CN105514009A - Chip carrying apparatus for chip visual detection - Google Patents

Chip carrying apparatus for chip visual detection Download PDF

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Publication number
CN105514009A
CN105514009A CN201510924530.XA CN201510924530A CN105514009A CN 105514009 A CN105514009 A CN 105514009A CN 201510924530 A CN201510924530 A CN 201510924530A CN 105514009 A CN105514009 A CN 105514009A
Authority
CN
China
Prior art keywords
chip
chi frame
guide
guide groove
track
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510924530.XA
Other languages
Chinese (zh)
Inventor
李志远
耿世慧
李熙春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chongqing Fivision Technology Co Ltd
Original Assignee
Chongqing Fivision Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chongqing Fivision Technology Co Ltd filed Critical Chongqing Fivision Technology Co Ltd
Priority to CN201510924530.XA priority Critical patent/CN105514009A/en
Publication of CN105514009A publication Critical patent/CN105514009A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Abstract

The invention provides a chip carrying apparatus for chip visual detection. The chip carrying apparatus comprises a track and a chip frame adapted to moving on the track, wherein the track comprises two steel rails in parallel arrangement, faces which are right opposite to the two steel rails are each provided with a guide groove, the two side edges of the chip frame are respectively embedded into the guide grooves of the two steel rails so as to realize movement on the track, the guide grooves are internally provided with one conveyor belt, a motor is arranged on the steel rails for driving the conveyor belt to perform cyclic motion, the two side edges of the chip frame are each fixedly connected with a plurality of guide wheels, the wheel surfaces of the guide wheels are in contact with the conveyor belt in the guide grooves, the guide wheels and the conveyor belt are made of rubber, the bottom portions of the two side edges of the chip frame, embedded in the guide grooves are also provided with a plurality of pulleys in contact with the guide grooves, and a plurality of through holes are also arranged in the end surface, where installation positions are disposed, of the chip frame. According to the invention, chip images can be obtained, and compared to a conventional manual detection mode in the prior art, the efficiency is higher.

Description

For the chip carrying device of chip vision-based detection
Technical field
The present invention relates to chip detection technical field, particularly relate to a kind of chip carrying device for chip vision-based detection.
Background technology
One of restriction China's development of computer and universal key technology are chips, and the development bottleneck of chip is manufacturing equipment and production technology.Can Godson popularize one of key factor on China's computer is exactly the production technology that China's manufacture of microchips must grasp chip.The technology that production technology relates to is a lot, and it is one of important content that the outward appearance wherein in chip manufacturing proces detects.The outward appearance detection system of current chip manufacture process is standard and the technology of American I NTEL and AMD substantially.China does not also have this type of chip outward appearance detection system a set of at present.Therefore China's self-developing chip outward appearance detection system is an extremely important project and engineering to China's chip manufacturing.
In existing chip manufacture process, the chip produced needs to carry out detecting to prevent chip defective or defective from coming into the market, and this operation is at present mainly by manually carrying out detecting.This mode of being undertaken detecting by experience, has following deficiency:
The first, the 4 second time of manual detection chip normal need, efficiency is not high;
The second, due to detection chip of manually bowing for a long time, cause brains to be fainted, eye fatigue, be easy to cause quality accident;
3rd, because manual detection station is worked hard, eye fatigue, a lot of employee is not for a long time in this station operating time, and station employee is exchanged frequently, causes quality not ensure.
Summary of the invention
The shortcoming of prior art in view of the above, the object of the present invention is to provide a kind of chip carrying device for chip vision-based detection, for solving problem lower by manual detection chip effect in prior art.
For achieving the above object and other relevant objects, the invention provides following technical scheme:
A kind of chip carrying device for chip vision-based detection, it is characterized in that: comprise track and the chi frame being suitable for movement in orbit, track comprises two rail be set in parallel, the face that two one steel rails are just right respectively offers a guide groove, the dual-side of described chi frame is embedded the movement realized in the guide groove of two one steel rails in orbit respectively, a conveyer belt is provided with in guide groove, conveyer belt shuttling movement is driven by arranging a motor on rail, the dual-side of chi frame is fixedly connected with some guide wheels respectively, and the wheel face of this guide wheel contacts with the conveyer belt in guide groove, this guide wheel and conveyer belt are made up of rubber, and be also provided with some pulleys in the bottom being embedded the chi frame dual-side in guide groove, and the wheel face of pulley contacts with guide groove, the chi frame end face at place, installation position is also provided with some through holes.
Preferably, installation position becomes the spread configuration of array on chi frame.
Preferably, chi frame comprises two row installation positions, the quantity often arranging installation position is 5-7.
Preferably, through hole is arranged between two row installation positions, and the quantity of through hole is identical with the quantity of the installation position often arranged.
As mentioned above, the present invention has following beneficial effect: in the application of reality, image acquiring device can be set above the track just right with installation position, chip on installation position is taken pictures, thus obtain image and judged the qualified detection of chip by image procossing, adopt the mode of artificial detection compared to existing technology, efficiency seems higher.
Accompanying drawing explanation
Fig. 1 is shown as a kind of schematic diagram of the chip carrying device for chip vision-based detection.
The one that Fig. 2 is shown as chi frame 2 implements structural representation.
Element numbers explanation
1 rail
11 guide grooves
2 chi frames
21 installation positions
22 through holes
3 guide wheels
4 pulleys
5 conveyer belts
6 motors
Embodiment
By particular specific embodiment, embodiments of the present invention are described below, person skilled in the art scholar the content disclosed by this specification can understand other advantages of the present invention and effect easily.
Refer to Fig. 1.Notice, structure, ratio, size etc. that this specification institute accompanying drawings illustrates, content all only in order to coordinate specification to disclose, understand for person skilled in the art scholar and read, and be not used to limit the enforceable qualifications of the present invention, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the present invention can produce and the object that can reach, still all should drop on disclosed technology contents and obtain in the scope that can contain.Simultaneously, quote in this specification as " on ", D score, "left", "right", " centre " and " one " etc. term, also only for ease of understanding of describing, and be not used to limit the enforceable scope of the present invention, the change of its relativeness or adjustment, under changing technology contents without essence, when being also considered as the enforceable category of the present invention.
Refer to Fig. 1, for a kind of schematic diagram of the chip carrying device for chip vision-based detection, as shown in the figure, this chip carrier mechanism comprises track and is suitable for the chi frame 2 of movement in orbit, track comprises two rail be set in parallel 1, the face that two one steel rails 1 are just right respectively offers a guide groove 11, the dual-side of described chi frame 2 is embedded the movement realized in the guide groove 11 of two one steel rails 1 in orbit respectively, a conveyer belt 5 is provided with in guide groove 11, conveyer belt 5 shuttling movement is driven by arranging a motor 6 on rail, the dual-side of chi frame 2 is fixedly connected with some guide wheels 3 respectively, and the wheel face of this guide wheel 3 contacts with the conveyer belt 5 in guide groove 11, this guide wheel 3 and conveyer belt 5 are made up of rubber, and be also provided with some pulleys 4 in the bottom of chi frame 2 dual-side be embedded in guide groove 11, and the wheel face of pulley 4 contacts with guide groove 11, chi frame 2 end face at place, installation position 21 is also provided with some through holes 22.
Chi frame can be made to move freely in orbit by said structure, and pass through the cooperation of guide wheel 3 and pulley 4, only need a motor 6 can complete the driving of chi frame, do not need large-scale transferring material, the cost of equipment can be saved, and by the cooperation between guide wheel 3 and conveyer belt 5, laser propagation effect can be made more stable.
In concrete enforcement, see Fig. 2, for the one of chi frame 2 implements structural representation, chi frame 2 can also be provided with some installation positions 21 for chip placement, the spread configuration of this some 21 one-tenth, installation positions array.Usually, chi frame 2 comprises two row installation positions 21, the quantity often arranging installation position 21 is 5-7, and wherein, described through hole 22 is arranged between two row installation positions 21, and the quantity of through hole 22 is identical with installation position 21 quantity often arranged.By this structure, chi frame 2 can be allowed to keep motion, and triggered by through hole 22 and take pictures thus in motion process, complete taking pictures of chip, thus avoid and allow chi frame 2 stop the situation of taking pictures, efficiency is higher always.
In concrete enforcement, chi frame 2 is also provided with some installation positions 21 for chip placement, the spread configuration of this some 21 one-tenth, installation positions array.
In the application of reality, image acquiring device can be set above the track just right with installation position 21, chip on installation position 21 is taken pictures, thus obtain image and judged the qualified detection of chip by image procossing, adopt the mode of artificial detection compared to existing technology, efficiency seems higher.So the present invention effectively overcomes various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Any person skilled in the art scholar all without prejudice under spirit of the present invention and category, can modify above-described embodiment or changes.Therefore, such as have in art usually know the knowledgeable do not depart from complete under disclosed spirit and technological thought all equivalence modify or change, must be contained by claim of the present invention.

Claims (4)

1. the chip carrying device for chip vision-based detection, it is characterized in that: comprise track and the chi frame (2) being suitable for movement in orbit, track comprises two rail be set in parallel (1), the face that two one steel rails (1) are just right respectively offers a guide groove (11), the dual-side of described chi frame (2) is embedded the movement realized in the guide groove (11) of two one steel rails (1) in orbit respectively, a conveyer belt (5) is provided with in guide groove (11), conveyer belt (5) shuttling movement is driven by arranging a motor (6) on rail, the dual-side of chi frame (2) is fixedly connected with some guide wheels (3) respectively, and the wheel face of this guide wheel (3) contacts with the conveyer belt (5) in guide groove (11), this guide wheel (3) and conveyer belt (5) are made up of rubber, and be also provided with some pulleys (4) in the bottom being embedded chi frame (2) dual-side in guide groove (11), and the wheel face of pulley (4) contacts with guide groove (11), chi frame (2) end face at installation position (21) place is also provided with some through holes (22).
2. the chip carrying device for chip vision-based detection according to claim 1, is characterized in that: installation position (21) become the spread configuration of array on chi frame (2).
3. the chip carrying device for chip vision-based detection according to claim 2, is characterized in that: on chi frame (2), comprise two row installation positions (21), and the quantity often arranging installation position (21) is 5-7.
4. the chip carrying device for chip vision-based detection according to claim 3, it is characterized in that: through hole (22) is arranged between two row installation positions (21), and the quantity of through hole (22) is identical with the quantity of the installation position often arranged (21).
CN201510924530.XA 2015-12-14 2015-12-14 Chip carrying apparatus for chip visual detection Pending CN105514009A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510924530.XA CN105514009A (en) 2015-12-14 2015-12-14 Chip carrying apparatus for chip visual detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510924530.XA CN105514009A (en) 2015-12-14 2015-12-14 Chip carrying apparatus for chip visual detection

Publications (1)

Publication Number Publication Date
CN105514009A true CN105514009A (en) 2016-04-20

Family

ID=55721891

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510924530.XA Pending CN105514009A (en) 2015-12-14 2015-12-14 Chip carrying apparatus for chip visual detection

Country Status (1)

Country Link
CN (1) CN105514009A (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1811337A (en) * 2005-01-28 2006-08-02 雅马哈发动机株式会社 Checking result informing device
WO2010019980A1 (en) * 2008-08-19 2010-02-25 Silverbrook Research Pty Ltd Measuring apparatus for performing positional analysis on an integrated circuit carrier
CN102470688A (en) * 2009-07-09 2012-05-23 联邦印刷厂有限公司 Method and APPARATUS FOR PRODUCING AN INLAY FOR A FILM COMPOSITE, AND FILM COMPOSITE WITH INLAY
CN203299135U (en) * 2013-06-14 2013-11-20 章斌 Circuit board detection device
CN103743746A (en) * 2013-12-23 2014-04-23 特新微电子(东莞)有限公司 Inspection machine of printed circuit board
CN204206630U (en) * 2014-07-30 2015-03-11 上海儒竞电子科技有限公司 A kind of chip mounter
CN204675335U (en) * 2015-04-30 2015-09-30 上海儒竞电子科技有限公司 A kind of conveyer of material
CN205879815U (en) * 2015-12-14 2017-01-11 重庆远创光电科技有限公司 A chip shiies device for chip visual detection

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1811337A (en) * 2005-01-28 2006-08-02 雅马哈发动机株式会社 Checking result informing device
WO2010019980A1 (en) * 2008-08-19 2010-02-25 Silverbrook Research Pty Ltd Measuring apparatus for performing positional analysis on an integrated circuit carrier
CN102470688A (en) * 2009-07-09 2012-05-23 联邦印刷厂有限公司 Method and APPARATUS FOR PRODUCING AN INLAY FOR A FILM COMPOSITE, AND FILM COMPOSITE WITH INLAY
CN203299135U (en) * 2013-06-14 2013-11-20 章斌 Circuit board detection device
CN103743746A (en) * 2013-12-23 2014-04-23 特新微电子(东莞)有限公司 Inspection machine of printed circuit board
CN204206630U (en) * 2014-07-30 2015-03-11 上海儒竞电子科技有限公司 A kind of chip mounter
CN204675335U (en) * 2015-04-30 2015-09-30 上海儒竞电子科技有限公司 A kind of conveyer of material
CN205879815U (en) * 2015-12-14 2017-01-11 重庆远创光电科技有限公司 A chip shiies device for chip visual detection

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Application publication date: 20160420

RJ01 Rejection of invention patent application after publication