CN107053030A - A kind of fan-shaped combined type polishing disk with gradient function - Google Patents
A kind of fan-shaped combined type polishing disk with gradient function Download PDFInfo
- Publication number
- CN107053030A CN107053030A CN201710010649.5A CN201710010649A CN107053030A CN 107053030 A CN107053030 A CN 107053030A CN 201710010649 A CN201710010649 A CN 201710010649A CN 107053030 A CN107053030 A CN 107053030A
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- Prior art keywords
- polishing disk
- fanlike die
- level
- elasticity
- modulus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 63
- 238000012545 processing Methods 0.000 claims abstract description 40
- 238000000034 method Methods 0.000 claims abstract description 12
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000009825 accumulation Methods 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims 1
- 238000009826 distribution Methods 0.000 abstract description 14
- 238000000227 grinding Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 15
- 239000000203 mixture Substances 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 2
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
- B24B37/245—Pads with fixed abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
Abstract
The invention discloses a kind of fan-shaped combined type polishing disk with gradient function, including polishing disk body, the polishing disk body is the fixed polishing disk that will not be rotated, the polishing disk is scattered in multilayer in the axial direction, and every layer of polishing disk is combined by the viscous mill layer of some coaxial sectors, the modulus of elasticity of the viscous mill layer of the sector on every layer of abrasive disk is differed and in the distribution of continuous gradient formula；Every layer of polishing disk is distributed in continuous gradient formula from top to bottom in its modulus of elasticity of any position of radial direction.The present invention possesses grinding and polishing while completion workpiece, realizes the high-efficiency and continuous processing of workpiece；Polishing disk is combined by multiple fan-shaped viscous mill layers, therefore with convertibility；The combination of the viscous mill layer of sector is various, and not only formula is distributed in gradient on overall axial direction, and can be distributed in the gradient type for radially or axially showing modulus of elasticity, makes to obtain more preferable crudy during work pieces process.
Description
Technical field
The present invention relates to Ultraprecision Machining field, in particular, more particularly to a kind of fan with gradient function
Shape combined type polishing disk.
Background technology
Traditional utilization abrasive disk or the processing method of polishing disk will be ground to be separated with glossing so that by overgrinding
To replacing polishing disk is needed during polishing, processing efficiency is difficult to improve.Meanwhile, currently the preparation to abrasive disk or polishing disk is all one
Disk, and card grinding single property is made in secondary property, and processing is extremely difficult to required material surface quality.
In past decades, the research and development to material is concentrated mainly on homogeneous material, i.e., its overall structure and
Performance does not change with locus.With the continuous cross development of subject, a kind of concept of function-graded material is rapidly emerging
Rise.So-called function-graded material, (Functionally Gradient Materials, abbreviation FGM) is the preparation in material
During, the material for selecting two or more property different, by microscopic (including the group for continuously controlling material
Into form and combination including, structure and space etc.) make the new material that its composition and tissue are all in consecutive variations.
The SiO that the research team of Anhui University of Technology delivered in 20142/CeO2The preparation of abrasive compound and in sapphire
One kind is proposed in application in wafer polishing SiO is prepared for using homogeneous precipitation method2/CeO2Abrasive compound, and for sapphire
The chemically mechanical polishing of chip, result of study shows, although it is slightly below single to polish material removal rate using abrasive compound
SiO2Sapphire wafer surface quality after abrasive material, but polishing is significantly improved, and can meet sapphire and make light emitting diode
The technological requirement of substrate.The functionally gradient that research team of Yantai Branch, No.5 Inst., China Weaponry Industry delivered in 2014
The progress of FGM is proposed in the technology of preparing and its Development Status of material, emphasis summarizes functionally gradient material
The preparation method and performance evaluation of material, wherein particularly point out the modulus of elasticity of FGM, thermal conductivity, thermal coefficient of expansion and
Composition is in consecutive variations in a thickness direction, and with designability, can pointedly change each component material volume content
Space distribution rule, optimizes inside configuration stress distribution.The enhancing iron that the research team of Xi'an University of Technology delivered in 2014
Propose and prepared using in-situ reaction on HT300 surfaces in the in-situ preparation and its abrasive wear characteristic of base gradient composite material
Ramet enhancing surface gradient composites, and microstructure, thing phase composition, microhardness and abrasive particle mill to composite bed
Damage performance to be characterized, from surface dense layer to matrix, its tissue, composition, hardness distribution change in gradient.Meanwhile, award
A kind of power notification number CN103432948B closed agitator produced for soft fixed grain all living creatures of Chinese invention patent is carried
Go out a kind of for mixtures such as more preferable uniform stirring high polymer, abrasive material, curing agent, initiators, it is ensured that preparing has gradient
The realization of function abrasive disk.
Therefore, it is to grind to design a kind of surface and be also distributed using gradient type and changed convenient polishing disk and workpiece is processed
Grind the inexorable trend of polishing development.But existing gradient type polishing disk is often all fixed gradient, is fixed in gradient
Optional position abrasion is excessive after getting off all can produce influence to ensuing processing, and these gradient type polishing disks can not all be changed
Changed and combined so that result in gradient type polishing disk only can adapt to a kind of processing of workpiece, it is difficult to for difference
Workpiece adaptability change polishing disk gradient distribution.
The content of the invention
The purpose of invention is to solve existing gradient type abrasive disk to only exist to be changed in gradient from top layer to nexine, is changed
It is inconvenient and the problem of a variety of different workpieces are ground polishing can not be adapted to there is provided a kind of with gradient function
Fan-shaped combined type polishing disk, can realize polishing panel surface gradient type distribution, while realize polishing dish axle to gradient type be distributed,
The different workpiece of convenient processing, while it is very convenient to change abrading section.
The present invention is achieved through the following technical solutions above-mentioned purpose：A kind of fan-shaped combined type polishing with gradient function
Disk, including polishing disk pedestal, one-level fanlike die block and two grades of fanlike die blocks that polishing disk body is divided into, all one-levels fans
One-level fanlike die block and two grades of flat back dies in shape module and the two grades of grade storehouses of fanlike die block formation with multiple gradients, grade storehouse
Block is respectively provided with modulus of elasticity from the minimum modulus of elasticity of process requirements to the multigroup of processing request highest modulus of elasticity, by several
One-level fanlike die block and several two grades of fanlike die blocks are combined and spliced that complete polishing disk is formed on polishing disk pedestal.
Further, above-mentioned any one one-level fanlike die block or two grades of fanlike die blocks diametrically show modulus of elasticity
Gradient type distribution.
Further, if any one above-mentioned one-level fanlike die block or two grades of fanlike die blocks are by the viscous mill layer accumulation of dried layer
Into, and the modulus of elasticity of every layer of viscous mill layer differs.
Further, two grades of fanlike die blocks are divided into some three-level fanlike die blocks, and all three-level fanlike die blocks are simultaneously
Enter the grade storehouse that formation is more refined in the grade storehouse, the modulus of elasticity of the three-level fanlike die block is axially or radially being presented
Go out the gradient type distribution of modulus of elasticity.
Further, the size dimension of all one-level fanlike die blocks is identical in the grade storehouse, all two grades of sectors
The size dimension of module is identical, and the size dimension of all three-level fanlike die blocks is identical.
The beneficial effects of the present invention are：The present invention is simple and compact for structure, and production cost is low, can be according to processing workpiece
Demand quickly prepares polishing disk, and the convenient processing request for workpiece produces the polishing disk for adapting to work pieces process mode,
Conveniently realize the high-efficiency and continuous processing of workpiece；Polishing disk is combined by multiple fanlike die blocks, therefore with convertibility；
Fanlike die block viscous mill layer combination it is various, not only on overall axial direction in gradient formula be distributed, and can radially or
Person axially shows the gradient type distribution of modulus of elasticity, makes to obtain more preferable crudy during work pieces process；With polishing disk
Size increase, the processing of the workpiece of at least four different processing requests can be completed simultaneously, improve polishing disk application it is wide
General property；Modulus of elasticity is distributed in continuous gradient formula, and its distribution ensure that the crudy of workpiece is more preferable.
Brief description of the drawings
Fig. 1 is the surface structure schematic diagram of polishing disk body of the present invention.
Fig. 2 is the structural representation of the single fan-shaped viscous mill layer of the present invention.
Fig. 3 is a kind of axial stratification schematic diagram of the fan-shaped combined type polishing disk with gradient function of the present invention.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings：
As shown in Figures 1 to 3, a kind of fan-shaped combined type polishing disk with gradient function, including polishing disk pedestal, by polishing
One-level fanlike die block and two grades of fanlike die blocks that disk body is divided into, all one-level fanlike die blocks and two grades of fanlike die blocks are formed
One-level fanlike die block and two grades of fanlike die blocks are respectively provided with modulus of elasticity and needed from processing in grade storehouse with multiple gradients, grade storehouse
Minimum modulus of elasticity is sought to the multigroup of processing request highest modulus of elasticity, by several one-level fanlike die blocks and several two grades of fans
The splicing of shape block combiner forms complete polishing disk on polishing disk pedestal.
It is different that above-mentioned any one one-level fanlike die block or two grades of fanlike die blocks are diametrically divided into some modulus of elasticity
Annular region.
If any one above-mentioned one-level fanlike die block or two grades of fanlike die blocks are formed by the viscous mill layer accumulation of dried layer, and every layer
The modulus of elasticity of viscous mill layer is differed.
Two grades of fanlike die blocks are divided into some three-level fanlike die blocks, and all three-level fanlike die blocks are incorporated to the grade
The grade storehouse more refined is formed in storehouse, the modulus of elasticity of the three-level fanlike die block is axially or radially showing modulus of elasticity
Gradient type distribution.And so on, fanlike die block can be subdivided into multistage.
The size dimension of all one-level fanlike die blocks is identical in the grade storehouse, the size of all two grades of fanlike die blocks
Size is identical, and the size dimension of all three-level fanlike die blocks is identical.
For a variety of different processing workpiece in the case ofs of processing simultaneously, if as long as list during any one processing work pieces process
During one modulus of elasticity, corresponding one-level fanlike die block, two grades of fanlike die blocks and three-level can be selected according to the volume of processing workpiece
Fanlike die block is combined into polishing disk, and processing workpiece is processed with single fanlike die block, and its working method is processing workpiece
Rotate, it is indefinite that polishing disk is fixed, a kind of processing for processing workpiece can be realized in each sector region of polishing disk being combined into,
So that single polishing disk possesses while processing the requirement of multiple processing workpiece.
For a variety of different processing workpiece in the case ofs of processing simultaneously, if needing to connect during any one processing work pieces process
During multiple modulus of elasticity of continuous gradient distribution, corresponding one-level fanlike die block, two can be selected according to the volume of processing workpiece
Level fanlike die block and three-level fanlike die block are combined into polishing disk, and these one-level fanlike die blocks, two grades of fanlike die blocks and three-level are fan-shaped
The gradient type that viscous mill layer in module is diametrically adapted to correspondence processing workpiece using the combination formation of annular region is distributed, can
To be processed with single fanlike die block to processing workpiece, its working method rotates for processing workpiece, and it is indefinite that polishing disk is fixed,
Processing workpiece is processed successively on single fanlike die block in multiple annular regions.
For a variety of different processing workpiece in the case ofs of processing simultaneously, if needing to connect during any one processing work pieces process
During multiple modulus of elasticity of continuous gradient distribution, corresponding one-level fanlike die block, two can be selected according to the volume of processing workpiece
Level fanlike die block and three-level fanlike die block are combined into polishing disk, and these one-level fanlike die blocks, two grades of fanlike die blocks and three-level are fan-shaped
Viscous mill layer in module shows the gradient type distribution of modulus of elasticity simultaneously on radial and axial, and its working method is processing work
Part is rotated, and it is indefinite that polishing disk is fixed, and processing workpiece carries out a variety of different processing successively on single fanlike die block.
Above-described embodiment is presently preferred embodiments of the present invention, is not the limitation to technical solution of the present invention, as long as
The technical scheme that can be realized without creative work on the basis of above-described embodiment, is regarded as falling into patent of the present invention
Rights protection scope in.
Claims (5)
1. a kind of fan-shaped combined type polishing disk with gradient function, it is characterised in that：Including polishing disk pedestal, by polishing disk sheet
One-level fanlike die block and two grades of fanlike die blocks that body is divided into, all one-level fanlike die blocks and two grades of fanlike die block formation have
One-level fanlike die block and two grades of fanlike die blocks are respectively provided with modulus of elasticity from process requirements most in the grade storehouse of multiple gradients, grade storehouse
Low modulus of elasticity is multigroup to processing request highest modulus of elasticity, by several one-level fanlike die blocks and several two grades of flat back dies
Block is combined and spliced to form complete polishing disk on polishing disk pedestal.
2. a kind of fan-shaped combined type polishing disk with gradient function according to claim 1, it is characterised in that：Above-mentioned
One one-level fanlike die block of meaning or two grades of fanlike die blocks are diametrically divided into the different annular region of some modulus of elasticity.
3. a kind of fan-shaped combined type polishing disk with gradient function according to claim 1, it is characterised in that：Above-mentioned
If one one-level fanlike die block of meaning or two grades of fanlike die blocks are formed by the viscous mill layer accumulation of dried layer, and the springform of every layer of viscous mill layer
Amount is differed.
4. a kind of fan-shaped combined type polishing disk with gradient function according to Claims 2 or 3, it is characterised in that：Institute
State two grades of fanlike die blocks and be divided into some three-level fanlike die blocks, all three-level fanlike die blocks are incorporated in the grade storehouse and formed more
The grade storehouse of refinement, the modulus of elasticity of the three-level fanlike die block is axially or radially showing the gradient type point of modulus of elasticity
Cloth.
5. a kind of fan-shaped combined type polishing disk with gradient function according to claim 4, it is characterised in that：It is described etc.
The size dimension of all one-level fanlike die blocks is identical in level storehouse, and the size dimension of all two grades of fanlike die blocks is identical,
The size dimension of all three-level fanlike die blocks is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710010649.5A CN107053030A (en) | 2017-01-06 | 2017-01-06 | A kind of fan-shaped combined type polishing disk with gradient function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710010649.5A CN107053030A (en) | 2017-01-06 | 2017-01-06 | A kind of fan-shaped combined type polishing disk with gradient function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107053030A true CN107053030A (en) | 2017-08-18 |
Family
ID=59624463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710010649.5A Pending CN107053030A (en) | 2017-01-06 | 2017-01-06 | A kind of fan-shaped combined type polishing disk with gradient function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107053030A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109682698A (en) * | 2018-09-09 | 2019-04-26 | 浙江工业大学 | A kind of processing test device and its test method for gradient function polishing disk |
| CN109940467A (en) * | 2019-03-12 | 2019-06-28 | 桂林创源金刚石有限公司 | A kind of burnishing device and manufacturing method |
| CN111037483A (en) * | 2019-12-23 | 2020-04-21 | 郑州安信研磨科技有限公司 | Preparation method of environment-friendly flower-piece diamond grinding disc |
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| CN1809444A (en) * | 2003-06-18 | 2006-07-26 | 株式会社荏原制作所 | Substrate polishing apparatus and substrate polishing method |
| CN102658528A (en) * | 2012-02-24 | 2012-09-12 | 浙江工业大学 | Graded structured composite elastic grinding and polishing disc |
| US20160107290A1 (en) * | 2014-10-17 | 2016-04-21 | Applied Materials, Inc. | Cmp pad construction with composite material properties using additive manufacturing processes |
| CN206839904U (en) * | 2017-01-06 | 2018-01-05 | 浙江工业大学 | A kind of fan-shaped combined type polishing disk |
-
2017
- 2017-01-06 CN CN201710010649.5A patent/CN107053030A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1330581A (en) * | 1998-11-09 | 2002-01-09 | 东丽株式会社 | Polishing pad and polishing device |
| CN1551303A (en) * | 1999-03-30 | 2004-12-01 | ������������ʽ���� | Polishing disk, polishing machine and method for manufacturing semiconductor |
| CN1809444A (en) * | 2003-06-18 | 2006-07-26 | 株式会社荏原制作所 | Substrate polishing apparatus and substrate polishing method |
| CN102658528A (en) * | 2012-02-24 | 2012-09-12 | 浙江工业大学 | Graded structured composite elastic grinding and polishing disc |
| US20160107290A1 (en) * | 2014-10-17 | 2016-04-21 | Applied Materials, Inc. | Cmp pad construction with composite material properties using additive manufacturing processes |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109682698A (en) * | 2018-09-09 | 2019-04-26 | 浙江工业大学 | A kind of processing test device and its test method for gradient function polishing disk |
| CN109682698B (en) * | 2018-09-09 | 2023-11-28 | 浙江工业大学 | Processing testing device and testing method for gradient function polishing disc |
| CN109940467A (en) * | 2019-03-12 | 2019-06-28 | 桂林创源金刚石有限公司 | A kind of burnishing device and manufacturing method |
| CN109940467B (en) * | 2019-03-12 | 2023-12-08 | 桂林创源金刚石有限公司 | Polishing device and manufacturing method |
| CN111037483A (en) * | 2019-12-23 | 2020-04-21 | 郑州安信研磨科技有限公司 | Preparation method of environment-friendly flower-piece diamond grinding disc |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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Application publication date: 20170818 |