CN105318985B - A kind of device and method by reflected light relative intensity measure body surface temperature - Google Patents

A kind of device and method by reflected light relative intensity measure body surface temperature Download PDF

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Publication number
CN105318985B
CN105318985B CN201510916533.9A CN201510916533A CN105318985B CN 105318985 B CN105318985 B CN 105318985B CN 201510916533 A CN201510916533 A CN 201510916533A CN 105318985 B CN105318985 B CN 105318985B
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lens
light
reflected light
under test
object under
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CN105318985A (en
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吕毅军
党思佳
肖瑶
高玉琳
朱丽虹
陈国龙
郭自泉
林岳
陈忠
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Xiamen University
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Xiamen University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/006Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on microwaves or longer electromagnetic waves, e.g. measuring temperature via microwaves emitted by the object

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Radiation Pyrometers (AREA)

Abstract

A kind of device and method by reflected light relative intensity measure body surface temperature, is related to body surface temperature testing method.Device is equipped with current source, infrared LED light source, lens, chopper, spectrometer, photomultiplier, lock-in amplifier, voltmeter, computer, thermostat, optical fiber;Object under test is connected with thermostat and the second current source respectively, infrared radiation source is connected with the first current source, first lens are arranged between infrared light supply and chopper, second lens are arranged on above chopper, the light that infrared light supply dissipates is collected and is changed into direct current light by chopper to exchange light by the first lens, the reference signal output termination lock-in amplifier of chopper, the collection illumination of second lens is mapped to object under test surface, separately reflected light is collected and is converged through the 3rd lens, spectrometer collects the converged light of the 3rd lens, spectrometer connects photomultiplier, photomultiplier connects lock-in amplifier, lock-in amplifier connects voltmeter, voltmeter connects computer input port.

Description

A kind of device and method by reflected light relative intensity measure body surface temperature
Technical field
The present invention relates to body surface temperature testing method, passes through reflected light relative intensity measure thing more particularly, to one kind The device and method of body surface temperature.
Background technology
The measuring method of temperature is very much, can be divided into contact and contactless according to measurement method.By temperature-measurement principle and The influence of technology, the temperature-measuring range of contact type thermometric indicator is relatively narrow, and precision is poor.According to the principle of contactless temperature-measuring method into The method of row thermometric has infrared thermal imaging technique etc..Infrared imagery technique is detection device due to the signal of blackbody radiation emission. But using infrared thermal imaging technique when, due to silicon materials to it is infrared be it is transparent, can not observe;Due to the radiative chain of metal Number is very low, therefore the signal-to-noise ratio of test can be caused very low.
The junction temperature test of light emitting diode (LED) is the difficult point of current LED measuring technologies, since LED surface is covered with envelope Lens are filled, can not be tested with the method directly contacted, mainly have forward voltage drop method, light currently for the measuring method of LED junction temperature Spectrometry, indigo plant Bai Bifa, infrared thermography etc..It is forward voltage drop method wherein using most common method, utilizes LED both end voltages Junction temperature test is carried out with the relation that temperature linearly changes, but its measuring accuracy is subject to be cut to test low current by heating high current The limitation of throw-over degree.It is general to be difficult due to many restrictions of its lamp outer casing material etc. for the lamps and lanterns finished product after encapsulation Realize the drop measurement on each LED pins.Spectroscopic methodology is to measure LED junction temperature with the drift relation of junction temperature by peak wavelength ([1]Y.Xi,J.Q.Xi,T.Gessmann,J.M.Shah,J.K.Kim,E.F.Schubert,A.J.Fischer, M.H.Crawford,K.H.A.Bogart,and A.A.Allerman,"Junction and carrier temperature measurements in deep-ultraviolet light-emitting diodes using three different methods,"Appl.Phys.Lett.,vol.86,no.3,pp.031907,Jan.2005.).The shortcomings that this method is spectrum Peak wavelength change is small, causes substantial measurement errors larger.Liu Liming etc. becomes also by LED peak wavelengths with Injection Current size Change relation measurement junction temperature (measurement [J] photon journals of [2] Liu Liming, Zheng Xiao east .LED junction temperatures and spectral characteristic relation, 2009(38):1069-1073.).Blue Bai Bifa belongs to non-contact method, and cardinal principle is the rise with junction temperature, chip Shine and the luminescence generated by light of fluorescent powder declines at the same time, but the decline of fluorescent powder is rapider, so that blue white light in white-light spectrum Ratio change.The shortcomings that this method is measurement ([3] the Y.M.Gu and for being difficult to realize monochromatic LED junction temperature N.Narendran,"A non-contact method for determining junction temperature of phosphor-converted white LEDs,"in Proc.3rd Int.Conf.Solid State Lighting,San Diego.,CA,2003,vol.5187,pp.107-114.).Lin etc. have studied centroid wavelength and halfwidth based on its definition To measure the method for LED junction temperature ([4] Y.Lin, Y.L.Gao, Y.J.Lu, L.H.Zhu, Y.Zhang and Z.Chen, " Study of temperature sensitive optical parameters and junction temperature determination of light-emitting diodes,”Appl.Phys.Lett.,vol.100,pp.202108, May.2012.).These contactless measurements avoid the influence to equipment normal work, but it is equally existed to instrument Required precision is high, and there are the shortcomings that large error.Infrared thermography is the common junction temperature distribution measurement method of semiconductor devices, The measurement of junction temperature is difficult to realize to packaged LED.
The content of the invention
It is an object of the invention to provide a kind of device by reflected light relative intensity measure body surface temperature.
Another object of the present invention is to provide a kind of method by reflected light relative intensity measure body surface temperature.
Device of the present invention by reflected light relative intensity measure body surface temperature is equipped with the first current source, infrared LED light source, the first lens, chopper, the second lens, the 3rd lens, spectrometer, photomultiplier, lock-in amplifier, voltage Table, computer, thermostat, the second current source, optical fiber;
Object under test is connected with thermostat and the second current source respectively, and the second current source provides electric current for object under test;It is red Outer LED light source is connected with the first current source, and the first lens are arranged between infrared LED light source and chopper, and the second lens are arranged on and cut Above ripple device, the light that infrared LED light source dissipates is collected and is changed into direct current light by chopper to exchange light by the first lens Line, the reference signal output termination lock-in amplifier of chopper, the collection light of the second lens is irradiated to be measured all the way by optical fiber Body surface, another way converge the 3rd lens that reflected light is gathered and passed through being arranged on above spectrometer, and spectrometer collects the 3rd The converged light of lens, the input terminal of the output termination photomultiplier of spectrometer, the output termination lock of photomultiplier mutually amplify The input terminal of device, the output termination voltmeter of lock-in amplifier, the input port of the output termination computer of voltmeter.
The method by reflected light relative intensity measure body surface temperature, using described relatively strong by reflected light The device of degree measurement body surface temperature, the described method comprises the following steps:
1) one group of invalid temperature for being less than object under test is selected, is denoted as T0、T1…TN, the suitable electric current of reselection is light source Power supply;
2) object under test is fixed, the temperature of object under test is maintained T by thermostat0, light source igniting is collected into be measured The intensity of reflected light of object simultaneously preserves data;
3) thermostat is adjusted, the temperature for changing thermostat successively is T1…TN, repetitive operation step 2), obtains each temperature Intensity of reflected light under point;
4) fitting obtains the functional relation of object under test surface temperature and intensity of reflected light;
5) object under test intensity of reflected light is measured, substitutes into the functional relation in step 4), you can try to achieve determinand instantly The surface temperature of body.
The principle that the present invention is changed using the reflectivity of material with temperature change is come test surfaces Temperature Distribution.With it is red Outer thermal imaging is compared using infrared band, advantage of the invention is that can be tested using visible ray, shorter ripple Length can improve the spatial resolution of an order of magnitude, and the spatial resolution of higher can more accurately test device under test Peak temperature.And its internal chip temperature can be tested to the LED component of such as transparent enclosure.Mutually put using lock in the present invention Big device can also avoid due to interference of the object under test self-luminous to reflected light and greatly improve signal-to-noise ratio.
The present invention provides a kind of contactless method to measure body surface temperature.Using intensity of reflected light with object table The principle of face temperature change, irradiates object under test by light source, collects the reflected light of the object when surface temperature is different, obtains temperature Degree and the relation of intensity of reflected light.And then utilize body surface intensity of reflected light under the relation test actual operating conditions, you can Obtain body surface temperature.Mutually being measured using lock can also avoid due to interference of the object under test self-luminous to reflected light.The present invention It is also applied for the surface temperature of measurement transparent enclosure inside chip.Select the light source of specific wavelength, you can realize to plastics, resin Do not raise one's hat test Deng encapsulation object.
Advantage of the present invention is as follows:
1. non-contact measurement.The small and fragile object for surface area, such as LED bare chips, avoid direct contact Experimental cost has been saved in the danger of measurement damage chip.
2. as long as object under test can easily be heated with reflection light, you can using present invention measurement body surface temperature, purposes Extensively.It is suitable for the surface temperature of measurement transparent enclosure inside chip, and can avoid due to object under test self-luminous Interference to reflected light.
Brief description of the drawings
Fig. 1 is the device embodiment structure composition of the present invention by reflected light relative intensity measure body surface temperature Figure.
Fig. 2 is blue-ray LED of embodiment of the present invention temperature control-reflected light relative intensity relation curve.
Fig. 3 is electric current added by blue-ray LED of the embodiment of the present invention-reflected light relative intensity relation curve.
Embodiment
Following embodiments will the present invention is described in detail with reference to attached drawing:It is red using blue-ray LED bare chip as object under test Light LED is excitation source.
Referring to Fig. 1, the device embodiment of the present invention by reflected light relative intensity measure body surface temperature is equipped with First current source 1, infrared LED light source 2, the first lens 3, chopper 4, the second lens 5, the 3rd lens 6, spectrometer 7, photoelectricity times Increase pipe 8, lock-in amplifier 9, voltmeter 10, computer 11, thermostat 12, the second current source 13, optical fiber 15.
Object under test 14 is connected with 12 and second current source 13 of thermostat respectively, and the second current source 13 carries for object under test 14 For electric current;Infrared LED light source 2 is connected with the first current source 1, and the first lens 3 are arranged between infrared LED light source 2 and chopper 4, Second lens 5 are arranged on the top of chopper 4, and the light that infrared LED light source 2 dissipates is collected and will by chopper 4 by the first lens 3 Direct current light is changed into exchanging light, the reference signal output termination lock-in amplifier 9 of chopper 4, and the collection light of the second lens 5 leads to Cross 15 1 tunnel of optical fiber and be irradiated to 14 surface of object under test, reflected light is gathered and passed through being arranged on the of the top of spectrometer 7 by another way Three lens 6 converge, and spectrometer 7 collects the converged light of the 3rd lens 6, the input of the output termination photomultiplier 8 of spectrometer 7 End, the input terminal of the output termination lock-in amplifier 9 of photomultiplier 8, the output termination voltmeter 10 of lock-in amplifier 9, electricity Press the input port of the output termination computer 11 of table 10.
The method by reflected light relative intensity measure body surface temperature, using described relatively strong by reflected light The device of degree measurement body surface temperature, the described method comprises the following steps:
(1) blue-ray LED bare chip sample is fixed, thermostat maintains 30 DEG C, does not light.By red-light LED light source at two Light.Spectrometer is collected into reflectance spectrum and is preserved by computer at this time.
(2) thermostat is adjusted, it is 40 DEG C, 50 DEG C, 60 DEG C, 70 DEG C, 80 DEG C to change control temperature successively, repeat step (1), Obtain 30 DEG C, 40 DEG C, 50 DEG C, 60 DEG C, 70 DEG C, the reflected spectrum data under 80 DEG C of 6 temperature spots.
(3) fitting data obtains the relation of blue-ray LED bare chip sample surface temperature and reflectance spectrum power, and obtains line Property functional relation.
(4) it is 30 DEG C to maintain thermostat, changes the second current source current size, measures distinguish in blue-ray LED electric current successively For the reflected light data under 0A, 0.3A, 0.6A, 0.9A, 1.2A, 1.5A.
(5) intensity reflected light values obtained in step (4) are substituted into step (3) respectively in obtained function, obtained Under each electric current, the surface temperature of blue-ray LED.
(6) temperature of the blue-ray LED when electric current is 0A, 0.3A, 0.6A, 0.9A, 1.2A, 1.5A is measured with thermocouple, with The temperature being calculated in step (5) is made comparisons, and the results are shown in Table 1, and by table 1 as it can be seen that both are sufficiently close to, error is smaller, Confirm the reliability of the present invention.
For blue-ray LED temperature control-reflected light relative intensity relation curve referring to Fig. 2, electric current-reflected light added by blue-ray LED is opposite Strength relationship curve is referring to Fig. 3.
Table 1
Electric current (A) 0 0.3 0.6 0.9 1.2 1.5
The temperature (DEG C) that the present invention measures 30.9 49.3 72.3 82.4 96.1 110.2
The temperature (DEG C) of thermocouple measurement 32.5 46.5 60.0 82.1 97.1 105.0
Table 1 for blue-ray LED of the embodiment of the present invention, with thermocouple survey by the surface temperature obtained by calculation under different electric currents The contrast of the surface temperature measured.

Claims (2)

1. pass through the device of reflected light relative intensity measure body surface temperature, it is characterised in that equipped with the first current source, infrared LED light source, the first lens, chopper, the second lens, the 3rd lens, spectrometer, photomultiplier, lock-in amplifier, voltage Table, computer, thermostat, the second current source, optical fiber;
Object under test is connected with thermostat and the second current source respectively, and the second current source provides electric current for object under test;Infrared LED Light source is connected with the first current source, and the first lens are arranged between infrared LED light source and chopper, and the second lens are arranged on chopper The light that infrared LED light source dissipates is collected and is changed into direct current light by chopper to exchange light, copped wave by side, the first lens The reference signal output termination lock-in amplifier of device, the collection light of the second lens are irradiated to determinand body surface by optical fiber all the way Face, another way converge the 3rd lens that reflected light is gathered and passed through being arranged on above spectrometer, and spectrometer collects the 3rd lens Converged light, the input terminal of the output termination photomultiplier of spectrometer, the output of photomultiplier terminate the defeated of lock-in amplifier Enter end, the output termination voltmeter of lock-in amplifier, the input port of the output termination computer of voltmeter.
2. pass through the method for reflected light relative intensity measure body surface temperature, it is characterised in that using as claimed in claim 1 By the device of reflected light relative intensity measure body surface temperature, the described method comprises the following steps:
1) one group of invalid temperature for being less than object under test is selected, is denoted as T0、T1…TN, the suitable electric current of reselection is light source power supply;
2) object under test is fixed, the temperature of object under test is maintained T by thermostat0, by light source igniting, it is collected into object under test Intensity of reflected light and preserve data;
3) thermostat is adjusted, the temperature for changing thermostat successively is T1…TN, repetitive operation step 2), obtains under each temperature spot Intensity of reflected light;
4) fitting obtains the functional relation of object under test surface temperature and intensity of reflected light;
5) object under test intensity of reflected light is measured, substitutes into the functional relation in step 4), you can tries to achieve object under test instantly Surface temperature.
CN201510916533.9A 2015-12-10 2015-12-10 A kind of device and method by reflected light relative intensity measure body surface temperature Expired - Fee Related CN105318985B (en)

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CN106872068B (en) * 2016-12-19 2019-06-07 中北大学 The real-time measurement apparatus of surface temperature during a kind of Damage of Optical Film
CN106872069B (en) * 2016-12-19 2019-06-04 中北大学 The method for real-time measurement of surface temperature during a kind of Damage of Optical Film
CN115291071B (en) * 2022-08-01 2024-05-28 厦门大学 LED array photo-thermal integrated detection device and method based on lock-in amplifier

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CN103759853A (en) * 2011-12-30 2014-04-30 上海华魏光纤传感技术有限公司 Probe device of semiconductor optical fiber temperature sensor
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