CN105045043A - 曝光装置和曝光方法 - Google Patents
曝光装置和曝光方法 Download PDFInfo
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- CN105045043A CN105045043A CN201510208609.2A CN201510208609A CN105045043A CN 105045043 A CN105045043 A CN 105045043A CN 201510208609 A CN201510208609 A CN 201510208609A CN 105045043 A CN105045043 A CN 105045043A
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Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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JP2014092500 | 2014-04-28 | ||
JP2014-092500 | 2014-04-28 | ||
JP2015-082004 | 2015-04-13 | ||
JP2015082004A JP6535197B2 (ja) | 2014-04-28 | 2015-04-13 | 露光装置及び露光方法 |
Publications (2)
Publication Number | Publication Date |
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CN105045043A true CN105045043A (zh) | 2015-11-11 |
CN105045043B CN105045043B (zh) | 2018-01-05 |
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CN201510208609.2A Expired - Fee Related CN105045043B (zh) | 2014-04-28 | 2015-04-28 | 曝光装置和曝光方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108535965A (zh) * | 2017-03-01 | 2018-09-14 | 株式会社斯库林集团 | 曝光装置、基板处理装置、曝光方法及基板处理方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6333777B1 (en) * | 1997-07-18 | 2001-12-25 | Canon Kabushiki Kaisha | Exposure apparatus and device manufacturing method |
CN1624590A (zh) * | 2001-04-27 | 2005-06-08 | 株式会社东芝 | 曝光装置的照度不匀度的测定方法和修正方法 |
CN101277566A (zh) * | 2007-03-26 | 2008-10-01 | 凤凰电机公司 | 光源装置以及使用该光源装置的曝光装置 |
CN101986207A (zh) * | 2009-07-28 | 2011-03-16 | 日本精工株式会社 | 曝光装置以及曝光方法 |
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2015
- 2015-04-28 CN CN201510208609.2A patent/CN105045043B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6333777B1 (en) * | 1997-07-18 | 2001-12-25 | Canon Kabushiki Kaisha | Exposure apparatus and device manufacturing method |
CN1624590A (zh) * | 2001-04-27 | 2005-06-08 | 株式会社东芝 | 曝光装置的照度不匀度的测定方法和修正方法 |
CN101277566A (zh) * | 2007-03-26 | 2008-10-01 | 凤凰电机公司 | 光源装置以及使用该光源装置的曝光装置 |
CN101986207A (zh) * | 2009-07-28 | 2011-03-16 | 日本精工株式会社 | 曝光装置以及曝光方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108535965A (zh) * | 2017-03-01 | 2018-09-14 | 株式会社斯库林集团 | 曝光装置、基板处理装置、曝光方法及基板处理方法 |
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CN105045043B (zh) | 2018-01-05 |
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Address after: Kanagawa, Japan Applicant after: VN Systems Ltd. Address before: Tokyo, Japan Applicant before: NSK Technology Co.,Ltd. |
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Effective date of registration: 20160301 Address after: Kanagawa, Japan Applicant after: V TECHNOLOGY Co.,Ltd. Address before: Kanagawa, Japan Applicant before: VN Systems Ltd. |
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