CN108225167A - Measuring device and spacer material height measurement method - Google Patents
Measuring device and spacer material height measurement method Download PDFInfo
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- CN108225167A CN108225167A CN201810003165.2A CN201810003165A CN108225167A CN 108225167 A CN108225167 A CN 108225167A CN 201810003165 A CN201810003165 A CN 201810003165A CN 108225167 A CN108225167 A CN 108225167A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
- G01B7/082—Height gauges
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Abstract
The invention discloses a kind of measuring device and spacer material height measurement methods, are related to field of measuring technique, and main purpose is the detection method of spacer material height on simplified color membrane substrates, improve the accuracy that spacer material measures on color membrane substrates.The present invention main technical schemes be：A kind of measuring device, including：Capacitance part, the capacitance part include the first conductive plate and the second conductive plate that are oppositely arranged, wherein, the distance between first conductive plate and second conductive plate are adjustable；Test section, the test section are connected to the capacitance part, for detecting the capacitance of the capacitance part；Power supply unit, the two poles of the earth of the power supply unit are connected to first conductive plate and second conductive plate.Present invention is mainly used for the spacer material height measured on color membrane substrates.
Description
Technical field
The present invention relates to field of measuring technique more particularly to a kind of measuring device and spacer material height measurement methods.
Background technology
Liquid crystal display is due to low-power, high image quality and many advantages such as light and handy, having become in display field
Leading products.
The display panel of liquid crystal display includes color membrane substrates and TFT substrate, is set between color membrane substrates and TFT substrate
Liquid crystal layer is equipped with, in order to control the gap between color membrane substrates and TFT substrate, to keep the thickness of liquid crystal layer, in color membrane substrates
Multiple spaced spacer materials are equipped with close to the side of liquid crystal layer, spacer material is the supplementary structure of display base plate, is used to support
The clearance distance between color membrane substrates and TFT substrate is kept, wherein, the altitude information of multiple spacer materials is to determine on color membrane substrates
The important parameter of liquid crystal display quality, at present, the measuring method to spacer material height are mainly optical method, still, using light
The measuring apparatus and measuring method of method are all more complicated, result in measurement efficiency low in this way, when being measured to spacer material,
The a small amount of spacer material that can only be selected on color membrane substrates measures, and can not thus ensure that whole spacer materials measure on color membrane substrates
Accuracy.
Invention content
In view of this, the embodiment of the present invention, which provides a kind of measuring device and spacer material height measurement method, main purpose, is
The detection method of spacer material height on color membrane substrates is simplified, improves the accuracy that spacer material measures on color membrane substrates.
In order to achieve the above objectives, present invention generally provides following technical solutions：
On the one hand, an embodiment of the present invention provides a kind of measuring device, including：
Capacitance part, the capacitance part include the first conductive plate and the second conductive plate that are oppositely arranged, wherein, described first leads
The distance between battery plate and second conductive plate are adjustable；
Test section, the test section are connected to the capacitance part, for detecting the capacitance of the capacitance part；
Power supply unit, the two poles of the earth of the power supply unit are connected to first conductive plate and second conductive plate.
Further, first conductive plate includes multiple conductive sheets, and multiple conductive sheets are connected in parallel in the electricity
The first electrode in source portion, wherein, in the same plane, multiple conductive sheets are led with described second for multiple conductive sheet settings
Battery plate is oppositely arranged, and the test section is connected to multiple conductive sheets, for detect each conductive sheet with it is described
Capacitance between second conductive plate.
Further, first conductive plate further includes：Insulation board and electrically-conductive backing plate, multiple conductive sheets are set to institute
It states on the first face of insulation board, the electrically-conductive backing plate is set to the side that the insulation board deviates from first face, wherein, it is described
Power supply unit is connected to multiple conductive sheets by the electrically-conductive backing plate.
Further, the measuring device, further includes：
Driving portion, first conductive plate are connected to the driving end of the driving portion, and the driving portion is described for driving
First conductive plate activity, to adjust the distance between first conductive plate and second conductive plate.
Further, the measuring device, further includes：
Processing module, the input terminal of the processing module is connected to the driving portion and the test section, for obtaining
The capacitance information of capacitance part and the distance between first conductive plate and second conductive plate information are stated, and according to described
Capacitance information and the range information calculate the elevation information of measured base plate；
Display module, the display module are connected to the output terminal of the processing module, for showing the measured base plate
Elevation information.
Further, the measuring device, further includes：
Supporting rack, support frame as described above be equipped with it is multiple apart from the Support Position of the second conductive plate different height, it is described
First conductive plate is arranged on any one of Support Position, wherein, the quantity of multiple Support Positions is at least three.
Further, the measuring device, further includes：
Seal box and vacuum pump, the interior pumping that there is seal cavity and connected with the seal cavity of the seal box
Mouthful, the vacuum pump is connected to the bleeding point, for the seal cavity to be vacuumized, wherein, the capacitance part is set to
In the seal cavity.
On the other hand, present specification additionally provides a kind of spacer material height measurement method, for the measuring device,
Including：
Color membrane substrates are placed on the first conductive plate between second conductive plate；
The distance between the first conductive plate and the second conductive plate are adjusted as the first height, the second height and third height, and
At the described first height, second height and the third height position, the capacitance of detection capacitance part is the first electricity respectively
Appearance, the second capacitance and third capacitance；
According to first capacitance, second capacitance and the third capacitance be calculated on the color membrane substrates lead every
The height of underbed and secondary spacer material.
Further, it is described that color membrane substrates are placed on the first conductive plate between second conductive plate, including：
Color membrane substrates are laid on second conductive plate close to the side of first conductive plate, are made described by color film
Spacer material on substrate is toward first conductive plate.
Further, it is described color membrane substrates are placed on the first conductive plate between second conductive plate before, also
Including：
First conductive plate and second conductive plate are set under vacuum environment.
An embodiment of the present invention provides a kind of measuring devices, simplify the detection method of spacer material height on color membrane substrates,
Improve the accuracy that spacer material measures on color membrane substrates.And in the prior art, the measuring method to spacer material height is mainly light
Method, it is still, all more complicated using the measuring apparatus and measuring method of optical method, result in measurement efficiency low in this way, right
When spacer material on color membrane substrates measures, a small amount of spacer material that can only be selected on color membrane substrates measures, thus without
Method ensures the accuracy that whole spacer materials measure on color membrane substrates.Compared with prior art, the measurement dress that present specification provides
Put including：Capacitance part, test section and power supply unit, wherein, capacitance part includes the first conductive plate and the second conductive plate, in the color film of detection
During the height of spacer on substrate, first, color membrane substrates are placed on the first conductive plate between the second conduction；Then, it adjusts
The distance between the first conductive plate and the second conductive plate are saved as the first height, the second height and third height, and respectively first
Highly, the second height and capacitance of detection capacitance part is the first capacitance, the second capacitance and third capacitance during third height position；
Finally, the height of main spacer material and secondary spacer material on color membrane substrates is calculated according to the first capacitance, the second capacitance and third capacitance
Degree.By the measuring device of present specification can be more convenient detection color membrane substrates on main spacer material and secondary spacer material
Height, in addition, the measuring device of present specification can measure the average height value of spacer material on color membrane substrates, ensure that survey
The accuracy rate of amount.
Description of the drawings
Fig. 1 is the structure diagram of measuring device provided in an embodiment of the present invention；
Fig. 2 is the structure diagram of spacer material on color membrane substrates provided in an embodiment of the present invention；
Fig. 3 is the structure diagram of the first conductive plate provided in an embodiment of the present invention；
Fig. 4 is the flow chart of spacer material height measurement method provided in an embodiment of the present invention.
Specific embodiment
The technological means and effect taken further to illustrate the present invention to reach predetermined goal of the invention, below in conjunction with
Attached drawing and preferred embodiment, to measuring device its specific embodiment, structure, feature and its effect proposed according to the present invention,
It is described in detail as after.
As shown in Figure 1, an embodiment of the present invention provides a kind of measuring device, including：
Capacitance part 1, capacitance part 1 include the first conductive plate 11 and the second conductive plate 12 that are oppositely arranged, wherein, first is conductive
The distance between 11 and second conductive plate 12 of plate is adjustable；
Test section (not shown), test section are connected to capacitance part 1, for detecting the capacitance of capacitance part 1；
Power supply unit 2, the two poles of the earth of power supply unit 2 are connected to the first conductive plate 11 and the second conductive plate 12, for for capacitance
Portion 1 powers.
Wherein, above-mentioned measuring device is used to measure the height of spacer material in liquid crystal display panel, and spacer material is usually set
On color membrane substrates 3, when detecting, need color membrane substrates 3 and the spacer material being arranged on color membrane substrates 3 being placed on capacitance
Be detected between first conductive plate 11 and the second conductive plate 12 in portion 1, wherein, spacer material on color membrane substrates 3 include it is main every
Underbed and secondary spacer material, and the height of main spacer material is more than the height of secondary spacer material.
Wherein, capacitance part 1 is capacitor element, and for accommodating charge, it is conductive that capacitance part 1 includes the first conductive plate 11 and second
Plate 12, wherein, the first conductive plate 11 and the second conductive plate 12 are made of conductive material, such as：Metal material etc., first is conductive
11 and second conductive plate 12 of plate can be arranged in parallel, has gap between the first conductive plate 11 and the second conductive plate 12, should
For placing color membrane substrates 3 in gap, for the height of spacer material in more convenient measurement color membrane substrates 3, color film base is being placed
During plate 3, color membrane substrates 3 can be made to be mutually parallel with the first conductive plate 11, the second conductive plate 12.
Wherein, power supply unit 2 can be DC power supply, and the positive and negative electrode of power supply unit 2 is connected to 11 He of the first conductive plate
Second conductive plate 12, optionally, positive electrode can be connected to the first conductive plate 11, and negative electrode can be connected to the second conductive plate 12
When, after capacitance part 1 is powered, positive charge can be assembled on the first conductive plate 11, can assemble negative electrical charge on the second conductive plate 12,
And then realize the storage of charge.
The working process and principle measured below by way of measuring device in the present embodiment to spacer material on color membrane substrates 3
To illustrate the measuring device in the present embodiment：
First, color membrane substrates 3 are placed in parallel between the first conductive plate 11 and the second conductive plate 12.
Then, it is powered by power supply unit 2 for the first conductive plate 11 and the second conductive plate 12.
Finally, it is d1, d2, d3, and pass through test section to adjust the distance between the first conductive plate 11 and the second conductive plate 12
The capacitance of capacitance part 1 is C1, C2, C3 when the distance between first conductive plate 11 and the second conductive plate 12 are d1, d2, d3, root
Film base of behaving excellently can be calculated according to the distance between above-mentioned first conductive plate 11 and the second conductive plate 12 and the capacitance measured
The thickness of spacer material in plate 3.
Wherein, it is as follows to calculate derivation：
According to formulaIt can obtain：
As shown in Fig. 2, wherein, the area for corresponding to the first conductive plate 11 in color membrane substrates without dottle pin object area is S1, it is secondary every
The area that underbed region corresponds to the first conductive plate 11 is S2, and the area that main dottle pin object area corresponds to the first conductive plate 11 is S3, color
Thickness without spacer material area in ilm substrate is h1, and the thickness of secondary dottle pin object area is h2 in color membrane substrates, led in color membrane substrates every
The thickness in underbed region is h3；The dielectric constant for having dottle pin object area in color membrane substrates is ε1, without spacer material area in color membrane substrates
The dielectric constant in domain is ε2。
Since the capacitance of capacitance part 1 is：C=CMain spacer material+CSecondary spacer material+CWithout spacer material
Substituting into formula 1, formula 2, formula 3 can obtain：
Wherein, C, d, ε0、ε1、ε2、S1、S2、S3For known constant, h1、h2、h3It is conductive by adjusting first for unknown constant
The distance between 11 and second conductive plate 12 of plate is d1、d2、d3……dn, and corresponding the first conductive plate of measure 11 and second is conductive
Capacitance C between plate 121、C2、C3……Cn, you can it obtains about h1、h2、h3Equation with three unknowns group, and then can calculate
To h1、h2、h3Numerical value.
The height h of wherein main spacer materialIt is main=h1-h3, the height h of secondary spacer materialIt is secondary=h2-h3。
An embodiment of the present invention provides a kind of measuring devices, simplify the detection method of spacer material height on color membrane substrates,
Improve the accuracy that spacer material measures on color membrane substrates.And in the prior art, the measuring method to spacer material height is mainly light
Method, it is still, all more complicated using the measuring apparatus and measuring method of optical method, result in measurement efficiency low in this way, right
When spacer material on color membrane substrates measures, a small amount of spacer material that can only be selected on color membrane substrates measures, thus without
Method ensures the accuracy that whole spacer materials measure on color membrane substrates.Compared with prior art, the measurement dress that present specification provides
Put including：Capacitance part, test section and power supply unit, wherein, capacitance part includes the first conductive plate and the second conductive plate, in the color film of detection
During the height of spacer on substrate, first, color membrane substrates are placed on the first conductive plate between the second conduction；Then, it adjusts
The distance between the first conductive plate and the second conductive plate are saved as the first height, the second height and third height, and respectively first
Highly, the second height and capacitance of detection capacitance part is the first capacitance, the second capacitance and third capacitance during third height position；
Finally, the height of main spacer material and secondary spacer material on color membrane substrates is calculated according to the first capacitance, the second capacitance and third capacitance
Degree.By the measuring device of present specification can be more convenient detection color membrane substrates on main spacer material and secondary spacer material
Height, in addition, the measuring device of present specification can measure the average height value of spacer material on color membrane substrates, ensure that survey
The accuracy rate of amount.
In the practical measurement process of color membrane substrates 3, due to the error of manufacture craft, it may result on color membrane substrates 3
The spacer material height difference of different location is larger, in order to improve the quality of display panel, needs to detect dottle pin in color membrane substrates 3
The larger region of object height difference, to be adjusted, as shown in figure 3, optionally, the first conductive plate 11 includes multiple conductive sheets
13, multiple conductive sheets 13 are connected in parallel in the first electrode of power supply unit 2, wherein, multiple conductive sheets 13 are set in the same plane,
Multiple conductive sheets 13 are oppositely arranged with the second conductive plate 12, and test section is connected to multiple conductive sheets 13, each for detecting
Capacitance between 13 and second conductive plate 12 of conductive sheet.In the present embodiment, multiple 13 and second conductive plates 12 of conductive sheet can be with
Form multiple capacitances, and since multiple conductive sheets 13 are connected in parallel in the first electrode of power supply unit 2, thus multiple conductive sheets 13 with
Voltage between second conductive plate 12 is identical, and each conductive sheet 13 can correspond to the subregion of color membrane substrates 3, passes through detection
Portion can detect the capacitance between each 13 and second conductive plate 12 of conductive sheet respectively, can thus be calculated respectively every
The average height value of a conductive sheet 13 and the spacer material in color membrane substrates corresponding region, by comparing spacer material in different zones
Height value can obtain the distribution trend of spacer material on color membrane substrates 3, to be carried out to the spacer material height on color membrane substrates 3
Adjustment, to improve the quality of display panel.
Above-mentioned first conductive plate 11 can have a variety of patterns, and optionally, the first conductive plate 11 further includes：Insulation board 111
With electrically-conductive backing plate 112, multiple conductive sheets 13 are set on the first face of insulation board 111, and electrically-conductive backing plate 112 is set to insulation board
111 deviate from the side in the first face, wherein, power supply unit is connected to multiple conductive sheets 13 by electrically-conductive backing plate 112.In the present embodiment,
Multiple conductive sheets 13 are arranged on the first face of insulation board 111, have gap, conductive sheets multiple in this way between multiple conductive sheets 13
Mutually insulated between 13 just makes to influence each other between multiple conductive sheets 13, enables multiple conductive sheets 13 respectively with second
Conductive plate 12 forms multiple capacitances, so that the height for checking spacer material on the color membrane substrates 3 of different zones in color membrane substrates 3 becomes
Gesture.
The distance between above-mentioned first conductive plate, 11 and second conductive plate 12 is adjustable, regulative mode can there are many, can
Selection of land, above-mentioned measuring device further include driving portion 4, and the first conductive plate 11 is connected to the driving end of driving portion 4, and driving portion 4 is used for
11 activity of the first conductive plate is driven, to adjust the distance between the first conductive plate 11 and the second conductive plate 12.In the present embodiment, lead to
Portion 4 of overdriving can automatically adjust spacing between the first conductive plate 11 and the second conductive plate 12, in addition, staff passes through drive
Dynamic portion 4 is come when adjusting the spacing between the first conductive plate 11 and the second conductive plate 12, it is ensured that the accuracy rate of adjusting improves color
The accuracy rate that spacer material measures in ilm substrate 3.
In order to staff can be more convenient the elevation information for getting spacer material on color membrane substrates 3, further,
Measuring device further includes：Processing module, the input terminal of processing module are connected to driving portion 4 and test section, for obtaining capacitance part 1
Capacitance information and the distance between the first conductive plate 11 and the second conductive plate 12 information, and according to capacitance information and apart from letter
Breath calculates the elevation information of measured base plate；Display module, display module are connected to the output terminal of processing module, for showing quilt
Survey the elevation information of substrate.In the present embodiment, the spacer material that can be calculated automatically from by processing module on color membrane substrates 3 is high
Degree, can improve the measurement efficiency of spacer material height, staff can pass through display module to avoid the trouble manually calculated
The spacer material height of color membrane substrates 3 is directly obtained, it is very convenient quick, wherein, display module can be display.
The distance between above-mentioned first conductive plate, 11 and second conductive plate 12 is adjustable, and regulative mode is in addition to that can pass through drive
Outside dynamic portion 4 is adjusted, other regulative modes can also be used, optionally, above-mentioned measuring device further includes supporting rack, support
Frame is equipped with the Support Position of multiple 12 different heights of the second conductive plate of distance, and the first conductive plate 11 is arranged on any one support
On position, wherein, the quantity of multiple Support Positions is at least three.In the present embodiment, the second conductive plate 12 and supporting rack
To be arranged on platform, and the first conductive plate 11 can be arranged on any one Support Position of supporting rack, make the second conduction
Plate 12 is oppositely arranged with the first conductive plate 11, when needing to adjust the relative distance between the first conductive plate 11 and the second conductive plate 12
When, Support Position of first conductive plate 11 on supporting rack can be adjusted, the first conductive plate 11 and are adjusted by supporting rack
Relative distance between two conductive plates 12, adjustment structure is more simple, and it is quick to adjust also enhanced convenience.
In order to further improve the accuracy of detection, optionally, measuring device further includes：Seal box and vacuum pump, sealing
Bleeding point is connected to seal cavity and the bleeding point connected with seal cavity, vacuum pump in case, for by seal cavity
It vacuumizes, wherein, capacitance part 1 is set in seal cavity.It, can be by the sealing in seal box by vacuum pump in the present embodiment
Cavity vacuum state, and capacitance part 1 can be arranged on the height of spacer material on annular seal space vivo detection color membrane substrates 3,
The accuracy rate of detection can be improved under vacuum environment.
On the other hand, as shown in figure 4, the embodiment of the present invention additionally provides a kind of spacer material height measurement method, for
The measuring device stated, including：
Color membrane substrates 3 are placed on the first conductive plate 11 between the second conductive plate 12 by step 101；
Step 102, adjust the distance between the first conductive plate 11 and the second conductive plate 12 for first height, second height and
Third height, and at the first height, the second height and third height position, the capacitance of detection capacitance part 1 is the first electricity respectively
Appearance, the second capacitance and third capacitance；
Step 103, be calculated on color membrane substrates 3 according to the first capacitance, the second capacitance and third capacitance main spacer material and
The height of secondary spacer material.Wherein, calculating process has been described in detail in the above-described embodiment, and therefore not to repeat here.
An embodiment of the present invention provides a kind of spacer material height measurement method, for simplifying the detection side of spacer material height
Method improves the accuracy that spacer material measures on color membrane substrates.And in the prior art, the measuring method to spacer material height is mainly
Optical method, it is still, all more complicated using the measuring apparatus and measuring method of optical method, result in measurement efficiency low in this way,
When being measured to spacer material, a small amount of spacer material that can only be selected on color membrane substrates measures, and can not thus ensure color film
The accuracy that whole spacer materials measure on substrate.Compared with prior art, the spacer material elevation carrection side that present specification provides
Method includes：First, color membrane substrates are placed on the first conductive plate between the second conduction；Then, adjust the first conductive plate and
The distance between second conductive plate for first height, second height and third height, and respectively first height, second height and
The capacitance that capacitance part is detected during third height position is the first capacitance, the second capacitance and third capacitance；Finally, according to the first electricity
Hold, the height of main spacer material and secondary spacer material on color membrane substrates is calculated in the second capacitance and third capacitance.Pass through the application text
The measuring method of part can be more convenient detection color membrane substrates on the height of main spacer material and secondary spacer material, and this Shen
Please the measurement method of file can measure the average height value of spacer material on color membrane substrates, ensure that the accuracy rate of measurement.
Further, color membrane substrates are placed on the first conductive plate between the second conductive plate 12 by above-mentioned steps 101,
Including：Color membrane substrates are laid on the second conductive plate 12 close to the side of the first conductive plate, are made by the dottle pin on color membrane substrates
Object is toward the first conductive plate.In the present embodiment, color membrane substrates include opposite first side and second side, multiple spacer materials
It can be arranged in the first side of color membrane substrates, and second side is planar structure, when measuring spacer material height, can be incited somebody to action
The second side of color membrane substrates is laid on the second conductive plate 12 close to the side of the first conductive plate, makes the second conductive plate 12 and
Two side faces are bonded to each other, and the spacer material in color membrane substrates first side can not only be protected so then toward the first conductive plate
Spacer material on card color membrane substrates will not be damaged, but also can ensure to measure in detection process due to extruding etc.
Accuracy rate.
In order to further improve the accuracy rate of measurement, optionally, color membrane substrates are placed on first and led by above-mentioned steps 101
On battery plate between the second conductive plate 12 before, further include：First conductive plate and the second conductive plate are set under vacuum environment.
In the present embodiment, since the first conductive plate and the second conductive plate may be contained under vacuum environment, so on color membrane substrates are measured
During the height of spacer material, it can equally carry out under vacuum conditions, and under vacuum conditions, dottle pin on color membrane substrates can be improved
The accuracy rate of object height detection.
The above description is merely a specific embodiment, but protection scope of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can readily occur in change or replacement, should all contain
Lid is within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (10)
1. a kind of measuring device, which is characterized in that including：
Capacitance part, the capacitance part include the first conductive plate and the second conductive plate that are oppositely arranged, wherein, first conductive plate
The distance between second conductive plate is adjustable；
Test section, the test section are connected to the capacitance part, for detecting the capacitance of the capacitance part；
Power supply unit, the two poles of the earth of the power supply unit are connected to first conductive plate and second conductive plate.
2. measuring device according to claim 1, which is characterized in that
First conductive plate includes multiple conductive sheets, and multiple conductive sheets are connected in parallel in the first electricity of the power supply unit
Pole, wherein, in the same plane, multiple conductive sheets are opposite with second conductive plate to be set for multiple conductive sheet settings
It puts, the test section is connected to multiple conductive sheets, for detecting each conductive sheet and second conductive plate
Between capacitance.
3. measuring device according to claim 2, which is characterized in that
First conductive plate further includes：Insulation board and electrically-conductive backing plate, multiple conductive sheets are set to the of the insulation board
On on one side, the electrically-conductive backing plate is set to the side that the insulation board deviates from first face, wherein, the power supply unit passes through institute
It states electrically-conductive backing plate and is connected to multiple conductive sheets.
4. measuring device according to claim 1, which is characterized in that further include：
Driving portion, first conductive plate are connected to the driving end of the driving portion, and the driving portion is used to drive described first
Conductive plate activity, to adjust the distance between first conductive plate and second conductive plate.
5. measuring device according to claim 4, which is characterized in that further include：
Processing module, the input terminal of the processing module are connected to the driving portion and the test section, for obtaining the electricity
The capacitance information in appearance portion and the distance between first conductive plate and second conductive plate information, and according to the capacitance
Information and the range information calculate the elevation information of measured base plate；
Display module, the display module are connected to the output terminal of the processing module, for showing the height of the measured base plate
Spend information.
6. measuring device according to claim 1, which is characterized in that further include：
Supporting rack, support frame as described above be equipped with it is multiple apart from the Support Position of the second conductive plate different height, described first
Conductive plate is arranged on any one of Support Position, wherein, the quantity of multiple Support Positions is at least three.
7. measuring device according to claim 1, which is characterized in that further include：
Seal box and vacuum pump, the interior bleeding point that there is seal cavity and connected with the seal cavity of the seal box, institute
It states vacuum pump and is connected to the bleeding point, for the seal cavity to be vacuumized, wherein, the capacitance part is set to described close
It seals in cavity.
8. a kind of spacer material height measurement method, for the measuring device as described in any one of claim 1 to 7, feature
It is, including：
Color membrane substrates are placed on the first conductive plate between second conductive plate；
The distance between the first conductive plate and the second conductive plate are adjusted as the first height, the second height and third height, and respectively
The described first height, second height and during the third height position capacitance of detection capacitance part be the first capacitance,
Second capacitance and third capacitance；
Main spacer material on the color membrane substrates is calculated according to first capacitance, second capacitance and the third capacitance
With the height of secondary spacer material.
9. spacer material height measurement method according to claim 8, which is characterized in that described that color membrane substrates are placed on
On one conductive plate between second conductive plate, including：
Color membrane substrates are laid on second conductive plate close to the side of first conductive plate, are made described by color membrane substrates
On spacer material toward first conductive plate.
10. spacer material height detection method according to claim 8, which is characterized in that
It is described color membrane substrates are placed on the first conductive plate between second conductive plate before, further include：By described
One conductive plate and second conductive plate are set under vacuum environment.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109031808A (en) * | 2018-07-20 | 2018-12-18 | 深圳市华星光电技术有限公司 | The determination method of safe range lower limit is measured under liquid crystal drop |
| CN114199954A (en) * | 2021-12-06 | 2022-03-18 | Tcl华星光电技术有限公司 | Fragment detection device |
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| CN114199954A (en) * | 2021-12-06 | 2022-03-18 | Tcl华星光电技术有限公司 | Fragment detection device |
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