CN105280729A - 一种太阳能电池钝化减反薄膜及其制备方法 - Google Patents
一种太阳能电池钝化减反薄膜及其制备方法 Download PDFInfo
- Publication number
- CN105280729A CN105280729A CN201510109372.2A CN201510109372A CN105280729A CN 105280729 A CN105280729 A CN 105280729A CN 201510109372 A CN201510109372 A CN 201510109372A CN 105280729 A CN105280729 A CN 105280729A
- Authority
- CN
- China
- Prior art keywords
- layer
- solar cell
- oxide layer
- preparation
- al2o3
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 17
- 238000002161 passivation Methods 0.000 title abstract description 19
- 239000010409 thin film Substances 0.000 title abstract 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 41
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 20
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims abstract description 19
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- 238000004544 sputter deposition Methods 0.000 claims abstract description 8
- 238000000137 annealing Methods 0.000 claims abstract description 7
- 238000000231 atomic layer deposition Methods 0.000 claims abstract description 4
- 238000004549 pulsed laser deposition Methods 0.000 claims abstract description 4
- 210000004027 cell Anatomy 0.000 claims description 39
- 230000003667 anti-reflective effect Effects 0.000 claims description 22
- 230000000415 inactivating effect Effects 0.000 claims description 19
- 238000005229 chemical vapour deposition Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 48
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 239000000377 silicon dioxide Substances 0.000 description 6
- 230000003595 spectral effect Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Energy (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510109372.2A CN105280729A (zh) | 2015-03-13 | 2015-03-13 | 一种太阳能电池钝化减反薄膜及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510109372.2A CN105280729A (zh) | 2015-03-13 | 2015-03-13 | 一种太阳能电池钝化减反薄膜及其制备方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN105280729A true CN105280729A (zh) | 2016-01-27 |
Family
ID=55149415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510109372.2A Pending CN105280729A (zh) | 2015-03-13 | 2015-03-13 | 一种太阳能电池钝化减反薄膜及其制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105280729A (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101431110A (zh) * | 2008-10-06 | 2009-05-13 | 上海电力学院 | 低折射率纳米材料减反射膜 |
CN101533861A (zh) * | 2009-03-18 | 2009-09-16 | 厦门市三安光电科技有限公司 | 一种三层太阳电池增透膜及其制备方法 |
CN101846756A (zh) * | 2010-05-26 | 2010-09-29 | 湖南大学 | 一种用于玻璃表面增透的MgF2/氧化物复合膜 |
CN102403369A (zh) * | 2011-10-31 | 2012-04-04 | 晶澳(扬州)太阳能科技有限公司 | 一种用于太阳能电池的钝化介质膜 |
CN203690312U (zh) * | 2014-01-26 | 2014-07-02 | 内蒙古日月太阳能科技有限责任公司 | 减反射膜及具有该减反射膜的太阳能电池片 |
CN104103699A (zh) * | 2013-04-03 | 2014-10-15 | Lg电子株式会社 | 太阳能电池 |
-
2015
- 2015-03-13 CN CN201510109372.2A patent/CN105280729A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101431110A (zh) * | 2008-10-06 | 2009-05-13 | 上海电力学院 | 低折射率纳米材料减反射膜 |
CN101533861A (zh) * | 2009-03-18 | 2009-09-16 | 厦门市三安光电科技有限公司 | 一种三层太阳电池增透膜及其制备方法 |
CN101846756A (zh) * | 2010-05-26 | 2010-09-29 | 湖南大学 | 一种用于玻璃表面增透的MgF2/氧化物复合膜 |
CN102403369A (zh) * | 2011-10-31 | 2012-04-04 | 晶澳(扬州)太阳能科技有限公司 | 一种用于太阳能电池的钝化介质膜 |
CN104103699A (zh) * | 2013-04-03 | 2014-10-15 | Lg电子株式会社 | 太阳能电池 |
CN203690312U (zh) * | 2014-01-26 | 2014-07-02 | 内蒙古日月太阳能科技有限责任公司 | 减反射膜及具有该减反射膜的太阳能电池片 |
Non-Patent Citations (2)
Title |
---|
MARTINA.GREEN: "《太阳能电池工作原理、技术和系统应用 》", 31 January 2010, 上海交通大学出版社 * |
王治乐: "《薄膜光学与真空镀膜技术》", 30 June 2013, 哈尔滨工业大学出版社 * |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101533861B (zh) | 一种三层太阳电池增透膜及其制备方法 | |
CN101436616B (zh) | 硅太阳能电池双层减反射薄膜及其制备方法 | |
US20060243320A1 (en) | Optical thin film for solar cells and method of forming the same | |
Sertel et al. | Effect of single-layer Ta2O5 and double-layer SiO2/Ta2O5 anti-reflective coatings on GaInP/GaAs/Ge triple-junction solar cell performance | |
CN102005485A (zh) | 一种太阳能电池的多层减反膜以及其制作方法 | |
CN102723370A (zh) | 一种用于太阳能电池的宽光谱多层减反钝化膜 | |
WO2023125776A1 (zh) | 太阳能电池正面钝化膜层 | |
US20140373906A1 (en) | Anti-reflection coatings for multijunction solar cells | |
CN105322029A (zh) | 减反膜、光电子器件及其制作方法 | |
CN103746005B (zh) | 双层氮化硅减反射膜 | |
Selj et al. | Optimization of the antireflection coating of thin epitaxial crystalline silicon solar cells | |
JP4789131B2 (ja) | 太陽電池及び太陽電池の製造方法 | |
US10115843B2 (en) | Broadband antireflection coatings under coverglass using ion gun assisted evaporation | |
KR101194258B1 (ko) | 광대역 반사방지 다층코팅을 갖는 태양전지용 투명 기판 및 그 제조방법 | |
CN112490297B (zh) | 一种空间三结砷化镓太阳电池用三层减反射膜及其制备方法 | |
CN105280729A (zh) | 一种太阳能电池钝化减反薄膜及其制备方法 | |
CN201307596Y (zh) | 硅太阳能电池双层减反射薄膜 | |
CN114447127A (zh) | 一种太阳能电池及其制备方法 | |
JP2006287027A (ja) | 太陽電池 | |
CN102496633A (zh) | 一种GaAs系太阳能电池的多层减反射膜 | |
CN104659118A (zh) | 一种太阳能电池的多层减反膜 | |
US20130167921A1 (en) | Double layer antireflection coating for silicon based solar cell modules | |
JP2007251114A (ja) | 光学多層膜を有した高性能太陽光電池用基板及びその製造方法 | |
CN102931242A (zh) | 一种晶体硅太阳能电池多层二氧化硅减反射膜 | |
Rajan et al. | Multi layered anti-reflective coatings for ultra-thin CIGS solar cells |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Applicant after: trina solar Ltd. Address before: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Applicant before: CHANGZHOU TRINA SOLAR ENERGY Co.,Ltd. Address after: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Applicant after: TRINASOLAR Co.,Ltd. Address before: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Applicant before: trina solar Ltd. |
|
CB02 | Change of applicant information | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160127 |
|
RJ01 | Rejection of invention patent application after publication |