CN105103098B - 触控面板、其制备方法以及用于触控面板的银‑钯‑钕合金 - Google Patents

触控面板、其制备方法以及用于触控面板的银‑钯‑钕合金 Download PDF

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Publication number
CN105103098B
CN105103098B CN201480020506.7A CN201480020506A CN105103098B CN 105103098 B CN105103098 B CN 105103098B CN 201480020506 A CN201480020506 A CN 201480020506A CN 105103098 B CN105103098 B CN 105103098B
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CN
China
Prior art keywords
silver
palladium
touch panel
neodymium
alloy
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Expired - Fee Related
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CN201480020506.7A
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English (en)
Chinese (zh)
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CN105103098A (zh
Inventor
成基勋
郑载勋
穆图·塞巴斯蒂安
安祐莹
赵凤贤
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0445Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C5/00Alloys based on noble metals
    • C22C5/06Alloys based on silver
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/18Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/045Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using resistive elements, e.g. a single continuous surface or two parallel surfaces put in contact
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/048Indexing scheme relating to G06F3/048
    • G06F2203/04804Transparency, e.g. transparent or translucent windows

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Non-Insulated Conductors (AREA)
CN201480020506.7A 2013-04-09 2014-03-13 触控面板、其制备方法以及用于触控面板的银‑钯‑钕合金 Expired - Fee Related CN105103098B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2013-0038625 2013-04-09
KR1020130038625A KR20140122338A (ko) 2013-04-09 2013-04-09 터치패널, 그 제조방법 및 터치패널용 Ag-Pd-Nd 합금
PCT/US2014/025250 WO2014168712A1 (en) 2013-04-09 2014-03-13 Touch panel, preparing method thereof, and ag-pd-nd alloy for touch panel

Publications (2)

Publication Number Publication Date
CN105103098A CN105103098A (zh) 2015-11-25
CN105103098B true CN105103098B (zh) 2018-02-02

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CN201480020506.7A Expired - Fee Related CN105103098B (zh) 2013-04-09 2014-03-13 触控面板、其制备方法以及用于触控面板的银‑钯‑钕合金

Country Status (7)

Country Link
US (1) US10104770B2 (enExample)
EP (1) EP2984543A4 (enExample)
JP (1) JP6453850B2 (enExample)
KR (1) KR20140122338A (enExample)
CN (1) CN105103098B (enExample)
TW (1) TW201446981A (enExample)
WO (1) WO2014168712A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017532586A (ja) 2014-08-07 2017-11-02 スリーエム イノベイティブ プロパティズ カンパニー 反射シート及びその製造方法
US9857930B2 (en) 2015-12-16 2018-01-02 3M Innovative Properties Company Transparent conductive component with interconnect circuit tab comprising cured organic polymeric material
CN106980399B (zh) * 2016-01-15 2023-10-24 宸鸿科技(厦门)有限公司 触控面板
CN107881470A (zh) * 2017-11-22 2018-04-06 朱秋华 一种ZnO透明导电薄膜及其制备方法
SE545102C2 (en) 2018-04-25 2023-04-04 Bactiguard Ab A surface coating for use in the prophylaxis of allergy

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008041294A (ja) * 2006-08-02 2008-02-21 Dainippon Printing Co Ltd 導電膜基板
JP2008080743A (ja) * 2006-09-28 2008-04-10 Optrex Corp タッチパネル装置
CN102216887A (zh) * 2008-11-14 2011-10-12 Lg伊诺特有限公司 触摸屏及其制造方法
CN102216886A (zh) * 2008-11-14 2011-10-12 Lg伊诺特有限公司 触摸屏及其制造方法
CN102543266A (zh) * 2010-12-27 2012-07-04 迎辉科技股份有限公司 具有铜导线的透明导电膜

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5886763A (en) 1997-09-26 1999-03-23 Ois Optical Imaging Systems, Inc. LCD heater utilizing Z-axis conductive adhesive to attach bus bars to ito
US6744425B2 (en) * 2000-12-26 2004-06-01 Bridgestone Corporation Transparent electroconductive film
JP2004002929A (ja) 2001-08-03 2004-01-08 Furuya Kinzoku:Kk 銀合金、スパッタリングターゲット、反射型lcd用反射板、反射配線電極、薄膜、その製造方法、光学記録媒体、電磁波遮蔽体、電子部品用金属材料、配線材料、電子部品、電子機器、金属膜の加工方法、電子光学部品、積層体及び建材ガラス
KR100788310B1 (ko) 2002-03-07 2007-12-27 엘지.필립스 엘시디 주식회사 인듐-틴-옥사이드 전극 위에 은을 무전해 도금하는 방법
SG106070A1 (en) 2002-04-23 2004-09-30 Agency Science Tech & Res Method for elelctroless deposition of a metal layer on selected portions of a substrate
EP1531989A4 (en) 2002-06-04 2006-11-29 Western Life Sciences Llc PROCESS FOR MAKING A POLYMERIC BONDING LAYER ON A METAL SURFACE
US7217344B2 (en) 2002-06-14 2007-05-15 Streaming Sales Llc Transparent conductive film for flat panel displays
US6811815B2 (en) * 2002-06-14 2004-11-02 Avery Dennison Corporation Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films
US20040040148A1 (en) 2002-08-29 2004-03-04 Parlex Corporation Manufacture of flexible printed circuit boards
JP2005029849A (ja) * 2003-07-07 2005-02-03 Kobe Steel Ltd リフレクター用Ag合金反射膜、及び、このAg合金反射膜を用いたリフレクター、並びに、このAg合金反射膜の形成用のAg合金スパッタリングターゲット
US20070110968A1 (en) 2003-09-26 2007-05-17 Furuya Metal Co., Ltd. Silver alloy, sputtering target material thereof, and thin film thereof
CN100334239C (zh) * 2003-12-04 2007-08-29 株式会社神户制钢所 平板显示器用Ag基合金配线电极膜、Ag基合金溅射靶
JPWO2005056851A1 (ja) * 2003-12-10 2007-12-13 田中貴金属工業株式会社 反射率維持特性に優れた銀合金
US7291816B2 (en) 2004-05-17 2007-11-06 Shu-Lien Chen Transparent electrothermal body and the method of making it
JPWO2006132411A1 (ja) 2005-06-10 2009-01-08 田中貴金属工業株式会社 電極、配線及び電磁波遮蔽用の銀合金
WO2006132413A1 (ja) 2005-06-10 2006-12-14 Tanaka Kikinzoku Kogyo K.K. 電極、配線及び電磁波遮蔽用の銀合金
WO2006132410A1 (ja) 2005-06-10 2006-12-14 Tanaka Kikinzoku Kogyo K.K. 電極、配線及び電磁波遮蔽用の銀合金
JPWO2006132412A1 (ja) 2005-06-10 2009-01-08 田中貴金属工業株式会社 電極、配線及び電磁波遮蔽用の銀合金
US20080188020A1 (en) 2007-02-05 2008-08-07 Kuo Wei-Min Method of LED packaging on transparent flexible film
CN101911232B (zh) * 2008-02-22 2014-03-12 株式会社神户制钢所 触摸屏传感器
US20100051973A1 (en) * 2008-08-28 2010-03-04 Seiko Epson Corporation Light-emitting device, electronic equipment, and process of producing light-emitting device
KR100908101B1 (ko) 2008-10-01 2009-07-16 신와전공 주식회사 터치패널의 제조방법 및 이에 의해 제조되는 터치패널
JP2010157497A (ja) 2008-12-02 2010-07-15 Geomatec Co Ltd 透明導電膜付き基板とその製造方法
TWI404994B (zh) 2009-12-14 2013-08-11 Wintek Corp 觸控面板
JP5729298B2 (ja) 2009-12-28 2015-06-03 東レ株式会社 導電積層体およびそれを用いてなるタッチパネル
TW201145125A (en) 2010-06-03 2011-12-16 J Touch Corp Touch panel manufacturing method and structure thereof
CN104461118B (zh) * 2010-09-29 2018-10-16 大日本印刷株式会社 触摸面板传感器膜及其制造方法
JP5914036B2 (ja) * 2011-04-20 2016-05-11 日東電工株式会社 導電性積層フィルムの製造方法
US8629944B2 (en) * 2011-05-03 2014-01-14 Innovation & Infinity Global Corp. Transparent conductive structure applied to a touch panel and method of making the same
KR20120139076A (ko) * 2011-06-16 2012-12-27 삼성디스플레이 주식회사 디스플레이 장치
JP5473990B2 (ja) * 2011-06-17 2014-04-16 日東電工株式会社 導電性積層体、パターン配線付き透明導電性積層体、および光学デバイス。
JP2013177667A (ja) * 2012-02-02 2013-09-09 Kobe Steel Ltd 反射膜および/または透過膜、もしくは電気配線および/または電極に用いられるAg合金膜、並びにAg合金スパッタリングターゲットおよびAg合金フィラー
JP2017532586A (ja) * 2014-08-07 2017-11-02 スリーエム イノベイティブ プロパティズ カンパニー 反射シート及びその製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008041294A (ja) * 2006-08-02 2008-02-21 Dainippon Printing Co Ltd 導電膜基板
JP2008080743A (ja) * 2006-09-28 2008-04-10 Optrex Corp タッチパネル装置
CN102216887A (zh) * 2008-11-14 2011-10-12 Lg伊诺特有限公司 触摸屏及其制造方法
CN102216886A (zh) * 2008-11-14 2011-10-12 Lg伊诺特有限公司 触摸屏及其制造方法
CN102543266A (zh) * 2010-12-27 2012-07-04 迎辉科技股份有限公司 具有铜导线的透明导电膜

Also Published As

Publication number Publication date
US10104770B2 (en) 2018-10-16
KR20140122338A (ko) 2014-10-20
JP6453850B2 (ja) 2019-01-16
EP2984543A4 (en) 2016-12-07
US20160057858A1 (en) 2016-02-25
WO2014168712A1 (en) 2014-10-16
TW201446981A (zh) 2014-12-16
JP2016514879A (ja) 2016-05-23
CN105103098A (zh) 2015-11-25
EP2984543A1 (en) 2016-02-17

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Granted publication date: 20180202