CN104475977A - IC (Integrated Circuit) equipment ultra-large aluminum alloy cavity welding method - Google Patents
IC (Integrated Circuit) equipment ultra-large aluminum alloy cavity welding method Download PDFInfo
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- CN104475977A CN104475977A CN201410783502.6A CN201410783502A CN104475977A CN 104475977 A CN104475977 A CN 104475977A CN 201410783502 A CN201410783502 A CN 201410783502A CN 104475977 A CN104475977 A CN 104475977A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/346—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding
- B23K26/348—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding in combination with arc heating, e.g. TIG [tungsten inert gas], MIG [metal inert gas] or plasma welding
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Abstract
The invention relates to an IC (Integrated Circuit) equipment aluminum alloy cavity welding method and particularly relates to an IC equipment ultra-large aluminum alloy cavity welding method. According to the technical scheme adopted in the invention, the thickness of an ultra-large aluminum alloy cavity is greater than or equal to 300mm, and the wall thickness of the cavity is greater than or equal to 15mm. According to the method, an aluminum alloy stretched plate is adopted as a cavity welding raw material and is provided with a run-on plate and a run-off plate; a T-shaped or L-shaped locating mode is adopted for locating butt-welded seams, a laser-arc hybrid welding method is adopted for welding, a closed-loop control method is adopted for regulating butt-welding parameters in real time, and the run-on plate and the run-off plate are cut off by use of a mechanical processing method after welding is finished. According to the welding method, the run-on plate and the run-off plate are arranged on the cavity welding raw material; during welding, arc striking is performed on the run-on plate and arc suppression is performed on the run-off plate, and the run-on plate and the run-off plate are processed to be removed off after welding is finished, so that the IC equipment ultra-large aluminum alloy cavity meets the requirement of consistent materials.
Description
Technical field
The present invention relates to the welding method that a kind of IC equips aluminium alloy cavity, be specifically related to the welding method that a kind of IC equips ultra-large type aluminium alloy cavity.
Background technology
The development of the aluminium alloy cavity part in IC equipment (producing the production equipment special of semiconductor devices, IC chip and flat-panel monitor) field has the trend of gigantism, and wherein wall thickness more than 15mm and thickness more than the ultra-large type aluminium alloy cavity of 300mm, very difficult by technology preparations such as existing machine cut, electron beam welding, agitating friction welding and forging processing, the aluminium alloy cavity part of 300mm thickness becomes Pinch technology gradually.Machine cut method, can empty stretching sheet material, but causes waste of raw materials serious, and expends man-hour; Due to the restriction of its vacuum, there is great difficulty to oversize weld parts in electron beam welding; Friction stir welding limits because of its technology, cannot complete the graded seal technique of angle welding form; Because IC equips the particular/special requirement of aluminium alloy cavity part, need part to manufacture in subsequent technique and carry out anodized, the higher import reflectal of general employing uniform in material is as raw material, and often limit because of FMT more than the reflectal of 300mm, the requirement that material is consistent cannot be reached.
Because IC equips the particularity of industry, require high to parts weldquality, require that the material uniformity of weld seam and mother metal is higher, and the physical property that aluminium alloy is very easily oxidized under having normal temperature and pressure, therefore the welding of aluminium alloy has difficulty; Easily produce weld porosity under wet environment, easily form fire check, thermal conductivity and specific heat capacity are large, and strong etc. to light, heat reflection, need high power welding power supply.Therefore, Laser-Arc Hybrid Welding, belongs to one of high energy beam welding method, can complete the technology of the high-quality weld seam of more than 15mm aluminium alloy, be solve prepare wall thickness more than 15mm and thickness more than the excellent technique method of the ultra-large type aluminium alloy cavity of 300mm.
The Laser-Arc Hybrid Welding technology of ultra-large type aluminium alloy cavity; the welding process of weld seam is divided into the starting the arc-welding-receipts arc; because heat is inadequate during the starting the arc; often can form that weld seam is narrow, the weld defect of part incomplete fusion; incomplete fusion is present in the root of weld; and the intersection of weld seam and mother metal, incomplete fusion makes local strength decline to a great extent.In welding process, the element of end fusing point constantly flows to weld seam end due to good mobility, finally concentrate on the center, molten bath of receiving arc, make element ratio other positions far above weld seam of fusing point at the bottom of receipts arc place, the element of end fusing point comprises at the bottom of sulphur, phosphorus, these material intensities of oxide, tissue looseness, under the effect of the welding shrinkage stress of welding process generation, these places are easy to produce fine cracks.Weld defect and fine cracks can be there is in starting the arc place and the receipts arc place of weld seam.
Summary of the invention
The invention provides the welding method that a kind of IC equips ultra-large type aluminium alloy cavity, cavity welding raw material arranged run-on tab and receive arc plate, the starting the arc on run-on tab during welding, arc received by receipts arc plate, after welding, run-on tab and the processing of receipts arc plate are removed, make IC equip ultra-large type aluminium alloy cavity and reach the consistent requirement of material.
Technical scheme of the present invention is as follows:
A kind of IC equips the welding method of ultra-large type aluminium alloy cavity, described ultra-large type aluminium alloy cavity thickness >=300mm and cavity wall thickness >=15mm, described method adopts Aluminum alloy tensile plate as cavity welding raw material, described Aluminum alloy tensile plate arranged run-on tab and receive arc plate, T-shaped or L-type locate mode butt welded seam is adopted to position, laser-arc hybrid welding in industry method is adopted to weld, adopt closed loop control method welding parameters to adjust in real time, welded rear employing machining process and machined away described run-on tab and receive arc plate.
Described IC equips the welding method of ultra-large type aluminium alloy cavity, and its preferred version is, described method carries out pre-welding treatment, with acetone cleaning weldment weld seam and the dirt within the scope of 30 ~ 50mm both sides, weld seam both sides.
Described IC equips the welding method of ultra-large type aluminium alloy cavity, and its preferred version is, in described laser-arc hybrid welding in industry method, laser and electric arc are coaxial or paraxonic is arranged.
Described IC equips the welding method of ultra-large type aluminium alloy cavity, and its preferred version is, in described laser-arc hybrid welding in industry method, laser adopts the optical fiber laser of more than 2KW.
Described IC equips the welding method of ultra-large type aluminium alloy cavity, and its preferred version is, in described laser-arc hybrid welding in industry method, electric arc is TIG weldering, MIG weldering or plasma arc welding (PAW).
Beneficial effect of the present invention is as follows:
1, welding method of the present invention, adopt Aluminum alloy tensile plate as cavity welding raw material, described Aluminum alloy tensile plate arranged run-on tab and receive arc plate, the starting the arc on run-on tab during welding, arc received by receipts arc plate, after welding, run-on tab and the processing of receipts arc plate are removed, make IC equip ultra-large type aluminium alloy cavity and reach the consistent requirement of material.
2, the present invention adopts acetone to carry out welding front cleaning, in laser-plasma hybrid welding process, hydrogen is fully overflowed; Welding surroundings humid control, below 50%, effectively controls the generation of weld blowhole.
3, welding method of the present invention saves material, and saves man-hour, meets the trend of environmental protection and energy saving.
4, welding method of the present invention adopts the method for closed-loop control, and welding parameters adjusts control in real time, makes seam organization have comparatively high uniformity and uniformity.
Accompanying drawing explanation
Fig. 1 is base arrangement schematic diagram;
Fig. 2 is left plate structural representation;
Fig. 3 is right plate structural representation;
Fig. 4 is top board structure schematic diagram;
Fig. 5 is back plate structure schematic diagram;
Fig. 6 is front board structure schematic diagram;
Fig. 7 is that the IC after welding equips ultra-large type aluminium alloy cavity structural representation.
Detailed description of the invention
As shown in Fig. 1 ~ 7, a kind of IC equips the welding method of ultra-large type aluminium alloy cavity, and adopt laser-arc hybrid welding in industry method to weld, wherein laser and electric arc are coaxial setting, and laser adopts the optical fiber laser of more than 2KW, and electric arc is TIG weldering; Closed loop control method welding parameters is adopted to adjust in real time; Carry out pre-welding treatment, with acetone cleaning weldment weld seam and the dirt within the scope of 30 ~ 50mm both sides, weld seam both sides.
IC equips ultra-large type aluminium alloy cavity and is of a size of 320mm*480mm*500mm, Aluminum alloy tensile plate is adopted to equip ultra-large type aluminium alloy cavity welding raw material as described IC, comprise base plate 1, left plate 2, right plate 3, top board 4, rear plate 5 and header board 6, base plate 1, rear plate 5 and header board 6 wall thickness are 20mm, and left plate 2, right plate 3 and top board 4 wall thickness are 15mm;
Base plate 1 arranged run-on tab 1, receive arc plate 1, receive arc plate 2 13, receive arc plate 3 15 and rise and receive arc plate 1, left plate 2 arranged run-on tab 2 21, run-on tab 3 22 and receive arc plate 4 23, right plate 3 is arranged run-on tab 4 31, receive arc plate 5 32 and receive arc plate 6 33, top board 4 arranged run-on tab 5 41 and receive arc plate 7 42, rear plate 5 arranged run-on tab 6 51, run-on tab 7 53, run-on tab 8 54 and receive arc plate 8 52, header board 6 having been arranged and has received arc plate 2 61;
First, adopt T-shaped locate mode butt welded seam to position base plate 1 and rear plate 5, in run-on tab 1 and the run-on tab 6 51 junction starting the arc, receive arc at receipts arc plate 1 with receipts arc plate 8 52 junction;
Next, adopt T-shaped locate mode butt welded seam to position left plate 2 and base plate 1 and rear plate 5, in run-on tab 2 21 and the run-on tab 7 53 junction starting the arc, receives arc at receipts arc plate 2 13 with receipts arc plate 4 23 junction;
Again, adopt T-shaped locate mode butt welded seam to position right plate 3 and base plate 1 and rear plate 5, in run-on tab 4 31 and the run-on tab 8 54 junction starting the arc, receive arc at receipts arc plate 5 32 with receipts arc plate 3 15 junction;
Then, employing machining process, machines away run-on tab 1, run-on tab 6 51, receipts arc plate 1, receipts arc plate 8 52, run-on tab 2 21, run-on tab 7 53, receipts arc plate 2 13, receipts arc plate 4 23, run-on tab 4 31, run-on tab 8 54, receipts arc plate 5 32 and receipts arc plate 3 15;
Thereafter, adopt T-shaped locate mode butt welded seam to position top board 4 and left plate 2, right plate 3 and rear plate 5, in run-on tab 5 41 and the run-on tab 3 22 junction starting the arc, receive arc at receipts arc plate 7 42 with receipts arc plate 6 33 junction; Adopt machining process, run-on tab 5 41, run-on tab 3 22, receipts arc plate 7 42 and receipts arc plate 6 33 are machined away;
Again, adopt L-type locate mode butt welded seam to position header board 6 and top board 4, left plate 2, right plate 3 and base plate 1, receive arc plate 1 with rising and receives the arc plate 2 61 junction starting the arc rising, receive arc plate 1 and receive arc plate 2 61 junction and receive arc rising after welding; Adopt machining process, will work to receive arc plate 1 and receive arc plate 2 61 machining away.
Claims (5)
1. the welding method of an IC equipment ultra-large type aluminium alloy cavity, it is characterized in that, described ultra-large type aluminium alloy cavity thickness >=300mm and cavity wall thickness >=15mm, described method adopts Aluminum alloy tensile plate as cavity welding raw material, described Aluminum alloy tensile plate arranged run-on tab and receive arc plate, T-shaped or L-type locate mode butt welded seam is adopted to position, laser-arc hybrid welding in industry method is adopted to weld, adopt closed loop control method welding parameters to adjust in real time, welded rear employing machining process and machined away described run-on tab and receive arc plate.
2. IC according to claim 1 equips the welding method of ultra-large type aluminium alloy cavity, and it is characterized in that, described method carries out pre-welding treatment, with acetone cleaning weldment weld seam and the dirt within the scope of 30 ~ 50mm both sides, weld seam both sides.
3. IC according to claim 1 equips the welding method of ultra-large type aluminium alloy cavity, and it is characterized in that, in described laser-arc hybrid welding in industry method, laser and electric arc are coaxial or paraxonic is arranged.
4. IC according to claim 1 equips the welding method of ultra-large type aluminium alloy cavity, it is characterized in that, in described laser-arc hybrid welding in industry method, laser adopts the optical fiber laser of more than 2KW.
5. IC according to claim 1 equips the welding method of ultra-large type aluminium alloy cavity, it is characterized in that, in described laser-arc hybrid welding in industry method, electric arc is TIG weldering, MIG weldering or plasma arc welding (PAW).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410783502.6A CN104475977A (en) | 2014-12-16 | 2014-12-16 | IC (Integrated Circuit) equipment ultra-large aluminum alloy cavity welding method |
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| CN201410783502.6A CN104475977A (en) | 2014-12-16 | 2014-12-16 | IC (Integrated Circuit) equipment ultra-large aluminum alloy cavity welding method |
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Cited By (4)
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| CN108994543A (en) * | 2018-08-24 | 2018-12-14 | 沈阳富创精密设备有限公司 | A kind of processing technology of IC equipment configuration part |
| CN109128508A (en) * | 2018-09-29 | 2019-01-04 | 沈阳富创精密设备有限公司 | Large aluminum alloy cavity laser-plasma arc hybrid welding technique |
| CN110899980A (en) * | 2019-12-10 | 2020-03-24 | 沈阳富创精密设备有限公司 | Plasma arc-laser hybrid welding method for high-sealing aluminum alloy rectangular cavity |
| CN114178701A (en) * | 2021-12-06 | 2022-03-15 | 中国兵器科学研究院宁波分院 | 7B52 aluminum alloy laser-electric arc hybrid welding positioning device and use method thereof |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108994543A (en) * | 2018-08-24 | 2018-12-14 | 沈阳富创精密设备有限公司 | A kind of processing technology of IC equipment configuration part |
| CN109128508A (en) * | 2018-09-29 | 2019-01-04 | 沈阳富创精密设备有限公司 | Large aluminum alloy cavity laser-plasma arc hybrid welding technique |
| CN110899980A (en) * | 2019-12-10 | 2020-03-24 | 沈阳富创精密设备有限公司 | Plasma arc-laser hybrid welding method for high-sealing aluminum alloy rectangular cavity |
| WO2021114456A1 (en) * | 2019-12-10 | 2021-06-17 | 沈阳富创精密设备有限公司 | Plasma arc-laser hybrid welding method for high-leakproofness aluminum alloy rectangular cavity |
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| JP7344629B2 (en) | 2019-12-10 | 2023-09-14 | 沈陽富創精密設備股▲フン▼有限公司 | Plasma arc/laser hybrid welding method for high sealing aluminum alloy rectangular chamber |
| KR102662108B1 (en) | 2019-12-10 | 2024-05-03 | 선양 포춘 프리시전 이큅먼트 컴퍼니., 리미티드. | High-tightness aluminum alloy rectangular cavity plasma arc-laser composite welding method |
| CN114178701A (en) * | 2021-12-06 | 2022-03-15 | 中国兵器科学研究院宁波分院 | 7B52 aluminum alloy laser-electric arc hybrid welding positioning device and use method thereof |
| CN114178701B (en) * | 2021-12-06 | 2024-05-14 | 中国兵器科学研究院宁波分院 | 7B52 aluminum alloy laser-arc composite welding positioning device and use method thereof |
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