CN105158945A - Substrate static electricity testing device - Google Patents
Substrate static electricity testing device Download PDFInfo
- Publication number
- CN105158945A CN105158945A CN201510684858.9A CN201510684858A CN105158945A CN 105158945 A CN105158945 A CN 105158945A CN 201510684858 A CN201510684858 A CN 201510684858A CN 105158945 A CN105158945 A CN 105158945A
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- CN
- China
- Prior art keywords
- electrostatic
- static electricity
- substrate
- control device
- sent out
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
Abstract
The invention discloses a substrate static electricity testing device which comprises a substrate loading table, and a static electricity generation device and a control device which are arranged above the substrate loading table. A static electricity induction device is arranged on the substrate loading table. The static electricity generation device and the static electricity induction device are in communication connection with the control device. The control device controls the static electricity generation device to radiate static electricity. The static electricity induction device inducts static electricity information circulating from a substrate and transmits the static electricity information to the control device. The control device processes the static electricity information and generates a static electricity detection result. According to the substrate static electricity testing device, static electricity discharge electric parameters of the static electricity generation device can be precisely adjusted through a static electricity discharge adjusting device, and the requirement for measuring stability, accuracy, repeatability and the like is met. According to the substrate static electricity testing device, static electricity detectors are evenly distributed on a detection area, the static electricity circulation path can be detected, a static electricity transmission path image is generated on the control device, and tracking analysis is facilitated. According to the substrate static electricity testing device, the static electricity transmission path can be detected and tracked, the static electricity damage reason is analyzed in an assisted mode, abnormity analysis is assisted, and the product static electricity weak position is improved.
Description
Technical field
The present invention relates to a kind of substrate electrostatic test device, belong to display device manufacturing technology field.
Background technology
Liquid crystal indicator, because having the advantages such as low in energy consumption, radiationless, has now occupied the leading position in plane display field.In existing liquid crystal indicator, liquid crystal panel generally includes the array base palte and color membrane substrates that are oppositely arranged, and the liquid crystal layer be filled between array base palte and color membrane substrates, wherein, array base palte is provided with multiple thin film transistor (TFT) and multiple pixel electrode, pixel electrode is connected with the drain electrode of thin film transistor (TFT), and color membrane substrates is provided with the public electrode corresponding with pixel electrode.When by thin film transistor (TFT) being pixel electrode charging, between pixel electrode and public electrode, form electric field, thus the liquid crystal deflecting element in the controllable pixels electrode pair liquid crystal region of answering, and then realize crystal display.
Feed back in the development technique of liquid crystal indicator, in the process such as product evaluation analysis or before liquid crystal indicator is sold to user, frequent needs are to assembling complete array base palte through antistatic test, along with the progress of technology and more and more stricter to the requirement of product antistatic effect, the requirement of ESD (Electro-Staticdischarge, Electro-static Driven Comb) checkout equipment is also constantly being increased.Accurate and the stability of static sent out angle, radiation rifle head and product distance, sparking voltage is all need Consideration.And to be correlated with the requirement of failure analysis due to ESD, obvious all the more to the tracking demand of electrostatic transmission path.
The existing ESD of beating equipment mostly is hand-held, and Electro-static Driven Comb angle is comparatively large with distance man's activity, is difficult to accurately control static sent out angle, radiation rifle head and product distance, sparking voltage etc., to electrostatic test stability and accuracy poor, experimental repeatability is poor.And tracking display cannot be carried out to the electrostatic path that circulates, the parsing requirement bad to ESD can not be met.
Summary of the invention
The technical problem to be solved in the present invention is: the antistatic property how facilitating accurate duplicate detection substrate.
The invention provides a kind of substrate electrostatic test device for achieving the above object, comprise baseplate carrier, be arranged on electrostatic generator above baseplate carrier and control device;
Described baseplate carrier is provided with electrostatic inductor;
Described electrostatic generator and described electrostatic inductor and described control device communicate to connect;
Described control device controls described electrostatic generator radiation electrostatic, and the induction of described electrostatic inductor is from the electrostatic information of substrate circulation and transfer to described control device, and described control device is according to described electrostatic information process and generate electrostatic detection result.
Alternatively, also comprise electrostatic generator support, described electrostatic inductor is arranged on described electrostatic generator support;
Described electrostatic generator also comprises static sent out regulating device, and described static sent out regulating device regulates the static sent out parameter of described electrostatic generator.
Alternatively, described static sent out regulating device and described control device communicate to connect;
Described static sent out regulating device regulates described static sent out parameter according to the control command of described control device.
Alternatively, described static sent out parameter comprises:
In static sent out angle, static sent out distance, static discharge number of times, static discharge voltage, static sent out position any one or multiple.
Alternatively, described electrostatic inductor is the multiple Cylindrical Electrostatic probes being distributed in described baseplate carrier surface.
Alternatively, described multiple Cylindrical Electrostatic probe is evenly distributed on described baseplate carrier surface.
Alternatively, also apparatus for fixing substrate is comprised;
Described apparatus for fixing substrate is arranged on described baseplate carrier surface.
Alternatively, described apparatus for fixing substrate comprises the vacuum suction sucker being arranged on baseplate carrier surface and the vacuum suction pipeline be connected with described vacuum suction sucker.
Alternatively, described electrostatic detection result is electrostatic transmission path image.
Substrate electrostatic test device provided by the invention, by the angle of static sent out regulating device fine adjustment electrostatic generator release electrostatic with distance, voltage swing and discharge time, the Electro-static Driven Comb electrical quantitys such as discharge position are set, meet Measurement sensibility, the requirement such as accurate, repeated.Be uniformly distributed Cylindrical Electrostatic probe by surveyed area, electrostatic circulation path can be detected, control device generates electrostatic transmission path image, is convenient to trace analysis.The present invention can detecting and tracking electrostatic transmission path, helps to analyze electrostatic damage reason, and auxiliary failure analysis, improves product electrostatic weakness.
Accompanying drawing explanation
Fig. 1 is substrate electrostatic test device structural representation of the present invention;
Fig. 2 is baseplate carrier structural representation of the present invention;
Fig. 3 is apparatus for fixing substrate structural representation of the present invention;
Fig. 4 is the vacuum pan schematic top plan view of apparatus for fixing substrate in Fig. 3.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
As shown in Figure 1, the invention provides a kind of substrate electrostatic test device, comprising the baseplate carrier 1 for placing substrate 5, be arranged on electrostatic generator 2 above baseplate carrier 1 and control device 3; Baseplate carrier 1 is provided with electrostatic inductor 4; Electrostatic generator 2 and electrostatic inductor 4 communicate to connect with control device 3; Control device 3 controls electrostatic generator 1 and radiates electrostatic, and electrostatic inductor 4 is responded to the electrostatic information that circulates from substrate 5 and transferred to control device 3, and control device 3 is according to electrostatic information process and generate electrostatic detection result.Detailed description is launched to substrate electrostatic test device provided by the invention below.
As shown in Figure 1, substrate electrostatic test device provided by the invention also comprises electrostatic generator support 6, and electrostatic generator 2 is preferably arranged on electrostatic generator support 6; Electrostatic generator 2 also comprises static sent out regulating device 7, and static sent out regulating device 7 regulates the static sent out parameter of electrostatic generator 2.Static sent out regulating device 7 is preferably arranged on electrostatic generator support 6.As shown in Figure 1, static sent out regulating device 7 and control device 3 communicate to connect; Static sent out regulating device 7 regulates static sent out parameter according to the control command of control device 3.Static sent out parameter comprises: in static sent out angle, static sent out distance, static discharge number of times, static discharge voltage, static sent out position any one or multiple.
As shown in Figure 1 and Figure 2, electrostatic inductor 4 is the multiple Cylindrical Electrostatic probes being distributed in baseplate carrier 1 surface.Multiple Cylindrical Electrostatic probe is evenly distributed on baseplate carrier 1 surface.The various electrostatic currents that each Cylindrical Electrostatic probe reception electrostatic generator 2 sends turn over the electrostatic information of substrate 5.The electrostatic information received is transferred to control device 3 by each Cylindrical Electrostatic probe.The electrostatic information analysis received is drawn electrostatic detection result according to each Cylindrical Electrostatic probe by control device 3, and electrostatic detection result is preferably electrostatic transmission path image, and image comprises electrostatic circulation path.Be convenient to trace analysis electrostatic damage reason by electrostatic transmission path image, improve properties of product.
As shown in Figure 3, substrate electrostatic test device provided by the invention, also comprises apparatus for fixing substrate; Apparatus for fixing substrate is arranged on the surface of baseplate carrier 1, for the fixing base 5 when the antistatic property of test base.As Fig. 4, preferably apparatus for fixing substrate comprises the vacuum suction sucker 8 being arranged on baseplate carrier 1 surface and the vacuum suction pipeline 9 be connected with vacuum suction sucker.As shown in Figure 3, when the antistatic property of test base 5, vacuum suction pipeline 9 vacuumizes to vacuum suction sucker 8, and substrate 5 is stably fixed on baseplate carrier 1.
In sum, substrate electrostatic test device provided by the invention, by the angle of static sent out regulating device fine adjustment electrostatic generator release electrostatic with distance, voltage swing and discharge time, the Electro-static Driven Comb electrical quantitys such as discharge position are set, meet Measurement sensibility, the requirement such as accurate, repeated.Be uniformly distributed Cylindrical Electrostatic probe by surveyed area, electrostatic circulation path can be detected, control device generates electrostatic transmission path image, is convenient to trace analysis.The present invention can detecting and tracking electrostatic transmission path, helps to analyze electrostatic damage reason, and auxiliary failure analysis, improves product electrostatic weakness.
Above embodiment is only for illustration of the present invention; and be not limitation of the present invention; the those of ordinary skill of relevant technical field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all equivalent technical schemes also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (9)
1. a substrate electrostatic test device, is characterized in that: comprise baseplate carrier, be arranged on electrostatic generator above baseplate carrier and control device;
Described baseplate carrier is provided with electrostatic inductor;
Described electrostatic generator and described electrostatic inductor and described control device communicate to connect;
Described control device controls described electrostatic generator radiation electrostatic, and the induction of described electrostatic inductor is from the electrostatic information of substrate circulation and transfer to described control device, and described control device is according to described electrostatic information process and generate electrostatic detection result.
2. substrate electrostatic test device as claimed in claim 1, it is characterized in that, also comprise electrostatic generator support, described electrostatic inductor is arranged on described electrostatic generator support;
Described electrostatic generator also comprises static sent out regulating device, and described static sent out regulating device regulates the static sent out parameter of described electrostatic generator.
3. substrate electrostatic test device as claimed in claim 2, it is characterized in that, described static sent out regulating device and described control device communicate to connect;
Described static sent out regulating device regulates described static sent out parameter according to the control command of described control device.
4. substrate electrostatic test device as claimed in claim 2, it is characterized in that, described static sent out parameter comprises:
In static sent out angle, static sent out distance, static discharge number of times, static discharge voltage, static sent out position any one or multiple.
5. substrate electrostatic test device as claimed in claim 1, it is characterized in that, described electrostatic inductor is the multiple Cylindrical Electrostatic probes being distributed in described baseplate carrier surface.
6. substrate electrostatic test device as claimed in claim 5, it is characterized in that, described multiple Cylindrical Electrostatic probe is evenly distributed on described baseplate carrier surface.
7. substrate electrostatic test device as claimed in claim 1, is characterized in that, also comprise apparatus for fixing substrate;
Described apparatus for fixing substrate is arranged on described baseplate carrier surface.
8. substrate electrostatic test device as claimed in claim 7, it is characterized in that, described apparatus for fixing substrate comprises the vacuum suction sucker being arranged on baseplate carrier surface and the vacuum suction pipeline be connected with described vacuum suction sucker.
9. the substrate electrostatic test device as described in claim 1-8 any one, is characterized in that, described electrostatic detection result is electrostatic transmission path image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510684858.9A CN105158945A (en) | 2015-10-20 | 2015-10-20 | Substrate static electricity testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510684858.9A CN105158945A (en) | 2015-10-20 | 2015-10-20 | Substrate static electricity testing device |
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| CN105158945A true CN105158945A (en) | 2015-12-16 |
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| CN201510684858.9A Pending CN105158945A (en) | 2015-10-20 | 2015-10-20 | Substrate static electricity testing device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106124891A (en) * | 2016-06-21 | 2016-11-16 | 西南交通大学 | A kind of planar circuit test space electromagnetic interference method |
| CN106142133A (en) * | 2016-06-20 | 2016-11-23 | 昆山国显光电有限公司 | Mechanical arm and electrostatic detection methods thereof |
| CN106249085A (en) * | 2016-08-30 | 2016-12-21 | 京东方科技集团股份有限公司 | Static discharge detection method and system |
| CN108226658A (en) * | 2016-12-21 | 2018-06-29 | 财团法人工业技术研究院 | Static electricity detection system and method |
| CN108267655A (en) * | 2018-01-15 | 2018-07-10 | 郑州云海信息技术有限公司 | A kind of device and method for assessing electrostatic discharge susceptivity power |
| CN110646695A (en) * | 2019-09-29 | 2020-01-03 | 歌尔股份有限公司 | Static test tool |
| CN111257714A (en) * | 2020-01-17 | 2020-06-09 | 上海华力集成电路制造有限公司 | Electrostatic measuring apparatus and electrostatic measuring method |
| CN111610383A (en) * | 2020-05-28 | 2020-09-01 | 厦门天马微电子有限公司 | Electrostatic detection device and electrostatic detection system |
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| CN101285948A (en) * | 2008-05-30 | 2008-10-15 | 福建华映显示科技有限公司 | LCM half-finished product electrostatic resistance limit voltage resistant test method |
| CN103091574A (en) * | 2011-10-28 | 2013-05-08 | 纬创资通股份有限公司 | Electrostatic field interference testing device and method |
| CN103267913A (en) * | 2013-05-02 | 2013-08-28 | 扬州丰登精密机械有限公司 | Induction type static electricity testing device |
| CN104730367A (en) * | 2013-12-24 | 2015-06-24 | 鸿富锦精密工业（深圳）有限公司 | Static test jig |
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2015
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101285948A (en) * | 2008-05-30 | 2008-10-15 | 福建华映显示科技有限公司 | LCM half-finished product electrostatic resistance limit voltage resistant test method |
| CN103091574A (en) * | 2011-10-28 | 2013-05-08 | 纬创资通股份有限公司 | Electrostatic field interference testing device and method |
| CN103267913A (en) * | 2013-05-02 | 2013-08-28 | 扬州丰登精密机械有限公司 | Induction type static electricity testing device |
| CN104730367A (en) * | 2013-12-24 | 2015-06-24 | 鸿富锦精密工业（深圳）有限公司 | Static test jig |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106142133A (en) * | 2016-06-20 | 2016-11-23 | 昆山国显光电有限公司 | Mechanical arm and electrostatic detection methods thereof |
| CN106124891A (en) * | 2016-06-21 | 2016-11-16 | 西南交通大学 | A kind of planar circuit test space electromagnetic interference method |
| CN106249085B (en) * | 2016-08-30 | 2019-05-28 | 京东方科技集团股份有限公司 | Static discharge detection method and system |
| CN106249085A (en) * | 2016-08-30 | 2016-12-21 | 京东方科技集团股份有限公司 | Static discharge detection method and system |
| CN108226658B (en) * | 2016-12-21 | 2020-06-23 | 财团法人工业技术研究院 | Static electricity detection system and method |
| US10656193B2 (en) | 2016-12-21 | 2020-05-19 | Industrial Technology Research Institute | Electrostatic detecting system and method |
| CN108226658A (en) * | 2016-12-21 | 2018-06-29 | 财团法人工业技术研究院 | Static electricity detection system and method |
| CN108267655A (en) * | 2018-01-15 | 2018-07-10 | 郑州云海信息技术有限公司 | A kind of device and method for assessing electrostatic discharge susceptivity power |
| CN110646695A (en) * | 2019-09-29 | 2020-01-03 | 歌尔股份有限公司 | Static test tool |
| CN110646695B (en) * | 2019-09-29 | 2021-07-23 | 潍坊歌尔微电子有限公司 | Static test tool |
| CN111257714A (en) * | 2020-01-17 | 2020-06-09 | 上海华力集成电路制造有限公司 | Electrostatic measuring apparatus and electrostatic measuring method |
| CN111610383A (en) * | 2020-05-28 | 2020-09-01 | 厦门天马微电子有限公司 | Electrostatic detection device and electrostatic detection system |
| CN111610383B (en) * | 2020-05-28 | 2023-02-03 | 厦门天马微电子有限公司 | Electrostatic detection device and electrostatic detection system |
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Application publication date: 20151216 |