CN105003537B - 基于气悬浮振动信号抑制的方法和系统 - Google Patents
基于气悬浮振动信号抑制的方法和系统 Download PDFInfo
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CN105786037B (zh) * | 2016-03-03 | 2018-09-07 | 深圳市雷赛智能控制股份有限公司 | 抑制机械系统残留振动的输入整形器 |
CN108536096B (zh) * | 2018-04-11 | 2020-12-29 | 哈尔滨工业大学深圳研究生院 | 基于任务极坐标系的三维轮廓控制方法及装置 |
CN111338216B (zh) * | 2020-04-21 | 2021-06-29 | 华中科技大学 | 一种基于混合脉冲激励的输入整形器及设计方法 |
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JP4182539B2 (ja) * | 2002-09-30 | 2008-11-19 | 日本精工株式会社 | 位置決め装置 |
JP2006092412A (ja) * | 2004-09-27 | 2006-04-06 | Nsk Ltd | センサ付回転支持装置 |
CN101520606B (zh) * | 2008-01-02 | 2011-07-20 | 西安交通大学 | 非接触长行程多自由度纳米精密工作台 |
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