CN104995481B - 应用机床查明特征的方法 - Google Patents
应用机床查明特征的方法 Download PDFInfo
- Publication number
- CN104995481B CN104995481B CN201380027017.XA CN201380027017A CN104995481B CN 104995481 B CN104995481 B CN 104995481B CN 201380027017 A CN201380027017 A CN 201380027017A CN 104995481 B CN104995481 B CN 104995481B
- Authority
- CN
- China
- Prior art keywords
- probe
- simulated
- measurement data
- motion
- simulated probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP12250095 | 2012-04-18 | ||
| EP12250095.2 | 2012-04-18 | ||
| PCT/GB2013/050966 WO2013156767A1 (en) | 2012-04-18 | 2013-04-16 | A method of finding a feature using a machine tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104995481A CN104995481A (zh) | 2015-10-21 |
| CN104995481B true CN104995481B (zh) | 2018-05-01 |
Family
ID=49382987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380027017.XA Active CN104995481B (zh) | 2012-04-18 | 2013-04-16 | 应用机床查明特征的方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US9733060B2 (OSRAM) |
| EP (1) | EP2839241B1 (OSRAM) |
| JP (1) | JP6242856B2 (OSRAM) |
| CN (1) | CN104995481B (OSRAM) |
| IN (1) | IN2014DN08719A (OSRAM) |
| TW (1) | TWI503522B (OSRAM) |
| WO (1) | WO2013156767A1 (OSRAM) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3144632B1 (en) | 2015-09-18 | 2021-08-11 | Hexagon Technology Center GmbH | Coordinate measuring machine having a camera |
| WO2013156767A1 (en) * | 2012-04-18 | 2013-10-24 | Renishaw Plc | A method of finding a feature using a machine tool |
| WO2013156765A1 (en) * | 2012-04-18 | 2013-10-24 | Renishaw Plc | A method of analogue measurement scanning on a machine tool and corresponding machine tool apparatus |
| CN104487801B (zh) * | 2012-04-18 | 2018-12-07 | 瑞尼斯豪公司 | 在机床上测量的方法以及相应的机床设备 |
| US9250055B2 (en) * | 2014-05-09 | 2016-02-02 | Mitutoyo Corporation | High speed contact detector for measurement sensors |
| GB201505999D0 (en) | 2015-04-09 | 2015-05-27 | Renishaw Plc | Measurement method and apparatus |
| GB201615307D0 (en) * | 2016-09-09 | 2016-10-26 | Renishaw Plc | Measurement method and apparatus |
| JP6474439B2 (ja) * | 2017-02-22 | 2019-02-27 | ファナック株式会社 | データ収集装置及びデータ収集プログラム |
| EP3460384A1 (en) * | 2017-09-26 | 2019-03-27 | Renishaw PLC | Measurement probe |
| EP3623883B1 (de) * | 2018-09-17 | 2024-07-24 | Adelbert Haas GmbH | Verfahren und werkzeugmaschine zur bearbeitung von werkstücken unbekannter werkstückgeometrie |
| EP3685961A1 (en) * | 2019-01-25 | 2020-07-29 | Renishaw PLC | Measurement device for a machine tool |
| CN118204908B (zh) * | 2024-05-21 | 2024-07-30 | 西安汉沣精密机械有限公司 | 工件全闭环加工方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4166323A (en) * | 1973-09-14 | 1979-09-04 | Maag Gear-Wheel & Machine Co. Ltd. | Gear tester for profile and lead testing |
| CN101622513A (zh) * | 2007-02-22 | 2010-01-06 | 瑞尼斯豪公司 | 校准方法和设备 |
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| US4153998A (en) | 1972-09-21 | 1979-05-15 | Rolls-Royce (1971) Limited | Probes |
| GB1551218A (en) | 1975-05-13 | 1979-08-22 | Rolls Royce | Probe for use in displacement measuring apparatus |
| GB2174216B (en) | 1985-03-19 | 1988-10-26 | Mitutoyo Mfg Co Ltd | Method of operating a coordinate measuring instrument |
| CN85105480A (zh) | 1985-07-17 | 1987-01-14 | 通用电气公司 | 针尖接触式探测系统 |
| GB8713715D0 (en) | 1987-06-11 | 1987-07-15 | Renishaw Plc | Workpiece inspection method |
| JPH02145908A (ja) | 1988-11-28 | 1990-06-05 | Okuma Mach Works Ltd | デジタイジング装置におけるスタイラスのたわみ補正自動設定方法 |
| US5189806A (en) * | 1988-12-19 | 1993-03-02 | Renishaw Plc | Method of and apparatus for scanning the surface of a workpiece |
| GB8908854D0 (en) | 1989-04-19 | 1989-06-07 | Renishaw Plc | Method of and apparatus for scanning the surface of a workpiece |
| GB9110818D0 (en) | 1991-05-21 | 1991-07-10 | Renishaw Metrology Ltd | A method of measuring workpieces using a surface contacting measuring probe |
| DE4245012B4 (de) | 1992-04-14 | 2004-09-23 | Carl Zeiss | Verfahren zur Messung von Formelementen auf einem Koordinatenmeßgerät |
| DE69309588T2 (de) | 1992-09-12 | 1997-07-24 | Renishaw Plc, Wotton-Under-Edge, Gloucestershire | Verfahren und Gerät zum Abtasten der Oberfläche eines Werkstückes |
| US5948972A (en) * | 1994-12-22 | 1999-09-07 | Kla-Tencor Corporation | Dual stage instrument for scanning a specimen |
| GB2302589B (en) | 1995-06-21 | 1998-11-11 | Zeiss Stiftung | Probe head for coordinate measuring machines with a clamping device for clamping the deflectable part of the probe head |
| DE19730471C5 (de) | 1997-07-16 | 2009-02-19 | Hexagon Metrology Gmbh | Verfahren zum Scannen mit einem Koordinatenmeßgerät |
| US6580964B2 (en) * | 1998-10-24 | 2003-06-17 | Renishaw Plc | Calibrations of an analogue probe and error mapping |
| JP4660779B2 (ja) | 2000-08-18 | 2011-03-30 | 学校法人 中央大学 | 移動装置の位置誤差評価方法およびその評価結果に基づく移動精度向上方法 |
| JP3905771B2 (ja) | 2001-03-02 | 2007-04-18 | 株式会社ミツトヨ | 測定機の校正方法及び装置 |
| GB0118492D0 (en) | 2001-07-30 | 2001-09-19 | Renishaw Plc | A machine tool control process and apparatus therfor |
| GB0126232D0 (en) | 2001-11-01 | 2002-01-02 | Renishaw Plc | Calibration of an analogue probe |
| GB0210990D0 (en) | 2002-05-14 | 2002-06-19 | Rolls Royce Plc | Method of generating an inspection program and method of generating a visual display |
| GB0215152D0 (en) | 2002-07-01 | 2002-08-07 | Renishaw Plc | Probe or stylus orientation |
| GB0215478D0 (en) * | 2002-07-04 | 2002-08-14 | Renishaw Plc | Method of scanning a calibrating system |
| GB0220158D0 (en) * | 2002-08-30 | 2002-10-09 | Renishaw Plc | Method of scanning |
| CN1297796C (zh) | 2003-07-02 | 2007-01-31 | 西安交通大学 | 线阵光电传感器层析扫描三维测量方法及其装置 |
| GB0322115D0 (en) | 2003-09-22 | 2003-10-22 | Renishaw Plc | Method of error compensation |
| GB0322362D0 (en) | 2003-09-24 | 2003-10-22 | Renishaw Plc | Measuring methods for use on machine tools |
| GB0329098D0 (en) | 2003-12-16 | 2004-01-21 | Renishaw Plc | Method of calibrating a scanning system |
| US7543393B2 (en) * | 2003-12-16 | 2009-06-09 | Renishaw Plc | Method of calibrating a scanning system |
| GB0400144D0 (en) | 2004-01-06 | 2004-02-11 | Renishaw Plc | Inspection system |
| EP1555676A3 (en) | 2004-01-14 | 2006-09-13 | FEI Company | Method of operating a probe microscope |
| CN1727871A (zh) | 2004-01-14 | 2006-02-01 | Fei公司 | 探针显微镜的操作方法 |
| JP2007529734A (ja) | 2004-03-18 | 2007-10-25 | レニショウ パブリック リミテッド カンパニー | 物体走査 |
| JP4782990B2 (ja) | 2004-05-31 | 2011-09-28 | 株式会社ミツトヨ | 表面倣い測定装置、表面倣い測定方法、表面倣い測定プログラムおよび記録媒体 |
| JP4510520B2 (ja) | 2004-06-01 | 2010-07-28 | キヤノン株式会社 | 形状測定方法および形状測定装置 |
| GB0414649D0 (en) | 2004-06-30 | 2004-08-04 | Renishaw Plc | Generation of a CNC machine tool control program |
| GB0417536D0 (en) | 2004-08-06 | 2004-09-08 | Renishaw Plc | The use of surface measurement probes |
| GB0508273D0 (en) | 2005-04-25 | 2005-06-01 | Renishaw Plc | Method for scanning the surface of a workpiece |
| GB0508395D0 (en) | 2005-04-26 | 2005-06-01 | Renishaw Plc | Method for scanning the surface of a workpiece |
| US20070050089A1 (en) | 2005-09-01 | 2007-03-01 | Yunquan Sun | Method for detecting the position and orientation of holes using robotic vision system |
| GB0608235D0 (en) * | 2006-04-26 | 2006-06-07 | Renishaw Plc | Differential calibration |
| GB0611109D0 (en) | 2006-06-06 | 2006-07-19 | Renishaw Plc | A method for measuring workpieces |
| GB0625260D0 (en) | 2006-12-19 | 2007-01-24 | Renishaw Plc | A method for measuring a workpiece using a machine tool |
| EP1978328B1 (en) | 2007-04-03 | 2015-02-18 | Hexagon Metrology AB | Oscillating scanning probe with constant contact force |
| GB0707921D0 (en) | 2007-04-24 | 2007-05-30 | Renishaw Plc | Apparatus and method for surface measurement |
| US8919005B2 (en) | 2007-04-30 | 2014-12-30 | Renishaw Plc | Analogue probe and method of operation |
| EP1988357B1 (en) | 2007-05-04 | 2018-10-17 | Hexagon Technology Center GmbH | Coordinate measuring method and device |
| GB0713639D0 (en) * | 2007-07-13 | 2007-08-22 | Renishaw Plc | Error correction |
| GB0716218D0 (en) | 2007-08-20 | 2007-09-26 | Renishaw Plc | Measurement path generation |
| JP5091702B2 (ja) | 2008-02-04 | 2012-12-05 | 株式会社ミツトヨ | プローブの真直度測定方法 |
| US7752000B2 (en) | 2008-05-02 | 2010-07-06 | Qcept Technologies, Inc. | Calibration of non-vibrating contact potential difference measurements to detect surface variations that are perpendicular to the direction of sensor motion |
| JP4611403B2 (ja) | 2008-06-03 | 2011-01-12 | パナソニック株式会社 | 形状測定装置及び形状測定方法 |
| WO2010049693A2 (en) | 2008-10-29 | 2010-05-06 | Renishaw Plc | Measurement method |
| GB0900878D0 (en) * | 2009-01-20 | 2009-03-04 | Renishaw Plc | Method for optimising a measurement cycle |
| JP5281992B2 (ja) | 2009-08-28 | 2013-09-04 | 株式会社日立製作所 | 走査型プローブ顕微鏡及びそれを用いた計測方法 |
| EP2290486A1 (en) | 2009-08-28 | 2011-03-02 | Renishaw plc | Machine tool calibration method |
| JP5439157B2 (ja) * | 2009-12-22 | 2014-03-12 | 三菱重工業株式会社 | 歯車測定方法 |
| JP5690941B2 (ja) | 2010-09-13 | 2015-03-25 | ヘキサゴン・テクノロジー・センター・ゲーエムベーハーHexagon Technology Center Gmbh | 表面走査座標測定装置の制御方法及び制御装置 |
| CN103562672B (zh) | 2011-01-19 | 2016-09-28 | 瑞尼斯豪公司 | 用于机床设备的模拟测量探头 |
| CN103842766B (zh) * | 2011-10-06 | 2017-05-24 | 瑞尼斯豪公司 | 测量方法 |
| WO2013156767A1 (en) | 2012-04-18 | 2013-10-24 | Renishaw Plc | A method of finding a feature using a machine tool |
| WO2013156765A1 (en) * | 2012-04-18 | 2013-10-24 | Renishaw Plc | A method of analogue measurement scanning on a machine tool and corresponding machine tool apparatus |
-
2013
- 2013-04-16 WO PCT/GB2013/050966 patent/WO2013156767A1/en not_active Ceased
- 2013-04-16 JP JP2015506299A patent/JP6242856B2/ja active Active
- 2013-04-16 IN IN8719DEN2014 patent/IN2014DN08719A/en unknown
- 2013-04-16 US US14/391,822 patent/US9733060B2/en active Active
- 2013-04-16 EP EP13719596.2A patent/EP2839241B1/en active Active
- 2013-04-16 CN CN201380027017.XA patent/CN104995481B/zh active Active
- 2013-04-18 TW TW102113861A patent/TWI503522B/zh active
-
2017
- 2017-05-25 US US15/605,377 patent/US9952028B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4166323A (en) * | 1973-09-14 | 1979-09-04 | Maag Gear-Wheel & Machine Co. Ltd. | Gear tester for profile and lead testing |
| CN101622513A (zh) * | 2007-02-22 | 2010-01-06 | 瑞尼斯豪公司 | 校准方法和设备 |
Non-Patent Citations (1)
| Title |
|---|
| 党娟娟.光学表面亚表层损伤表征技术研究.《中国优秀硕士学位论文全文数据库 基础科学辑》.2011,(第8期),第22-24页. * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6242856B2 (ja) | 2017-12-06 |
| TWI503522B (zh) | 2015-10-11 |
| TW201350790A (zh) | 2013-12-16 |
| EP2839241A1 (en) | 2015-02-25 |
| CN104995481A (zh) | 2015-10-21 |
| US9733060B2 (en) | 2017-08-15 |
| WO2013156767A1 (en) | 2013-10-24 |
| US20150101204A1 (en) | 2015-04-16 |
| IN2014DN08719A (OSRAM) | 2015-05-22 |
| US20170261305A1 (en) | 2017-09-14 |
| JP2015531853A (ja) | 2015-11-05 |
| EP2839241B1 (en) | 2018-08-08 |
| US9952028B2 (en) | 2018-04-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |