CN114043070A - Stirring friction welding method for target material back plate - Google Patents
Stirring friction welding method for target material back plate Download PDFInfo
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- CN114043070A CN114043070A CN202111452152.1A CN202111452152A CN114043070A CN 114043070 A CN114043070 A CN 114043070A CN 202111452152 A CN202111452152 A CN 202111452152A CN 114043070 A CN114043070 A CN 114043070A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/12—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
- B23K20/122—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding using a non-consumable tool, e.g. friction stir welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/12—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding
- B23K20/129—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating the heat being generated by friction; Friction welding specially adapted for particular articles or workpieces
Abstract
The invention provides a stirring friction welding method of a target backboard, which is characterized in that a backboard bottom plate with a cooling water channel and a disc-shaped water channel cover plate are assembled, and the target backboard is obtained through stirring friction welding; the friction stir welding is simple and convenient to operate, no additional welding flux is needed, no impurity element is introduced, the welding combination rate is high, and the condition of water leakage is not easy to occur; the friction stir welding path is reasonably arranged, so that the phenomenon that the local temperature is too high due to too long feed during friction stir welding is avoided, the risk of breakage of a welding head in the welding process is reduced, and the welding combination rate is effectively improved; meanwhile, the friction stir welding method can be used for welding large-size back plates.
Description
Technical Field
The invention belongs to the technical field of target preparation, and particularly relates to a stirring friction welding method of a target back plate.
Background
The target for semiconductor sputtering generates a large amount of heat during operation, and cooling water needs to flow through the position of the target back plate in order to reduce the temperature of a product during the operation of the target. Generally, the cooling back plate is divided into two types according to the types of sputtering machines: the back plate with cooling water channel and the back plate without cooling water channel.
The cooling of the sputtering target is an important influence factor in the sputtering process, and a backboard with a cooling water channel is generally processed into a water channel structure in a welding mode, but if the structural design is unreasonable, a welding flux is selected incorrectly, a welding process is not appropriate, and the like, welding defects and product deformation are generated, so that the water channel leaks and damages equipment.
The back plate is mainly used for bearing the sputtering objects and is fixed on the equipment machine table, so that the sputtering objects are prevented from being fixed, the sputtering objects only need to be welded on the back plate, and the processing hole positions on the back plate are fixed on the equipment machine table. Because the sputtering object is bombarded to cause the temperature of the sputtering object to rise in the sputtering process, in order to achieve the effect of reducing the temperature, a water channel needs to be designed on the back plate, and the water is introduced into the water channel of the back plate in the sputtering process to achieve the effect of cooling the sputtering object. Generally, a water channel groove is designed on a back plate, and then a cover plate is placed in the water channel groove to complete the design of a back plate water channel through a welding technology.
CN112894291A discloses a method for manufacturing an industrial cooling copper back plate, which comprises the following steps: processing a stepped groove on an industrial cooling copper back plate body, wherein a cover plate placing groove is arranged at the upper part of the stepped groove, a cooling water groove is arranged at the lower part of the stepped groove, an arc angle is arranged at the corner of the stepped groove, a cover plate is placed in the cover plate placing groove, a pressing block or a pressing strip is pressed on the cover plate to fix the cover plate, the angle of a welding needle of a rotating head is adjusted to gradually rotate into the splicing part of the cover plate and the industrial cooling copper back plate body, the welding needle of the rotating head is contacted with the surface of the cover plate and the surface of the industrial cooling copper back plate body, the welding needle of the rotating head moves along the splicing part where the cover plate and the industrial cooling copper back plate body are fused, and the welding needle is driven by the rotating head to rotate to use energy generated by friction so as to fuse the cover plate and the industrial cooling copper back plate body; the long-term stable work of industrial cooling copper back plate is facilitated, and the good cooling effect of the industrial cooling copper back plate can be guaranteed to be stably kept for a long time.
CN112410740A discloses a target cooling back plate and a preparation method thereof, wherein a flange connecting piece of a water inlet and a water outlet is integrally designed on a base of the target cooling back plate to be a part of the base, and a cooling water channel in the base and the water inlet and the water outlet are correspondingly changed into an inclined water channel, so that the leakage problem at the water inlet and the water outlet is effectively prevented; the thickness of a cover plate of the target cooling back plate is increased to 4.5-5mm, sand blasting is carried out on the inner surface of a cooling water channel of the base, then the cover plate and the base are welded by adopting vacuum brazing to obtain a crude product of the target cooling back plate, and machining is carried out by means of supporting and fixing of bosses with equal heights to obtain the target cooling back plate.
CN112372165A discloses a welding method for a target cooling backing plate, which comprises the following steps: (1) machining the cover plate and the base, wherein the machined base comprises a cooling water channel; (2) contacting the cover plate machined in the step (1) with the cooling water channel, assembling the cover plate and the base, and then performing vacuum brazing to obtain a crude product of the target cooling back plate; (3) performing friction stir welding on the welding seam of the crude product of the target cooling back plate in the step (2) to obtain a target cooling back plate; the welding method adopts a composite welding form of vacuum brazing and friction stir welding, firstly ensures the welding combination rate of most welding surfaces through the vacuum brazing, and then performs supplementary welding on the welding seams of the vacuum brazing through the friction stir welding, ensures the welding combination rate, avoids the leakage problem of the cooling water channel, and reduces the production cost.
CN104588807B a method for forming a back sheet, and a back sheet, wherein the method for forming a back sheet includes: providing a bottom plate and a cover plate, wherein the surface of one side of the bottom plate, which faces the cover plate, is a top surface of the bottom plate, the top surface of the bottom plate is a plane, the bottom surface of the cover plate is a plane, and the bottom of the cover plate is provided with a cooling water channel groove-shaped structure; the cooling water channel groove-shaped structure and the bottom plate form a cooling water channel; welding the bottom surface of the cover plate and the top surface of the bottom plate by using a brazing process to form a back plate; the method can reduce the assembly difficulty coefficient of the cover plate, the brazing filler metal and the bottom plate, and the formed back plate is high in welding combination rate and not easy to deform.
At present, the water channel cover plate and the back plate bottom plate are mostly connected in a vacuum brazing mode, however, the vacuum brazing needs to use a solder for welding, impurity elements can be introduced into the back plate, the solder is easy to leak into the water channel, pore channels can be blocked when the welding is serious, the overhauling and maintenance cost is increased, and the back plate can leak water due to uneven placement of the solder; and the vacuum brazing needs to be carried out in a vacuum brazing furnace, so that the size of the back plate is limited, and the vacuum brazing cannot be used for welding the large-size back plate.
In the prior art, welding has many requirements on the size of a water channel, different welding modes are required to be adopted for the sizes of different water channels, the water channel on the back plate is complicated and complicated aiming at a large-size square back plate, the larger the size of the back plate is, the longer the designed length of the water channel is, so that the welding difficulty is increased, irregular tracks exist, and the problems of serious deformation of the welding surface or damage to the appearance size of a product and influence on the welding effect are solved.
Therefore, a new target backing plate welding method is needed, which has the advantages of simple operation, reasonable welding path and high welding bonding rate, and can be used for welding large-size cover plates.
Disclosure of Invention
The invention aims to provide a stirring friction welding method of a target backboard, which is characterized in that a backboard bottom plate with a cooling water channel and a disc-shaped water channel cover plate are assembled, and the target backboard is obtained through stirring friction welding; the friction stir welding has the advantages of simple and convenient operation, no need of additional welding flux, no introduction of impurity elements, high welding combination rate, difficult occurrence of water leakage and effective improvement of the welding combination rate.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention aims to provide a stirring friction welding method of a target backboard.
The invention adopts the disc-shaped water channel cover plate which can be assembled with the back plate bottom plate, the friction stir welding operation is simple and convenient, no welding flux is needed to be added, no impurity element is introduced, the welding combination rate is high, and the water leakage condition is not easy to occur; the friction stir welding method can be used for welding the large-size back plate.
As a preferred embodiment of the present invention, the disk-shaped waterway cover plate and the back plate base plate are cleaned before the assembly.
Preferably, the cleaning agent used for cleaning comprises water and/or ethanol.
As a preferred embodiment of the present invention, the welding speed of the friction stir welding is 150-250mm/min, such as 150mm/min, 155mm/min, 160mm/min, 165mm/min, 170mm/min, 175mm/min, 180mm/min, 185mm/min, 190mm/min, 195mm/min, 200mm/min, 205mm/min, 210mm/min, 215mm/min, 220mm/min, 225mm/min, 230mm/min, 235mm/min, 240mm/min, 245mm/min, 250mm/min, etc., but not limited to the values listed, and other values not listed in the above-mentioned value range are also applicable.
As a preferred technical solution of the present invention, the rotational speed of the welding tool for friction stir welding is 300-500r/min, for example, 300r/min, 310r/min, 320r/min, 330r/min, 340r/min, 350r/min, 360r/min, 370r/min, 380r/min, 390r/min, 400r/min, 410r/min, 420r/min, 430r/min, 440r/min, 450r/min, 460r/min, 470r/min, 480r/min, 490r/min, 500r/min, etc., but not limited to the values listed, and other values not listed in the above range of values are also applicable.
In a preferred embodiment of the present invention, the tool inclination angle of the friction stir welding is 0 to 5 °, and may be, for example, 0 °, 1 °, 2 °, 3 °, 4 °, 5 °, but is not limited to the above-mentioned values, and other values not listed in the above-mentioned range of values are also applicable.
In a preferred embodiment of the present invention, the shape of the plate-shaped water passage cover plate is identical to the shape of the cooling water passage.
In a preferred embodiment of the present invention, when the length of the cooling water channel is greater than 5m, the welding is performed in stages, and may be, for example, 5.5m, 6m, 7m, 8m, 9m, 10m, 11m, 12m, 13m, 14m, 15m, 16m, 17m, 18m, but is not limited to the above-mentioned values, and other values not listed in the above-mentioned range of values are also applicable.
Preferably, in the step welding, the welding path length of each step is less than or equal to 10m, and may be, for example, 1m, 2m, 3m, 4m, 5m, 6m, 7m, 8m, 9m, 10m, etc., but is not limited to the enumerated values, and other unrecited values in the above numerical range are also applicable.
In a preferred embodiment of the present invention, when the length of the cooling water channel is less than or equal to 5m, the welding is performed only once, and the welding path is performed along the edge of the cooling water channel with one end of the cooling water channel as a start end and an end, and may be, for example, 1m, 1.5m, 2m, 2.5m, 3m, 3.5m, 4m, 4.5m, 5m, etc., but not limited to the above-mentioned values, and other values not listed in the above-mentioned value range are also applicable.
As a preferred technical solution of the present invention, the welding path uses the water inlet or the water outlet of the cooling water channel as a starting end and an ending end.
As a preferable technical scheme of the invention, the backboard bottom plate is provided with at least two mutually independent cooling water channels, and at least two mutually independent disc-shaped water channel cover plates are respectively corresponding to the cooling water channels.
It is worth to be noted that the back plate comprising at least two cooling water channels belongs to a large-size back plate, and the welding method of each disk-shaped water channel cover plate adopts the stirring friction welding method.
The recitation of numerical ranges herein includes not only the above-recited numerical values, but also any numerical values between non-recited numerical ranges, and is not intended to be exhaustive or to limit the invention to the precise numerical values encompassed within the range for brevity and clarity.
Compared with the prior art, the invention has the following beneficial effects:
(1) in the stirring friction welding method of the target back plate, the path is reasonably arranged, and the phenomenon that the local temperature is too high due to too long feed during stirring friction welding is avoided, so that the risk of breakage of a welding head in the welding process is reduced, and the welding combination rate is effectively improved;
(2) the stirring friction welding method of the target material back plate is flexible to apply and simple and convenient to operate, and can be used for welding large-size target material back plates.
Drawings
Fig. 1 shows the welding path of the target backing plate according to example 1.
Detailed Description
The technical solution of the present invention is further explained by the following embodiments. It should be understood by those skilled in the art that the examples are only for the understanding of the present invention and should not be construed as the specific limitations of the present invention.
Example 1
The embodiment provides a friction stir welding method for a target back plate, which includes:
cleaning a backboard base plate with three cooling water channels and three mutually independent disk-shaped water channel cover plates by using water, and finishing assembly in a one-to-one correspondence manner, wherein the length of a first cooling water channel is 6m, the length of a second cooling water channel is 4m, and the length of a third cooling water channel is 6 m;
stirring, rubbing and welding the back plate bottom plate and the disc-shaped water channel cover plate at the welding speed of 200mm/min, the welding tool rotating speed of 400r/min and the welding tool inclination angle of 0 degrees to obtain a target material back plate;
the length of the first cooling water channel is 6m and is more than 5m, the welding path of the first cooling water channel is divided into two sections, the two sections are respectively welded along one side of the cooling water channel, and the length of each section of the welding path is 6 m; the length of the second cooling water channel is 4m and less than 5m, the welding is carried out only once, one end of the welding path is used as a starting end and an ending end, the welding is carried out along the edge of the cooling water channel, and the length of the welding path is 8 m; the length of the third cooling water channel is 6m and larger than 5m, the welding path of the first cooling water channel is divided into two sections, welding is respectively carried out along one side of the cooling water channel, and the length of each section of the welding path is 6 m.
The welding path of the present embodiment is as shown in fig. 1, and on the first cooling water channel, the first section of welding path is from the lower cutting edge 11 to the tool withdrawal opening 12, and the second section of welding path is from the lower cutting edge 21 to the tool withdrawal opening 22; on the second cooling water channel, a third section of welding path is from the lower cutter opening 31 to the cutter withdrawal opening 32; on the third cooling water channel, the fourth welding path is from the lower cutting edge 41 to the tool withdrawal opening 42, and the fifth welding path is from the lower cutting edge 51 to the tool withdrawal opening 52.
Example 2
The embodiment provides a friction stir welding method for a target back plate, which includes:
cleaning a back plate bottom plate with two cooling water channels and two mutually independent disk-shaped water channel cover plates by using water, and finishing assembly in a one-to-one correspondence manner, wherein the length of a first cooling water channel is 5m, and the length of a second cooling water channel is 10 m;
stirring, rubbing and welding the back plate bottom plate and the disc-shaped water channel cover plate at the welding speed of 250mm/min, the welding tool rotating speed of 500r/min and the welding tool inclination angle of 5 degrees to obtain a target material back plate;
the length of the first cooling water channel is 5m, welding is carried out only once, one end of the welding path, which is taken as a starting end and an ending end, of the cooling water channel is welded along the edge of the cooling water channel, and the length of the welding path is 10 m; the length of the second cooling water channel is 10m and larger than 5m, the welding path of the first cooling water channel is divided into two sections, welding is respectively carried out along one side of the cooling water channel, and the length of each section of the welding path is 10 m.
Example 3
The embodiment provides a friction stir welding method for a target back plate, which includes:
cleaning a backboard base plate with three cooling water channels and three mutually independent disk-shaped water channel cover plates by using water, and finishing assembly in a one-to-one correspondence manner, wherein the length of a first cooling water channel is 5m, the length of a second cooling water channel is 3m, and the length of a third cooling water channel is 8 m;
stirring, rubbing and welding the back plate bottom plate and the disc-shaped water channel cover plate at the welding speed of 150mm/min, the welding tool rotating speed of 300r/min and the welding tool inclination angle of 3 degrees to obtain a target material back plate;
the length of the first cooling water channel is 5m, welding is carried out only once, one end of the welding path, which is taken as a starting end and an ending end, of the cooling water channel is welded along the edge of the cooling water channel, and the length of the welding path is 10 m; the length of the second cooling water channel is 3m and less than 5m, the welding is carried out only once, one end of the welding path is used as a starting end and an ending end, the welding is carried out along the edge of the cooling water channel, and the length of the welding path is 6 m; the length of the third cooling water channel is 8m and larger than 5m, the welding path of the first cooling water channel is divided into two sections, welding is respectively carried out along one side of the cooling water channel, and the length of each section of the welding path is 8 m.
Example 4
The embodiment provides a friction stir welding method for a target back plate, which includes:
cleaning a back plate bottom plate with four cooling water channels and four mutually independent disk-shaped water channel cover plates by using water, and finishing assembly in a one-to-one correspondence manner, wherein the length of a first cooling water channel is 3m, the length of a second cooling water channel is 9m, the length of a third cooling water channel is 12m, and the length of a fourth cooling water channel is 7 m;
stirring, rubbing and welding the back plate bottom plate and the disc-shaped water channel cover plate at the welding speed of 200mm/min, the welding tool rotating speed of 400r/min and the welding tool inclination angle of 2 degrees to obtain a target material back plate;
the length of the first cooling water channel is 3m and less than 5m, welding is carried out only once, one end of the welding path, which is taken as a starting end and an ending end, of the cooling water channel is welded along the edge of the cooling water channel, and the length of the welding path is 6 m; the length of the second cooling water channel is 9m and is more than 5m, the welding path of the first cooling water channel is divided into two sections, welding is respectively carried out along one side of the cooling water channel, and the length of each section of welding path is 9 m; the length of the third cooling water channel is 12m and is more than 5m, the welding path of the first cooling water channel is divided into three sections, the welding is carried out along one side by taking the water inlet of the cooling water channel as a starting end, the welding paths of the three sections are connected end to end, meanwhile, the water inlet of the cooling water channel is taken as an ending end, and the length of each welding path is 8 m; the length of the fourth cooling water channel is 7m and larger than 5m, the welding path of the fourth cooling water channel is divided into two sections, welding is carried out along one side of the cooling water channel respectively, and the length of each section of the welding path is 7 m.
Example 5
The embodiment provides a friction stir welding method for a target back plate, which includes:
cleaning a backboard base plate with three cooling water channels and three mutually independent disk-shaped water channel cover plates by using water, and finishing assembly in a one-to-one correspondence manner, wherein the length of a first cooling water channel is 6m, the length of a second cooling water channel is 10m, and the length of a third cooling water channel is 6 m;
stirring, rubbing and welding the back plate bottom plate and the disc-shaped water channel cover plate at the welding speed of 200mm/min, the welding tool rotating speed of 400r/min and the welding tool inclination angle of 0 degrees to obtain a target material back plate;
the length of the first cooling water channel is 6m, welding is carried out only once, one end of the welding path, which is taken as a starting end and an ending end, of the cooling water channel is welded along the edge of the cooling water channel, and the length of the welding path is 12 m; the length of the second cooling water channel is 10m, the second cooling water channel is only welded once, the welding path takes one end of the cooling water channel as a starting end and an ending end, welding is carried out along the edge of the cooling water channel, and the length of the welding path is 20 m; the length of the third cooling water channel is 6m, the third cooling water channel is welded only once, one end of the welding path is used as a starting end and an end, welding is carried out along the edge of the cooling water channel, and the length of the welding path is 12 m.
Comparative example 1
The comparative example provides a welding method of a target backing plate, comprising the following steps:
cleaning a backboard base plate with a 6m cooling water channel and a square water channel cover plate by using water, and filling welding flux at the position needing welding so as to finish assembly; then putting the mixture into a vacuum brazing furnace, and keeping the vacuum degree at 10-2Vacuum brazing is carried out for 30min at the temperature of 800 ℃ under Pa to obtainA target backing plate.
Firstly, testing the frequency of replacing a welding head in the welding process of the embodiment, wherein the testing comprises the following specific steps:
welding according to the welding path in each embodiment, recording the length of the welding path of each used welding head, and taking an average value as the average using path length of the welding head, wherein the unit is m; the average using path length of the welding head can reflect the replacement frequency of the welding head, and the longer the average using path length of the welding head is, the lower the replacement frequency of the welding head is.
The test results of the frequency of replacement of the welding head of the above embodiment are shown in table 1.
(II) carrying out one-time welding pass rate test on the target back plates obtained in the above examples and comparative examples, wherein the test comprises the following specific steps:
and (3) introducing cooling water into the N target back plates, observing the water leakage condition, and if water leakage occurs in the N target back plates, determining the one-time welding pass rate as (1-N/N) multiplied by 100%.
The test results of the one-time welding pass rates of the above examples and comparative examples are shown in table 1.
TABLE 1
| Item | Average used path length of welding head/m | One-time weld pass rate/%) |
| Example 1 | 33 | 99.7 |
| Example 2 | 32 | 99.4 |
| Example 3 | 30 | 99.6 |
| Example 4 | 32 | 99.4 |
| Example 5 | 18 | 99.2 |
| Comparative example 1 | / | 97.1 |
The following points can be derived from table 1:
(1) as can be seen from the examples 1-4, the friction stir welding method of the target backing plate has high one-time welding throughput rate, long average using path length of the welding head and low replacement frequency of the welding head;
(2) comparing example 1 with example 5, it can be seen that, in example 5, the length of the welding path of the first cooling water channel is 12m, the length of the welding path of the second cooling water channel is 20m, and the length of the welding path of the third cooling water channel is 12m, but the length of the welding path of each section is preferably less than or equal to 10m, so that when the friction stir welding is performed, the local temperature is too high due to the overlong welding path of each section, and further, the risk that the welding head is broken in the welding process is increased, so that the average use path length of the welding head is short, and the frequency of replacement of the welding head is high;
(3) comparing the embodiment 1 with the comparative example, it can be found that the comparative example 1 adopts vacuum brazing to prepare the target material back plate, the vacuum brazing needs to use solder for welding, impurity elements are introduced into the back plate, the solder is easy to leak into a water channel, the back plate cover plate and the back plate bottom plate are possibly not contacted tightly enough, gaps exist at the welding position, and therefore water leakage occurs, and the one-time welding passing rate is lower than that of the friction stir welding method; and the vacuum brazing needs to be carried out in a vacuum brazing furnace, so that the size of the back plate is limited, and the vacuum brazing cannot be used for welding the large-size back plate.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. A stirring friction welding method for a target backboard is characterized in that a backboard bottom plate with a cooling water channel and a disc-shaped water channel cover plate are assembled, and the target backboard is obtained through stirring friction welding.
2. The friction stir welding method of claim 1 wherein said disk shaped waterway cover plate and said back plate base plate are cleaned prior to said assembling;
preferably, the cleaning agent used for cleaning comprises water and/or ethanol.
3. The friction stir welding method as recited in claim 1 or 2, wherein the welding speed of the friction stir welding is 150-250 mm/min.
4. The friction stir welding method as recited in any one of claims 1 to 3, wherein the rotational speed of the welding tool for friction stir welding is 300-.
5. The friction stir welding method of any of claims 1-4 wherein the tool inclination angle of the friction stir welding is 0-5 °.
6. The friction stir welding method of any one of claims 1 to 5, wherein the shape of the disk-shaped waterway cover plate conforms to the shape of the cooling waterway.
7. The friction stir welding method according to any one of claims 1 to 6, wherein when the length of the cooling water passage is more than 5m, the segmented welding is performed;
preferably, in the segmented welding, the welding path length of each segment is less than or equal to 10 m.
8. The friction stir welding method according to any one of claims 1 to 7, wherein the welding is performed only once when the length of the cooling water passage is less than or equal to 5m, and the welding path is performed along the edge of the cooling water passage with one end of the cooling water passage as a starting end and an ending end.
9. The friction stir welding method of claim 8 wherein the weld path begins and ends with a water inlet or a water outlet of the cooling water channel.
10. The friction stir welding method of any one of claims 1 to 9, wherein the back plate base plate is provided with at least two independent cooling water passages, and at least two independent disk-shaped water passage cover plates are provided to correspond to the cooling water passages, respectively.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115255596A (en) * | 2022-09-06 | 2022-11-01 | 浙江最成半导体科技有限公司 | Target, target assembly and manufacturing method thereof |
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2021
- 2021-12-01 CN CN202111452152.1A patent/CN114043070A/en active Pending
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