CN205484078U

CN205484078U - Chip image acquisition device

Info

Publication number: CN205484078U
Application number: CN201521031384.XU
Authority: CN
Inventors: 李志远; 耿世慧; 李熙春
Original assignee: Chongqing Future Innovation Vision Technology Co ltd
Current assignee: Chongqing Future Innovation Vision Technology Co ltd
Priority date: 2015-12-14
Filing date: 2015-12-14
Publication date: 2016-08-17
Anticipated expiration: 2025-12-14

Abstract

The utility model provides a chip image acquisition device, include: the guide rail is suitable for to provide and removes the route, chip frame, including the installation position that the chip was placed in a plurality of confessions, the installation position is array alignment and sets up, is suitable for the chip that moves in order will place on installing the position on the removal route that the guide rail provided to transport to presetting the position, the motion camera sets up directly over the guide rail, is suitable for when chip frame stops to predetermine the position to shoot to the chip on the installation position along predetermineeing the route, acquires the image that obtains the chip and exports, can realize acquireing fast of image through this kind of structure, and efficiency is high, provides the basis for subsequent image detection.

Description

Chip image acquisition device

Technical field

This utility model relates to the use of image to carry out the technical field of chip detection, particularly relates to a kind of chip image and obtains dress Put.

Background technology

One of restriction China's development of computer and universal key technology are chips, and the development bottleneck of chip is manufacture equipment and production Technique.Can Godson popularize the life that one of key factor on China's computer is exactly China's manufacture of microchips and must grasp chip Production. art.The technology that production technology relates to is a lot, and wherein the detection of the outward appearance in chip manufacturing proces is one of important content.At present The outward appearance detecting system of chip manufacturing proces is substantially American I NTEL and the standard of AMD and technology.China does not the most also have There is this type of chip outward appearance detecting system a set of.Therefore China's self-developing chip outward appearance detecting system is to be one to China's chip manufacturing The extremely important project of item and engineering.

In existing production process, or the quality of chip is detected by the main mode using manual detection, how to carry Image detection is carried out, with regard to the problem having become those skilled in the art to need to solve for a kind of effective image detection auxiliary device.

Utility model content

The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of chip image acquisition device, suitable In the problem solving to need in prior art manually to come chip is detected.

For achieving the above object and other relevant purposes, this utility model provides techniques below scheme:

A kind of chip image acquisition device, including: guide rail, it is adapted to provide for mobile route；Chi frame, including multiple for placing The installation position of chip, described installation position is array spread configuration, is suitable to move being placed on the mobile route that guide rail provides Chip on installation position is transported to predeterminated position；Motion camera, is arranged on the surface of guide rail, is suitable to stop at chi frame Along preset path, the chip on installation position is taken pictures during predeterminated position, acquire the image of chip and exported.

Preferably, guide rail is provided with the sensor for monitoring chi frame mobile status, including being adapted to detect for whether having chip frame Frame enters the first sensor of guide rail, is arranged on the guide rail one end at place when chi frame enters mobile route；Be suitable to flip chip Framework makees the second sensor of retarded motion, is arranged on the mobile road before chi frame arrives described predeterminated position according to setting position On footpath；It is adapted to detect for chi frame and reaches the 3rd sensor of described predeterminated position, be arranged on the guide rail at predeterminated position place.

Preferably, it is provided with a stopper in predetermined position.

Preferably, described installation position is divided into two row on chi frame, and each column has 5 equal installation positions of spacing.

As it has been described above, this utility model has the advantages that this utility model is by being arranged on chip on chi frame It is fixed, and then recycling camera carries out motion and takes pictures, and obtains chip image with this, can realize figure by this structure The quick obtaining of picture, ultrahigh in efficiency, provide the foundation for follow-up image detection.

Accompanying drawing explanation

Fig. 1 is shown as the schematic diagram of a kind of chip image acquisition device.

Drawing reference numeral explanation

1 guide rail

2 chi frames

21 installation positions

3 motion cameras

4 predeterminated positions

5 first sensors

6 second sensors

7 the 3rd sensors

8 stoppers

Detailed description of the invention

By particular specific embodiment, embodiment of the present utility model being described below, those skilled in the art can be by this specification Disclosed content understands other advantages of the present utility model and effect easily.

It should be clear that structure depicted in this specification institute accompanying drawings, ratio, size etc., the most only in order to coordinate disclosed in description Content, understands for those skilled in the art and reads, being not limited to the enforceable qualifications of this utility model, therefore Do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size, do not affecting this practicality Under novel effect that can be generated by and the purpose that can reach, all should still fall and obtain can contain at the technology contents disclosed in this utility model In the range of lid.Meanwhile, in this specification cited as " on ", D score, "left", "right", " middle " and The term of " one " etc., is merely convenient to understanding of narration, and is not used to limit the enforceable scope of this utility model, and it is relative Being altered or modified of relation, is changing under technology contents without essence, when being also considered as the enforceable category of this utility model.

Referring to Fig. 1, this utility model provides a kind of chip image acquisition device, and such as Fig. 1, this chip image obtains dress Put and include: guide rail 1, be adapted to provide for mobile route；Chi frame 2, including multiple installation positions 21 for chip placement, described Installation position 21, in array spread configuration, is suitable to move being placed on installation position 21 on the mobile route that guide rail 1 provides Chip is transported to predeterminated position 4；Motion camera 3, is arranged on the surface of guide rail 1, is suitable to stop at default at chi frame 2 Along preset path, the chip on installation position 21 is taken pictures during position 4, acquire the image of chip and exported.

In being embodied as, in conjunction with Fig. 1, guide rail 1 is provided with the sensor for monitoring chi frame 2 mobile status, including It is adapted to detect for the first sensor 5 whether having chi frame 2 to enter guide rail 1, is arranged on chi frame 2 when entering mobile route Guide rail 1 one end at place；Be suitable to flip chip framework 2 and make the second sensor 6 of retarded motion, be arranged on according to setting position Chi frame 2 arrives on the mobile route before described predeterminated position 4；It is adapted to detect for chi frame 2 and reaches described predeterminated position 4 The 3rd sensor 7, be arranged on the guide rail 1 at predeterminated position 4 place.

In being embodied as, in conjunction with Fig. 1, at predeterminated position 4, it is provided with a stopper 7.It is used for entering chi frame 2 Shi Shengqi, and fall after motion camera 3 completes to take pictures, make chi frame 2 remove, to enter next chip image acquisition stream Journey.

In being embodied as, described installation position 21 is divided into two row on chi frame 2, and each column has 5 equal installations of spacing Position 21, this set efficiency of taking pictures is higher.

In sum, this utility model is fixed by being arranged on by chip on chi frame 2, and then recycling camera enters Row motion is taken pictures, and obtains chip image with this, can be realized the quick obtaining of image by this structure, ultrahigh in efficiency, for Follow-up image detection provides the foundation.So, this utility model effectively overcomes various shortcoming of the prior art and has height Industrial utilization.

Above-described embodiment only illustrative principle of the present utility model and effect thereof, rather than be suitable to limit this utility model.Any Above-described embodiment all can be modified under spirit and the scope of the present utility model or change by those skilled in the art. Therefore, such as art has usually intellectual without departing from the spirit disclosed in this utility model with under technological thought All equivalences completed are modified or change, and must be contained by claim of the present utility model.

Claims

1. a chip image acquisition device, including:

Guide rail, is adapted to provide for mobile route；

Chi frame, is suitable to move on the mobile route that guide rail provides；

It is characterized in that: described chi frame includes multiple installation position for chip placement, and described installation position is array spread configuration, is suitable to the chip being placed on installation position is transported to predeterminated position；

Motion camera, is arranged on the surface of guide rail, is suitable to take pictures the chip on installation position along preset path when chi frame stops at predeterminated position, acquires the image of chip and exported.

Chip image acquisition device the most according to claim 1, it is characterised in that: on guide rail, it is provided with the sensor for monitoring chi frame mobile status, including:

It is adapted to detect for the first sensor whether having chi frame to enter guide rail, is arranged on the guide rail one end at place when chi frame enters mobile route；

Be suitable to flip chip framework and make the second sensor of retarded motion, be arranged on the mobile route before chi frame arrives described predeterminated position according to setting position；

It is adapted to detect for chi frame and reaches the 3rd sensor of described predeterminated position, be arranged on the guide rail at predeterminated position place.

Chip image acquisition device the most according to claim 1, it is characterised in that: it is provided with a stopper in predetermined position.

Chip image acquisition device the most according to claim 1, it is characterised in that: described installation position is divided into two row on chi frame, and each column has 5 equal installation positions of spacing.