CN109060164B - Light-emitting device temperature distribution measurement device and measurement method based on micro-hyperspectral - Google Patents

Light-emitting device temperature distribution measurement device and measurement method based on micro-hyperspectral Download PDF

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CN109060164B
CN109060164B CN201811113037.XA CN201811113037A CN109060164B CN 109060164 B CN109060164 B CN 109060164B CN 201811113037 A CN201811113037 A CN 201811113037A CN 109060164 B CN109060164 B CN 109060164B
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hyperspectral
power supply
temperature control
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CN109060164A (en
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吕毅军
金剑
徐云鑫
高玉琳
朱丽虹
郭自泉
林岳
陈国龙
陈忠
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Xiamen University
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    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Abstract

基于显微高光谱的发光器件温度分布测量装置及测量方法,属于测试发光器件温度分布领域,包括控温台、驱动电源、控温电源、显微镜、高光谱仪和计算机;设置样品的初始温度,用驱动电源选择脉冲信号驱动样品;调节控温电源,改变控温台的温度,高光谱仪采集对应的温度点下样品的高光谱数据;计算机根据高光谱数据计算二维温度敏感系数矩阵;驱动电源调至恒压或恒流模式,用高光谱仪采集样品的高光谱数据;计算机用恒压或恒流模式下的高光谱数据计算质心波长,结合二维温度敏感系数矩阵得出样品表面二维温度分布;可以得到发光器件表面各个像素点的光谱图像,从而精确得出发光器件表面二维温度分布图,直观体现其表面温度变化趋势。

A light-emitting device temperature distribution measurement device and measurement method based on micro-hyperspectrum belongs to the field of testing the temperature distribution of light-emitting devices, including a temperature control platform, a driving power supply, a temperature control power supply, a microscope, a hyperspectral instrument and a computer; the initial temperature of a sample is set, and the The driving power supply selects the pulse signal to drive the sample; adjust the temperature control power supply, change the temperature of the temperature control platform, and the hyperspectral instrument collects the hyperspectral data of the sample at the corresponding temperature point; the computer calculates the two-dimensional temperature sensitivity coefficient matrix according to the hyperspectral data; To the constant voltage or constant current mode, use the hyperspectral instrument to collect the hyperspectral data of the sample; the computer uses the hyperspectral data under the constant voltage or constant current mode to calculate the centroid wavelength, and combine the two-dimensional temperature sensitivity coefficient matrix to obtain the two-dimensional temperature distribution of the sample surface ; The spectral image of each pixel on the surface of the light-emitting device can be obtained, so as to accurately obtain the two-dimensional temperature distribution map of the surface of the light-emitting device, and intuitively reflect the trend of its surface temperature change.

Description

基于显微高光谱的发光器件温度分布测量装置及测量方法Light-emitting device temperature distribution measurement device and measurement method based on micro-hyperspectral

技术领域technical field

本发明属于测试发光器件温度分布的领域,尤其涉及基于显微高光谱的发光器件温度分布测量装置及测量方法。The invention belongs to the field of testing the temperature distribution of light-emitting devices, in particular to a measuring device and method for measuring the temperature distribution of light-emitting devices based on microscopic hyperspectral.

背景技术Background technique

在21世纪的能源经济时代,发光器件如半导体发光二极管(LED),因其体积小、寿命长、响应速度快等优点被广泛使用在日常生活、电子科技、军事等诸多领域。LED将电能转化为光能,但是由于60%~70%的电能会转化为热能,若大量的热散不出去,会导致结温过高,严重影响LED的使用寿命。因此对LED结温的研究,具有深远的意义。In the era of energy economy in the 21st century, light-emitting devices such as semiconductor light-emitting diodes (LEDs) are widely used in many fields such as daily life, electronic technology, and military affairs because of their small size, long life, and fast response. LED converts electrical energy into light energy, but since 60% to 70% of electrical energy will be converted into heat energy, if a large amount of heat cannot be dissipated, the junction temperature will be too high, which will seriously affect the service life of LED. Therefore, the research on LED junction temperature has far-reaching significance.

目前,针对发光器件结温的测量方法是利用器件本身某一特性与温度的关系进行间接测试,主要有正向压降法、光谱蓝白比法、光谱峰值波长法、光谱质心波长与半高宽法和红外法热成像等。At present, the measurement methods for the junction temperature of light-emitting devices are indirect tests using the relationship between a certain characteristic of the device itself and the temperature, mainly including forward voltage drop method, spectral blue-white ratio method, spectral peak wavelength method, spectral centroid wavelength and half-height Broad and infrared thermal imaging, etc.

正向压降法是目前普遍使用的测结温方法,它是利用器件两端电压与温度呈线性变化的关系进行结温测试,但其测试精度受到加热大电流到测试小电流切换速度的限制,而且对于封装后的灯具成品而言,由于其灯具外壳材料等诸多限制,一般很难精确测量各个LED引脚上的压降([1]Ryu H Y,Ha K H,Chae J H,et al.Measurement of junctiontemperature in GaN-based laser diodes using voltage-temperaturecharacteristics[J].Applied Physics Letters,2005,87(9):297.)。The forward voltage drop method is currently commonly used to measure the junction temperature. It uses the linear relationship between the voltage at both ends of the device and the temperature to test the junction temperature, but its test accuracy is limited by the switching speed from heating a large current to testing a small current. , and for the finished lamps after packaging, due to many limitations such as the material of the lamp shell, it is generally difficult to accurately measure the voltage drop on each LED pin ([1] Ryu H Y, Ha K H, Chae J H, et al.Measurement of junction temperature in GaN-based laser diodes using voltage-temperature characteristics[J].Applied Physics Letters,2005,87(9):297.).

光谱蓝白比法的主要原理是随着结温的升高,芯片的发光及荧光粉的光致发光同时下降,但荧光粉的发光下降更迅速,从而使白光光谱中蓝白光的比例发生变化。该方法的缺点是不适合单色LED结温的测量([2]Tetsushi Tamura,Tatsumi Setomoto,TsunemasaTaguchi.Illumination characteristics of lighting array using 10candela-classwhite LEDs under AC 100V operation[J].Journal of Luminescence,2000,87.)。The main principle of the spectral blue-white ratio method is that as the junction temperature rises, the luminescence of the chip and the photoluminescence of the phosphor decrease at the same time, but the luminescence of the phosphor decreases more rapidly, so that the proportion of blue-white light in the white light spectrum changes. . The disadvantage of this method is that it is not suitable for the measurement of monochromatic LED junction temperature ([2] Tetsushi Tamura, Tatsumi Setomoto, TsunemasaTaguchi. Illumination characteristics of lighting array using 10candela-classwhite LEDs under AC 100V operation [J]. Journal of Luminescence, 2000, 87.).

光谱峰值波长法是通过峰值波长随结温的漂移关系来测量LED结温。该方法的缺点是光谱峰值波长改变小,导致实际测量误差较大,受实验仪器影响大,而且不同LED峰值波长随温度变化规律不一致([3]Y.Xi,J.Q.Xi,T.Gessmann,J.M.Shah,J.K.Kim,E.F.Schubert,A.J.Fischer,M.H.Crawford,K.H.A.Bogart,and A.A.Allerman,"Junctionand carrier temperature measurements in deep-ultraviolet light-emittingdiodes using three different methods,"Appl.Phys.Lett.,vol.86,no.3,pp.031907,Jan.2005.)。The spectral peak wavelength method measures the LED junction temperature through the drift relationship of the peak wavelength with the junction temperature. The disadvantage of this method is that the change of the peak wavelength of the spectrum is small, resulting in a large actual measurement error, which is greatly affected by the experimental instrument, and the variation of the peak wavelength of different LEDs with temperature is inconsistent ([3] Y.Xi, J.Q.Xi, T.Gessmann, J.M. Shah, J.K.Kim, E.F.Schubert, A.J.Fischer, M.H.Crawford, K.H.A.Bogart, and A.A.Allerman, "Junction and carrier temperature measurements in deep-ultraviolet light-emitting diodes using three different methods," Appl. Phys. Lett., vol.86, no.3, pp.031907, Jan.2005.).

光谱质心波长与半高宽法是基于光学参数(质心波长和半高宽)与结温及直流驱动电流存在一个数学模型关系。该方法是利用加大直流驱动电流的同时降低热沉温度,以此来保证整体结温恒定的条件下,校正出光学参数、电流和结温三者的函数关系式,从而得到结温的表达式([4]Y.Lin,Y.L.Gao,Y.J.Lu,L.H.Zhu,Y.Zhang and Z.Chen,“Study oftemperature sensitive optical parameters and junction temperaturedetermination of light-emitting diodes,”Appl.Phys.Lett.,vol.100,pp.202108,May.2012.)。The spectral centroid wavelength and FWHM method is based on the existence of a mathematical model relationship between optical parameters (centroid wavelength and FWHM) and junction temperature and DC drive current. This method is to reduce the temperature of the heat sink while increasing the DC drive current, so as to ensure that the overall junction temperature is constant, and correct the functional relationship among the optical parameters, current and junction temperature, so as to obtain the expression of the junction temperature Formula ([4] Y.Lin, Y.L.Gao, Y.J.Lu, L.H.Zhu, Y.Zhang and Z.Chen, "Study of temperature sensitive optical parameters and junction temperature determination of light-emitting diodes," Appl. Phys. Lett., vol .100, pp.202108, May.2012.).

上述几种方法都是针对发光器件平均温度的测试,只能得到一个平均温度来代表发光器件温度。然而发光器件表面温度呈二维分布,各个位置的温度分布不完全一致。红外热成像法通过物体表面的红外辐射测量其表面二维温度分布,缺点是很容易受到器件封装结构的影响,难以探测封装LED芯片的表面([5]Tamdogan E,Pavlidis G,Graham S,etal.A Comparative Study on the Junction Temperature Measurements of LEDs WithRaman Spectroscopy,Microinfrared(IR)Imaging,and Forward Voltage Methods[J].IEEE Transactions on Components Packaging&Manufacturing Technology,2018,PP(99):1-9.)。The above-mentioned methods are all aimed at testing the average temperature of the light-emitting device, and only one average temperature can be obtained to represent the temperature of the light-emitting device. However, the surface temperature of the light-emitting device is distributed in two dimensions, and the temperature distribution at each position is not completely consistent. The infrared thermal imaging method measures the two-dimensional temperature distribution of the surface through the infrared radiation on the surface of the object. The disadvantage is that it is easily affected by the package structure of the device, and it is difficult to detect the surface of the packaged LED chip ([5]Tamdogan E, Pavlidis G, Graham S, et al. .A Comparative Study on the Junction Temperature Measurements of LEDs With Raman Spectroscopy,Microinfrared(IR)Imaging,and Forward Voltage Methods[J].IEEE Transactions on Components Packaging&Manufacturing Technology,2018,PP(99):1-9.).

高光谱技术是近年来新兴的综合探测技术,将影像信息和光谱数据有机地组成为一个图谱合一的三维数据立方,融合了成像技术、电子技术、信息技术、计算机技术等多领域技术,与传统手段相比具有更强大的数据获取功能,可以将光谱信息和空间信息结合起来,在遥感、农学、医疗、刑侦、鉴定等领域得到广泛的运用。Hyperspectral technology is an emerging comprehensive detection technology in recent years. It organically composes image information and spectral data into a three-dimensional data cube that integrates maps and spectra, and integrates imaging technology, electronic technology, information technology, computer technology and other technologies. Compared with traditional means, it has a more powerful data acquisition function. It can combine spectral information and spatial information, and has been widely used in remote sensing, agronomy, medical treatment, criminal investigation, identification and other fields.

发明内容Contents of the invention

本发明的目的在于解决现有技术中的上述问题,提供基于显微高光谱的发光器件温度分布测量装置及测量方法,可以精确得到发光器件表面各个像素点的光谱图像,从而精确得出发光器件表面二维温度分布图,直观体现其表面温度变化趋势。The purpose of the present invention is to solve the above-mentioned problems in the prior art, and to provide a light-emitting device temperature distribution measurement device and measurement method based on microscopic hyperspectral, which can accurately obtain the spectral image of each pixel on the surface of the light-emitting device, thereby accurately obtaining the temperature distribution of the light-emitting device. The surface two-dimensional temperature distribution map intuitively reflects the surface temperature change trend.

为达到上述目的,本发明采用如下技术方案:To achieve the above object, the present invention adopts the following technical solutions:

基于显微高光谱的发光器件温度分布测量装置,包括控温台、驱动电源、控温电源、显微镜、高光谱仪和计算机,所述控温台用于固定样品;A light-emitting device temperature distribution measurement device based on microscopic hyperspectral, including a temperature control platform, a driving power supply, a temperature control power supply, a microscope, a hyperspectral instrument and a computer, and the temperature control platform is used to fix samples;

驱动电源连接样品,驱动电源用于驱动样品;The driving power is connected to the sample, and the driving power is used to drive the sample;

控温电源与控温台连接,控温电源用于控制样品的温度;The temperature control power supply is connected to the temperature control platform, and the temperature control power supply is used to control the temperature of the sample;

显微镜设于样品上方,显微镜用于透过样品发出的光;The microscope is set above the sample, and the microscope is used to transmit the light emitted by the sample;

高光谱仪设于显微镜的上方,高光谱仪用于收集显微镜透过的光并得到高光谱数据;The hyperspectral instrument is set above the microscope, and the hyperspectral instrument is used to collect the light transmitted by the microscope and obtain hyperspectral data;

计算机连接高光谱仪,计算机用于将接收的高光谱数据进行计算得到样品表面二维温度分布。The computer is connected to the hyperspectral instrument, and the computer is used to calculate the received hyperspectral data to obtain the two-dimensional temperature distribution of the sample surface.

本发明所述驱动电源包括脉冲电压模式、脉冲电流模式、恒压模式和恒流模式。The driving power of the present invention includes pulse voltage mode, pulse current mode, constant voltage mode and constant current mode.

基于显微高光谱的发光器件温度分布测量方法,包括以下步骤:A method for measuring temperature distribution of a light-emitting device based on microscopic hyperspectral, comprising the following steps:

步骤1、将样品固定在控温台上,设置样品的初始温度T0,利用控温电源将样品温度控制在T0Step 1. Fix the sample on the temperature control platform, set the initial temperature T 0 of the sample, and control the temperature of the sample at T 0 by using the temperature control power supply;

步骤2、将驱动电源调至脉冲电压或脉冲电流模式,选择短脉冲信号驱动样品;Step 2. Adjust the driving power to pulse voltage or pulse current mode, and select a short pulse signal to drive the sample;

步骤3、调节控温电源,依次改变控温台的温度为T0、T1、T2……,样品发出的光经显微镜进入高光谱仪,高光谱仪采集对应的温度点下样品的高光谱数据;Step 3. Adjust the temperature control power supply, and change the temperature of the temperature control platform to T 0 , T 1 , T 2 . ;

步骤4、计算机根据高光谱数据拟合样品的质心波长与表面温度的敏感系数关系,进而得到二维温度敏感系数矩阵;Step 4, the computer fits the relationship between the centroid wavelength of the sample and the sensitivity coefficient of the surface temperature according to the hyperspectral data, and then obtains a two-dimensional temperature sensitivity coefficient matrix;

步骤5、将驱动电源调至恒压模式或恒流模式,电压或电流大小对应脉冲下的高电平电压或电流,样品发出的光经显微镜进入高光谱仪,用高光谱仪采集恒压或恒流模式下样品的光谱数据;Step 5. Adjust the driving power to constant voltage mode or constant current mode. The voltage or current corresponds to the high-level voltage or current under the pulse. The light emitted by the sample enters the hyperspectral instrument through the microscope, and the hyperspectral instrument is used to collect constant voltage or constant current. The spectral data of the sample in the mode;

步骤6、计算机用恒压模式或恒流模式下的高光谱数据计算质心波长,并结合步骤4中得到的二维温度敏感系数矩阵得出样品表面二维温度分布。Step 6. The computer uses the hyperspectral data in constant voltage mode or constant current mode to calculate the centroid wavelength, and combines the two-dimensional temperature sensitivity coefficient matrix obtained in step 4 to obtain the two-dimensional temperature distribution on the surface of the sample.

相对于现有技术,本发明技术方案取得的有益效果是:Compared with the prior art, the beneficial effects obtained by the technical solution of the present invention are:

1、本发明利用显微高光谱得到发光器件各像素点光谱质心波长随温度变化的线性关系原理来测试发光器件二维温度分布,相比于其他结温测试方法,显微高光谱技术空间分辨率及光谱分辨率高,可以精确得到发光器件表面各个像素点的光谱图像,从而精确得出发光器件表面二维温度分布图,直观体现其表面温度变化趋势。1. The present invention uses microscopic hyperspectral to obtain the principle of linear relationship between the spectral centroid wavelength of each pixel point of the light-emitting device and the temperature change to test the two-dimensional temperature distribution of the light-emitting device. Compared with other junction temperature testing methods, the spatial resolution of microscopic hyperspectral technology With high efficiency and spectral resolution, the spectral image of each pixel on the surface of the light-emitting device can be accurately obtained, so that the two-dimensional temperature distribution map of the surface of the light-emitting device can be accurately obtained, and the surface temperature change trend can be intuitively reflected.

2、本发明适用范围广,不受发光器件封装的影响,无论发光器件本身是否封装或者是否覆盖其他材料,只要发光可透过封装,即可得到发光芯片表面二维温度分布。2. The invention has a wide range of applications and is not affected by the packaging of the light-emitting device. No matter whether the light-emitting device itself is packaged or whether it is covered with other materials, as long as the light can pass through the package, the two-dimensional temperature distribution on the surface of the light-emitting chip can be obtained.

附图说明Description of drawings

图1为本发明的工作流程示意图;Fig. 1 is a schematic diagram of the workflow of the present invention;

图2为蓝光LED的质心波长与温度线性拟合关系曲线图;Fig. 2 is a graph of the linear fitting relationship between the centroid wavelength and the temperature of the blue LED;

图3为蓝光LED在25℃恒压模式下计算出的表面二维温度分布图;Figure 3 is a two-dimensional temperature distribution diagram of the surface of the blue LED calculated under constant voltage mode at 25°C;

图4为图3中的蓝光LED的A位置纵向温度变化趋势图;Fig. 4 is a longitudinal temperature change trend diagram at position A of the blue LED in Fig. 3;

图5为图3中的蓝光LED的B位置横向温度变化趋势图;Fig. 5 is a trend diagram of lateral temperature change at position B of the blue LED in Fig. 3;

图6为蓝光LED在25℃恒压模式下计算出的表面二维温度点的统计图。Fig. 6 is a statistical diagram of the two-dimensional temperature points on the surface of the blue LED calculated under the constant voltage mode at 25°C.

附图标记:1-驱动电源,2-控温电源,3-控温台,4-样品,5-显微镜,6-高光谱仪,7-计算机。Reference signs: 1-drive power supply, 2-temperature-controlled power supply, 3-temperature-controlled platform, 4-sample, 5-microscope, 6-hyperspectrometer, 7-computer.

具体实施方式Detailed ways

为了使本发明所要解决的技术问题、技术方案及有益效果更加清楚、明白,以下结合附图和实施例,对本发明做进一步详细说明。In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer and clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

如图1所示,本发明包括驱动电源1、控温电源2、控温台3、显微镜5、高光谱仪6和计算机7;其中:As shown in Figure 1, the present invention comprises driving power supply 1, temperature control power supply 2, temperature control table 3, microscope 5, hyperspectrometer 6 and computer 7; Wherein:

所述控温台3用于固定样品4;The temperature control platform 3 is used to fix the sample 4;

驱动电源1连接样品4,驱动电源1用于驱动样品4;驱动电源1包括脉冲电压模式、脉冲电流模式、恒压模式和恒流模式;The driving power supply 1 is connected to the sample 4, and the driving power supply 1 is used to drive the sample 4; the driving power supply 1 includes a pulse voltage mode, a pulse current mode, a constant voltage mode and a constant current mode;

控温电源2与控温台3连接,控温电源2用于控制样品4的温度;The temperature control power supply 2 is connected to the temperature control platform 3, and the temperature control power supply 2 is used to control the temperature of the sample 4;

显微镜5设于样品4上方,显微镜5用于透过样品4发出的光;The microscope 5 is arranged above the sample 4, and the microscope 5 is used to pass through the light emitted by the sample 4;

高光谱仪6设于显微镜5的上方,高光谱仪6用于收集显微镜5透过的光并得到高光谱数据;The hyperspectral instrument 6 is arranged above the microscope 5, and the hyperspectral instrument 6 is used to collect the light transmitted by the microscope 5 and obtain hyperspectral data;

计算机7连接高光谱仪6,计算机7用于将接收的高光谱数据进行计算得到样品4表面二维温度分布。The computer 7 is connected to the hyperspectral instrument 6, and the computer 7 is used to calculate the received hyperspectral data to obtain the two-dimensional temperature distribution on the surface of the sample 4.

本发明中所述样品为发光器件。The sample described in the present invention is a light emitting device.

本发明结合高光谱技术和显微技术,得到发光器件表面各个像素点高分辨的光谱信息,利用质心波长随温度变化的线性关系,用电压或电流脉冲信号校正温度。The invention combines hyperspectral technology and microscopic technology to obtain high-resolution spectral information of each pixel on the surface of a light-emitting device, utilizes the linear relationship between centroid wavelength and temperature change, and uses voltage or current pulse signals to correct temperature.

质心波长是光谱分布的几何对称波长,定义如下:The centroid wavelength is the geometrically symmetric wavelength of the spectral distribution, defined as follows:

其中:F(λ)是发光器件的光谱分布;λ为波长,λ1、λ2是光谱分布的上、下限波长,可见光范围一般为380~780nm。Where: F(λ) is the spectral distribution of the light-emitting device; λ is the wavelength, λ 1 and λ 2 are the upper and lower limit wavelengths of the spectral distribution, and the range of visible light is generally 380-780nm.

任一像素点质心波长-温度敏感系数Kij为:The centroid wavelength-temperature sensitivity coefficient K ij of any pixel point is:

其中:T0、T分别为控温台初始温度和另一控制温度;i=1…x,j=1…y,x,y为高光谱仪成像维像素,Δλcxy为xy像素点在T温度与T0温度下的质心波长之差。Among them: T 0 and T are the initial temperature of the temperature control platform and another control temperature respectively; i=1...x, j=1...y, x, y are the imaging dimension pixels of the hyperspectral instrument, Δλ cxy is the xy pixel point at T temperature The difference from the centroid wavelength at T 0 temperature.

表面所有像素点二维温度敏感系数矩阵为:The two-dimensional temperature sensitivity coefficient matrix of all pixels on the surface is:

器件表面所有像素点在待测温度与初始温度下的质心波长之差矩阵为:The difference matrix between the centroid wavelengths of all pixels on the surface of the device at the temperature to be measured and the initial temperature is:

则,发光器件表面所有像素点的二维温度分布矩阵为:Then, the two-dimensional temperature distribution matrix of all pixels on the surface of the light emitting device is:

本实施例以蓝光LED为待测的样品,采用本发明测量方法,具体包括以下步骤:In this embodiment, the blue light LED is used as the sample to be tested, and the measurement method of the present invention is adopted, which specifically includes the following steps:

步骤1、将蓝光LED固定到控温台3上,利用控温电源2先将样品4的热沉温度控制在25℃,蓝光LED不通电。Step 1. Fix the blue LED on the temperature control table 3, and use the temperature control power supply 2 to control the temperature of the heat sink of the sample 4 at 25°C, and the blue LED is not powered.

步骤2、调节驱动电源1,使其信号为:脉冲周期2ms,高电平3V,低电平0V,占空比3%的短脉冲电压模式下,对蓝光LED通电(一般脉宽控制小于1ms,可以较好避免自热效应影响)。Step 2. Adjust the driving power supply 1 so that the signal is: the pulse period is 2ms, the high level is 3V, the low level is 0V, and the duty ratio is 3%. , can better avoid the influence of self-heating effect).

步骤3、调节控温电源2,依次控制样品4热沉温度为25℃、35℃、45℃、55℃、65℃、75℃,样品4发出的光经显微镜5进入高光谱仪6,高光谱仪6采集蓝光LED高光谱数据到计算机7。Step 3, adjust the temperature control power supply 2, sequentially control the temperature of the heat sink of the sample 4 to 25°C, 35°C, 45°C, 55°C, 65°C, 75°C, the light emitted by the sample 4 enters the hyperspectral instrument 6 through the microscope 5, and the hyperspectral instrument 6 collect blue light LED hyperspectral data to computer 7.

步骤4、计算机7从高光谱数据计算芯片表面各像素点质心波长,根据公式(1)拟合出各像素点的质心波长-温度敏感关系式,如图2所示为蓝光LED的质心波长与温度线性拟合关系曲线图,进而得到公式(2)所示的所有像素点二维温度敏感系数矩阵K。Step 4, the computer 7 calculates the centroid wavelength of each pixel point on the chip surface from the hyperspectral data, and fits the centroid wavelength-temperature sensitivity relational expression of each pixel point according to formula (1), as shown in Figure 2. The temperature linear fitting relationship curve, and then obtain the two-dimensional temperature sensitivity coefficient matrix K of all pixels shown in the formula (2).

步骤5、再次调节驱动电源1,在对应脉冲高电平3V的恒压模式下对蓝光LED通电。Step 5. Adjust the driving power supply 1 again, and power on the blue LED in the constant voltage mode corresponding to the pulse high level of 3V.

步骤6、重复步骤3,得到3V恒压下蓝光LED分别在热沉温度25℃、35℃、45℃、55℃、65℃、75℃下的高光谱数据。Step 6. Repeat step 3 to obtain the hyperspectral data of blue LEDs at heat sink temperatures of 25°C, 35°C, 45°C, 55°C, 65°C, and 75°C under a constant voltage of 3V.

步骤7、从得到的恒压模式下的高光谱数据中提取出质心波长,根据步骤4得到的二维温度敏感系数矩阵K以及公式(3)与(4),得出恒压及不同热沉温度下蓝光LED表面二维温度分布图,如图3所示为蓝光LED在25℃恒压模式下计算出的表面二维温度分布图。图4和图5为蓝光LED纵向和横向温度变化趋势图。由于二维表面温度点较多,为了与热电偶结果对比,验证本发明的可靠性,取其温度间隔为0.1℃的分组中,出现频率最高小组的中间值温度,即众数温度,众数温度为该条件下的具有代表性的表面温度,如图6所示为蓝光LED在25℃恒压模式下计算出的表面二维温度点的统计图。Step 7. Extract the centroid wavelength from the obtained hyperspectral data in the constant pressure mode. According to the two-dimensional temperature sensitivity coefficient matrix K obtained in step 4 and the formulas (3) and (4), the constant pressure and different heat sinks are obtained. The two-dimensional temperature distribution diagram of the surface of the blue LED at different temperatures, as shown in Figure 3, is the two-dimensional temperature distribution diagram of the surface of the blue LED calculated under the constant voltage mode of 25°C. Figure 4 and Figure 5 are graphs showing the longitudinal and lateral temperature change trends of blue LEDs. Due to the large number of temperature points on the two-dimensional surface, in order to compare with the results of thermocouples and verify the reliability of the present invention, the median temperature of the group with the highest frequency of occurrence in the group whose temperature interval is 0.1 ° C, that is, the mode temperature, mode The temperature is a representative surface temperature under this condition. Figure 6 is a statistical diagram of the two-dimensional temperature points on the surface of the blue LED calculated under the constant voltage mode of 25°C.

步骤8、用热电偶测得蓝光LED在3V恒压下,热沉温度分别为25℃、35℃、45℃、55℃、65℃、75℃时的表面温度,与步骤7计算得出的众数温度作比较,平均误差小于0.7℃,证实了该方法的可靠性。Step 8. Use a thermocouple to measure the surface temperature of the blue LED when the heat sink temperature is 25°C, 35°C, 45°C, 55°C, 65°C, and 75°C under a constant voltage of 3V, which is the same as that calculated in step 7. Compared with the mode temperature, the average error is less than 0.7°C, which proves the reliability of the method.

表1 (℃)Table 1 (℃)

热沉温度heat sink temperature 2525 3535 4545 5555 6565 7575 平均误差average error 本方法测量的温度The temperature measured by this method 34.034.0 46.646.6 56.856.8 66.666.6 77.077.0 88.188.1 // 热电偶测量温度Thermocouples measure temperature 35.135.1 45.645.6 54.954.9 66.166.1 75.375.3 88.088.0 // 单次随机误差single random error -1.1-1.1 1.01.0 1.91.9 0.50.5 1.71.7 0.10.1 0.70.7

实施例蓝光LED在不同温度下通过显微高光谱技术得到的代表性的表面温度(众数温度)与热电偶所测表面温度的对比结果如表1所示。Table 1 shows the comparison results between the representative surface temperature (mode temperature) obtained by the microscopic hyperspectral technique and the surface temperature measured by the thermocouple of the blue LED at different temperatures.

Claims (1)

1. A light-emitting device temperature distribution measuring method based on microscopic hyperspectrum is characterized in that: the measuring device adopted by the measuring method comprises a temperature control table, a driving power supply, a temperature control power supply, a microscope, a hyperspectral meter and a computer;
The temperature control table is used for fixing a sample;
The driving power supply is connected with the sample and is used for driving the sample; the driving power supply comprises a pulse voltage mode, a pulse current mode, a constant voltage mode and a constant current mode;
the temperature control power supply is connected with the temperature control table and is used for controlling the temperature of the sample;
The microscope is arranged above the sample and is used for transmitting light emitted by the sample;
The hyperspectral meter is arranged above the microscope and used for collecting light transmitted by the microscope and obtaining hyperspectral data;
the computer is connected with the hyperspectral spectrometer and used for calculating the received hyperspectral data to obtain two-dimensional temperature distribution of the surface of the sample;
the measuring method comprises the following steps:
Step 1, fixing a sample on a temperature control table, setting the initial temperature T0 of the sample, and controlling the temperature of the sample to be T0 by using a temperature control power supply;
step 2, adjusting a driving power supply to a pulse voltage or pulse current mode, and selecting a short pulse signal to drive a sample;
step 3, adjusting a temperature control power supply, sequentially changing the temperature of a temperature control table to be T0, T1 and T2 … …, enabling light emitted by a sample to enter a hyperspectral meter through a microscope, and acquiring hyperspectral data of the sample at a corresponding temperature point by the hyperspectral meter;
Step 4, fitting the sensitivity coefficient relation between the centroid wavelength and the surface temperature of the sample by the computer according to the hyperspectral data to obtain a two-dimensional temperature sensitivity coefficient matrix;
step 5, adjusting the driving power supply to a constant voltage mode or a constant current mode, wherein the voltage or current corresponds to high level voltage or current under the pulse, light emitted by the sample enters the hyperspectral meter through the microscope, and the hyperspectral meter is used for collecting spectral data of the sample under the constant voltage or constant current mode;
and 6, calculating the centroid wavelength by using hyperspectral data in a constant voltage mode or a constant current mode by using a computer, and obtaining the two-dimensional temperature distribution of the surface of the sample by combining the two-dimensional temperature sensitivity coefficient matrix obtained in the step 4.
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