CN105242069A - Overload-resistant capacitive triaxial MEMS accelerometer - Google Patents
Overload-resistant capacitive triaxial MEMS accelerometer Download PDFInfo
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Abstract
The invention discloses an overload-resistant capacitive triaxial MEMS accelerometer. The accelerometer comprises an X axial direction detection unit, a Y axial direction detection unit and a Z axial direction detection unit. The X axial direction detection unit, the Y axial direction detection unit and the Z axial direction detection unit are provided with an X axial direction stress release beam, a Y axial direction stress release beam and a Z axial direction stress release beam respectively. The X axial direction stress release beam and the Y axial direction stress release beam are both beams shaped like a Chinese character kou, and are disposed on respective elastic beams respectively. The Z axial direction stress release beam includes a stress release beam with two grades shaped like a Chinese character jiong, and is disposed at an opening side of a Z axis mass block. Stress concentration areas are expanded from connections of all respective anchor points and all the axial elastic beams to the whole elastic beams, so the stress in the stress concentration areas can be effectively shared. The accelerometer is prevented from being impacted by excessively high overloads, can work normally in a high overload condition, is improved in inherent frequency, and has a more stable vibration mode.
Description
Technical field
The present invention relates to micro electronmechanical field, specifically a kind of overload-resistant capacitance-type triaxial mems accelerometer.
Background technology
Mems accelerometer is the important component part of MEMS (micro electro mechanical system).Micro-electro-mechanaccelerometer accelerometer because its volume is little, low in energy consumption, easy of integration, anti-overload ability feature that is strong and that can be mass-produced is widely used in the core parts of MIMU.Along with the development of MEMS method for designing and technology, micro-mechanical accelerometer has been widely used in each consumer fields such as missile guidance, household electrical appliance, automotive electronics.
Usual multi-axis capacitive adds meter structure needs installation three to add meter structure, and increase chip cost needs very high installation accuracy simultaneously, and the accelerometer of three-axis integrative also exists the problem that each axis is disturbed and the linearity has much room for improvement.The multiaxis arrangements of accelerometers that the patent document of " multi-axis capacitive accelerometer " (publication number is CN101738496A) provides can reduce the mutual phenomenon disturbed of each axial acceleration sensing, but does not carry out analysis and inspection to the anti-overloading performance of this kind of structure.
The sensitivity of mems accelerometer and frequency range are negative correlation, under the condition ensureing upper frequency, improve the sensitivity of accelerometer as far as possible, the position that optimizing stress is concentrated simultaneously.The overload impact that piezoresistive principles can realize more than 200000g acceleration is adopted in the patent document of " a kind of pressure resistance type MEMS high overload accelerometer " (publication number is CN103969467A), but the accelerometer of this kind of structure is usually used as projectile fuze switch and uses, namely reaching 200000g brief acceleration meter in impact just has signal to export, output signal small when acceleration value is less at ordinary times, accelerometer does not work substantially, adding of this kind of structure, counts the acceleration movement that is only limited in XY plane simultaneously, for Z-direction structure and impact and do not perform an analysis and evaluate.
In the patent document of " high overload accelerometer with three degrees of freedom " (publication number is CN1667420A), Three Degree Of Freedom arrangements of accelerometers adopts piezoresistive detection principle, when there is an acceleration in the external world, mass is subjected to displacement, semi-girder is caused to be out of shape, and then cause the voltage dependent resistor (VDR) value change of semi-girder place, but when acceleration is very little, mass displacement is very little, semi-girder is not easy distortion, the change of voltage dependent resistor (VDR) value is very micro-, cause accuracy of detection not high, measure the problems such as inaccurate, simultaneously three axles add meter fabric chip adopt make respectively after the method for unified paster again add manufacturing cost.
Summary of the invention
The object of the present invention is to provide a kind of overload-resistant capacitance-type triaxial mems accelerometer, this accelerometer can respond under normal acceleration input, can impact at high overload decline humble beam and anchor point junction stress again and concentrate the problem excessive with stress, ensure that accelerometer is be subject to can steady operation under high overload impact.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of overload-resistant capacitance-type triaxial mems accelerometer, comprise the X axis be located on substrate, Y-axis and Z-axis direction detecting unit, X axis detecting unit comprises the X axis mass of shaped as frame, is provided with X axis elastic beam between the frame of X axis mass, and the middle part of X axis elastic beam is fixed with X axis anchor body; Y-axis detecting unit comprises the Y-axis mass of shaped as frame, is provided with Y-axis elastic beam between the frame of Y-axis mass, and the middle part of Y-axis elastic beam is fixed with Y-axis anchor body; Also be respectively equipped with between the frame of X axis mass and Y-axis mass responsive movable comb electrodes to and drive fixed fingers electrode pair; Z-axis direction detecting unit comprises the Z-axis direction mass in H type, the middle part of Z-axis direction mass is provided with Z-axis direction anchor body and Z-axis direction elastic beam, two open side of described Z-axis direction mass are respectively equipped with symmetrical Z-axis direction stress relief beam, each Z-axis direction stress relief beam all comprises in the one-level stress relief beam of " Jiong " font and secondary stress relief beam, secondary stress relief beam is across the two ends of corresponding open side, and one-level stress relief beam is located at the middle part outside secondary stress relief beam; Middle part outside each secondary stress relief beam is also provided with the secondary Z-axis direction anchor body for being connected with substrate;
Described X axis elastic beam is provided with the X axis stress relief beam in " mouth " font, X axis stress relief beam by X axis anchor body frame in inside; The middle part of described X axis stress relief beam four edges is respectively equipped with X axis stress relief salient point;
Described Y-axis elastic beam is provided with the Y-axis stress relief beam in " mouth " font, Y-axis stress relief beam by Y-axis anchor body frame in inside; The middle part of described Y-axis stress relief beam four edges is respectively equipped with Y-axis stress relief salient point.
Further, described Z-axis direction mass is provided with relative to four symmetrical between two grooves of center, and be equipped with arc stress relief beam in each groove, arc stress relief beam is also symmetrical between two relative to center.
Further, the outer of described X axis mass is provided with X axis common electrode pair and X axis counter electrode pair, X axis common electrode is to being distributed on the transverse frame of X axis mass, X axis counter electrode is to being distributed on the longitudinal edge frame of X axis mass, X axis common electrode in an open loop mode of operation as Detection capacitance to, under closed loop mode of operation as feedback afterburning electrode pair, X axis counter electrode is to the acceleration Influence of Displacement balanced under closed loop mode of operation when X axis mass moves along Y-direction;
The outer of described Y-axis mass is provided with Y-axis common electrode pair and Y-axis counter electrode pair, Y-axis common electrode is to being distributed on the longitudinal edge frame of Y-axis mass, Y-axis counter electrode is to being distributed on the transverse frame of Y-axis mass, Y-axis common electrode in an open loop mode of operation as Detection capacitance to, under closed loop mode of operation as feedback afterburning electrode pair, Y-axis counter electrode is to the acceleration Influence of Displacement balanced under closed loop mode of operation when Y-axis mass moves along Y-direction.
Further, described X axis common electrode is also respectively equipped with elastic anti-collision salient point to, X axis counter electrode to, Y-axis common electrode pair and the right outside of Y-axis counter electrode.
The invention has the beneficial effects as follows, X axis and Y-axis respectively by respective responsive movable comb electrodes to and drive fixed fingers electrode pair coordinate the detection realizing X axis and Y-axis, Z-axis direction acceleration detecting unit adopts electric capacity between change upper and lower parallel plate electrode to detect peripheral input acceleration numerical value; The junction of region of stress concentration by X axis anchor point and X axis elastic beam can expand on whole X axis elastic beam by X axis stress relief beam and arranging of X axis stress relief salient point, effectively shares the stress of region of stress concentration; The junction of region of stress concentration by Y-axis anchor point and Y-axis elastic beam can expand on whole Y-axis elastic beam by Y-axis stress relief beam and arranging of Y-axis stress relief salient point, effectively shares the stress of region of stress concentration; Can the region of stress concentration under high overload be expanded on overall Z-axis direction elastic beam by the junction of Z-axis direction anchor point and Z-axis direction elastic beam by one-level stress relief beam, secondary stress relief beam and arc stress relief beam, effectively share the stress of region of stress concentration, avoid the impact that accelerometer impacts by high overload, ensure that accelerometer normally can work under high overload, improve the natural frequency of accelerometer, the vibration shape is more stable.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the present invention is further described:
Fig. 1 is structural representation of the present invention;
Fig. 2 is the schematic diagram of Z-axis direction detecting unit in Fig. 1;
Fig. 3 is the vertical view of Fig. 2;
Fig. 4 is the enlarged diagram of X axis detecting unit in Fig. 1;
Fig. 5 is the vertical view of Fig. 4;
Fig. 6 is the enlarged diagram of Y-axis detecting unit in Fig. 1.
Embodiment
Shown in composition graphs 1 ~ 3, the invention provides a kind of overload-resistant capacitance-type triaxial mems accelerometer, comprise the X axis detecting unit 2 be located on substrate, Y-axis detecting unit 3 and Z-axis direction detecting unit 1;
Z-axis direction detecting unit 1 comprises the Z-axis direction mass 1a in H type, the middle part of Z-axis direction mass 1a is provided with Z-axis direction anchor body 1b and Z-axis direction elastic beam 1c, two open side of described Z-axis direction mass 1a are respectively equipped with symmetrical Z-axis direction stress relief beam, each Z-axis direction stress relief beam all comprises in the one-level stress relief beam 1f of " Jiong " font and secondary stress relief beam 1g, secondary stress relief beam 1g is across the two ends of corresponding open side, and one-level stress relief beam 1f is located at the middle part outside secondary stress relief beam 1g; The length of one-level stress relief beam 1f is less than the length of secondary stress relief beam 1g; Middle part outside each secondary stress relief beam is also provided with the secondary Z-axis direction anchor body 1h for being connected with substrate; Described Z-axis direction mass 1a is provided with relative to four symmetrical between two groove 1d of center, and be equipped with arc stress relief beam 1e in each groove, arc stress relief beam 1e is also symmetrical between two relative to center.
Composition graphs 4 is with shown in Fig. 5, and X axis detecting unit 2 comprises the X axis mass 2a of shaped as frame, is provided with X axis elastic beam 2c between the frame of X axis mass 2a, and the middle part of X axis elastic beam 2c is fixed with X axis anchor body 2b, also be provided with the responsive movable comb electrodes of the X axis cooperatively interacted between the frame of X axis mass 2a and fixed fingers electrode pair 2f is driven to 2e and X axis, described X axis elastic beam 2c is provided with the X axis stress relief beam 2j in " mouth " font, X axis stress relief beam 2j by X axis anchor body 2b frame in inside, the middle part of described X axis stress relief beam 2j four edges is respectively equipped with X axis stress relief salient point 2d, the outer of described X axis mass 2a is provided with X axis common electrode to 2g and X axis counter electrode to 2h, X axis common electrode is distributed on the transverse frame of X axis mass 2a to 2g, X axis counter electrode is distributed on the longitudinal edge frame of X axis mass 2a to 2h, X axis common electrode to 2g in an open loop mode of operation as Detection capacitance pair, as the afterburning electrode pair of feedback under closed loop mode of operation, X axis counter electrode balances acceleration Influence of Displacement when X axis mass 2a moves along Y-direction to 2h under closed loop mode of operation, ensure that X axis mass 2a is in initial rest position in the Y direction all the time.
Shown in composition graphs 6, Y-axis detecting unit 3 and the similar of X axis detecting unit 2, namely obtain Y-axis detecting unit 3 by X axis detecting unit 2 half-twist; Y-axis detecting unit comprises the Y-axis mass 3a of shaped as frame, is provided with Y-axis elastic beam 3c between the frame of Y-axis mass 3a, and the middle part of Y-axis elastic beam 3c is fixed with Y-axis anchor body 3b; Also be provided with the responsive movable comb electrodes of the Y-axis cooperatively interacted between the frame of Y-axis mass 3a and fixed fingers electrode pair 3f is driven to 3e and Y-axis; Described Y-axis elastic beam 3c is provided with the Y-axis stress relief beam 3j in " mouth " font, Y-axis stress relief beam 3j by Y-axis anchor body 3b frame in inside; The middle part of described Y-axis stress relief beam 3j four edges is respectively equipped with Y-axis stress relief salient point 3d.The outer of described Y-axis mass 3a is provided with Y-axis common electrode to 3h and Y-axis counter electrode to 3g, Y-axis common electrode is distributed on the longitudinal edge frame of Y-axis mass 3a to 3h, Y-axis counter electrode is distributed on the transverse frame of Y-axis mass 3a to 3g, Y-axis common electrode to 3h in an open loop mode of operation as Detection capacitance pair, as the afterburning electrode pair of feedback under closed loop mode of operation, Y-axis counter electrode balances acceleration Influence of Displacement when Y-axis mass moves along Y-direction to 3g under closed loop mode of operation, ensure that Y-axis mass 3a is in initial rest position in the Y direction all the time.
X axis detecting unit 2 comprises two, and Y-axis detecting unit 3 also comprises two, and X axis detecting unit 2 and Y-axis detecting unit 3 cross-distribution are in the space that Z-axis direction stress relief beam and Z-axis direction detecting unit 1 surround.To 2g and X axis counter electrode, the outside to 2h is respectively equipped with X axis elastic anti-collision salient point 2i to described X axis common electrode, to 3g and Y-axis counter electrode, the outside to 3h is respectively equipped with Y-axis elastic anti-collision salient point 3i to Y-axis common electrode, and X axis elastic anti-collision salient point 2i and Y-axis elastic anti-collision salient point 3i is all towards Z-axis direction detecting unit 1.
X axis and Y-axis respectively by respective responsive movable comb electrodes to and drive fixed fingers electrode pair coordinate the detection realizing X axis and Y-axis, Z-axis direction acceleration detecting unit adopts electric capacity between change upper and lower parallel plate electrode to detect peripheral input acceleration numerical value; X axis elastic beam adopts single-ended semi-girder, ensure that the rigidity in the non-sensitive direction of semi-girder is far longer than sensitive direction rigidity, guarantee that acceleration is minimal and be subject to non-sensitive axial acceleration impact impact, the junction of region of stress concentration by X axis anchor point and X axis elastic beam can expand on whole X axis elastic beam by X axis stress relief beam and arranging of X axis stress relief salient point, effectively shares the stress of region of stress concentration; Y-axis elastic beam adopts single-ended semi-girder, ensure that the rigidity in the non-sensitive direction of semi-girder is far longer than sensitive direction rigidity, guarantee that acceleration is minimal and be subject to non-sensitive axial acceleration impact impact, the junction of region of stress concentration by Y-axis anchor point and Y-axis elastic beam can expand on whole Y-axis elastic beam by Y-axis stress relief beam and arranging of Y-axis stress relief salient point, effectively shares the stress of region of stress concentration; Can the region of stress concentration under high overload be expanded on overall Z-axis direction elastic beam by the junction of Z-axis direction anchor point and Z-axis direction elastic beam by one-level stress relief beam, secondary stress relief beam and arc stress relief beam, effectively share the stress of region of stress concentration, avoid the impact that accelerometer impacts by high overload, ensure that accelerometer normally can work under high overload, improve the natural frequency of accelerometer, the vibration shape is more stable.
For the technical scheme of the present embodiment, finite element separated time software ANSYS is used arrangements of accelerometers to be carried out to the eigenfrequncies and vibration models of model analysis determination arrangements of accelerometers, carry out the ess-strain dynamic respond of statics Analysis determination arrangements of accelerometers under acceleration, gather region of stress concentration in processing procedure and compare.The theoretical strength of silicon materials is 7Gpa, engineering uses 500MPa as the maximum demand stress of silicon materials.The maximum stress of silicon structure material generally appears at the corner that semi-girder end or anchor point are connected, as long as ensure that the maximum stress value of this position is no more than the maximum demand stress 500MPa of silicon materials, just thinking that structure is complete, can not there is fracture or fatigue damage in structure.
By the statics Analysis of ANSYS, for Z-axis direction detecting unit, at applying 20,000 G after the acceleration impact of Z-direction, the maximum stress value of structure is 279MPa, is less than the permissible stress value of silicon materials; Simultaneously, the impact of non-sensitive axle on sensitive axes is analyzed, the displacement produced when Z-axis direction detecting unit is subject to X-direction 20,000 G acceleration is 0.12um, the stress value produced is 43.8MPa, be far smaller than the permissible stress 500MPa of silicon, the Z-direction structure antijamming capability demonstrating the present invention's design is further strong.
By the statics Analysis of ANSYS, for Y-axis detecting unit, at applying 20,000 G after the acceleration impact of Y-direction, the maximum stress value of structure is 170.9MPa, be less than the permissible stress value of silicon materials, simultaneously, the impact of non-sensitive axle on sensitive axes is analyzed, the displacement produced when Y-axis detecting unit is subject to Z-direction 20,000 G acceleration is 0.08um, the stress value produced is 61.5MPa, be far smaller than the permissible stress 500MPa of silicon, the Y-direction structure antijamming capability demonstrating the present invention's design is further strong.Because X axis detecting unit is identical with Y-axis detecting unit structure, analysis result is also identical, at this not Ao Shu.
The above is only preferred embodiment of the present invention, not does any pro forma restriction to the present invention; Any those of ordinary skill in the art, do not departing under technical solution of the present invention ambit, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solution of the present invention, or be revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to technical spirit of the present invention to any simple modification made for any of the above embodiments, equivalent replacement, equivalence change and modification, all still belongs in the scope of technical solution of the present invention protection.
Claims (4)
1. an overload-resistant capacitance-type triaxial mems accelerometer, comprise the X axis be located on substrate, Y-axis and Z-axis direction detecting unit, X axis detecting unit comprises the X axis mass of shaped as frame, be provided with X axis elastic beam between the frame of X axis mass, the middle part of X axis elastic beam is fixed with X axis anchor body; Y-axis detecting unit comprises the Y-axis mass of shaped as frame, is provided with Y-axis elastic beam between the frame of Y-axis mass, and the middle part of Y-axis elastic beam is fixed with Y-axis anchor body; Also be respectively equipped with between the frame of X axis mass and Y-axis mass responsive movable comb electrodes to and drive fixed fingers electrode pair; Z-axis direction detecting unit comprises the Z-axis direction mass in H type, the middle part of Z-axis direction mass is provided with Z-axis direction anchor body and Z-axis direction elastic beam, it is characterized in that, two open side of described Z-axis direction mass are respectively equipped with symmetrical Z-axis direction stress relief beam, each Z-axis direction stress relief beam all comprises in the one-level stress relief beam of " Jiong " font and secondary stress relief beam, secondary stress relief beam is across the two ends of corresponding open side, and one-level stress relief beam is located at the middle part outside secondary stress relief beam; Middle part outside each secondary stress relief beam is also provided with the secondary Z-axis direction anchor body for being connected with substrate;
Described X axis elastic beam is provided with the X axis stress relief beam in " mouth " font, X axis stress relief beam by X axis anchor body frame in inside; The middle part of described X axis stress relief beam four edges is respectively equipped with X axis stress relief salient point;
Described Y-axis elastic beam is provided with the Y-axis stress relief beam in " mouth " font, Y-axis stress relief beam by Y-axis anchor body frame in inside; The middle part of described Y-axis stress relief beam four edges is respectively equipped with Y-axis stress relief salient point.
2. the overload-resistant capacitance-type triaxial mems accelerometer of one according to claim 1, it is characterized in that, described Z-axis direction mass is provided with relative to four symmetrical between two grooves of center, and be equipped with arc stress relief beam in each groove, arc stress relief beam is also symmetrical between two relative to center.
3. the overload-resistant capacitance-type triaxial mems accelerometer of one according to claim 1 and 2, it is characterized in that, the outer of described X axis mass is provided with X axis common electrode pair and X axis counter electrode pair, X axis common electrode is to being distributed on the transverse frame of X axis mass, X axis counter electrode is to being distributed on the longitudinal edge frame of X axis mass, X axis common electrode is in an open loop mode of operation as Detection capacitance pair, as the afterburning electrode pair of feedback under closed loop mode of operation, X axis counter electrode is to the acceleration Influence of Displacement balanced under closed loop mode of operation when X axis mass moves along Y-direction,
The outer of described Y-axis mass is provided with Y-axis common electrode pair and Y-axis counter electrode pair, Y-axis common electrode is to being distributed on the longitudinal edge frame of Y-axis mass, Y-axis counter electrode is to being distributed on the transverse frame of Y-axis mass, Y-axis common electrode in an open loop mode of operation as Detection capacitance to, under closed loop mode of operation as feedback afterburning electrode pair, Y-axis counter electrode is to the acceleration Influence of Displacement balanced under closed loop mode of operation when Y-axis mass moves along Y-direction.
4. the overload-resistant capacitance-type triaxial mems accelerometer of one according to claim 3, it is characterized in that, described X axis common electrode is also respectively equipped with elastic anti-collision salient point to, X axis counter electrode to, Y-axis common electrode pair and the right outside of Y-axis counter electrode.
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| CN112816736A (en) * | 2020-12-31 | 2021-05-18 | 中国电子科技集团公司第十三研究所 | Stress isolation structure, micro-mechanical detection structure and MEMS inertia measurement device |
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