CN105271106A - Laser implantation preparation method for multi-dimensional continuous fine structure - Google Patents
Laser implantation preparation method for multi-dimensional continuous fine structure Download PDFInfo
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- CN105271106A CN105271106A CN201510588239.XA CN201510588239A CN105271106A CN 105271106 A CN105271106 A CN 105271106A CN 201510588239 A CN201510588239 A CN 201510588239A CN 105271106 A CN105271106 A CN 105271106A
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Abstract
The invention relates to a laser implantation preparation method for a multi-dimensional continuous fine structure, and belongs to the fields of surface fine structure processing and micro/nano technologies. Through 3D printing type scan feeding of a movable three-dimensional fine platform in combination with repeated irradiation of laser light, a multi-layer fine structure is prepared on a substrate by continuously supplementing a suspension containing fine particles. According to the method, a multi-layer fine structure of the same material and a multi-layer fine structure of different materials can be prepared on the substrate. Through adoption of the method, the bonding strength among layers of an implanted fine structure can be enhanced, and the bonding strength and appearance of the implanted structure can be improved. In the method, laser light does not directly act on a target material, so that melting and vaporization of the target material are avoided, and the repeating accuracy of a scanning track can be ensured.
Description
Technical field
The present invention relates to the preparation method of the continuous fine structure of multidimensional, the laser being specifically related to the continuous fine structure of a kind of multidimensional implants preparation method, surface fine structure processing, nanometer technique field.
Background technology
Surface-functionalized technology is the important directions of scientific research for a long time always, and the application in engineering field is also more and more general.The development of nanometer technique in recent years, for surface-functionalized research is filled with new vitality, and shows more wide application prospect thereupon.By changing the microphysics chemical component of body surface, or going out certain fine structure in Surface Machining, the characteristics such as the machinery of working face, burn into photoelectron, fretting wear and hydrodynamics can be improved, thus improve service behaviour and the efficiency of device.
Continuous microstructure, particularly continuous metal micro-structural, have important application value in fields such as microcircuit, fine electronic devices and components, micro-fluidic and MEMSs, induced with laser shifts forward the method preparing metal continuous microstructure and causes people and more and more pay close attention in recent years.
Induced with laser shifts forward, is also the manufacturing technology of laser direct-writing, and its general principle as shown in Figure 2, Laser Focusing is in target (or sacrifice layer) surface, when pulsed laser energy exceedes certain threshold value, the small pieces of material in focal zone is pulled out away from target, and directive substrate is also deposited thereon.Induced with laser shifts forward without the need to making mask, and the process-cycle is short, and craft flexibility is good; Deposition accuracy is high, can reach micron level, a magnitude higher than the precision of electroforming; And the material be suitable for is more extensive, from metal, semiconductor, to pottery, macromolecule and can deposit in this way to biomaterial etc.
Bohandy utilizes Nd:YAG pulse laser first, deposit copper and silver-colored array that unit size is some tens of pm on a silicon substrate, thereafter a lot of scholar is to different metal and metal oxide, comprise copper, silver, zinc, iron and zinc oxide etc., multiple on-chip deposition process is studied, successfully prepares a lot of high-resolution fine structure.By selecting suitable laser parameter, accurately control the melting amount of target, can reach very high deposition accuracy, the size of unit even can be less than laser spot size.Kuznetsov etc., by the femtosecond pulse accurately controlled, the film targets such as gold, silver excite melting injection stream and droplet ejection, successfully prepare the dimpling of Nano grade, microparticle and micro-cylindrical array, as shown in Figure 3.Stacking by what spray that micro-melting drips, they have also prepared other three-dimensional microstructure of submicron order.
Existing technology " induced with laser shifts forward ", also cry " manufacturing technology of laser direct-writing ", use the laser that laser instrument sends, the film targets such as gold, silver excite melting injection stream and droplet ejection, directive base material and being deposited on, in the preparation of the fine array of discrete surface, achieve very large success, but because target is very thin, disposable consumption, be generally difficult to utilize and repeatedly shift with a slice target, the preparation of continuous surface fine structure is more difficult.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, provide the laser of the continuous fine structure of a kind of multidimensional to implant preparation method; The fine structure of multi-level identical material can be prepared by this method on substrate, also can prepare the multi-level fine structure of unlike material.
The laser of the continuous fine structure of a kind of multidimensional implants preparation method, by the 3D printing of the meticulous platform of moving three dimension be scanned into, coordinate the reirradiation of laser, and the suspension constantly supplemented containing subparticle, the shock wave utilizing induced with laser to produce and high-speed micro-jet, base material is prepared the fine structure that material of the same race is multi-level.
By injecting different types of subparticle, the multi-level fine structure of unlike material can be prepared.
For improving multi-level fine structure bond strength between layers, can add in suspension and implanting cement particle, form glued layer.
In order to improve bond strength and the exterior appearance of implant infrastructure, laser direct irradiation implant infrastructure can be used, carry out follow-up finishing.
Because target is supplied by suspension, easily add and discharge, above technique can be carried out under the state not changing clamping workpiece, can ensure the repeatable accuracy of track while scan.
Concrete steps of the present invention are as described in Figure 1: laser (1) through convex lens focus in the suspension (3) containing subparticle (2), laser energy exceedes the breakdown threshold of suspension (3), there is optical breakdown at focus place and produce cavitation bubble (4), the shock wave that induced with laser produces and high-speed micro-jet, impact the subparticle (2) in suspension (3) and implant base material (5); By injecting different types of particle (6) in suspension, the shock wave utilizing induced with laser to produce and high-speed micro-jet, can prepare the multi-level fine structure of unlike material.
The invention has the beneficial effects as follows:
1, the present invention injects different types of particle to suspension, the shock wave utilizing induced with laser to produce and high-speed micro-jet, is impacted by the subparticle of inside and implants base material, can prepare the multi-level fine structure of unlike material;
2, add implantation cement particle at suspension, cement particle is implanted fine structure between layers by the shock wave utilizing induced with laser to produce and high-speed micro-jet, can strengthen bond strength between layers;
3, laser not with target direct effect, avoid melting and the vaporization of target;
4, adopt suspension supply target, easily add and discharge, whole technique can be carried out under the state not changing clamping workpiece, can ensure the repeatable accuracy of track while scan.
Accompanying drawing explanation
Fig. 1 fundamental diagram of the present invention; In figure, a once implants, and b is that secondary is implanted;
The general principle figure that Fig. 2 induced with laser shifts forward; In figure, 1 be pulse laser, 2 are set of lenses, 3 are transparent restraint layers, 4 are targets, 5 is substrates;
Fig. 3 laser shifts molten droplets figure forward; A () general principle, the two dimension that (b) droplet ejection is formed and three-dimensional structure, in figure, 1 be laser pulse, 2 are goldleaf, 3 are transparent restraint layers, 4 is substrates.
Detailed description of the invention
Be described in further details the present invention below by example, these examples are only used for the present invention is described, do not limit the scope of the invention.
Embodiment 1
The laser of the continuous fine structure of a kind of multidimensional implants preparation method, laser (1) through convex lens focus in the suspension (3) containing subparticle (2), laser energy exceedes the breakdown threshold of suspension (3), there is optical breakdown at focus place and produce cavitation bubble (4), the shock wave that induced with laser produces and high-speed micro-jet, impact the subparticle (2) in suspension (3) and implant base material (5); By the 3D printing of the meticulous platform of moving three dimension be scanned into, coordinate the reirradiation of laser, and the suspension constantly supplemented containing subparticle, the shock wave utilizing induced with laser to produce and high-speed micro-jet, base material is prepared the fine structure that material of the same race is multi-level.
Embodiment 2
The laser of the continuous fine structure of multidimensional implants a preparation method, and by injecting different types of particle (6) in suspension, the shock wave utilizing induced with laser to produce and high-speed micro-jet, can prepare the multi-level fine structure of unlike material.
Claims (4)
1. the laser of the continuous fine structure of multidimensional implants preparation method, it is characterized in that: the method by the 3D printing of the meticulous platform of moving three dimension be scanned into, coordinate the reirradiation of laser, and the suspension constantly supplemented containing subparticle, base material is prepared multi-level fine structure, and concrete grammar is:
Laser through convex lens focus in containing in the suspension of subparticle, laser energy exceedes the breakdown threshold of suspension, there is optical breakdown at focus place and produce cavitation bubble, the shock wave that induced with laser produces and high-speed micro-jet, the subparticle in suspension is impacted and implants base material; By injecting different types of particle in suspension, the shock wave utilizing induced with laser to produce and high-speed micro-jet, prepare the multi-level fine structure of unlike material.
2. the laser of the continuous fine structure of a kind of multidimensional implants preparation method according to claim 1, it is characterized in that: the method, by injecting different types of subparticle, prepares the multi-level fine structure of unlike material.
3. the laser of the continuous fine structure of a kind of multidimensional implants preparation method according to claim 1, it is characterized in that: the method adds implantation glued layer, improves bond strength between layers.
4. the laser of the continuous fine structure of a kind of multidimensional implants preparation method according to claim 1, it is characterized in that: the method uses laser direct irradiation implant infrastructure, carries out follow-up finishing, to improve bond strength and the exterior appearance of implant infrastructure.
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| CN201510588239.XA CN105271106A (en) | 2015-09-16 | 2015-09-16 | Laser implantation preparation method for multi-dimensional continuous fine structure |
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Cited By (6)
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| CN105855726A (en) * | 2016-06-15 | 2016-08-17 | 广东工业大学 | Particle manufacturing equipment and application thereof |
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| CN106944744A (en) * | 2017-04-26 | 2017-07-14 | 广东工业大学 | A kind of anisotropic material method for implantation and device based on induced with laser cavitation |
| CN111716715A (en) * | 2020-05-14 | 2020-09-29 | 青岛科技大学 | Laser micro-nano deposition printing method based on liquid phase optical drive |
| FR3102377A1 (en) * | 2019-10-29 | 2021-04-30 | Universite de Bordeaux | Equipment and process for deposition by projection of particles by laser shock waves |
| CN114178547A (en) * | 2021-07-22 | 2022-03-15 | 广东工业大学 | Laser-induced transfer printing method for micro electronic elements based on non-Newtonian fluid characteristics |
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| CN106944744B (en) * | 2017-04-26 | 2019-05-24 | 广东工业大学 | A kind of anisotropic material method for implantation and device based on induced with laser cavitation |
| FR3102377A1 (en) * | 2019-10-29 | 2021-04-30 | Universite de Bordeaux | Equipment and process for deposition by projection of particles by laser shock waves |
| WO2021084201A1 (en) * | 2019-10-29 | 2021-05-06 | Universite de Bordeaux | Equipment and method for depositing particles using laser shockwaves |
| CN111716715A (en) * | 2020-05-14 | 2020-09-29 | 青岛科技大学 | Laser micro-nano deposition printing method based on liquid phase optical drive |
| CN111716715B (en) * | 2020-05-14 | 2021-12-28 | 青岛科技大学 | Laser micro-nano deposition printing method based on liquid phase optical drive |
| CN114178547A (en) * | 2021-07-22 | 2022-03-15 | 广东工业大学 | Laser-induced transfer printing method for micro electronic elements based on non-Newtonian fluid characteristics |
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