CN105328560A - 双面研磨工艺 - Google Patents
双面研磨工艺 Download PDFInfo
- Publication number
- CN105328560A CN105328560A CN201510611579.XA CN201510611579A CN105328560A CN 105328560 A CN105328560 A CN 105328560A CN 201510611579 A CN201510611579 A CN 201510611579A CN 105328560 A CN105328560 A CN 105328560A
- Authority
- CN
- China
- Prior art keywords
- grinding
- groove
- chip area
- plate
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510611579.XA CN105328560B (zh) | 2015-09-22 | 2015-09-22 | 双面研磨工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510611579.XA CN105328560B (zh) | 2015-09-22 | 2015-09-22 | 双面研磨工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105328560A true CN105328560A (zh) | 2016-02-17 |
CN105328560B CN105328560B (zh) | 2017-02-01 |
Family
ID=55279428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510611579.XA Active CN105328560B (zh) | 2015-09-22 | 2015-09-22 | 双面研磨工艺 |
Country Status (1)
Country | Link |
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CN (1) | CN105328560B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109202696A (zh) * | 2018-09-10 | 2019-01-15 | 台山市远鹏研磨科技有限公司 | 一种金刚石陶瓷减薄垫 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59232768A (ja) * | 1983-06-16 | 1984-12-27 | Kanebo Ltd | 平面研磨装置 |
US6797623B2 (en) * | 2000-03-09 | 2004-09-28 | Sony Corporation | Methods of producing and polishing semiconductor device and polishing apparatus |
US20110256803A1 (en) * | 2010-03-18 | 2011-10-20 | Boutaghou Llc | Fluidized web polishing apparatus and method using contact pressure feedback |
CN103192325A (zh) * | 2013-04-10 | 2013-07-10 | 大连理工大学 | 一种内冷却固结磨料研磨盘 |
CN203527234U (zh) * | 2013-11-18 | 2014-04-09 | 北京安泰钢研超硬材料制品有限责任公司 | 一种双面减薄陶瓷基金刚石研磨盘 |
CN203611119U (zh) * | 2013-12-05 | 2014-05-28 | 南京航空航天大学 | 球面工件研磨抛光用固结磨料垫 |
CN203665306U (zh) * | 2013-10-31 | 2014-06-25 | 重庆晶宇光电科技有限公司 | 晶片研磨盘 |
-
2015
- 2015-09-22 CN CN201510611579.XA patent/CN105328560B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59232768A (ja) * | 1983-06-16 | 1984-12-27 | Kanebo Ltd | 平面研磨装置 |
US6797623B2 (en) * | 2000-03-09 | 2004-09-28 | Sony Corporation | Methods of producing and polishing semiconductor device and polishing apparatus |
US20110256803A1 (en) * | 2010-03-18 | 2011-10-20 | Boutaghou Llc | Fluidized web polishing apparatus and method using contact pressure feedback |
CN103192325A (zh) * | 2013-04-10 | 2013-07-10 | 大连理工大学 | 一种内冷却固结磨料研磨盘 |
CN203665306U (zh) * | 2013-10-31 | 2014-06-25 | 重庆晶宇光电科技有限公司 | 晶片研磨盘 |
CN203527234U (zh) * | 2013-11-18 | 2014-04-09 | 北京安泰钢研超硬材料制品有限责任公司 | 一种双面减薄陶瓷基金刚石研磨盘 |
CN203611119U (zh) * | 2013-12-05 | 2014-05-28 | 南京航空航天大学 | 球面工件研磨抛光用固结磨料垫 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109202696A (zh) * | 2018-09-10 | 2019-01-15 | 台山市远鹏研磨科技有限公司 | 一种金刚石陶瓷减薄垫 |
Also Published As
Publication number | Publication date |
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CN105328560B (zh) | 2017-02-01 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20161129 Address after: Dalang town rhino Po Cun West 523000 Guangdong beauty city of Dongguan province No. 639 Applicant after: Dongguan Changying Precision Technology Co. Ltd. Address before: Industrial Songshan Lake high tech Industrial Development Zone, West three road 523808 Guangdong city of Dongguan province No. 6 Applicant before: Guangdong Changying Precision Technology Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Dalang town rhino Po Cun West 523000 Guangdong beauty city of Dongguan province No. 639 Patentee after: Dongguan Changying Precision Technology Co. Ltd. Address before: Dalang town rhino Po Cun West 523000 Guangdong beauty city of Dongguan province No. 639 Patentee before: Dongguan Changying Precision Technology Co. Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190730 Address after: 523799 639 Meijing West Road, Rhinopi Industrial Zone, Dalang Town, Dongguan City, Guangdong Province Co-patentee after: Guangdong Changying Precision Technology Co., Ltd. Patentee after: Dongguan Changying Precision Technology Co. Ltd. Address before: Dalang town rhino Po Cun West 523000 Guangdong beauty city of Dongguan province No. 639 Patentee before: Dongguan Changying Precision Technology Co. Ltd. |