CN205209987U - Chip vision detection system - Google Patents

Chip vision detection system Download PDF

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Publication number
CN205209987U
CN205209987U CN201521040926.XU CN201521040926U CN205209987U CN 205209987 U CN205209987 U CN 205209987U CN 201521040926 U CN201521040926 U CN 201521040926U CN 205209987 U CN205209987 U CN 205209987U
Authority
CN
China
Prior art keywords
chip
installation
image
guide rail
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201521040926.XU
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Chinese (zh)
Inventor
李志远
耿世慧
李熙春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chongqing Fivision Technology Co Ltd
Original Assignee
Chongqing Fivision Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chongqing Fivision Technology Co Ltd filed Critical Chongqing Fivision Technology Co Ltd
Priority to CN201521040926.XU priority Critical patent/CN205209987U/en
Application granted granted Critical
Publication of CN205209987U publication Critical patent/CN205209987U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model provides a chip vision detection system utilizes the chip frame who installs the chip to move on the guide rail to utilize to set up camera on the guide rail chip in to chip frame and shoot, thereby acquire chip image, and utilize image detection system to handle chip image, judge whether qualified the chip is, the utility model discloses utilize above -mentioned chip vision detection system to carry out machine automated inspection to the chip, overcome current detection technique, adopt and judge artificially that whether qualified the chip is not enough, compare the mode of artifical detection moreover, it is more high -efficient.

Description

A kind of chip vision detection system
Technical field
The utility model relates to and utilizes image to carry out the technical field of chip detection, particularly relates to a kind of chip vision detection system.
Background technology
One of restriction China's development of computer and universal gordian technique are chips, and the development bottleneck of chip is manufacturing equipment and production technology.Can Godson popularize one of key factor on China's computing machine is exactly the production technology that China's manufacture of microchips must grasp chip.The technology that production technology relates to is a lot, and it is one of important content that the outward appearance wherein in chip manufacturing proces detects.The outward appearance detection system of current chip manufacture process is standard and the technology of American I NTEL and AMD substantially.China does not also have this type of chip outward appearance detection system a set of at present.Therefore China's self-developing chip outward appearance detection system is an extremely important project and engineering to China's chip manufacturing.
In existing production run, or the main quality of mode to chip of manual detection that adopt detects, and how providing a kind of effective image to detect servicing unit to carry out image detection, needing the problem solved with regard to having become those skilled in the art.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of chip vision detection system, is suitable for solving in prior art relying on manually to come detect chip and cause the problem that detection efficiency is not high.
For achieving the above object and other relevant objects, the utility model provides following technical scheme:
A kind of chip vision detection system, comprising: guide rail, is suitable for providing mobile route; Chi frame, comprise the installation position of the confession chip placement that two row are parallel to each other and the multiple through holes between two row installation positions, the chip be placed on installation position is suitable for move that the chip be placed on installation position is transported to predeterminated position along the mobile route that guide rail provides, wherein, the quantity of described through hole is identical with the quantity often arranging installation position; Image acquiring device, comprise sensor and camera, described sensor setting is in the below of described guide rail, and described camera and described sensor are arranged at above track just over the ground, be suitable for the sensor when chi frame moves along described guide rail to trigger described camera by the through hole on described chi frame and take pictures to the chip be placed on installation position, and obtained chip image is exported; Whether image detecting system, connects image acquiring device, is suitable for identifying in described chip image input detection model, qualified to determine the chip corresponding to chip image.
Preferably, described chi frame comprises two row and to be in a parallel set installation position, often arrange on installation position and there is the equal installation position of 5-7 spacing.
Preferably, described image detecting system is computing machine.
As mentioned above, the utility model at least has following beneficial effect: the utility model utilizes said chip vision detection system can carry out machine to chip and automatically detects, overcome in existing detection technique, adopt and artificially judge the deficiency that whether qualified chip is, and compare the mode of manual detection, more efficiently.
Accompanying drawing explanation
Fig. 1 is a kind of schematic diagram of chip vision detection system.
Drawing reference numeral explanation
1 guide rail
2 chi frames
21 installation positions
22 through holes
3 sensors
4 cameras
5 image detecting systems
Embodiment
By particular specific embodiment, embodiment of the present utility model is described below, person skilled in the art scholar the content disclosed by this instructions can understand other advantages of the present utility model and effect easily.
Notice, structure, ratio, size etc. that this instructions institute accompanying drawings illustrates, content all only in order to coordinate instructions to disclose, understand for person skilled in the art scholar and read, and be not used to limit the enforceable qualifications of the utility model, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the utility model can produce and the object that can reach, still all should drop on technology contents that the utility model discloses and obtain in the scope that can contain.Simultaneously, quote in this instructions as " on ", D score, "left", "right", " centre " and " one " etc. term, also only for ease of understanding of describing, and be not used to limit the enforceable scope of the utility model, the change of its relativeness or adjustment, under changing technology contents without essence, when being also considered as the enforceable category of the utility model.
Refer to Fig. 1, be a kind of schematic diagram of chip vision detection system, as shown in the figure, this chip vision detection system comprises: guide rail 1, is suitable for providing mobile route; Chi frame 2, comprise the installation position 21 of the confession chip placement that two row are parallel to each other and the multiple through holes 22 between two row installation positions 21, the chip be placed on installation position 21 is suitable for move that the chip be placed on installation position 21 is transported to predeterminated position along the mobile route that guide rail 1 provides, wherein, the quantity of described through hole 22 is identical with the quantity often arranging installation position 21; Image acquiring device, comprise sensor 3 and camera 4, described sensor 3 is arranged at the below of described guide rail 1, and described camera 4 is arranged at above track just over the ground with described sensor 3, be suitable for the sensor 3 when chi frame 2 moves along described guide rail 1 to trigger described camera 4 by the through hole 22 on described chi frame 2 and take pictures to the chip be placed on installation position 21, and obtained chip image is exported; Whether image detecting system 5, is suitable for identifying in described chip image input detection model, qualified to determine the chip corresponding to chip image.
In concrete enforcement, image detecting system is generally computing machine, can install inspection software in a computer and process chip image, thus realize testing goal.Wherein, the principle of image detecting system is, processes the picture obtained, by existing picture Processing Technique, judge that whether some condition in picture is identical with the condition preset, or in pre-conditioned scope, if it is judge that it is qualified, if not then judge that it is defective.Particularly, when defective, alarm can be made in image detecting system.
In concrete enforcement, often arrange on installation position and there is the equal installation position of 5-7 spacing.
In concrete enforcement, sensor is photoelectric sensor, comprises photosignal transmitter and photoelectric signal receiver, wherein, photosignal transmitter can be arranged on below guide rail, and photoelectric signal receiver is arranged on camera, is suitable for the photosignal receiving the transmission of photosignal transmitter.
The utility model utilizes said chip vision detection system can carry out machine to chip and automatically detects, and overcomes in existing detection technique, adopts and artificially judges the deficiency that whether qualified chip is, and compare the mode of manual detection, more efficiently.So the utility model effectively overcomes various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not is suitable for limiting the utility model.Any person skilled in the art scholar all without prejudice under spirit of the present utility model and category, can modify above-described embodiment or changes.Therefore, such as have in art and usually know that the knowledgeable modifies or changes not departing from all equivalences completed under the spirit and technological thought that the utility model discloses, must be contained by claim of the present utility model.

Claims (3)

1. a chip vision detection system, is characterized in that, comprising:
Guide rail, is suitable for providing mobile route;
Chi frame, comprise the installation position of the confession chip placement that two row are parallel to each other and the multiple through holes between two row installation positions, the chip be placed on installation position is suitable for move that the chip be placed on installation position is transported to predeterminated position along the mobile route that guide rail provides, wherein, the quantity of described through hole is identical with the quantity often arranging installation position;
Image acquiring device, comprise sensor and camera, described sensor setting is in the below of described guide rail, and described camera and described sensor are arranged at above track just over the ground, be suitable for the sensor when chi frame moves along described guide rail to trigger described camera by the through hole on described chi frame and take pictures to the chip be placed on installation position, and obtained chip image is exported;
Whether image detecting system, connects image acquiring device, is suitable for identifying in described chip image input detection model, qualified to determine the chip corresponding to chip image.
2. chip vision detection system according to claim 1, is characterized in that: described chi frame comprises two row and to be in a parallel set installation position, often arranges on installation position and has the equal installation position of 5-7 spacing.
3. chip vision detection system according to claim 1, is characterized in that: described image detecting system is computing machine.
CN201521040926.XU 2015-12-14 2015-12-14 Chip vision detection system Expired - Fee Related CN205209987U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201521040926.XU CN205209987U (en) 2015-12-14 2015-12-14 Chip vision detection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201521040926.XU CN205209987U (en) 2015-12-14 2015-12-14 Chip vision detection system

Publications (1)

Publication Number Publication Date
CN205209987U true CN205209987U (en) 2016-05-04

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201521040926.XU Expired - Fee Related CN205209987U (en) 2015-12-14 2015-12-14 Chip vision detection system

Country Status (1)

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CN (1) CN205209987U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105448782A (en) * 2015-12-14 2016-03-30 重庆远创光电科技有限公司 Visual detection system for chip
CN111107324A (en) * 2019-12-31 2020-05-05 上海陛通半导体能源科技股份有限公司 Monitoring device and monitoring method of wafer transmission system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105448782A (en) * 2015-12-14 2016-03-30 重庆远创光电科技有限公司 Visual detection system for chip
CN105448782B (en) * 2015-12-14 2018-11-20 重庆远创光电科技有限公司 A kind of chip vision detection system
CN111107324A (en) * 2019-12-31 2020-05-05 上海陛通半导体能源科技股份有限公司 Monitoring device and monitoring method of wafer transmission system

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GR01 Patent grant
C14 Grant of patent or utility model
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160504

Termination date: 20181214

CF01 Termination of patent right due to non-payment of annual fee