CN105137513B - A kind of broadband photon sieve of phase coding - Google Patents
A kind of broadband photon sieve of phase coding Download PDFInfo
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- CN105137513B CN105137513B CN201510610910.6A CN201510610910A CN105137513B CN 105137513 B CN105137513 B CN 105137513B CN 201510610910 A CN201510610910 A CN 201510610910A CN 105137513 B CN105137513 B CN 105137513B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/44—Grating systems; Zone plate systems
Abstract
The invention discloses a kind of broadband photon sieves of phase coding, a diameter of D, including transparent flat substrate and the light tight metallic film being plated in the transparent flat substrate, the light tight metallic film is equipped with the thang-kng aperture of ring-band shape distribution, and the position distribution of the thang-kng aperture meets equation, in formula, f is the focal length of broadband photon sieve, and n is the annulus serial number of thang-kng annulus, and λ is the operation wavelength of photon screen, and R is the radius of broadband photon sieve,For code coefficient three times, k is wave number, xmAnd ymIt is the center of m-th of aperture on n-th of thang-kng annulus（m=1,2,3…um）, wherein, aperture radius.The present invention devises broadband photon sieve that is a kind of while having phase coding plate encoding function and conventional photonic sieve focusing function, greatly reduce sensibility of the photon screen to wavelength, and in the case where not influencing photon screen resolution ratio, the bandwidth of photon screen has been widened, while has improved energy efficiency.
Description
Technical field
The present invention relates to a kind of optical elements, and in particular to a kind of photon screen, especially a kind of broadband light of phase coding
Son sieve.
Background technology
In the prior art, photon screen is by a kind of Kipp diffraction optical elements proposed in 2001 and Fresnel wave
Strap is similar, is all to make odd number or even number Fresnel zone light transmission, and makes adjacent wavestrip light tight.Photon screen is by the wave of light transmission
Band is designed to the micropore of light transmission, and micropore is located in wavestrip, and light wave reaches the distance of focus by each micropore center and passes through optical axis
The difference for reaching the distance of focus is the integral multiple of wavelength, can realize focusing and imaging, for high resolution microscope, spectrum into
Picture, X radial imagings, UV photoetching etc..
As diffraction optical element, photon screen has very big aberration.Generally, for the photon of a focal length f
Sieve, only to design wavelength lambda blur-free imaging.Therefore, as a length of λ of incident light wave+Δ λ, f+ Δ f positions will be focused on, in original
Beginning focal plane position generates background noise.
To solve the above problems, Gimenez etc. is in document " F. Gim é nez, J. A. Monsoriu, W.
D.Furlan, and A. Pons,“Fractal photon sieve,” Opt. Express 14(25), 11958–
One kind point shape photon is proposed in 11963 (2006) " to weed out expansion depth of focus and reduce aberration.But the photon screen is to drop
Low design wavelength is cost in the resolution ratio of focusing position.Andersen et al. is in document " G. Andersen, andD.
Tullson, “Broadband antihole photon sieve telescope,” Appl. Opt. 46(18),3706–
It is proposed in 3708 (2007) " a kind of by telescopic system of the photon screen as primary mirror.In systems, another diffraction optics member
Part is designed to compensate the color aberration characteristics of photon screen, has reached certain wide spectrum imaging effect.But there are two be more than photon for it
The speculum of sieve primary mirror for collimated light path and focuses on, and this mode structure is relative complex.Week et al. document " C.X.Zhou,
X.C.Dong, L.F.Shi,C.T.Wang,and C.L.Du,“Experimental study of a
multiwavelength photon sieve designed by random-area-divided approach,”
It is designed in Appl.Opt.48 (8), 1619-1623 (2009) " and machined one piece of three wavelength photons sieve.The design of the photon screen
Three sets of nonoverlapping holes are separately designed for three different wavelength, for being imaged to three wavelength.But with relatively low
Diffraction efficiency and only to three wavelength of design be imaged.The Chinese patent of application publication number CN104865627A discloses one kind
Broadband photon sieve based on wavefront coding technology, the broadband photon sifter device have a phase coding plate, a table of phase coding plate
Face is phase coding face, another surface is plane, and photon screen is glued with after plane.Phase coding is set before the photon screen
Plate, structure are slightly more complex.
Therefore, in order to it is above-mentioned in the prior art the shortcomings that, develop a kind of broadband photon sieve, make it that not only there is conventional photonic
The focusing function of sieve, while the encoding function of phase coding plate has been also equipped with, and simple in structure, it is clear that there is positive reality
Meaning.
Invention content
The goal of the invention of the present invention is to provide a kind of broadband photon sieve of phase coding, is not influencing photon screen resolution ratio
Under the premise of, widen the bandwidth of photon screen.
To achieve the above object of the invention, the technical solution adopted by the present invention is：A kind of broadband photon sieve of phase coding, directly
Diameter is D, including transparent flat substrate and the light tight metallic film being plated in the transparent flat substrate, the light tight metal foil
Film is equipped with the thang-kng aperture of ring-band shape distribution, and the position distribution of the thang-kng aperture meets equation, in formula, f is the coke of broadband photon sieve
Away from n is the annulus serial number of thang-kng annulus, and λ is the operation wavelength of photon screen, and R is the radius of broadband photon sieve, and α is encodes three times
Coefficient, k are wave number, xmAnd ymIt is the center of m-th of aperture on n-th of thang-kng annulus, m=1,2,3 ..., num, wherein,, aperture radius。
In above-mentioned technical proposal, the α of the code coefficient three times ＞ 20.
In further technical solution, the π of the α of code coefficient three times=20.
In above-mentioned technical proposal, the transparent flat substrate be glass, thickness 2mm.
In above-mentioned technical proposal, the light tight metallic film be light tight chromium film, thickness 100nm.
Since above-mentioned technical proposal is used, the present invention has following advantages compared with prior art：
1. the invention introduces phase coding phase in conventional photonic sieves focusing formula, one kind is devised simultaneously
Width photon screen with phase coding plate encoding function and conventional photonic sieve focusing function, greatly reduces photon screen
To the sensibility of wavelength, and in the case where not influencing photon screen resolution ratio, the bandwidth of photon screen has been widened, while has improved energy
Amount efficiency；
2. it is the configuration of the present invention is simple, light, it is easy to process.
Description of the drawings
Fig. 1 is the structure diagram of one middle width strip photon screen of embodiment；
Fig. 2 is the aperture distribution schematic diagram of Fig. 1 broadband photons sieve；
Fig. 3 is the aperture distribution schematic diagram of conventional photonic sieve；
Fig. 4 is the schematic device for the imaging performance for testing conventional photonic sieve；
Fig. 5 is experimental results of the conventional photonic sieve in design wavelength 632.8nm；
Fig. 6 is the schematic device of the imaging performance of testing broad-band photon screen；
Fig. 7 is the transmittance curve of bandpass filter in Fig. 6
Fig. 8 is that conventional photonic sieves the imaging results under wideband light source；
Fig. 9 is that broadband photon sieves the imaging results under wideband light source；
Figure 10 is that one conventional photonic of embodiment sieve and broadband photon sieve exist（α=20Π）PSF comparison diagrams；
Figure 11 is the MTF curve figure of conventional photonic sieve and broadband photon sieve at different wavelengths；
Figure 12 is that conventional photonic sieves the imaging results figure under different wave length λ=625.8~639.8nm；
Figure 13 is intermediate blurred picture of the broadband photon sieve in different wave length λ=625.8~639.8nm；
Figure 14 is final restored image of the broadband photon sieve in different wave length λ=625.8~639.8nm.
Wherein：1st, transparent flat substrate；2nd, light tight metallic film；3rd, wavelength is the laser of 632.8nm；4th, it expands
Mirror；5th, wave filter；6th, turntable is scattered；7th, parallel light tube；8th, conventional photonic sieves；9、CCD ；10th, display；11st, wideband light source；
12nd, bandpass filter；13rd, broadband photon sieves.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and embodiments：
Embodiment one：It is shown in Figure 1, a kind of broadband photon sieve of phase coding, a diameter of D, including transparent flat base
Bottom and the light tight metallic film being plated in the transparent flat substrate, light tight metallic film are equipped with the thang-kng of ring-band shape distribution
Aperture, the position distribution of thang-kng aperture meet equation,
In formula, f is the focal length of broadband photon sieve, and n is the annulus serial number of thang-kng annulus, and λ is the operation wavelength of photon screen, and R is broadband light
The radius of son sieve, α are code coefficient three times, and k is wave number, xmAnd ymIt is the center of m-th of aperture on n-th of thang-kng annulus,
m=1,2,3…Num, wherein,, aperture radius。
In the present embodiment, code coefficient α is 20 π three times.
In the present embodiment, transparent flat substrate be glass, thickness 2mm.
In the present embodiment, light tight metallic film be light tight chromium film, thickness 100nm.
On the basis of above disclosure, specific photon screen is designed, is the present embodiment broadband photon sieve as shown in Figure 2
Aperture distribution schematic diagram.
As shown in figure 3, it is the aperture distribution schematic diagram of conventional photonic sieve, it can be seen that the structure of conventional photonic sieve is concentric
Annulus, and the present embodiment broadband photon sieve is no longer donut as can be seen from Figure 1, but about y=x symmetrical structure shapes
Formula, it is numerically relatively small by the coding item introduced in this present embodiment, so image is not symmetrically apparent about y=x.
Utilize UV photoetching techniques fabrication design one focal length 500nm, diameter 50mm, operating central wavelength 632.8nm, coding
The broadband photon sieve of 20 π of coefficient.
Comparison is tested for the property to the broadband photon sieve and conventional photonic sieve of above-mentioned acquisition, what wherein conventional photonic sieved sets
Meter wavelength is 632.8nm.
As a comparison, Fig. 4 is the schematic device for the imaging performance for testing conventional photonic sieve, and wavelength is swashing for 632.8nm
The aperture that the incoming laser beam that light device 3 is sent out focuses on wave filter 5 by beam expanding lens 4 is filtered, after pin-hole filter-ing
Laser beam eliminates block by scattering turntable 6.Using a focal length 550mm, the parallel light tube 7 and Pixel size of bore 55mm are
4.54μm（AVT Prosilica GX2750C）CCD9 carry out imaging test, shown on display 10.
Fig. 5 gives experimental results of the conventional photonic sieve in design wavelength 632.8nm, in figure,（a）For PSF characteristics,
（b）Test result is harrowed for resolution ratio,（c）For test result（b）Central area amplification.After going through, point of photon screen
The resolution limit is about 50lp/mm.
As shown in fig. 6, the schematic device of the imaging performance for testing broad-band photon screen, the light beam that wideband light source 11 is sent out
Pass through centre wavelength 632.8nm, the bandpass filter 12 of FWHM10nm（THORLABS company FL632.8-10）, use
Identical parallel light tube 7 irradiates broadband photon sieve 13, carries out imaging test with CCD9, is shown on display 10.Fig. 7 is
The transmittance curve of bandpass filter in Fig. 6.
With conventional photonic sieve replace Fig. 6 in broadband photon sieve, imaging results as shown in figure 8, wherein (a) be PSF characteristics,
（b）Test result is harrowed for resolution ratio,（c）It is harrowed for resolution ratio（b）Central area enlarged drawing, it is clear that conventional photonic sifter device has very big
Aberration.As centre wavelength 632.8nm, the bandwidth incidence of FWHM10nm so that conventional photonic sieve is produced in imaging plane
Very strong background noise.
Fig. 9 gives broadband photon sieve test result under centre wavelength 632.8nm, the bandwidth incidence of FWHM10nm.It is real
Test result figure 9（a）Show that the PSF images that laboratory measures have identical " L " shape feature, Fig. 9（b）Give broadband photon
The intermediate blurred picture of sieve, Fig. 9（c）For final restored image, Fig. 9（d）For restored image Fig. 9（c）Central area amplification.
Intermediate blurred picture is recovered to clear image by appropriate filter function, reaches and is sieved with conventional photonic in design wavelength
632.8nm essentially identical resolution ratio.Under centre wavelength 632.8nm, FWHM10nm illuminations, the resolution ratio of broadband photon sieve is
501p/nm。
It is right under the illumination of different wave length photo respectively in order to further verify the broadband performance of photon screen of the invention obtained
The conventional photonic sieve and broadband photon sieve of the present embodiment are compared, and comparison is carried out using computer simulation emulation, as a result as follows：
Figure 10 is shown under different wave length illumination（λ=625.8~639.8nm）Conventional photonic sieves and broadband photon sieve（α=20
Π）PSF situations.From Figure 10（a）In as can be seen that conventional photonic sieve design wavelength lambda=632.8nm at have it is stronger gather
Burnt ability, but with the deviation of wavelength, focusing power weakens significantly, it is impossible to blur-free imaging.However, Figure 10（b）Middle width strip photon
The PSF of sieve maintains good consistency in the range of wavelength X=625.8nm~639.8nm.Work as λ<627.8nm and λ>
During 637.8nm, PSF consistency is slightly deviateed.
Figure 11 respectively shows the MTF of conventional photonic sieve and broadband photon sieve at different wavelengths（The Fourier of PSF becomes
It changes）Curve.As wavelength departure is in design wavelength, the MTF curve of conventional photonic sieve declines rapidly, and zero occur, causes sky
Between frequency lose.On the contrary, broadband photon sieve keeps good consistency in the range of wavelength X=625.8~639.8nm, work as λ<
627.8nm and λ>637.8nm when slightly reduce.Since MTF in different wave length has good consistency, and from high frequency to low
There is not zero in frequency, so, it can be by designing appropriate wave filter by intermediate blur image restoration.Therefore, photon screen gathers
The introducing of phase coding item can largely reduce sensibility of the photon screen to wavelength in burnt formula, reach and expand bandwidth
Purpose.
Figure 12 gives conventional photonic and sieves the imaging results under different wave length λ=625.8~639.8nm.As wavelength is inclined
From in design wavelength 632.8nm, image blur aggravation.Conventional photonic sieve bandwidth be。
Figure 13 gives broadband photon sieve in different wave length（λ=625.8~639.8nm）Under intermediate blurred picture, own
Image has almost the same fuzzy behaviour under different wavelength.
Figure 14 gives broadband photon sieve in different wave length（λ=625.8~639.8nm）Final restored image.All waves
Intermediate blurred picture under long can access good recovery, have and conventional photonic sieve is in essentially identical point of design wavelength
Resolution.When wavelength significantly deviates from design wavelength（λ<627.8nm and λ>637.8nm）When, MTF is declined slightly, and is caused
Final restored image slightly deviates.For with bore 50mm, the present embodiment prepared by the Π of focal length 500mm, code coefficient α=20
The bandwidth of broadband photon sieve is after tested about 14nm, and broadband photon sieve bandwidth is about 88 times of conventional photonic sieve bandwidth.
Claims (5)
1. a kind of broadband photon sieve of phase coding, a diameter of D including transparent flat substrate and are plated in the transparent flat substrate
Light tight metallic film, it is characterised in that：The light tight metallic film is equipped with the thang-kng aperture of ring-band shape distribution, described
The position distribution of thang-kng aperture meets equation,
In formula, f is the focal length of broadband photon sieve, and n is the annulus serial number of thang-kng annulus, and λ is the operation wavelength of photon screen, and R is broadband light
The radius of son sieve, α are code coefficient three times, and k is wave number, xmAnd ymIt is the center of m-th of aperture on n-th of thang-kng annulus,
M=1,2,3 ..., num, wherein,, aperture radius。
2. the broadband photon sieve of phase coding according to claim 1, it is characterised in that：The α of the code coefficient three times ＞
20。
3. the broadband photon sieve of phase coding according to claim 2, it is characterised in that：The π of the α=20.
4. the broadband photon sieve of phase coding according to claim 1, it is characterised in that：The transparent flat substrate is glass
Glass, thickness 2mm.
5. the broadband photon sieve of phase coding according to claim 1, it is characterised in that：The light tight metallic film is
Light tight chromium film, thickness 100nm.
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| CN201510610910.6A CN105137513B (en) | 2015-09-23 | 2015-09-23 | A kind of broadband photon sieve of phase coding |
| PCT/CN2016/077040 WO2017049886A1 (en) | 2015-09-23 | 2016-03-22 | Phase encoding broadband photon sieve |
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| CN201510610910.6A CN105137513B (en) | 2015-09-23 | 2015-09-23 | A kind of broadband photon sieve of phase coding |
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| CN105137513B (en) * | 2015-09-23 | 2018-06-26 | 苏州大学 | A kind of broadband photon sieve of phase coding |
| CN105404017B (en) * | 2015-12-21 | 2017-12-08 | 哈尔滨工业大学 | Photon screen primary mirror dual colour imaging optical system and its application |
| CN106054297A (en) * | 2016-08-01 | 2016-10-26 | 苏州大学 | Large field diffraction photon sieve |
| CN107152998B (en) * | 2017-04-20 | 2019-09-20 | 苏州大学 | A kind of photon screen alignment methods based on detection Wavefront Coding system |
| CN110501768A (en) * | 2018-05-17 | 2019-11-26 | 苏州大学 | A kind of multispectral, big bandwidth photon screen |
| CN108761606A (en) * | 2018-05-30 | 2018-11-06 | 苏州大学 | A kind of production method of splicing large-diameter photon sieve |
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| CN103018808B (en) * | 2011-09-23 | 2015-05-13 | 中国科学院微电子研究所 | Photon sieve and manufacturing method thereof |
| CN105137513B (en) * | 2015-09-23 | 2018-06-26 | 苏州大学 | A kind of broadband photon sieve of phase coding |
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