In order to achieve the above object, one aspect of a digital micromirror position adjusting device according to the present invention includes a rotation adjusting means for adjusting a direction by rotating a digital micromirror coupled to a lower portion, and the rotation adjustment. It is connected to the upper part of the means, and is formed by combining a horizontal adjusting means for adjusting the digital micromirror and the rotation adjusting means in the front-rear or left-right direction, and a plurality of frames, and is attached to the ground or equipment, and is attached to the upper horizontal part. Comprises a support frame to which the level adjusting means is fixed , and a cooling means for cooling the heat generated in the digital micromirror between the rotation adjusting means 30 and the digital micromirror, and the rotation adjusting means. Is attached to the upper part of the cooling means, and a rotating body to which a rotating shaft is attached is mounted inside, and an upper part of the rotating body. A rotating case attached to one side of the rotating case, and a rotation adjusting tool that rotates the rotating shaft, and a rotating adjuster that is attached to one side of the rotating case and restricts the operation of the rotating adjusting tool. And a rotation stopper .
In order to achieve the above object, another aspect of the apparatus for adjusting the position of a digital micromirror according to the present invention includes a rotation adjusting means for adjusting a direction by rotating a digital micromirror coupled to a lower portion, and the rotation. A horizontal adjustment means that is coupled to the upper part of the adjustment means and adjusts the digital micromirror and the rotation adjustment means in the front-rear or left-right direction, and is formed by combining a number of frames, and is attached to the ground or equipment. And a support frame to which the level adjusting means is fixed. The level adjusting means is fixed to an upper part of the rotation adjusting means, and a lower stage in which front and rear guide grooves are formed in the upper part, and the lower stage The front and rear guide rails are formed at the lower part and are movable along the front and rear guide grooves. The upper part is perpendicular to the front and rear guide grooves. An intermediate stage in which left and right guide grooves are formed; an upper stage that is attached to an upper portion of the intermediate stage and in which a left and right guide rail is formed movably along the left and right guide grooves; and one of the intermediate stages And a front / rear adjuster for adjusting the digital micromirror and the rotation adjusting means in the front-rear direction, and a front / rear adjustment tool attached to one side of the upper stage for adjusting the digital micromirror and the rotation adjusting means in the left-right direction. And a left-right adjuster.

  According to the present invention, it is possible to easily adjust the position of the digital micromirror attached to the exposure apparatus using the rotation adjusting means and the horizontal adjusting means, and to perform exposure at an accurate position. is there.

  In addition, according to the present invention, the position of the digital micromirror can be finely adjusted by using the rotation adjusting means and the level adjusting means that are easily operated, and the labor and cost can be reduced. There is.

  Further, according to the present invention, a cooling means is attached between the digital micromirror and the rotation adjusting means, and an error between the rotation adjusting means and the horizontal adjusting means can be eliminated while cooling the digital micromirror. There is a merit.

The schematic block diagram which shows the structure of the conventional exposure engine. The perspective view which shows the position adjustment apparatus of the digital micromirror which concerns on this invention. The perspective view which shows other embodiment of the position adjustment apparatus of the digital micromirror which concerns on this invention. The disassembled perspective view which shows the principal part of the position adjustment apparatus of the digital micromirror which concerns on this invention. The perspective view which shows the principal part of the position adjustment apparatus of the digital micromirror which concerns on this invention. The perspective view which shows the operating state of the position adjustment apparatus of the digital micromirror which concerns on this invention.

  Hereinafter, a configuration of a position adjusting device for a digital micromirror according to the present invention will be described with reference to the accompanying drawings. 2 is a perspective view showing a position adjusting device for a digital micromirror according to the present invention, and FIG. 3 is a perspective view showing another embodiment of the position adjusting device for a digital micromirror according to the present invention. 4 is an exploded perspective view showing the main part of the position adjusting device of the digital micromirror according to the present invention, FIG. 5 is a perspective view showing the main part of the position adjusting device of the digital micromirror according to the present invention, FIG. 6 is a perspective view showing an operating state of the position adjusting device for the digital micromirror according to the present invention.

  The digital micromirror position adjustment apparatus 10 according to the present invention is coupled to the rotation adjustment means 30 for adjusting the rotation direction of the digital micromirror 20 and the rotation adjustment means 30, and the digital micromirror 20 and the rotation adjustment means 30 are combined. A horizontal adjustment means 40 that adjusts in the front-rear or left-right direction, a support frame 50 that is fixed to the ground or equipment and fixed to the horizontal adjustment means 40, and the digital micromirror 20 and the rotation adjustment means 30 are attached. Cooling means 60.

  Here, since the digital micromirror 20 is composed of a known digital micromirror, a separate description is omitted.

  The rotation adjusting unit 30 that adjusts the rotation direction of the digital micromirror 20 is combined with a cooling unit 60 that is combined with the digital micromirror 20 to adjust the rotation angle of the digital micromirror 20.

  The rotation adjusting means 30 is fixed to the upper part of the cooling means 60, and has a hollow rotating body 31 to which a rotating shaft 32 that rotates is attached, and a hollow shape that is attached to the upper part of the rotating body 31. The rotation case 33, the rotation adjuster 34 attached to one side of the rotation case 33 to rotate the rotation shaft 32, and the rotation adjuster 34 attached to one side of the rotation case 33. And a rotation stopper 35 for restricting the operation.

  That is, the rotation adjusting means 30 has a rotation case 33 attached to the upper part of a rotating body 31 to which a rotation shaft 32 is attached, and a rotation adjustment tool 34 for rotating the rotation shaft 32 on one side of the rotation case 33. And a rotation stopper 35 for restricting the operation of the rotation adjuster 34 is attached to the other side of the rotation case 33.

  The horizontal adjustment means 40 attached to the upper part of the rotation adjustment means 30 is coupled to the support frame 50 and the rotation adjustment means 30 at the upper and lower portions, respectively, so that the rotation adjustment means 30, the cooling means 60 and the digital micromirror 20 are moved back and forth. Or adjust left and right.

  The horizontal adjusting means 40 is slid onto the lower stage 41 fixed to the upper part of the rotation adjusting means 30, the intermediate stage 42 slidably attached to the upper part of the lower stage 41, and the upper part of the intermediate stage 42. An upper stage 43 movably attached, a front / rear adjuster 44 for adjusting the intermediate stage 42, and a left / right adjuster 45 for adjusting the upper stage 43 are provided.

  More specifically, the lower stage 41 has a lower part fixed to the upper part of the rotation adjusting means 30, and at least two front and rear guide grooves 41a are formed on the upper part. Further, the intermediate stage 42 attached to the upper part of the lower stage 41 is formed with a front and rear guide rail 42a movably forward and rearward along the front and rear guide groove 41a at the lower part, and the front and rear guide grooves 41a are formed on the upper part. At least two left and right guide grooves 42b are formed in the orthogonal direction.

  That is, the intermediate stage 42 guides the upper stage 43 in the left-right direction while moving along the front-rear guide groove 41 a of the lower stage 41.

  The upper stage 43 attached to the upper part of the intermediate stage 42 is formed with left and right guide rails 43a at the lower part so as to be movable left and right along the left and right guide grooves 42b.

  Further, a front / rear adjustment tool 44 attached to one side of the intermediate stage 42 is attached to one side of the upper stage 43 by moving the digital micromirror 20 and the rotation adjusting means 30 in the front / rear direction by a rotating operation. The left / right adjuster 45 moves the left / right adjuster 45 that adjusts the digital micromirror 20 and the rotation adjusting means 30 in the left-right direction by a rotating operation.

  Next, a movement restriction means 70 capable of restricting the movement distance of the intermediate stage 42 and the lower stage 41 is further attached to the horizontal adjustment means 40 that plays the above-described role.

  The movement restricting means 70 that plays the above-described role is fixed to the intermediate stage 42 and the upper stage 43 on one side, and a fixed plate 71 in which a moving space 72 is formed, and the movement of the fixed plate 71. And a fixing pin 73 that is fitted on the intermediate stage 42 and the lower stage 41 with one side inserted into the space 72.

  That is, the movement limiting means 70 can limit the moving distance of the digital micromirror 20 using the moving space 72 and the fixed pin 73 attached to the intermediate stage 42 and the upper stage 43.

  The support frame 50 fixed to the level adjustment means 40 is formed by connecting a number of frames and is attached to equipment such as the ground or an exposure apparatus. At this time, a number of frames constituting the support frame 50 may be integrally formed.

  In addition, the support frame 50 according to the present invention includes a lower horizontal part 51 formed to have a predetermined length, a vertical part 52 attached perpendicularly to the tip of the lower horizontal part 51, and a horizontal part at the tip of the vertical part 52. A case in which the upper horizontal part 53 attached to the horizontal adjustment means 40 is connected to the horizontal adjustment means 40 will be described as an example.

  The cooling means 60 coupled to the upper part of the digital micromirror 20 is attached between the digital micromirror 20 and the rotation adjusting means 30 to cool heat transmitted through the digital micromirror 20.

  The cooling means 60 operates along with the digital micromirror 20 when the rotation adjusting means 30 and the level adjusting means 40 are operated.

  Here, an example of the cooling means 60 for cooling the heat of the digital micromirror 20 will be described with reference to FIGS.

  First, the cooling means 60 of FIG. 2 is formed in a hollow rectangular shape from copper, aluminum or the like having a high thermal conductivity. That is, the cooling unit 60 is formed in a hollow rectangular shape, and the lower part is coupled to the digital micromirror 20 and the upper part is coupled to the rotation adjusting unit 30.

  Next, the cooling means 60 of FIG. 3 is formed of copper, aluminum or the like having high thermal conductivity, and is formed by combining a heat block 61, a heat pipe 62, and a heat blade 63. In other words, the cooling means 60 has a heat pipe 62 attached vertically to the top of the digital micromirror 20, a heat block 61 attached to the bottom of the heat pipe 62, and a heat blade 63 spaced apart from the top. It is attached.

  An embodiment of a position adjusting device for a digital micromirror having the above configuration will be described.

  First, a lower horizontal part 51 formed to have a predetermined length, a vertical part 52 attached perpendicularly to the tip of the lower horizontal part 51, and a horizontal part attached to the tip of the vertical part 52, the horizontal adjusting means 40 After forming the support frame 50 having the upper horizontal portion 53 coupled to the lower horizontal portion 51, the lower horizontal portion 51 is fixed to the exposure apparatus.

  Also, a heat pipe 62 formed at a predetermined height above the digital micromirror 20 selected according to the application and purpose, a heat block 61 attached to the lower part of the heat pipe 62, and the heat pipe 62 A cooling means 60 having a heat blade 63 is attached to the upper portion of the heater at intervals.

  Next, a rotating body 31 to which a rotating shaft 32 that rotates inside is attached to the upper part of the cooling means 60, a rotating case 33 that is attached to the upper part of the rotating body 31, and one side of the rotating case 33. A rotation adjusting means 30 having a rotation adjustment tool 34 for rotating the rotation shaft 32 and a rotation stopper 35 attached to one side of the rotation case 33 and restricting the operation of the rotation adjustment tool 34; Install.

  Further, the upper part of the rotation adjusting unit 30 is fixed to the upper part of the rotation adjusting unit 30, and the upper part is provided with a lower stage 41 in which front and rear guide grooves 41a are formed. The front and rear guide rails 42a are formed movably along the front and rear guide grooves 41a, and the intermediate stage 42 is formed with a left and right guide grooves 42b formed in a direction perpendicular to the front and rear guide grooves 41a. Is attached to one side of the intermediate stage 42 and the upper stage 43 in which the left and right guide rails 43a are formed to be movable along the left and right guide grooves 42b. A front / rear adjustment tool 44 for adjusting the micromirror 20 and the rotation adjusting means 30 and one side of the upper stage 43 are provided. Attached is attached left and right adjuster 45 for adjusting the right and left direction digital micromirror 20 and the rotation regulating means 30, a horizontal adjustment means 40 with.

  Next, when the horizontal adjusting means 40 is fixed to the upper horizontal portion 53 of the support frame 50, the assembly of the digital micromirror position adjusting device 10 is completed.

  Here, the assembly order of the digital micromirror position adjustment device may be different from the above order. Next, the use state of the position adjusting device for the digital micromirror having the above configuration will be described.

  First, the position of the digital micromirror 20 attached to the exposure apparatus is inspected. Next, in consideration of the current position of the digital micromirror 20, the rotation direction, the front-rear direction, and the left-right direction are adjusted.

  First, when the rotation adjustment tool 34 attached to the rotation case 33 is rotated to change the rotation direction of the digital micromirror 20, the rotation shaft 32 that operates along with the rotation adjustment tool 34 is moved to the rotation adjustment tool 34. When the digital micromirror 20 is moved to a designated position according to the rotation direction of the rotation of the digital micromirror 20, the rotation adjustment tool 34 is stopped and fixed using the rotation stopper 35. .

  Next, when the front / rear adjustment tool 44 attached to the intermediate stage 42 is rotated in order to adjust the digital micromirror 20 in the front-rear direction, the digital micromirror 20 includes the cooling means 60, the rotation adjustment means 30, and the rotation adjustment means 30. It moves forward and backward together with the lower stage 41.

  Further, when the left / right adjustment tool 45 attached to the upper stage 43 is rotated to adjust the digital micromirror 20 in the left / right direction, the digital micromirror 20 includes the cooling means 60, the rotation adjusting means 30, and the like. Then, it moves to the left or right side together with the lower stage 41 and the intermediate stage 42.

  At this time, the intermediate stage 42 and the lower stage 41 can move only in a space designated by the restriction plate 71 and the fixed pin 73 that constitute the movement restriction means 70.

  In this manner, the modulated beam of the digital micromirror 20 is transmitted to a desired location by the operation of the rotation adjusting means 30 and the horizontal adjusting means 40 constituting the position adjusting device 10 of the digital micromirror.

  The specific shape and direction of the digital micromirror position adjustment device according to the present invention have been described with reference to the accompanying drawings. However, the present invention can be modified and changed in various ways by those skilled in the art. Modifications should be construed as being within the scope of the present invention.

DESCRIPTION OF SYMBOLS 10 Digital micromirror position adjustment apparatus 20 Digital micromirror 30 Rotation adjustment means 31 Rotating body 32 Rotating shaft 33 Rotation case 34 Rotation adjustment tool 35 Rotation stopper 40 Horizontal adjustment means 41 Lower stage 42 Intermediate stage 43 Upper stage 44 Front and rear adjustment tool 45 Left / right adjuster 50 Support frame 60 Cooling means 70 Movement limiting means

Claims (3)

A rotation adjusting means 30 for adjusting the direction by rotating the digital micromirror 20 coupled to the lower part;
A horizontal adjustment means 40 coupled to an upper part of the rotation adjustment means 30 for adjusting the digital micromirror 20 and the rotation adjustment means 30 in the front-rear or left-right direction;
A support frame 50 formed by joining a number of frames and attached to the ground or equipment, and the horizontal adjustment means 40 being fixed to the upper horizontal portion;
Between the rotation adjusting means 30 and the digital micromirror 20, a cooling means 60 for cooling the heat generated in the digital micromirror 20 is provided .
The rotation adjusting means 30 is fixed to the upper part of the cooling means 60, and has a rotating body 31 to which a rotating shaft 32 that rotates is attached, a rotating case 33 attached to the upper part of the rotating body 31, and the rotation. A rotation adjuster 34 that is attached to one side of the case 33 and rotates the rotary shaft 32; a rotation stopper 35 that is attached to one side of the rotation case 33 and restricts the operation of the rotation adjuster 34; the position adjusting device of a digital micromirror, characterized in that it comprises a. A rotation adjusting means 30 for adjusting the direction by rotating the digital micromirror 20 coupled to the lower part;
A horizontal adjustment means 40 coupled to an upper part of the rotation adjustment means 30 for adjusting the digital micromirror 20 and the rotation adjustment means 30 in the front-rear or left-right direction;
A support frame 50 that is formed by joining a number of frames and is attached to the ground or equipment, and the horizontal adjustment means 40 is fixed to the upper horizontal portion;
The horizontal adjusting means 40 is fixed to the upper part of the rotation adjusting means 30, and is attached to the upper part of the lower stage 41, the lower stage 41 having the front and rear guide grooves 41a formed in the upper part, and the front and rear guides in the lower part. A front and rear guide rail 42a is formed movably along the groove 41a, and an upper stage is formed with a left and right guide groove 42b in a direction orthogonal to the front and rear guide groove 41a. The lower stage is attached to one side of the intermediate stage 42 and the upper stage 43 in which left and right guide rails 43a are formed so as to be movable along the left and right guide grooves 42b. A front / rear adjuster 44 for adjusting the rotation adjusting means 30 and one side of the upper stage 43; Position adjusting device of a digital micromirror, characterized in that it comprises a left-right regulating device 45 for adjusting the digital micromirror 20 and the rotation regulating means 30 in the right direction. The horizontal adjustment means 40 is further provided with a movement restriction means 70 so that the movement distance of the intermediate stage 42 and the lower stage 41 can be restricted.
The movement restricting means 70 has one side fixed to the intermediate stage 42 and the upper stage 43, and a fixed plate 71 in which a moving space 72 is formed, and one side fitted into the moving space 72 of the fixed plate 71. The digital micromirror position adjusting device according to claim 2 , further comprising a fixing pin 73 fixed to the intermediate stage 42 and the lower stage 41.

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