CN205941963U - Big visual field diffraction photon sieve - Google Patents

Big visual field diffraction photon sieve Download PDF

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Publication number
CN205941963U
CN205941963U CN201620822952.6U CN201620822952U CN205941963U CN 205941963 U CN205941963 U CN 205941963U CN 201620822952 U CN201620822952 U CN 201620822952U CN 205941963 U CN205941963 U CN 205941963U
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China
Prior art keywords
visual field
aperture
photon screen
photon sieve
big visual
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Expired - Fee Related
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CN201620822952.6U
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Chinese (zh)
Inventor
赵效楠
朱爱娇
王钦华
许峰
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Suzhou University
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Suzhou University
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Abstract

The utility model discloses a big visual field diffraction photon sieve, diameter are D, include the basement of transparent plane and plate the light tight metallic film in this transparent plane basement, be equipped with smooth aperture of leading to of ring zonal distribution on the light tight metallic film, the position that leads to the light aperture distributes and satisfies equation (img file='DDA0001066994100000011. TIF'wi='1174'he='119' /) wherein, F is the focus of photon sieve, the clitellum sequence of n for leading to ring of light area, lambda is the operating wavelength of photon sieve, R is the radius of photon sieve, eta is the coefficient of controlling of little pore size distribution, xm and ym are that the central point of a photon sieve m aperture puts, M=1, 2, 3, , num, wherein (img file='DDA0001066994100000012. TIF'wi='238'he='127' /) leads to ring of light area radius and is about (img file='DDA0001066994100000013. TIF'wi='411'he='94' /) little pore radius (img file='DDA0001066994100000014. TIF'wi='202'he='141' /) the utility model provides a big visual field diffraction photon sieve's final formation of image is insensitive to the off -axis aberration, can clearly form images in big view field range, compares with traditional photon sieve, and the field angle under the same numerical aperture has obvious expansion.

Description

A kind of big visual field diffraction photon screen
Technical field
This utility model is related to a kind of big visual field diffraction photon screen, belongs to optical element technology field.
Background technology
In contemporary optics system, diffraction optical element has become as a kind of main element.For example hope in extra space Remote mirror, high resolution microscope, light spectrum image-forming, terahertz optics, x-ray imaging and UV photoetching etc., they have compact conformation, The advantages of lightweight, flexible design.Fresnel zone plate (FZP) is a kind of typical diffraction optical element, by a series of same Heart annulus is constituted, and photon screen is as a kind of new diffraction optical element, and it is proposed in calendar year 2001 by Kipp first, by a large amount of not Overlapping aperture replaces the annulus of Fresnel zone plate, and aperture is easily controllable, has the resolution higher compared with Fresnel zone plate. However, all of diffraction optical element can only on optical axis (0 degree of visual field) blur-free imaging, limit the application of diffraction element, especially It is in optical imaging field.2005, Andersen proposed a kind of numerical aperture (NA) 0.05, the heavy caliber light of bore 10cm Son sieve, effective working field of view only has 0.5 degree.2009, reach 10nm resolution to improve Soft X-ray Microscope, Chao etc. Propose a kind of nanometer processing process of utilization Fresnel zone plate.But, because little visual field limits 2.5 μm so that whole System debug great challenge.2014, Andersen proposed a kind of film space with photon screen as primary mirror and hopes glasses, has Effect working field of view only has 0.008 degree.Obviously, all diffraction imaging elements can only effectively be operated on axle, can only regard at almost 0 degree Field can be with blur-free imaging.
In view of this, develop a kind of new photon screen, solve effective little defect of working field of view scope in prior art, show So it is a need for.
Content of the invention
Goal of the invention of the present utility model is to provide a kind of big visual field diffraction photon screen, solves photon riddler in prior art Make the little shortcoming in visual field.
To achieve the above object of the invention, the technical solution adopted in the utility model is:A kind of big visual field diffraction photon screen, a diameter of D, including transparent flat substrate and be plated in the suprabasil light tight metallic film of this transparent flat, described light tight metallic film is provided with ring The thang-kng aperture of zonal distribution, the position distribution of described thang-kng aperture meets equation Wherein, f is the focal length of photon screen, and n is the annulus sequence of thang-kng annulus, and λ is the operation wavelength of photon screen, and R is the half of photon screen Footpath, η is the manipulation coefficient of little pore size distribution, xmAnd ymIt is the center of m-th aperture of photon screen, m=1,2,3 ..., num, its InThang-kng girdle radius are aboutAperture radius
Preferably, described η=15 λ.
Preferably, described transparent flat substrate is clear glass substrate.
Preferably, described light tight metallic film is chromium film.
Because technique scheme is used, this utility model compared with prior art has following advantages:
The utility model proposes big visual field diffraction photon screen be ultimately imaged insensitive to off-axis aberration, can be big Blur-free imaging in field range, compared with conventional photonic sieve, the field of view angle under identical numerical aperture has obvious expansion.
Brief description
Fig. 1 is the structural representation of this utility model embodiment one.
Fig. 2 is the Structure Comparison figure of conventional photonic sieve and big visual field diffraction photon screen in this utility model embodiment one.
Fig. 3 is the PSF comparison diagram of conventional photonic sieve and big visual field diffraction photon screen in this utility model embodiment one.
Fig. 4 is that in this utility model embodiment one, conventional photonic sieves and big visual field diffraction photon screen is under different visual fields MTF curve figure.
Fig. 5 is the imaging test installation drawing of this utility model embodiment one.
Fig. 6 is the test result figure of conventional photonic sieve in this utility model embodiment one.
Fig. 7 is the test result figure of big visual field diffraction photon screen in this utility model embodiment one.
Wherein:1st, transparent flat substrate;2nd, light tight metallic film.
Specific embodiment
Below in conjunction with the accompanying drawings and embodiment is further described to this utility model:
Embodiment one:Shown in Figure 1, a kind of big visual field diffraction photon screen, a diameter of D, including transparent flat substrate 1 and plating In the suprabasil light tight metallic film 2 of this transparent flat, described light tight metallic film is provided with the thang-kng of ring-band shape distribution Aperture, the position distribution of described thang-kng aperture meets equation Wherein, f is the focal length of photon screen, and n is the annulus sequence of thang-kng annulus, and λ is the operation wavelength of photon screen, and R is the half of photon screen Footpath, η is the manipulation coefficient of little pore size distribution, xm and ym is the center of m-th aperture of photon screen, m=1,2,3 ..., num, its InThang-kng girdle radius are aboutAperture radius
In the present embodiment, described η=15 λ.
In the present embodiment, described transparent flat substrate 1 is clear glass substrate.
In the present embodiment, described light tight metallic film 2 is chromium film.
Shown in Figure 2, it is the Structure Comparison schematic diagram of conventional photonic sieve and big visual field diffraction photon screen, conventional photonic sieves The structure of (η=0) is donut, and the aperture coordinate system on outermost annulate shaft is respectively:(25mm,0mm),(-25mm,0mm), (0mm, 25mm) and (0mm, -25mm).And the big visual field photon screen (η=15 λ) in the present embodiment is no longer donut, but With regard to y=x symmetrical structure form, the aperture coordinate system on outermost annulate shaft is respectively:(25.19mm,0mm),(-24.81mm, 0mm), (0mm, 25.19mm) and (0mm, -24.81mm).
The present embodiment devises a focal length 500mm, diameter 50mm, operation wavelength 632.8nm, and aperture manipulation coefficient η= 15 λ, whole annulus quantity are 987, the big visual field photon screen of 3.1641 μm of the pinhole size of minimum.Shown in Figure 3, for difference Visual field (- 6~6 degree of degree) conventional photonic sieve (η=0) and the PSF situation comparison diagram of big visual field photon screen (η=15 λ).In Fig. 3 (a) Conventional photonic sieve has stronger focusing power in 0.5 degree of field range, but the increase with the angle of visual field, focusing power is significantly Weaken it is impossible to blur-free imaging.And the PSF of Fig. 3 (b) big visual field photon screen maintains good concordance in the range of 4 degree of visual field. Work as visual field>When 4 degree, PSF concordance slightly there occurs deviation.
Fig. 4 respectively show conventional photonic sieve and big visual field photon screen in the MTF curve under different visual fields (in Fu of PSF Leaf transformation), wherein dotted line represents the MTF curve of conventional photonic sieve, and solid line represents the MTF curve of big visual field photon screen.With regarding Rink corner degree deviates from visual field on axle (0 degree), and the MTF curve of conventional photonic sieve declines rapidly, and zero point, causes spatial frequency Lose.On the contrary, big visual field photon screen keeps good concordance in the range of 4 degree of the angle of visual field, works as visual field>Slightly reduce when 4 degree. Because MTF has good concordance in different visual fields, and zero point not occurring from high frequency to low frequency, so, can pass through Design suitable wave filter by middle blur image restoration.Therefore, it is proposed that big visual field photon screen can be largely Reduce the sensitivity to visual field (off-axis aberration) for the photon screen, reach the purpose expanding visual field.
Shown in Figure 5, it is the imaging test installation drawing of the present embodiment, wavelength is that the incoming laser beam of 632.8nm passes through Microcobjective focuses on aperture and is filtered, and the laser beam after pin-hole filter-ing passes through to scatter rotating disk elimination block, then uses One focal length 550mm, the collimator of bore 55mm and Pixel size are 4.54 μm (AVT Prosilica GX2750C's) CCD carries out imaging test.
Fig. 6 gives the experimental results in wavelength 632.8nm for the conventional photonic sieve.Wherein Fig. 6 (a) is PSF characteristic, figure 6 (b) harrows test result for resolution.It can be seen that, conventional photonic sieve can be had and connect with blur-free imaging in the range of 0.5 degree of the angle of visual field The PSF disc of confusion of nearly diffraction limit and image quality, after going through, the resolution limit of photon screen is about 50lp/mm.When regarding Rink corner degree>When 0.5, there is big off-axis aberration, so image quality is decreased obviously, so the field range of conventional photonic sieve is about Spend~0.5 degree for -0.5.
Fig. 7 gives big visual field photon screen imaging test result under field of view angle -6 spends~6 degree.Experimental result Fig. 7 (a) Show, emulate Fig. 3 (b) has identical " L " shape feature to the PSF that laboratory records together, keep in the range of visual field -4 spends~4 degree Good concordance, insensitive to field of view angle.Fig. 7 (b) gives the middle broad image of big visual field photon screen.Fig. 7 (c) For final restored image.Middle broad image is recovered to picture rich in detail by suitable filter function, spends~4 degree in the angle of visual field -4 In the range of reach, with conventional photonic sieve, (0 degree of visual field) essentially identical resolution, about 50lp/mm be imaged on axle.This enforcement Field of view angle under identical numerical aperture for the big visual field photon screen in example is about 8 times of conventional photonic sieve.

Claims (4)

1. a kind of big visual field diffraction photon screen, a diameter of D, including transparent flat substrate with to be plated in this transparent flat suprabasil not Transparent metal thin film it is characterised in that:Described light tight metallic film is provided with the thang-kng aperture of ring-band shape distribution, described thang-kng The position distribution of aperture meets equationWherein, f is The focal length of photon screen, n is the annulus sequence of thang-kng annulus, and λ is the operation wavelength of photon screen, and R is the radius of photon screen, and η is little The manipulation coefficient of pore size distribution, xmAnd ymIt is the center of m-th aperture of photon screen, m=1,2,3 ..., num, whereinThang-kng girdle radius are aboutAperture radius
2. big visual field diffraction photon screen according to claim 1 it is characterised in that:Described η=15 λ.
3. big visual field diffraction photon screen according to claim 1 it is characterised in that:Described transparent flat substrate is transparent glass Glass substrate.
4. big visual field diffraction photon screen according to claim 1 it is characterised in that:Described light tight metallic film is chromium Film.
CN201620822952.6U 2016-08-01 2016-08-01 Big visual field diffraction photon sieve Expired - Fee Related CN205941963U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106054297A (en) * 2016-08-01 2016-10-26 苏州大学 Large field diffraction photon sieve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106054297A (en) * 2016-08-01 2016-10-26 苏州大学 Large field diffraction photon sieve

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20170208

Termination date: 20190801