CN105334226A - Chip image acquisition device provided with light source - Google Patents

Chip image acquisition device provided with light source Download PDF

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Publication number
CN105334226A
CN105334226A CN201510924289.0A CN201510924289A CN105334226A CN 105334226 A CN105334226 A CN 105334226A CN 201510924289 A CN201510924289 A CN 201510924289A CN 105334226 A CN105334226 A CN 105334226A
Authority
CN
China
Prior art keywords
installation
chip
chi frame
light source
guide groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510924289.0A
Other languages
Chinese (zh)
Inventor
李志远
耿世慧
李熙春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chongqing Fivision Technology Co Ltd
Original Assignee
Chongqing Fivision Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chongqing Fivision Technology Co Ltd filed Critical Chongqing Fivision Technology Co Ltd
Priority to CN201510924289.0A priority Critical patent/CN105334226A/en
Publication of CN105334226A publication Critical patent/CN105334226A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined

Abstract

The invention provides a chip image acquisition device provided with a light source. The chip image acquisition device comprises a track, a chip frame, sensors and cameras, chips are moved and transported by the chip frame, the chips on the cameras can be triggered by the sensors to photograph the chips on the chip frame in the movement process of the chip frame so as to obtain chip images, and the chips can be detected automatically by the aid of an image detection system. According to the chip detection system provided with the light source, the chips are detected by obtaining cleaned chip images, and the efficiency is high.

Description

With the chip image acquisition device of light source
Technical field
The present invention relates to chip detection technical field, particularly relate to a kind of chip image acquisition device with light source.
Background technology
One of restriction China's development of computer and universal gordian technique are chips, and the development bottleneck of chip is manufacturing equipment and production technology.Can Godson popularize one of key factor on China's computing machine is exactly the production technology that China's manufacture of microchips must grasp chip.The technology that production technology relates to is a lot, and it is one of important content that the outward appearance wherein in chip manufacturing proces detects.The outward appearance detection system of current chip manufacture process is standard and the technology of American I NTEL and AMD substantially.China does not also have this type of chip outward appearance detection system a set of at present.Therefore China's self-developing chip outward appearance detection system is an extremely important project and engineering to China's chip manufacturing.
In existing chip manufacture process, the chip produced needs to carry out detecting to prevent chip defective or defective from coming into the market, and this operation is at present mainly by manually carrying out detecting.This mode of being undertaken detecting by experience, has following deficiency:
The first, the 4 second time of manual detection chip normal need, efficiency is not high;
The second, due to detection chip of manually bowing for a long time, cause brains to be fainted, eye fatigue, be easy to cause quality accident;
3rd, because manual detection station is worked hard, eye fatigue, a lot of employee is not for a long time in this station working time, and station employee is exchanged frequently, causes quality not ensure.
Summary of the invention
The shortcoming of prior art in view of the above, the object of the present invention is to provide a kind of chip image acquisition device with light source, for solving problem lower by manual detection chip effect in prior art.
For achieving the above object and other relevant objects, the invention provides following technical scheme:
A kind of chip image acquisition device with light source, at least comprise track and the chi frame being suitable for movement in orbit, track comprises two rail be set in parallel, the face that two one steel rails are just right respectively offers a guide groove, the dual-side of described chi frame is embedded the movement realized in the guide groove of two one steel rails in orbit respectively, a travelling belt is provided with in guide groove, travelling belt shuttling movement is driven by arranging a motor on rail, the dual-side of chi frame is fixedly connected with some guide wheels respectively, and the wheel face of this guide wheel contacts with the travelling belt in guide groove, this guide wheel and travelling belt are made up of rubber, and be also provided with some pulleys in the bottom being embedded the chi frame dual-side in guide groove, and the wheel face of pulley contacts with guide groove, some installation positions for chip placement are provided with above the end face place of chi frame, the barrier run through bottom chi frame is provided with bottom installation position, the bottom at the end face place of chi frame is also provided with the light source identical with installation position quantity, and light source contacts with barrier, in addition, the end face of chi frame also offers some through holes, below through hole, install one be suitable for via through hole to send the sensor of trigger pip, camera is provided with above the track just right with installation position, camera is taken pictures to the chip be placed on installation position by the trigger pip of the transmission of sensor, acquisition obtains chip image and is exported.
Preferably, described installation position becomes the spread configuration of array on chi frame.
Preferably, described installation position comprises two row, and the quantity often arranging installation position is 5-7.
Preferably, described through hole is opened between two row installation positions, and the quantity of installation position is identical with the quantity often arranging installation position.
As mentioned above, the present invention has following beneficial effect: in the application of reality, image acquiring device can be set above the track just right with installation position, chip on installation position is taken pictures, thus obtain image and judged the qualified detection of chip by image procossing, adopt the mode of artificial detection compared to existing technology, efficiency seems higher.
Accompanying drawing explanation
Fig. 1 is shown as a kind of schematic diagram of the chip carrying device with light source.
Element numbers explanation
1 rail
11 guide grooves
2 chi frames
21 installation positions
22 barriers
23 through holes
3 guide wheels
4 pulleys
5 travelling belts
6 motors
7 light sources
8 sensors
81 photosignal transmitters
82 photoelectric signal receivers
9 cameras
Embodiment
By particular specific embodiment, embodiments of the present invention are described below, person skilled in the art scholar the content disclosed by this instructions can understand other advantages of the present invention and effect easily.
Refer to Fig. 1.Notice, structure, ratio, size etc. that this instructions institute accompanying drawings illustrates, content all only in order to coordinate instructions to disclose, understand for person skilled in the art scholar and read, and be not used to limit the enforceable qualifications of the present invention, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the present invention can produce and the object that can reach, still all should drop on disclosed technology contents and obtain in the scope that can contain.Simultaneously, quote in this instructions as " on ", D score, "left", "right", " centre " and " one " etc. term, also only for ease of understanding of describing, and be not used to limit the enforceable scope of the present invention, the change of its relativeness or adjustment, under changing technology contents without essence, when being also considered as the enforceable category of the present invention.
Refer to Fig. 1, for a kind of schematic diagram of the chip image acquisition device with light source, as shown in the figure, this chip image acquisition device comprises track and is suitable for the chi frame 2 of movement in orbit, track comprises two rail be set in parallel 1, the face that two one steel rails 1 are just right respectively offers a guide groove 11, the dual-side of described chi frame 2 is embedded the movement realized in the guide groove 11 of two one steel rails 1 in orbit respectively, a travelling belt 5 is provided with in guide groove 11, travelling belt 5 shuttling movement is driven by arranging a motor 6 on rail, the dual-side of chi frame 2 is fixedly connected with some guide wheels 3 respectively, and the wheel face of this guide wheel 3 contacts with the travelling belt 5 in guide groove 11, this guide wheel 3 and travelling belt 5 are made up of rubber, and be also provided with some pulleys 4 in the bottom of chi frame 2 dual-side be embedded in guide groove 11, and the wheel face of pulley 4 contacts with guide groove 11, some installation positions 21 for chip placement are provided with above the end face place of chi frame 2, the barrier 22 run through bottom chi frame 2 is provided with bottom installation position 21, the bottom at the end face place of chi frame 2 is also provided with the light source 7 identical with installation position 21 quantity, and light source 7 contacts with barrier 22, in addition, the end face of chi frame 2 also offers some through holes 23, below through hole 23, install one be suitable for via through hole 23 to send the sensor 8 of trigger pip, camera 9 is provided with above the track just right with installation position 21, camera 9 is taken pictures to the chip be placed on installation position 21 by the trigger pip of the transmission of sensor 8, acquisition obtains chip image and is exported.By said structure, chip image more clearly can be obtained in actual use.
Pass through such scheme, chi frame can be made to move freely in orbit, and only need a motor 6 can complete the driving of chi frame, do not need large-scale transferring material, can save the cost of equipment, in addition, chip can complete the acquisition of chip image in motion process, do not need to stop, ultrahigh in efficiency.
In concrete enforcement, some installation positions 21 become the spread configuration of array on chi frame 2.Usually, chi frame 2 comprises two row installation positions 21, the quantity often arranging installation position 21 is 5-7.Wherein, the quantity of through hole 23 is identical with the quantity often arranging installation position 21, and accordingly, camera can comprise two cameras, at chi frame 2 through sensor, triggers camera and takes pictures to the chip on installation position, ensure that the high efficiency of detection via through hole.Usually, this sensor 8 can be photoelectric sensor, comprise photosignal transmitter 81 and photoelectric signal receiver 82, what photosignal transmitter 81 was corresponding with through hole 23 is arranged on below track, what photoelectric signal receiver was corresponding with through hole 23 is arranged on above track, is suitable for receiving photosignal and sends trigger pip to camera.
In the application of reality, the chip image acquired can be sent in detection system and judge that whether chip is qualified, adopt the mode of artificial detection compared to existing technology, efficiency seems higher.So the present invention effectively overcomes various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Any person skilled in the art scholar all without prejudice under spirit of the present invention and category, can modify above-described embodiment or changes.Therefore, such as have in art usually know the knowledgeable do not depart from complete under disclosed spirit and technological thought all equivalence modify or change, must be contained by claim of the present invention.

Claims (4)

1. the chip image acquisition device with light source, it is characterized in that: at least comprise track and the chi frame being suitable for movement in orbit, track comprises two rail be set in parallel, the face that two one steel rails are just right respectively offers a guide groove, the dual-side of described chi frame is embedded the movement realized in the guide groove of two one steel rails in orbit respectively, a travelling belt is provided with in guide groove, travelling belt shuttling movement is driven by arranging a motor on rail, the dual-side of chi frame is fixedly connected with some guide wheels respectively, and the wheel face of this guide wheel contacts with the travelling belt in guide groove, this guide wheel and travelling belt are made up of rubber, and be also provided with some pulleys in the bottom being embedded the chi frame dual-side in guide groove, and the wheel face of pulley contacts with guide groove, some installation positions for chip placement are provided with above the end face place of chi frame, the barrier run through bottom chi frame is provided with bottom installation position, the bottom at the end face place of chi frame is also provided with the light source identical with installation position quantity, and light source contacts with barrier, in addition, the end face of chi frame also offers some through holes, below through hole, install one be suitable for via through hole to send the sensor of trigger pip, camera is provided with above the track just right with installation position, camera is taken pictures to the chip be placed on installation position by the trigger pip of the transmission of sensor, acquisition obtains chip image and is exported.
2. the chip image acquisition device of band light source according to claim 1, is characterized in that: described installation position becomes the spread configuration of array on chi frame.
3. the chip image acquisition device of band light source according to claim 2, is characterized in that: described installation position comprises two row, and the quantity often arranging installation position is 5-7.
4. the chip image acquisition device of band light source according to claim 3, is characterized in that: described through hole is opened between two row installation positions, and the quantity of installation position is identical with the quantity often arranging installation position.
CN201510924289.0A 2015-12-14 2015-12-14 Chip image acquisition device provided with light source Pending CN105334226A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510924289.0A CN105334226A (en) 2015-12-14 2015-12-14 Chip image acquisition device provided with light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510924289.0A CN105334226A (en) 2015-12-14 2015-12-14 Chip image acquisition device provided with light source

Publications (1)

Publication Number Publication Date
CN105334226A true CN105334226A (en) 2016-02-17

Family

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Family Applications (1)

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CN201510924289.0A Pending CN105334226A (en) 2015-12-14 2015-12-14 Chip image acquisition device provided with light source

Country Status (1)

Country Link
CN (1) CN105334226A (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007131326A1 (en) * 2006-05-12 2007-11-22 Alberta Research Council Inc. A system and a method for detecting a damaged or missing machine part
CN201434846Y (en) * 2009-06-08 2010-03-31 杭州开源电脑技术有限公司 Single camera fabric defect on-line detection device
CN103021899A (en) * 2012-12-21 2013-04-03 日月光半导体(昆山)有限公司 Semiconductor product detecting machine and detecting method thereof
CN203323701U (en) * 2013-07-04 2013-12-04 长春工程学院 Online detection device for automobile frame
CN203376271U (en) * 2013-04-23 2014-01-01 胡进 Machine vision-based non-continuous product online detection system
CN205538727U (en) * 2015-12-14 2016-08-31 重庆远创光电科技有限公司 Take chip image acquisition device of light source

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007131326A1 (en) * 2006-05-12 2007-11-22 Alberta Research Council Inc. A system and a method for detecting a damaged or missing machine part
CN201434846Y (en) * 2009-06-08 2010-03-31 杭州开源电脑技术有限公司 Single camera fabric defect on-line detection device
CN103021899A (en) * 2012-12-21 2013-04-03 日月光半导体(昆山)有限公司 Semiconductor product detecting machine and detecting method thereof
CN203376271U (en) * 2013-04-23 2014-01-01 胡进 Machine vision-based non-continuous product online detection system
CN203323701U (en) * 2013-07-04 2013-12-04 长春工程学院 Online detection device for automobile frame
CN205538727U (en) * 2015-12-14 2016-08-31 重庆远创光电科技有限公司 Take chip image acquisition device of light source

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Application publication date: 20160217

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