CN105149764A - Target material and backboard welding method - Google Patents
Target material and backboard welding method Download PDFInfo
- Publication number
- CN105149764A CN105149764A CN201510522856.XA CN201510522856A CN105149764A CN 105149764 A CN105149764 A CN 105149764A CN 201510522856 A CN201510522856 A CN 201510522856A CN 105149764 A CN105149764 A CN 105149764A
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- welding
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- stirring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/12—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
- B23K20/122—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding using a non-consumable tool, e.g. friction stir welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/24—Preliminary treatment
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Abstract
The invention belongs to the technical field of target material welding and particularly relates to a target material and backboard welding method. The method sequentially includes the following steps that firstly, preparation before welding is made, wherein a target material and a backboard are cleaned; secondly, the CNC welding process simulation is performed; and thirdly, friction-stir welding is performed, and a stirring head rotates at a high speed and rubs with a target material assembly material, so that the temperature of a material on a joint is raised, the target assembly material is softened, and welding is completed. Compared with the vacuum electron beam welding technology in the existing target industry, the welding method has the beneficial effects that as a solid phase welding method, the welding method avoids the situation that because hydrogen atoms are diffused to a molten pool due to fusion welding, and air holes are formed, and the welding air hole problem is fundamentally solved; a workpiece does not need a strict surface cleaning preparation requirement before welding, and an oxidization film on the surface of a weldment can be removed through friction and stirring in the welding process; and the pollution to the environment is small before welding and in the welding process, and the welding method is an environment-friendly welding manner.
Description
Technical field
The invention belongs to target welding technology field, particularly the welding method of a kind of target and backboard.
Background technology
At semiconductor industry, for the manufacturing process of sputtering target material product, usually the high-purity aluminum or aluminum alloy target of sputtering target material performance and high strength aluminium ring backboard, Cu ring backboard or Cu alloy hoop backboard will to be met through welding forming, and then through the technique such as roughing, fine finishining, be finally processed into the sputtering target material product of size qualification.
For sputtering target material, after welding, target material surface temperature can not higher than its recrystallization temperature, otherwise the change of target internal grain size and orientation can be caused, and the thermal conductivity factor of aluminium alloy is large especially, heat transfer rapidly, only have while adopting the very intensive thermal source of energy just likely to guarantee weld seam fusing, can effectively control target material surface temperature, usually electron beam welding and laser weld is only had can to meet this requirement in current welding method, but the latter's investment is too huge, and thus people often select electron beam welding.Electron beam welding refers to and utilizes high-power electron beam to bombard weld material surface, produces heat, makes commissure need one or more metal moltens of welding, thus complete welding process.
For the welding between rafifinal and between high-purity aluminum or aluminum alloy, also there is another one problem: in weld seam, the porosity is extremely difficult controls, the hydrogen absorbed is made not form pore because it often takes various means in smelt stage, and be present in material with the form of hydrogen atom, when welding of aluminum or aluminium alloy, the high temperature of weld seam to be diffused into enough energy to hydrogen atom and to form pore together, simultaneously because commissure temperature raises, the solubility of hydrogen sharply rises, and around weld seam, in heat affected area, hydrogen atom also can spread in weld seam; In addition, the hydrogen that extraneous water, organic matter etc. decomposite also can be absorbed by weld seam, and when therefore utilizing electron beam welding rafifinal or aluminium alloy, the pore in weld seam is extremely difficult to be controlled.
Sputtering target material is all generally work under the environment of very severe.First, its operating temperature will up to 300-400 DEG C, simultaneously the side of target material assembly is filled with cooling water cold by force, under opposite side is then in 10-9Pa high vacuum, therefore defines a huge pressure differential in both sides, if there is larger or more pore in weld seam, then because the heat-blocking action of pore makes pore environment temperature sharply rise, apparently higher than surrounding area, after near the fusing point that temperature rises to aluminium or aluminium alloy, likely cause weld cracking, target surface comes off damage sputtering machine table; Secondly, if pore is more so that form through hole in weld seam, water can leak into opposite side under pressure differential effect, infringement sputtering equipment.Target is all use on high-accuracy sputtering equipment, and being worth expensive semiconductor production equipment is do not allow to occur such situation.
The method that current domestic conventional aluminium alloy electron beam welding reduces the porosity mainly repeats electron beam welding and scanning beam weldering.Wherein, repeat electron beam welding and refer to Rewelding on same weld seam, its advantage is equivalent to increase the weld seam molten bath holding time, gas is made easily to overflow thus reduce the porosity, shortcoming repeats the scaling loss that welding can cause alloying element, repeat to weld the heat affected area temperature caused simultaneously and significantly raise the distortion causing assembly, and after repeating to weld several times, the reduction of the porosity will become extremely slow.Scanning welding refers to that electron beam is when moving along bead direction, vertical weld direction also moves left and right, travel frequency is generally at tens hertz, its advantage plays mechanical agitation by moving left and right of electron beam to molten bath, gas in molten bath is easily overflowed, shortcoming is the limited use that scanning welds to reducing the porosity, fundamentally can not solve the reduction of the porosity.Fig. 1 uses the weld seam of electron beam welding through the gas hole defect figure of X-ray check.
Therefore, need people work out a kind of newly, be different from the high energy beam weldings such as conditional electronic bundle, effectively can solve the welding method of gas hole defect problem in target welding.Patent CN1962153A describes the method using vacuum electron beam welding to reduce pore appearance, first time welding makes pore be enriched in weld seam, second time welding is carried out after vacuum heat-preserving, then quench rapidly, so just control target material assembly gas pore in weld metal rate, but the appearance of pore can not be avoided completely.
The invention provides the third welding method outside a kind of traditional target welding manner, i.e. agitating friction welding, in order to solve the problem of gas hole defect in target welding.
Summary of the invention
The invention provides the welding method of a kind of target and backboard, the method is based on agitating friction solder technology, thoroughly to solve the problem of gas hole defect in target welding.
A welding method for target and backboard, comprises the following steps successively:
(1) welds prepares: cleaning target and backboard, and the target material assembly that the target be mounted with and backboard form is moved on agitating friction welding machine;
(2) abutment joint carries out CNC simulation welding: simulate sky by CNC and walk, determine path of welding and stirring-head position consistency;
(3) agitating friction welding is implemented: mixing needle stretches in the seam of target material assembly while rotation, the position of fixing stirring-head, target material assembly starts to rotate, frictional heat between the stirring-head of High Rotation Speed and target material assembly makes the material before stirring-head that strong plastic deformation occur, along with the rotation of target material assembly, the material of stirring-head posterior facial height plastic deformation deposits, after target material assembly rotates a circle gradually, stirring-head pumpback, completes welding.
In step (1), target material is alusil alloy, aluminium copper, Al-Si-Cu alloy, fine aluminium or high purity copper, and back veneer material is 6XXX aluminium alloy, 5XXX aluminium alloy, 4XXX aluminium alloy or copper alloy.
Different according to target and back veneer material, and the difference of the depth of weld, step (3) can repeat.
In step (3), different according to target and back veneer material, and the difference of the depth of weld, determine stirring-head model, rotating speed and the speed of welding needed for welding, preferably, stirring-head rotating speed is 400-800rpm, and target material assembly degree of turning is 150-250mm/min, and welding temperature is not higher than 500 DEG C.
Described stirring-head is made up of tool steel, threaded three flat face bit of preferred taper.
Beneficial effect of the present invention is:
(1) because the heat input in friction stir welding process is little relative to fusion process, there is not the fusing of metal in joint area, be a kind of solid State Welding process, doing so avoids the hydrogen atom that melting welding causes and be diffused into the pore formed in molten bath, fundamentally solve the problem of weld blowhole; Friction in welding process can remove the oxide-film on weldment surface with stirring, ensure that the quality of weldment.
(2) before operation, target material assembly prepares requirement without the need to strict removing surface, and welding process is without the need to vacuum environment, and whole process can be carried out in atmospheric atmosphere; Less demanding to equipment of friction stir welding, the most basic requirement is the rotary motion of stirring-head and the relative motion of target material assembly, even if milling machine also can reach the requirement of small-sized welding simply; Friction stir welding is the heat utilizing target material assembly to produce with stirring-head relative motion, phase mutual friction, weld material is made to reach hot plastic state, then rapid upset, complete welding, visible, welding equipment investment of the present invention is low, and operating cost is low, and technique is simple, welding efficiency can improve more than 2-3 times.
(3) smoke dust and splashing in welding process, noise is low, and welding process is safe, radiationless, is a kind of welding manner of environmental protection.
Accompanying drawing explanation
Fig. 1 uses the weld seam of electron beam welding through the gas hole defect figure of X-ray check;
Fig. 2 is weld assembly and stirring-head position view in the embodiment of the present invention 1;
Fig. 3 is the result that in the embodiment of the present invention 1, weld seam detects through X ray tester;
Fig. 4 is weld assembly and stirring-head position view in the embodiment of the present invention 2;
Fig. 5 is the result that in the embodiment of the present invention 2, weld seam detects through X ray tester;
Fig. 6 is other possible weld assemblies and stirring-head position view in the present invention.
Detailed description of the invention
The invention provides the welding method of a kind of target and backboard, the method is based on agitating friction solder technology, thoroughly can solve the problem of gas hole defect in target welding.Below in conjunction with the drawings and specific embodiments, the present invention will be further described, but should not be used for limiting the present invention.
Embodiment 1
Target material is the Al-Si-Cu alloy of Al-1%Si-0.5%Cu, and back veneer material is 6061 aluminium alloys, and design weld penetration is 17mm, and the gained weldment porosity is 0.Wherein, implementation process is welded as follows:
(1) welds prepares: cleaning target and backboard, then the target material assembly of the target be mounted with and backboard composition is moved on agitating friction welding machine, the position relationship of target material assembly and stirring-head is as shown in Figure 2;
(2) abutment joint carries out CNC simulation welding: stirring-head selects threaded three flat face bit of taper, simulates sky and walks, determine path of welding and stirring-head position consistency by CNC;
(3) agitating friction welding is implemented: mixing needle rotating speed is 600rad/min, and temperature 490 DEG C, stretches in the seam of target material assembly, stretching into the degree of depth is 17mm, the position of fixing stirring-head, and target material assembly rotates a circle with the speed of 200mm/min, then stirring-head pumpback, completes welding.
Utilize the weld seam of X ray tester to the target material assembly completing welding by above-mentioned steps to detect, result as shown in Figure 3, finds pore-free defect.
Each welding parameter used in the present embodiment is all only effective to the present embodiment, does not affect other embodiments of the present invention.
Embodiment 2
Target material is the alusil alloy of Al-1%Si, and back veneer material is 6061 aluminium alloys, and design weld penetration is 9mm, gained weldment pore-free defect.Wherein, implementation process is welded as follows:
(1) welds prepares: cleaning target and backboard, then the target material assembly of the target be mounted with and backboard composition is moved on stirring friction welding machine, the position relationship of target material assembly and stirring-head is as shown in Figure 4;
(2) abutment joint carries out CNC simulation welding: stirring-head selects threaded three flat face bit of taper, simulates sky and walks, determine path of welding and stirring-head position consistency by CNC;
(3) agitating friction welding is implemented: mixing needle rotating speed is 600rad/min, and temperature 450 DEG C, stretches in the seam of target material assembly, stretching into the degree of depth is 9mm, the position of fixing stirring-head, and target material assembly rotates a circle with the speed of 250mm/min, then stirring-head pumpback, completes welding.
Utilize the weld seam of X ray tester to the target material assembly completing welding by above-mentioned steps to detect, result as shown in Figure 5, finds pore-free defect.
Each welding parameter used in the present embodiment is all only effective to the present embodiment, does not affect other embodiments of the present invention.
Claims (6)
1. a welding method for target and backboard, is characterized in that, comprises the following steps successively:
(1) welds prepares: cleaning target and backboard, and the target material assembly that the target be mounted with and backboard form is moved on agitating friction welding machine;
(2) abutment joint carries out CNC simulation welding: simulate sky by CNC and walk, determine path of welding and stirring-head position consistency;
(3) agitating friction welding is implemented: mixing needle stretches in the seam of target material assembly while rotation, the position of fixing stirring-head, target material assembly starts to rotate, frictional heat between Stirring head and target material assembly makes the material generation plastic deformation before stirring-head, along with the rotation of target material assembly, after stirring-head, the material of plastic deformation deposits, after target material assembly rotates a circle, stirring-head pumpback, completes welding.
2. the welding method of target according to claim 1 and backboard, is characterized in that, the institute of welding all carries out in steps in air atmosphere.
3. the welding method of target according to claim 1 and backboard, it is characterized in that, in step (1), described target material is alusil alloy, aluminium copper, Al-Si-Cu alloy, fine aluminium or high purity copper, and back veneer material is 6XXX aluminium alloy, 5XXX aluminium alloy, 4XXX aluminium alloy or copper alloy.
4. the welding method of target according to claim 1 and backboard, is characterized in that, different according to target and back veneer material, and the difference of the depth of weld, and step (3) can repeat.
5. the welding method of target according to claim 1 and backboard, is characterized in that, in step (3), stirring-head rotating speed is 400-800rpm, and target material assembly degree of turning is 150-250mm/min, and welding temperature is not higher than 500 DEG C.
6. the welding method of target according to claim 1 and backboard, is characterized in that, described stirring-head is made up of tool steel.
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| CN201510522856.XA CN105149764A (en) | 2015-08-24 | 2015-08-24 | Target material and backboard welding method |
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| CN201510522856.XA CN105149764A (en) | 2015-08-24 | 2015-08-24 | Target material and backboard welding method |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105382404A (en) * | 2015-12-24 | 2016-03-09 | 福建阿石创新材料股份有限公司 | Device and method for welding target through stirring friction |
| CN107520533A (en) * | 2016-06-22 | 2017-12-29 | 宁波江丰电子材料股份有限公司 | The welding method of target material assembly |
| CN107984075A (en) * | 2017-11-17 | 2018-05-04 | 中国科学院宁波材料技术与工程研究所 | A kind of frictional diffusion soldering method of aluminium target material assembly |
| CN108515261A (en) * | 2018-04-12 | 2018-09-11 | 南通东源新能源科技发展有限公司 | A kind of welding method of lightweighting materials |
| CN108994444A (en) * | 2018-10-08 | 2018-12-14 | 宁波顺奥精密机电有限公司 | A kind of sputtering target material welding method |
| CN114043070A (en) * | 2021-12-01 | 2022-02-15 | 宁波江丰电子材料股份有限公司 | Stirring friction welding method for target material back plate |
| CN114959618A (en) * | 2022-06-29 | 2022-08-30 | 浙江最成半导体科技有限公司 | Sputtering target material and preparation method thereof |
| CN115229324A (en) * | 2022-08-31 | 2022-10-25 | 宁波江丰电子材料股份有限公司 | Repair welding method for aluminum alloy back plate |
| CN115283818A (en) * | 2022-09-06 | 2022-11-04 | 宁波江丰电子材料股份有限公司 | Friction stir welding method for pure aluminum tubular target and aluminum alloy accessory |
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| CN104125870A (en) * | 2012-02-14 | 2014-10-29 | 东曹Smd有限公司 | Low deflection sputtering target assembly and methods of making same |
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| JP2000199054A (en) * | 1998-12-28 | 2000-07-18 | Kobe Steel Ltd | Aluminum alloy sputtering target material |
| US20060207876A1 (en) * | 2003-04-03 | 2006-09-21 | Kobelco Research Institute, Inc. | Sputtering target and method for preparation thereof |
| CN101133182A (en) * | 2005-03-04 | 2008-02-27 | 日本轻金属株式会社 | Metal double layer structure and method for manufacturing the same and regeneration method of sputtering target employing that method |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105382404A (en) * | 2015-12-24 | 2016-03-09 | 福建阿石创新材料股份有限公司 | Device and method for welding target through stirring friction |
| CN107520533A (en) * | 2016-06-22 | 2017-12-29 | 宁波江丰电子材料股份有限公司 | The welding method of target material assembly |
| CN107984075A (en) * | 2017-11-17 | 2018-05-04 | 中国科学院宁波材料技术与工程研究所 | A kind of frictional diffusion soldering method of aluminium target material assembly |
| CN107984075B (en) * | 2017-11-17 | 2019-12-24 | 中国科学院宁波材料技术与工程研究所 | Friction diffusion welding method of aluminum target assembly |
| CN108515261A (en) * | 2018-04-12 | 2018-09-11 | 南通东源新能源科技发展有限公司 | A kind of welding method of lightweighting materials |
| CN108994444A (en) * | 2018-10-08 | 2018-12-14 | 宁波顺奥精密机电有限公司 | A kind of sputtering target material welding method |
| CN114043070A (en) * | 2021-12-01 | 2022-02-15 | 宁波江丰电子材料股份有限公司 | Stirring friction welding method for target material back plate |
| CN114959618A (en) * | 2022-06-29 | 2022-08-30 | 浙江最成半导体科技有限公司 | Sputtering target material and preparation method thereof |
| CN115229324A (en) * | 2022-08-31 | 2022-10-25 | 宁波江丰电子材料股份有限公司 | Repair welding method for aluminum alloy back plate |
| CN115283818A (en) * | 2022-09-06 | 2022-11-04 | 宁波江丰电子材料股份有限公司 | Friction stir welding method for pure aluminum tubular target and aluminum alloy accessory |
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Application publication date: 20151216 |