CN105171627B - A kind of elastic layer and preparation method thereof of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll - Google Patents
A kind of elastic layer and preparation method thereof of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll Download PDFInfo
- Publication number
- CN105171627B CN105171627B CN201510549772.5A CN201510549772A CN105171627B CN 105171627 B CN105171627 B CN 105171627B CN 201510549772 A CN201510549772 A CN 201510549772A CN 105171627 B CN105171627 B CN 105171627B
- Authority
- CN
- China
- Prior art keywords
- roll
- elastic layer
- polishing
- photocuring
- mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Abstract
A kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll, its key points of the technical solution are that: component is as follows with weight percent: light-cured resin 20%~60%, adhesive agent 2% ~ 10%, reactive diluent 20%~50%, photoinitiator 5%~15%, promotor 0.5%~7%, adjuvant 0.5% ~ 4%, filler 0.5% ~ 5%.The present invention is original, innovative product with independent intellectual property rights, and operating process is simple, low in cost, is easy to industrialization and popularization and application, has a vast market foreground, and economic benefit and social benefit are significant.
Description
Technical field
The present invention relates to microelectronics, photoelectron, flexible display substrate manufacture in Ultraprecision Machining, especially one
The elastic layer and preparation method thereof of kind Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll.
Background technique
Microelectronics, photoelectron, IC manufacturing are the one of the important signs that for measuring a statehood and overall national strength,
It is that the world today is most hotly competitive, develops most rapid field, only grasps advanced microelectronics and optoelectronic fabrication techniques
Cost can be efficiently controlled and expanded the scale of production, it could the survival and development in fierce market competition.Microelectronics and photoelectricity
The advanced manufacture of son passes through China its people as the basic industry of national economy, guiding industry, pillar industry and strategic industry
Ji, national security, people's lives and social progress are playing increasingly important role.
Flexible display technologies just gradually improving people's lives with exchange, and significantly promote information visualization.In recent years,
The advantage of Flexible Displays becomes increasingly conspicuous, and flexible electronic as LCD, OLED of FPD and plasma compared with showing, tool
Have ultra-thin, light weight, durable, storage capacity be big, design freely, deflection can be wound and the performances such as impact resistance, be widely used in moving
Mobile phone, personal digital assistant PDA, laptop, trade mark, secure identity file, e-book, electronic poster, automobile instrument
The industry such as plate, RF identifying system, sensor, environment show, medical treatment, general lighting, robot sense skin, civilian and military row
Industry, flexible display can also allow display screen to be easier to become ornament materials, make work using the bendability characteristics of Flexible Displays
Journey design is not limited to planarize the display pattern, it can be achieved that diversification external form.
Due to the huge market prospects of Flexible Displays, the research institution and production firm of many countries and regions put into soft
In the research and application of property display technology, and achieve significant achievement.Currently, be also in i.e. will be before industrialization for flexible electronic
At night, still there is also many technical bottlenecks, and the stage of research and exploration is also in for material, technique, design etc..Flexibility is aobvious
The technology of showing is to integrate large scale integrated circuit, precision processing technology, photoelectron technology new high-tech industry, is related to partly leading
Numerous high-tech area such as body, optics, microelectronics, chemical material, precision machinery and processing.
Flexible Displays substrate is the basis of flexibility of research and development display.Flat-panel monitor is made by substrate of glass substrate
, and flexible display be then using flexible material as substrate, to the surface quality requirements of flexible substrate as glass substrate,
Surface smoothness and thickness requirement are very strict, to realize the surface quality and machining accuracy of flexible substrate, most common
Method is chemical Mechanical Polishing Technique.
Chemical Mechanical Polishing Technique is considered as that can take into account the best technique of surface roughness and surface smoothness requirement
Method, it has also become hard brittle crystal material, metal material and other materials realize the most practical of the not damaged processing of surface ultra-smooth
One of technology, and be widely used in the photoelectrons such as super large-scale integration, semiconductor lighting, optical glass, FPD,
The fields such as microelectronics, aerospace and mechanical engineering.By analysis with research, chemical Mechanical Polishing Technique may be most suitable
And be entirely capable of in the efficient Ultra-precision Turning of Roll-to-Roll for large-size ultra-thin Flexible Displays substrate surface, to obtain
Obtain the undamaged finished surface of ultra-smooth.
Another key factor of exploitation flexible display is that its technique may be by Sheet-
Fedbatchprocessing(individual produces in batches) it is converted into the roll-to-roll production of Roll-to-Rollmanufacturing(),
Efficiency greatly improves, it is meant that the cost of display may substantially reduce.Therefore, the task of top priority is that research large-size ultra-thin is flexible
Show that the Roll-to-Roll high benefit installation, equipment and technology and Ultra-precision Turning of substrate are theoretical.
Polishing roll is the main portion in the Roll-to-Roll chemical-mechanical polishing mathing of large-size ultra-thin Flexible Displays substrate
Part, since free abrasive chemical Mechanical Polishing Technique has many insurmountable problems, in recent years, concretion abrasive chemical machinery
Polishing technology is expected to replace free abrasive chemically mechanical polishing due to its huge superiority；And concretion abrasive chemical machinery is thrown
The manufacture of smooth roll is a problem, and the elastic layer of polishing roll, and certain resilient support effect is provided for rigid layer, is being worked
When, buffer function can be played, guarantees the quality of workpiece surface and the uniformity etc. of material removal, but currently, related solid not yet
The document report for tying the manufacture view of abrasive material Roll-to-Roll chemically mechanical polishing roller, more not about concretion abrasive Roll-
The report of to-Roll chemically mechanical polishing roller elastic layer manufacture view.
Currently, particular problem existing for Roll-to-Roll chemical Mechanical Polishing Technique is as follows:
(1) Roll-to-Roll polishing machine is using traditional free abrasive chemical Mechanical Polishing Technique to ultrathin flexible substrate
When material is polished, the inhomogeneities for causing free abrasive grain to be distributed between polishing roll and workpiece makes the material of workpiece each section
Expect that removal rate is inconsistent, influences surface smoothness.(2) due to containing abrasive material in polishing fluid, polishing rear portion abrasive grain can be inlayed
In workpiece surface, not easy cleaning.(3) due to polishing fluid complicated component, the removing of workpiece surface remaining slurry is CMP after polishing
The problem cleaned afterwards.(4) concretion abrasive polishing roll is also easy to produce plastic deformation in surface in polishing, surface gradually become it is smooth or
Blockage of the micro orifice makes it accommodate polishing fluid and excludes the ability reduction of scrap, material removing rate is caused to decline at any time.It needs constantly
Ground finishing and wet polishing pad cause low efficiency to restore its surface roughness and porosity.(5) Roll-to-Roll polishing machine
When concretion abrasive chemically-mechanicapolish polishes, if only rigid layer does not have elastic layer, workpieces processing surface scratching is serious, damages
Height, surface quality are low.
Summary of the invention
The object of the present invention is to provide a kind of Roll-to-Roll chemical machinery throwings high in machining efficiency, abrasive material utilization rate is high
The elastic layer and preparation method thereof of ray machine concretion abrasive polishing roll.
The technical scheme is that a kind of bullet of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll
Property layer, it is characterised in that: component is as follows with weight percent:
Light-cured resin 20%~60%,
Adhesive agent 2% ~ 10%
Reactive diluent 20%~50%
Photoinitiator 5%~15%
Promotor 0.5%~7%
Adjuvant 0.5% ~ 4%,
Filler 0.5% ~ 5%.
The light-cured resin is urethane acrylate of the degree of functionality less than 4, polyester acrylic of the degree of functionality less than 4
The mixture of one or both of ester.
The adhesive agent is the mixing of one or both of linear macromolecule polyacrylate, UV metal bottom inorganic agent
Object.
The reactive diluent is polyethyleneglycol diacrylate, diethylene glycol diacrylate, 1,6-HD two
The mixture of one or both of acrylate, two diacrylates of Poly-propylene glycol, tripropylene glycol diacrylate.
In the photoinitiator 1- hydroxycyclohexyl phenyl ketone, 2,4,6- trimethylbenzoyl phenyl phosphinic acid ethyl ester
One or two kinds of mixtures.
The promotor is the mixture of one or both of tributyl phosphate, polyethers.
The adjuvant is p-hydroxyanisole.
The filler is walnut shell powder, and diameter is 75 μm ~ 125 μm.
A kind of preparation method of the Roll-to-Roll chemical-mechanical polishing mathing elastic layer of concretion abrasive polishing roll, it is special
Sign be it the following steps are included:
(1) prepare several glasswares and blender,
(2) example weighs selected light-cured resin, adhesive agent, reactive diluent, photoinitiator, rush according to a certain mass ratio
Into agent, filler, adjuvant, for use；
(3) elastic layer photocuring mold is mounted on no cured polishing roll matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) load weighted light-cured resin is poured into blender first, be subsequently poured into reactive diluent, photoinitiator,
Promotor, adhesive agent, filler, adjuvant are thoroughly mixed uniformly, become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold of step (3) institute, and filled
Divide full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the good polishing roll of photocuring, install rigid layer light
Curing mold can carry out the photocuring operation of next step rigid layer.
Beneficial effects of the present invention:
The elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll prepared by the present invention, can be real
It is existing:
(1) elastic layer of the concretion abrasive polishing roll is used to support the rigid layer of concretion abrasive polishing roll, in polishing process
In, effective buffer function is played, the processing quality of workpiece surface is improved, ensure that the surface smoothness of processing object.
(2) bonding agent is not needed between the elastic layer and stainless steel base of concretion abrasive polishing pad, takes photocuring technology,
It can make the elastic layer of concretion abrasive polishing pad is strong to be attached on stainless steel base.
(3) bonding agent is not needed between the rigid layer and elastic layer of concretion abrasive polishing pad, takes multi-shell curing real
The now bonding between every layer.
(4) in the Roll-to-Roll chemically mechanical polishing for carrying out ultrathin flexible substrate material, concretion abrasive polishing pad
Elastic layer be used in combination with rigid layer, can be improved the processing quality of workpiece surface, reduce surface and sub-surface damage, improve material
Expect that removal rate and material remove uniformity.
(5) elastic layer of concretion abrasive polishing roll during the polishing process, will not generate swelling because of water suction, in continuous polishing mistake
The physicochemical properties of Cheng Zhong, polishing pad itself are stablized.
The present invention is original, innovative product with independent intellectual property rights, and operating process is simple, low in cost,
It is easy to industrialization and popularization and application, has a vast market foreground, economic benefit and social benefit is significant.
Detailed description of the invention
Fig. 1 is concretion abrasive polishing roll structure chart of the present invention,
Fig. 2 is the elastic layer photocuring mold structure diagram of concretion abrasive polishing roll of the present invention.
Specific embodiment:
Technical solution of the present invention is further illustrated with reference to the accompanying drawings and examples.
Example 1:
Foundation structure of the invention is:
Polishing roll left end support mechanism 1 and polishing roll right end supporting mechanism are respectively equipped in the two sides of concretion abrasive polishing roll
5, the outside of concretion abrasive polishing roll 6 is equipped with concretion abrasive polishing roll base layer 4, sets on the outside of concretion abrasive polishing roll base layer
The outside of elasticity layer 3, elastic layer is equipped with rigid layer 2, and the elastic layer photocuring mold 7 of concretion abrasive polishing roll is sleeved on consolidation
The outside of abrasive polishing roller base layer.
The present invention manufactures and designs a kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll,
Thickness 1.5mm；For rough polishing process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, as shown in Figure 1.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) polyester acrylate 200g, the polyethyleneglycol diacrylate 200g, diethyl two that degree of functionality is 3 are weighed respectively
Alcohol diacrylate 300g, 1- hydroxycyclohexyl phenyl ketone 100g, 2,4,6- trimethylbenzoyl phenyl phosphinic acid ethyl ester
50g, tributyl phosphate 50g, polyethers 20g, p-hydroxyanisole 10g, the processing of 125 μm of diameter of walnut shell powder 50g, UV metal bottom
Agent 20g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) the polyester acrylate 200g by load weighted degree of functionality for 3, polyethyleneglycol diacrylate 200g, diethyl
Omega-diol diacrylate 300g is poured into blender, is stirred evenly, then pours into photoinitiator, promotor, filler, adjuvant, attached
Agent, be thoroughly mixed uniformly, become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 2: manufacturing and designing a kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll,
Thickness 1.5mm；For essence throw process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, as shown in Figure 1.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) urethane acrylate (aliphatic) 300g that degree of functionality is 3, the polyurethane third that degree of functionality is 3 are weighed respectively
Olefin(e) acid ester (aromatic series) 200g, 1,6 hexanediol diacrylate 200g, 1- hydroxycyclohexyl phenyl ketone 50g, tricresyl phosphate fourth
Ester 5g, p-hydroxyanisole 40g, 75 μm of diameter of walnut shell powder 5g, linear macromolecule polyacrylate 50g, UV metal bottom
Manage agent 50g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 urethane acrylate (aliphatic) 300g, the polyurethane that degree of functionality is 3
Acrylate (aromatic series) 200g, 1,6- hexanediyl ester 200g pour into blender, stir evenly, then pour into light-initiated
Agent, promotor, filler, adjuvant, adhesive agent are thoroughly mixed uniformly, become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 3: manufacturing and designing a kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll,
Thickness 1.5mm；For essence throw process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, as shown in Figure 1.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) respectively weigh degree of functionality be 3 polyester acrylate 100g, degree of functionality be 3 urethane acrylate (fat
Race) 300g, diethylene glycol diacrylate 400g, 1- hydroxycyclohexyl phenyl ketone 40g, 2,4,6- trimethylbenzoyl benzene
Base phosphinic acid ethyl ester 40g, polyethers 20g, p-hydroxyanisole 20g, 75 μm of diameter of walnut shell powder 50g, linear macromolecule polypropylene
Sour rouge 30g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 polyester acrylate 100g, degree of functionality be 3 urethane acrylate (rouge
Fat race) 300g, diethylene glycol diacrylate 400g pour into blender, it stirs evenly, then pour into photoinitiator, promotor, fill out
Material, adjuvant, adhesive agent are thoroughly mixed uniformly, become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 4: manufacturing and designing a kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll,
Thickness 1.5mm；For rough polishing process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, as shown in Figure 1.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) respectively weigh degree of functionality be 3 polyester acrylate 150g, degree of functionality be 3 urethane acrylate (fragrance
Race) 200g, diethylene glycol diacrylate 200g, two diacrylates of Poly-propylene glycol 250g, 2,4,6- trimethylbenzoyls
Phenyl-phosphonic acid ethyl ester 80g, tributyl phosphate 30g, p-hydroxyanisole 30g, 100 μm of diameter of walnut shell powder 20g, UV metal bottom
Inorganic agent 40g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 polyester acrylate 150g, degree of functionality be 3 urethane acrylate (virtue
Fragrant race) 200g, diethylene glycol diacrylate 200g, two diacrylates of Poly-propylene glycol 250g pour into blender, it stirs evenly,
Photoinitiator, promotor, filler, adjuvant, adhesive agent are poured into again, are thoroughly mixed uniformly, are become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 5: manufacturing and designing a kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll,
Thickness 1.5mm；For essence throw process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, as shown in Figure 1.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) respectively weigh degree of functionality be 3 polyester acrylate 250g, degree of functionality be 3 urethane acrylate (fragrance
Race) 200g, polyethyleneglycol diacrylate 200g, two diacrylates of Poly-propylene glycol 150g, 2,4,6- trimethylbenzoyls
Phenyl-phosphonic acid ethyl ester 40g, 1- hydroxycyclohexyl phenyl ketone 10g, tributyl phosphate 30g, p-hydroxyanisole 20g, 75 μ of diameter
Walnut shell powder 60g, UV metal bottom inorganic agent 40g of m.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 polyester acrylate 250g, degree of functionality be 3 urethane acrylate (virtue
Fragrant race) 200g, polyethyleneglycol diacrylate 200g, two diacrylates of Poly-propylene glycol 150g pour into blender, it stirs evenly,
Photoinitiator, promotor, filler, adjuvant, adhesive agent are poured into again, are thoroughly mixed uniformly, are become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 6: manufacturing and designing a kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll,
Thickness 1.5mm；For rough polishing process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, as shown in Figure 1.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) urethane acrylate (aliphatic) 150g that degree of functionality is 3, the polyurethane third that degree of functionality is 3 are weighed respectively
Olefin(e) acid ester (aromatic series) 150g, tripropylene glycol diacrylate 200g, two diacrylates of Poly-propylene glycol 250g, 2,4,6- tri-
It is methyl benzoyl phenyl-phosphonic acid ethyl ester 25g, 1- hydroxycyclohexyl phenyl ketone 25g, tributyl phosphate 30g, polyethers 20g, right
Hydroxyanisol 30g, 125 μm of diameter of walnut shell powder 50g, linear macromolecule polyacrylate 30g, UV metal bottom inorganic agent
40g。
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 urethane acrylate (aliphatic) 150g, the polyurethane that degree of functionality is 3
Acrylate (aromatic series) 150g, tripropylene glycol diacrylate 200g, two diacrylates of Poly-propylene glycol 250g are poured into and are stirred
Device is mixed, is stirred evenly, then pours into photoinitiator, promotor, filler, adjuvant, adhesive agent, is thoroughly mixed uniformly, becomes
Mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 7: manufacturing and designing a kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll,
Thickness 1.5mm；For rough polishing process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, as shown in Figure 1.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) respectively weigh degree of functionality be 3 polyester acrylate 200g, polyethyleneglycol diacrylate 200g, 1,6- oneself
Omega-diol diacrylate 300g, 1- hydroxycyclohexyl phenyl ketone 100g, 2,4,6- trimethylbenzoyl phenyl phosphinic acid ethyl ester
50g, tributyl phosphate 50g, polyethers 20g, p-hydroxyanisole 10g, the processing of 125 μm of diameter of walnut shell powder 50g, UV metal bottom
Agent 20g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) the polyester acrylate 200g by load weighted degree of functionality for 3, polyethyleneglycol diacrylate 200g, 1,6-
Hexanediyl ester 300g is poured into blender, is stirred evenly, then pour into photoinitiator, promotor, filler, adjuvant,
Adhesive agent is thoroughly mixed uniformly, becomes mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 8: manufacturing and designing a kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll,
Thickness 1.5mm；For essence throw process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, as shown in Figure 1.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) urethane acrylate (aliphatic) 300g that degree of functionality is 3, the polyurethane third that degree of functionality is 3 are weighed respectively
Olefin(e) acid ester (aromatic series) 200g, polyethyleneglycol diacrylate 200g, 1- hydroxycyclohexyl phenyl ketone 50g, tributyl phosphate
5g, p-hydroxyanisole 40g, 75 μm of diameter of walnut shell powder 5g, the processing of linear macromolecule polyacrylate 50g, UV metal bottom
Agent 50g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 urethane acrylate (aliphatic) 300g, the polyurethane that degree of functionality is 3
Acrylate (aromatic series) 200g, polyethyleneglycol diacrylate 200g pour into blender, stir evenly, then pour into light-initiated
Agent, promotor, filler, adjuvant, adhesive agent are thoroughly mixed uniformly, become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 9: manufacturing and designing a kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll,
Thickness 1.5mm；For essence throw process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, as shown in Figure 1.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) respectively weigh degree of functionality be 3 polyester acrylate 100g, degree of functionality be 3 urethane acrylate (fat
Race) 300g, polyethyleneglycol diacrylate 200g, tripropylene glycol diacrylate 200g, 1- hydroxycyclohexyl phenyl ketone
40g, 2,4,6- trimethylbenzoyl phenyl phosphinic acid ethyl ester 40g, polyethers 20g, p-hydroxyanisole 20g, 75 μm of diameter of core
Peach shell powder 50g, linear macromolecule polyacrylate 30g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 polyester acrylate 100g, degree of functionality be 3 urethane acrylate (rouge
Fat race) 300g, polyethyleneglycol diacrylate 200g, tripropylene glycol diacrylate 200g pour into blender, it stirs evenly,
Photoinitiator, promotor, filler, adjuvant, adhesive agent are poured into again, are thoroughly mixed uniformly, are become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 10: manufacture and design a kind of elasticity of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll
Layer, thickness 1.5mm；For rough polishing process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, such as Fig. 1 institute
Show.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) respectively weigh degree of functionality be 3 polyester acrylate 150g, degree of functionality be 3 urethane acrylate (fragrance
Race) 200g, diethylene glycol diacrylate 200g, 1,6 hexanediol diacrylate 250g, 2,4,6- trimethylbenzoyl
Phenyl-phosphonic acid ethyl ester 80g, tributyl phosphate 30g, p-hydroxyanisole 30g, 100 μm of diameter of walnut shell powder 20g, UV metal bottom
Inorganic agent 40g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 polyester acrylate 150g, degree of functionality be 3 urethane acrylate (virtue
Fragrant race) 200g, diethylene glycol diacrylate 200g, 1,6- hexanediyl ester 250g pour into blender, it stirs evenly,
Photoinitiator, promotor, filler, adjuvant, adhesive agent are poured into again, are thoroughly mixed uniformly, are become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 11: manufacture and design a kind of elasticity of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll
Layer, thickness 1.5mm；Process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, such as Fig. 1 institute are thrown for essence
Show.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) respectively weigh degree of functionality be 3 polyester acrylate 250g, degree of functionality be 3 urethane acrylate (fragrance
Race) 200g, two diacrylates of Poly-propylene glycol 350g, 2,4,6- trimethylbenzoyl phenyl phosphinic acid ethyl ester 40g, 1- hydroxyl rings
Hexyl phenyl ketone 10g, tributyl phosphate 30g, p-hydroxyanisole 20g, 75 μm of diameter of walnut shell powder 60g, UV metal bottom
Inorganic agent 40g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 polyester acrylate 250g, degree of functionality be 3 urethane acrylate (virtue
Fragrant race) 200g, two diacrylates of Poly-propylene glycol 350g pour into blender, stir evenly, then pour into photoinitiator, promotor,
Filler, adjuvant, adhesive agent are thoroughly mixed uniformly, become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 12: manufacture and design a kind of elasticity of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll
Layer, thickness 1.5mm；For rough polishing process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, such as Fig. 1 institute
Show.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) urethane acrylate (aliphatic) 150g that degree of functionality is 3, the polyurethane third that degree of functionality is 3 are weighed respectively
Olefin(e) acid ester (aromatic series) 150g, tripropylene glycol diacrylate 200g, diethylene glycol diacrylate 250g, 2,4,6- front three
Base benzoylphenyl phosphinic acid ethyl ester 25g, 1- hydroxycyclohexyl phenyl ketone 25g, tributyl phosphate 30g, polyethers 20g, to hydroxyl
Base methyl phenyl ethers anisole 30g, 125 μm of diameter of walnut shell powder 50g, linear macromolecule polyacrylate 30g, UV metal bottom inorganic agent 40g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 urethane acrylate (aliphatic) 150g, the polyurethane that degree of functionality is 3
Acrylate (aromatic series) 150g, tripropylene glycol diacrylate 200g, diethylene glycol diacrylate 250g pour into stirring
Device stirs evenly, then pours into photoinitiator, promotor, filler, adjuvant, adhesive agent, is thoroughly mixed uniformly, becomes mixed
Close object；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 13: manufacture and design a kind of elasticity of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll
Layer, thickness 1.5mm；Process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, such as Fig. 1 institute are thrown for essence
Show.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) respectively weigh degree of functionality be 3 polyester acrylate 100g, degree of functionality be 3 urethane acrylate (fat
Race) 300g, tripropylene glycol diacrylate 400g, 1- hydroxycyclohexyl phenyl ketone 40g, 2,4,6- trimethylbenzoyl
Phenyl-phosphonic acid ethyl ester 40g, polyethers 20g, p-hydroxyanisole 20g, 75 μm of diameter of walnut shell powder 50g, linear macromolecule poly- third
Olefin(e) acid rouge 30g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 polyester acrylate 100g, degree of functionality be 3 urethane acrylate (rouge
Fat race) 300g, tripropylene glycol diacrylate 400g pour into blender, stir evenly, then pour into photoinitiator, promotor,
Filler, adjuvant, adhesive agent are thoroughly mixed uniformly, become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 14: manufacture and design a kind of elasticity of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll
Layer, thickness 1.5mm；For rough polishing process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, such as Fig. 1 institute
Show.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) respectively weigh degree of functionality be 3 polyester acrylate 150g, degree of functionality be 3 urethane acrylate (fragrance
Race) 200g, two diacrylates of Poly-propylene glycol 200g, 1,6 hexanediol diacrylate 250g, 2,4,6- trimethylbenzoyl
Base phenyl-phosphonic acid ethyl ester 80g, tributyl phosphate 30g, p-hydroxyanisole 30g, 100 μm of diameter of walnut shell powder 20g, UV metal
Bottom inorganic agent 40g.
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 polyester acrylate 150g, degree of functionality be 3 urethane acrylate (virtue
Fragrant race) 200g, two diacrylates of Poly-propylene glycol 200g, 1,6- hexanediyl ester 250g pour into blender, and stirring is equal
It is even, then photoinitiator, promotor, filler, adjuvant, adhesive agent are poured into, it is thoroughly mixed uniformly, becomes mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
Example 15: manufacture and design a kind of elasticity of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll
Layer, thickness 1.5mm；Process, the concretion abrasive polishing roll base diameter 294mm, width 600mm, such as Fig. 1 institute are thrown for essence
Show.
The quasi- mixture for preparing 1000g:
(1) prepare several glasswares and blender,
(2) respectively weigh degree of functionality be 3 polyester acrylate 250g, degree of functionality be 3 urethane acrylate (fragrance
Race) 200g, 1,6 hexanediol diacrylate 150g, tripropylene glycol diacrylate 200g, 2,4,6- trimethylbenzoyl
Base phenyl-phosphonic acid ethyl ester 40g, 1- hydroxycyclohexyl phenyl ketone 10g, tributyl phosphate 30g, p-hydroxyanisole 20g, diameter
75 μm of walnut shell powder 60g, UV metal bottom inorganic agent 40g；
(3) elastic layer photocuring mold (Fig. 2) is mounted on the polishing roll of matrix (4)；
(4) adjust the cure parameter of photo solidification machine: adjustment polishes roll shaft driving motor revolving speed as table on 60r/min, mold
Identity distance light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) by load weighted degree of functionality be 3 polyester acrylate 250g, degree of functionality be 3 urethane acrylate (virtue
Fragrant race) 200g, 1,6- hexanediyl ester 150g, tripropylene glycol diacrylate 200g pour into blender, and stirring is equal
It is even, then photoinitiator, promotor, filler, adjuvant, adhesive agent are poured into, it is thoroughly mixed uniformly, becomes mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold (Fig. 2) of step (3) institute,
And sufficiently full of the gap between mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the polishing roll of the good elastic layer of photocuring, for use.
After elastic layer photocuring is good, polishing roll is removed, unloads elastic layer photocuring mold (Fig. 2), can be carried out next
The work of step.
It should be understood that for those of ordinary skills, it can be modified or changed according to the above description,
And all these modifications and variations should all belong to the protection domain of appended claims of the present invention.
Claims (3)
1. a kind of elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll, it is characterised in that: component
It is as follows with weight percent:
Light-cured resin 20%~60%,
Adhesive agent 2% ~ 10%,
Reactive diluent 20%~50%,
Photoinitiator 5%~15%,
Promotor 0.5%~7%,
Adjuvant 0.5% ~ 4%,
Filler 0.5% ~ 5%；
The light-cured resin be degree of functionality be 3 urethane acrylate, degree of functionality be 3 polyester acrylate in one
Kind or two kinds of mixture；
The adhesive agent is the mixture of one or both of linear macromolecule polyacrylate, UV metal bottom inorganic agent；
The reactive diluent is polyethyleneglycol diacrylate, diethylene glycol diacrylate, two propylene of 1,6-HD
The mixture of one or both of acid esters, two diacrylates of Poly-propylene glycol, tripropylene glycol diacrylate；
The photoinitiator is 1- hydroxycyclohexyl phenyl ketone, in 2,4,6- trimethylbenzoyl phenyl phosphinic acid ethyl ester
One or two kinds of mixtures；
The promotor is the mixture of one or both of tributyl phosphate, polyethers；
The adjuvant is p-hydroxyanisole；
The filler is walnut shell powder.
2. a kind of elasticity of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll according to claim 1
Layer, it is characterised in that: the diameter of the filler is 75 μm ~ 125 μm.
3. the elastic layer of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll according to claim 1,
It is characterized in that its preparation method the following steps are included:
(1) prepare several glasswares and blender；
(2) example weighs selected light-cured resin, adhesive agent, reactive diluent, photoinitiator, promotion according to a certain mass ratio
Agent, filler, adjuvant, for use；
(3) elastic layer photocuring mold is mounted on no cured polishing roll matrix；
(4) adjust photo solidification machine cure parameter: adjustment polishing roll shaft driving motor revolving speed be 60r/min, mould upper surface away from
Light source 30mm, rotary table motor speed are 60r/min, timer setting 5 minutes；
(5) load weighted light-cured resin is poured into blender first, is subsequently poured into reactive diluent, photoinitiator, promotion
Agent, adhesive agent, filler, adjuvant are thoroughly mixed uniformly, become mixture；
(6) mixture made of step (5) is poured into the mounted elastic layer photocuring mold of step (3) institute, and sufficiently filled
Gap between full mould inner surface and matrix；
(7) mold of step (6) and polishing roll are co-mounted on concretion abrasive photo solidification machine；
(8) booting carries out photocuring；
(9) it after photo solidification machine is out of service, waits 5 minutes, takes out the good polishing roll of photocuring, install rigid layer photocuring
Mold can carry out the photocuring operation of next step rigid layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510549772.5A CN105171627B (en) | 2015-09-01 | 2015-09-01 | A kind of elastic layer and preparation method thereof of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510549772.5A CN105171627B (en) | 2015-09-01 | 2015-09-01 | A kind of elastic layer and preparation method thereof of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105171627A CN105171627A (en) | 2015-12-23 |
| CN105171627B true CN105171627B (en) | 2018-12-04 |
Family
ID=54894295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510549772.5A Expired - Fee Related CN105171627B (en) | 2015-09-01 | 2015-09-01 | A kind of elastic layer and preparation method thereof of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105171627B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106346382A (en) * | 2016-08-29 | 2017-01-25 | 华侨大学 | Preparation method of braze welding grinding wheel with controllable abrasive cluster arrangement patterns |
| CN115558411B (en) * | 2022-11-09 | 2023-10-20 | 河北思瑞恩新材料科技有限公司 | Velvet-based V-grid-shaped three-dimensional abrasive and preparation method thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5178646A (en) * | 1992-01-22 | 1993-01-12 | Minnesota Mining And Manufacturing Company | Coatable thermally curable binder presursor solutions modified with a reactive diluent, abrasive articles incorporating same, and methods of making said abrasive articles |
| FR2811922B1 (en) * | 2000-07-20 | 2003-01-10 | Optoform Sarl Procedes De Prot | METAL POWDER LOADED PASTE COMPOSITION, PROCESS FOR OBTAINING METAL PRODUCTS FROM THE SAME, AND METAL PRODUCT OBTAINED BY SAID PROCESS |
| KR100905266B1 (en) * | 2000-12-01 | 2009-06-29 | 도요 고무 고교 가부시키가이샤 | Polishing pad |
| CN100506487C (en) * | 2007-06-29 | 2009-07-01 | 南京航空航天大学 | Solidified abrasive lapping polishing pad having self-modifying function and preparation method |
| CN101428404A (en) * | 2008-12-22 | 2009-05-13 | 南京航空航天大学 | Fixed abrasive grinding polishing pad and method of manufacturing the same |
| CN103381573B (en) * | 2013-05-27 | 2016-08-10 | 河南科技学院 | A kind of SiC single crystal slice lapping operation concretion abrasive cmp dish |
-
2015
- 2015-09-01 CN CN201510549772.5A patent/CN105171627B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN105171627A (en) | 2015-12-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105150120B (en) | A kind of Roll to Roll chemical-mechanical polishing mathings rigid layer of concretion abrasive polishing roll and preparation method thereof | |
| CN105171627B (en) | A kind of elastic layer and preparation method thereof of Roll-to-Roll chemical-mechanical polishing mathing concretion abrasive polishing roll | |
| CN102601747B (en) | A kind of grinding pad and preparation method thereof, using method | |
| CN104440497A (en) | Polishing device and method for cambered surfaces of mobile phone panels | |
| CN105215865B (en) | A kind of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll and preparation method thereof | |
| CN108481217A (en) | A kind of pyramid type solid grinding tool and preparation method for metallic mobile phone center of polishing | |
| CN105368324A (en) | Oily diamond grinding lubricant | |
| CN106634836A (en) | Diamond paste as well as preparation method and application thereof | |
| CN110052917A (en) | A kind of sapphire polishing processing method based on concretion abrasive technology | |
| CN111251175A (en) | Grinding pad and preparation method and application thereof | |
| CN109318136A (en) | A kind of flexible polishing device | |
| CN202507174U (en) | Fixture for grinding glass surface | |
| CN102205517A (en) | Method for thinning glass | |
| CN107571166B (en) | A kind of sand paper and preparation method thereof | |
| CN107053030A (en) | A kind of fan-shaped combined type polishing disk with gradient function | |
| CN109366347A (en) | A kind of grinding pad and preparation method thereof suitable for hard brittle material precise finiss | |
| CN206010821U (en) | Disk device repaiied by a kind of liquid-crystalline glasses polishing disk | |
| CN115401530A (en) | Shape-controlled flexible polishing method for microarray mold | |
| CN204772145U (en) | SEM grinds appearance abrasive paper | |
| CN110695773B (en) | Scratch repair process for glass or sapphire panel on surface of electronic product | |
| JP2022108264A (en) | Soft polishing disc friendly to environment and processing technique thereof | |
| CN209207277U (en) | Flexible polishing device | |
| CN206416060U (en) | A kind of column bar combined type polishing disk with gradient function | |
| CN207629822U (en) | A kind of copper-based axial bearing surface scratching technique and device | |
| CN206795536U (en) | A kind of optics is high to throw machine equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181204 Termination date: 20210901 |