CN105200425B - 刻蚀设备 - Google Patents
刻蚀设备 Download PDFInfo
- Publication number
- CN105200425B CN105200425B CN201510634535.9A CN201510634535A CN105200425B CN 105200425 B CN105200425 B CN 105200425B CN 201510634535 A CN201510634535 A CN 201510634535A CN 105200425 B CN105200425 B CN 105200425B
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- etching
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- circuit board
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- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
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Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510634535.9A CN105200425B (zh) | 2015-09-28 | 2015-09-28 | 刻蚀设备 |
Applications Claiming Priority (1)
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CN201510634535.9A CN105200425B (zh) | 2015-09-28 | 2015-09-28 | 刻蚀设备 |
Publications (2)
Publication Number | Publication Date |
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CN105200425A CN105200425A (zh) | 2015-12-30 |
CN105200425B true CN105200425B (zh) | 2018-05-18 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201510634535.9A Active CN105200425B (zh) | 2015-09-28 | 2015-09-28 | 刻蚀设备 |
Country Status (1)
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CN (1) | CN105200425B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN117241483B (zh) * | 2023-10-25 | 2024-04-12 | 广东达源设备科技有限公司 | 用于电路板生产的喷淋装置和方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1438361A (zh) * | 2002-02-11 | 2003-08-27 | 皮尔注册商人 | 对印刷电路板进行喷射操作的装置 |
CN103369850A (zh) * | 2012-03-30 | 2013-10-23 | 北大方正集团有限公司 | Pcb喷淋蚀刻生产线 |
CN203365922U (zh) * | 2013-07-18 | 2013-12-25 | 宇宙电路板设备(深圳)有限公司 | 精密显影机 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002141329A (ja) * | 2000-11-07 | 2002-05-17 | Matsushita Electric Ind Co Ltd | エッチング液濃度制御装置および液晶表示装置の製造装置および製造方法ならびに液晶表示装置 |
CN102492946B (zh) * | 2011-12-30 | 2013-11-06 | 特新电路材料(东莞)有限公司 | 一种蚀刻机 |
CN102707562A (zh) * | 2012-06-17 | 2012-10-03 | 无锡市优耐特石化装备有限公司 | 一种显影液搅拌装置 |
CN203187754U (zh) * | 2013-03-20 | 2013-09-11 | 宁波东盛集成电路元件有限公司 | 一种带清洗、吹干装置的蚀刻、去膜生产线系统 |
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2015
- 2015-09-28 CN CN201510634535.9A patent/CN105200425B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1438361A (zh) * | 2002-02-11 | 2003-08-27 | 皮尔注册商人 | 对印刷电路板进行喷射操作的装置 |
CN103369850A (zh) * | 2012-03-30 | 2013-10-23 | 北大方正集团有限公司 | Pcb喷淋蚀刻生产线 |
CN203365922U (zh) * | 2013-07-18 | 2013-12-25 | 宇宙电路板设备(深圳)有限公司 | 精密显影机 |
Also Published As
Publication number | Publication date |
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CN105200425A (zh) | 2015-12-30 |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Process for adjusting thimble of process chamber in semiconductor etching device Effective date of registration: 20200323 Granted publication date: 20180518 Pledgee: China Co truction Bank Corp Huizhou branch Pledgor: HUIZHOU GLORYSKY ELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: Y2020980000897 |
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CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 516300 Jinpaishan Mountain, Taiyang Depression, Baihua Town, Huidong County, Huizhou City, Guangdong Province Patentee after: Huizhou techuang Electronic Technology Co.,Ltd. Address before: 516000 taiyangao Industrial Zone, Baihua Town, Huizhou City, Guangdong Province Patentee before: HUIZHOU GLORYSKY ELECTRONICS TECHNOLOGY Co.,Ltd. |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220614 Granted publication date: 20180518 Pledgee: China Co. truction Bank Corp Huizhou branch Pledgor: HUIZHOU GLORYSKY ELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: Y2020980000897 |