CN105215553A - A kind of fine structure induced with laser method for implantation based on suspension target and device - Google Patents
A kind of fine structure induced with laser method for implantation based on suspension target and device Download PDFInfo
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- CN105215553A CN105215553A CN201510596710.XA CN201510596710A CN105215553A CN 105215553 A CN105215553 A CN 105215553A CN 201510596710 A CN201510596710 A CN 201510596710A CN 105215553 A CN105215553 A CN 105215553A
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Abstract
The invention discloses a kind of fine structure induced with laser method for implantation based on suspension target, comprise the suspension containing subparticle be placed in by base material in glassware; Laser carries out focusing to by convex lens the position that base material needs to implant subparticle through speculum; When the laser energy focused on is greater than the breakdown threshold of liquid, laser breakdown suspension, produces Cathode plasma explosion and gives off plasma stock wave; Externally shock wave can be given off when inducing the cavitation bubble of generation to crumble and fall after plasma disappearance; Cavitation bubble and substrate surface interact and produce high-speed micro-jet; The impact produced involves high-speed micro-jet and promotes subparticle impact implantation base material.The laser energy that the present invention adopts is not directly act on to implant on target, can not destroy target, adopt the suspension of any degree of depth containing subparticle, supplements continually and implants target, to improve the efficiency of continuous production fine structure.The invention also discloses the device of said method.
Description
Technical field
The present invention relates to surface fine structure processing technique field, particularly relate to a kind of fine structure induced with laser method for implantation based on suspension target and device.
Background technology
Surface-functionalized technology is the important directions of scientific research for a long time always, and the application in engineering field is more and more general.The development of nanometer technique in recent years, for surface-functionalized research is filled with new vitality, and shows more wide application prospect thereupon.By changing the microphysics chemical component of body surface, or going out certain fine structure in Surface Machining, the characteristics such as the machinery of working face, burn into photoelectron, fretting wear and hydrodynamics can be improved, thus improve service behaviour and the efficiency of device.
Microcircuit refers to have high density equivalent-circuit component and (or) parts, and can be used as the microelectronic component of separate piece.MEMS (MEMS) refers to that size is at several millimeters and even less high-tech device, its internal structure is generally in micron even nanometer scale, it is an independently intelligence system, primarily of sensor, actuator (actuator) and micro-energy three parts composition, there is microminiaturization, intellectuality, multi-functional, high integration and be suitable for producing these features in enormous quantities.Have a wide range of applications in electronics, medical science, industry, automobile and aerospace system.Microfluidic system, also known as microfluidic analysis chip, micro-total analysis system (μ TAS) or chip lab, Micrometer-Nanometer Processing Technology is utilized to be integrated on one piece of microchip by various functional units such as microchannel, Micropump, micro-valve, microreactor, microsensor, micro-detectors, by controlling solution flowing wherein, carry out the micro-analysis system of the functions such as the sample preparation involved by the fields such as biological and chemical, mixing, reaction, separation, detection, biochemical analysis.In bioanalysis, microchemical analysis and detection, microelectronic device cools, and microsatellite bearing adjusts, and the fields such as portable fuel battery all present good application prospect.
Continuous microstructure, particularly continuous metal micro-structural, have important application value in fields such as microcircuit, fine electronic devices and components, micro-fluidic and MEMSs, people more and more pay close attention to induced with laser and shift forward the method preparing metal continuous microstructure in recent years.Jacob(JamesA.Grant-Jacob, BenjaminMills, MatthiasFeinaeugleetal.Micron-scalecopperwiresprintedusi ngfemtosecondlaser-inducedforwardtransferwithautomateddo norreplenishment.OpticalMaterialsExpress, 2013,3 (6): 747-754.) etc. propose one " automatic target supply technology ", prepare the micro-line of continuous metal in conjunction with " induced with laser is transfer techniques forward ".In laser pulse melting and while target micelle of dishing out, continuous mobile target, make post laser pulsed irradiation on new target region, and make the continuous stacking deposition of follow-up micelle of dishing out, form continuous micro-line, as shown in Figure 1, their profit in this way success prepared on a silicon substrate some tens of pm wide, reach micro-copper cash of several millimeters.
" liquid target forwards moves technology " applies the liquid target sheet material layers of some tens of pm on transparent restraint layer, as particle suspension, Polymer Solution, colloid and biofluid etc., in order to absorbing laser energy, often need to prepare absorbed layer (sacrifice layer) (as Fig. 2 (a)) on liquid target, or in target, add light energy absorption material, with absorbing laser energy, provide the motive force of dishing out needed for target.Another benefit adopting sacrifice layer to protect liquid target, reduces the heat effect impact of laser.Florian(C.Floriana, F.Caballero-Lucasa, J.M.Fernandez-Pradasaetal.Conductivesilverinkprintingthr oughthelaser-inducedforwardtransfertechnique.AppliedSurf aceScience, 2015, etc. inpress.) induced with laser that have studied silver-colored ink shifts forward, in order at deposition on substrate micro wire, experiment finds the continuous micro-line obtained by drop repeatedly stacking, compare micro-line that solid target material deposition obtains, its uniformity is better, microscopic appearance is more smooth (Fig. 2 (b)) also.
Laser is directly radiated on solid-state target by " the automatic target supply technology " of prior art, utilize laser energy by target melting, dish out, be implanted on base material, the uniformity of micro-line prepared by " automatic target supply technology " and pattern need further improvement, and there is the defect such as bottleneck and splashing.Due to target very thin (approximate number micron), between target and substrate space minimum (about some tens of pm), utilize induced with laser to shift forward stacking deposition continuous microstructure and there is very large control difficulty.And target even can be vaporized by lf in transfer process, be difficult to avoid the problems such as splashing, cause the uniformity of micro-structural and pattern quality all to there is larger deficiency." liquid target forwards moves technology " of prior art applies the liquid target sheet material layers of some tens of pm on transparent restraint layer, utilize laser energy that target is implanted base material, " liquid target forwards moves technology " due to liquid target sheet material layers still thinner (about some tens of pm), very easily consume, for obtaining the second best in quality continuous microstructure, the control of the selection of laser parameter and target motion is still more difficult.In addition, after liquid dried, continuity, the uniformity of residual solid content, and and substrate between bond strength, be all difficult to ensure.
Summary of the invention
For deficiency of the prior art, the technical problem that the present invention solves proposes a kind of suspension adopting any degree of depth containing subparticle, supplement continually and implant target, to improve the fine structure induced with laser method for implantation based on suspension target of continuous production fine structure efficiency.
The invention allows for the device of a kind of enforcement based on the fine structure induced with laser method for implantation of suspension target.
In order to solve the problems of the technologies described above, the fine structure induced with laser method for implantation based on suspension target that the embodiment of the present invention provides, comprises the following steps:
S1: base material is placed in the suspension containing subparticle in glassware;
S2: laser instrument produces high energy pulse laser;
S3: the speculum of laser in light path system carries out focusing to by convex lens the position that base material needs to implant subparticle;
S4: when the laser energy focused on is greater than the breakdown threshold of liquid, laser breakdown suspension, produces Cathode plasma explosion and gives off plasma stock wave;
S5: externally can give off shock wave when inducing the cavitation bubble of generation to crumble and fall after plasma disappearance;
S6: cavitation bubble and substrate surface interact and produce high-speed micro-jet;
S7: the impact of generation involves high-speed micro-jet and promotes subparticle impact implantation base material.
Preferably, in step sl, described glassware is positioned over three-dimensional fine workbench, the motion of three-dimensional fine workbench is accurately controlled by computer and kinetic control system, distance between the motion adjustable base material of the vertical direction of three-dimensional fine workbench and laser spot, three-dimensional fine workbench does the two dimensional motion of horizontal direction, in the mode scanned, base material is implanted required fine structure.
In order to solve the problems of the technologies described above, the device implementing the fine structure induced with laser method for implantation based on suspension target of the present invention comprises laser and injects system, glassware, three-dimensional fine workbench, computer and kinetic control system, described laser is injected system and is comprised laser instrument, speculum and convex lens, the suspension containing subparticle and base material is provided with in described glassware, base material is positioned at the bottom of glassware, the high energy pulse laser that laser instrument produces is injected speculum in system through laser and is carried out focusing to by convex lens the position that base material needs to implant subparticle, motion that is vertical and horizontal direction done by described three-dimensional fine workbench under the control of computer and kinetic control system.
The fine structure induced with laser method for implantation based on suspension target that the embodiment of the present invention provides, has following beneficial effect:
In the fine structure induced with laser method for implantation based on suspension target that the embodiment of the present invention provides and device, laser energy is not directly act on to implant on target, target can not be destroyed, adopt the suspension of any degree of depth containing subparticle, supplement continually and implant target, to improve the efficiency of continuous production fine structure; The present invention uses the suspension containing subparticle to provide implantation target continuously, the impact that laser focusing induction produces involves high-speed micro-jet body and is promoted to implant base material by the target in suspension, more be applicable to the manufacture of large-scale continuous microstructure, the present invention can prepare at substrate surface has unlike material or out of phase fine structure layer, the further surface property improving base material, improves the efficiency of continuous production fine structure; Can repeatedly implant continuously, without the need to sacrifice layer, fairly large continuous, uniform fine structure can be prepared, do not need to prepare mask in advance, manufacture efficiency greatly improve, the present invention except can directly by Laser Focusing in suspension, quartz glass sleeve can also be used to introduce in suspension by laser, go for the target layer of any kind, any thickness, and laser energy is not suffered a loss.The present invention can select the suspension of any thickness, implants subparticle, so can prepare unlike material or out of phase fine structure layer on base material, can improve the efficiency of continuous production fine structure to supplement continually.
Accompanying drawing explanation
Fig. 1 a is the schematic diagram of the automatic target supply shifting forward the micro-copper cash of preparation based on the induced with laser of automatic target supply.
Fig. 1 b is the structural representation shifting forward the fine copper cash that the micro-copper cash of preparation deposits on a silicon substrate based on the induced with laser of automatic target supply.
Fig. 2 a is the general principle figure that the induced with laser of fluent material shifts forward.
Fig. 2 b is the continuous micro-line structure schematic diagram adopting nano-Ag particles ink to deposit on a glass substrate.
Fig. 3 is the schematic diagram of the fine structure induced with laser method for implantation based on suspension target that the preferred embodiment of the present invention provides.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
See Fig. 3, the structural representation of the device of the fine structure induced with laser method for implantation based on suspension target that the preferred embodiment of the present invention provides and enforcement the method thereof.
The present embodiment based in the fine structure induced with laser method for implantation of suspension target, laser instrument 1 produces high energy pulse laser 5, and the energy of laser and frequency-adjustable.The speculum 4 of laser in light path system carries out focusing to by convex lens 6 position that base material 12 needs to implant subparticle, (except can directly by Laser Focusing in suspension, quartz glass sleeve can also be used to be introduced in suspension by laser).Base material 12 is placed in the suspension 10 containing subparticle 8 in glassware 7.Laser focusing punctures suspension 10, produces Cathode plasma explosion and gives off plasma stock wave 11; Externally shock wave can be given off when inducing the cavitation bubble 9 of generation to crumble and fall after plasma disappearance; Cavitation bubble 9 and substrate surface interact and produce high-speed micro-jet.In a word, the impact that laser focusing induction produces involves high-speed micro-jet and metal fine particles 8 can be driven to impact implantation base material 12.Base material 12 is positioned in glassware 7, and glassware 7 is positioned on three-dimensional fine workbench 13.The motion of three-dimensional fine workbench 13 is accurately controlled by computer 3 and kinetic control system 2, distance between the motion adjustable base material 12 of the vertical direction of three-dimensional fine workbench 13 and laser spot, three-dimensional fine workbench 13 does the two dimensional motion of horizontal direction, in the mode of scanning, implant required fine structure on the base substrate 12, reach surface-functionalized object.
The invention process comprises laser based on the device of the fine structure induced with laser method for implantation of suspension target and injects system, glassware 7, three-dimensional fine workbench 13, computer 3 and kinetic control system 2, described laser is injected system and is comprised laser instrument 1, speculum 4 and convex lens 6, the suspension 10 containing subparticle 8 and base material 12 is provided with in described glassware 7, base material 12 is positioned at the bottom of glassware 7, the high energy pulse laser 5 that laser instrument 1 produces is injected speculum 4 in system through laser and is carried out focusing to by convex lens 6 position that base material 12 needs to implant subparticle, motion that is vertical and horizontal direction done by described three-dimensional fine workbench 13 under the control of computer 3 and kinetic control system 2.
In the fine structure induced with laser method for implantation based on suspension target that the embodiment of the present invention provides and device, laser energy is not directly act on to implant on target, target can not be destroyed, adopt the suspension 10 of any degree of depth containing subparticle 8, supplement continually and implant target 12, to improve the efficiency of continuous production fine structure; The present invention uses the suspension 10 containing subparticle 8 to provide continuously and implants target 12, the impact that laser focusing induction produces involves high-speed micro-jet body and is promoted to implant base material by the target in suspension 10, more be applicable to the manufacture of large-scale continuous microstructure, the present invention can prepare at substrate surface has unlike material or out of phase fine structure layer, the further surface property improving base material, improves the efficiency of continuous production fine structure; Can repeatedly implant continuously, without the need to sacrifice layer, fairly large continuous, uniform fine structure can be prepared, do not need to prepare mask in advance, manufacture efficiency greatly improve, the present invention except can directly by Laser Focusing in suspension 10, quartz glass sleeve can also be used to be introduced by laser in suspension 10, go for the target layer of any kind, any thickness, and laser energy is not suffered a loss.The present invention can select the suspension 10 of any thickness, implants subparticle 8, so can prepare unlike material or out of phase fine structure layer on the base substrate 12, can improve the efficiency of continuous production fine structure to supplement continually.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.
Claims (3)
1., based on a fine structure induced with laser method for implantation for suspension target, it is characterized in that, comprise the following steps:
S1: base material (12) is placed in the suspension (10) containing subparticle (8) in glassware (7);
S2: laser instrument (1) produces high energy pulse laser (5);
S3: the speculum of laser in light path system (4) carries out focusing to by convex lens (6) position that base material (12) needs to implant subparticle;
S4: when the laser energy focused on is greater than the breakdown threshold of liquid, laser breakdown suspension, produces Cathode plasma explosion and gives off plasma stock wave (11);
S5: externally can give off shock wave when inducing the cavitation bubble of generation (9) to crumble and fall after plasma disappearance;
S6: cavitation bubble (9) and substrate surface interact and produce high-speed micro-jet;
S7: the impact of generation involves high-speed micro-jet and promotes subparticle (8) impact implantation base material (12).
2. as claimed in claim 1 based on the fine structure induced with laser method for implantation of suspension target, it is characterized in that, in step sl, described glassware (7) is positioned over three-dimensional fine workbench (13), the motion of three-dimensional fine workbench (13) is accurately controlled by computer (3) and kinetic control system (2), distance between the motion adjustable base material (12) of the vertical direction of three-dimensional fine workbench (13) and laser spot, three-dimensional fine workbench (13) does the two dimensional motion of horizontal direction, in the mode of scanning, at the fine structure needed for the upper implantation of base material (12).
3. one kind implements the claims the device of method described in 1, it is characterized in that, comprise laser and inject system, glassware (7), three-dimensional fine workbench (13), computer (3) and kinetic control system (2), described laser is injected system and is comprised laser instrument (1), speculum (4) and convex lens (6), the suspension (10) containing subparticle (8) and base material (12) is provided with in described glassware (7), base material (12) is positioned at the bottom of glassware (7), the high energy pulse laser (5) that laser instrument (1) produces is injected speculum (4) in system through laser and is carried out focusing to by convex lens (6) position that base material (12) needs to implant subparticle, described three-dimensional fine workbench (13) does motion that is vertical and horizontal direction under the control of computer (3) and kinetic control system (2).
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| CN106271063A (en) * | 2016-08-30 | 2017-01-04 | 江苏大学 | A kind of method and device of the double cavity of induced with laser |
| CN106492715A (en) * | 2016-12-19 | 2017-03-15 | 广东工业大学 | A kind of method and device for preparing microgranule |
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| CN106944744A (en) * | 2017-04-26 | 2017-07-14 | 广东工业大学 | A kind of anisotropic material method for implantation and device based on induced with laser cavitation |
| CN108018549A (en) * | 2017-10-24 | 2018-05-11 | 广东工业大学 | A kind of multidimensional fine structure deposition process based on induced with laser nozzle |
| CN109317555A (en) * | 2018-08-23 | 2019-02-12 | 江苏大学 | It is a kind of to utilize the molding apparatus and method of induced with laser compound punching |
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| CN106271063A (en) * | 2016-08-30 | 2017-01-04 | 江苏大学 | A kind of method and device of the double cavity of induced with laser |
| CN106492715B (en) * | 2016-12-19 | 2023-02-10 | 广东工业大学 | Method and device for preparing particles |
| CN106492715A (en) * | 2016-12-19 | 2017-03-15 | 广东工业大学 | A kind of method and device for preparing microgranule |
| CN106496605A (en) * | 2016-12-23 | 2017-03-15 | 广东工业大学 | A kind of apparatus and method for preparing high molecule magnetic microsphere |
| CN106496605B (en) * | 2016-12-23 | 2019-10-11 | 广东工业大学 | A kind of apparatus and method preparing high molecule magnetic microsphere |
| CN106944744A (en) * | 2017-04-26 | 2017-07-14 | 广东工业大学 | A kind of anisotropic material method for implantation and device based on induced with laser cavitation |
| CN106944744B (en) * | 2017-04-26 | 2019-05-24 | 广东工业大学 | A kind of anisotropic material method for implantation and device based on induced with laser cavitation |
| CN108018549A (en) * | 2017-10-24 | 2018-05-11 | 广东工业大学 | A kind of multidimensional fine structure deposition process based on induced with laser nozzle |
| CN109317555A (en) * | 2018-08-23 | 2019-02-12 | 江苏大学 | It is a kind of to utilize the molding apparatus and method of induced with laser compound punching |
| CN109482750A (en) * | 2018-12-24 | 2019-03-19 | 广东工业大学 | A kind of micro- riveting set of no rivet |
| CN113102884A (en) * | 2021-05-13 | 2021-07-13 | 山东大学 | Material surface modification method by thermal composite underwater laser shock |
| CN114178547A (en) * | 2021-07-22 | 2022-03-15 | 广东工业大学 | Laser-induced transfer printing method for micro electronic elements based on non-Newtonian fluid characteristics |
| CN115772649A (en) * | 2023-02-10 | 2023-03-10 | 中国航空制造技术研究院 | Laser-induced deposition device for aircraft skin structure |
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