CN104989942A - 包含内置于流体密封容器中并可在其内现场调节的调节器的气体储存和分配系统 - Google Patents
包含内置于流体密封容器中并可在其内现场调节的调节器的气体储存和分配系统 Download PDFInfo
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- CN104989942A CN104989942A CN201510282437.3A CN201510282437A CN104989942A CN 104989942 A CN104989942 A CN 104989942A CN 201510282437 A CN201510282437 A CN 201510282437A CN 104989942 A CN104989942 A CN 104989942A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
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- F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
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- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
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- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
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Abstract
本发明涉及一种流体存储和分配系统,包括:容器,所述容器限定用于容纳压缩气体的内部空间;阀头,所述阀头与所述容器密封地啮合,所述阀头包括能够打开或关闭的阀,以从所述容器分配气体,第一压力调节器和第二压力调节器,所述第一压力调节器和所述第二压力调节器在所述容器的所述内部空间中彼此串联连接,以使气体从所述容器流动到所述阀头以进行分配。
Description
分案申请
本申请是中国申请号为01810427.4的发明专利申请(国际申请号为PCT/US01/11480)的分案申请。01810427.4号专利申请的申请日为2001年4月9日,发明名称为“包含内置于流体密封容器中并可在其内现场调节的调节器的气体储存和分配系统”。
相关申请的交叉引用
这是在1999年4月28日由王录平(Luping Wang)和Glenn M.Tom提交的名为“流体存储和气体分配系统”的美国专利申请09/300,994的部分继续申请,而上述专利申请又是在1998年4月28日由王录平(Luping Wang)和Glenn M.Tom提交的名为“流体存储和气体分配系统”的美国专利申请09/067,393的部分继续申请。
技术领域
本发明涉及一种加压的气体存储和气体分配系统,用于例如生产半导体材料和装置的应用中。
背景技术
在许多工业生产和应用中,都需要可靠的生产气体源。
这些生产和应用领域包括半导体生产、离子注入、平板显示器生产、医学干预和治疗、水处理、紧急呼吸设备、焊接操作、基于空间的液体和气体供应,等等。
本发明提供了这样一种可靠的气体源,它特别适合用于半导体生产设备,以提供所需的气体供应,例如卤化合物气体(例如,BF3,F2,等等),氢化物气体(例如,砷化三氢,磷化氢,等等)和气态有机金属源反应物。
在气体存储和分配系统的领域中的工艺包括以下美国专利所描述的装置和方法:
1998年5月17日授予Karl O.Knollmueller的美国专利4,744,211(砷化三氢的储存和分配,吸附地存储在5-15埃孔径的沸石中,通过加热沸石升高温度释放砷化三氢进行分配);
1996年5月21日授予Glenn M.Tom和James V.McManus的美国专利5,518,528(气体存储和分配系统,气体在低压下吸附地保存在物理的吸附介质中,通过压力差动来调节从吸附介质中解吸出的气体来实现分配);
1999年8月17日授予David A.LeFebre和Thomas B.Martin,Jr.的美国专利5,937,895和1999年12月28日授予Roy V.Semerdjian,David A.LeFebre和Thomas B.Marin,Jr.的美国专利6,007,609(具有分配止回阀形式调节器的加压容器和用于流体分配的流动限制装置的毛细管);
1998年4月28日由Luping Wang和Glenn M.Tom提交的在先待批美国专利申请09/067,393和1999年4月28日由Luping Wang和GlennM.Tom提交的在先待批美国专利申请09/300,994(流体存储和气体分配系统,包括一个安装有流体压力调节器的存储和分配容器,这样从容器中分发出的流体流经调节器到达下游的流动控制装置);
授予Stenner的美国专利3,590,860(一种用于液化丙烷仓的手动可调节的调节阀,包括一个调节板和传动弹簧装置);
授予Coffre等的美国专利4,836,242(一种用来提供电子级气体的减压器,包括一个风箱和进气阀,在风箱和低压出口之间安装了一个固体颗粒过滤器);
授予Ollivier的美国专利5,230,359(用于高压气缸的膜式压力调节器,其中在调节器中安装了一个阀门用于可调节地对压缩流体节流);
授予Baranowski,Jr.的美国专利3,699,998(一种可修正压力调节器,其中叶片弹簧夹紧器用来把调节器的各个部件保持在合适的位置);
授予Mays的美国专利3,791,412(用于高压气体容器的减压阀,包括一对阀部件分发低压的节流液体);
授予Wormser的美国专利3,972,346(特征在于U型环密封提升阀装置的压力调节器);
授予Eidsmore的美国专利4,793,379(用于压缩气缸的主要关闭和流动控制的按钮操作式阀门,阀部件使用磁传动);
授予Senesky的美国专利2,615,287(一种气体压力调节器,包括隔板和隔板夹紧部件);
授予Martin的美国专利4,173,986(压缩气体流动控制阀,包括压力调节器和响应式提升阀结构);
授予Baumann等的美国专利3,388,962(压缩气体燃料调节装置,包括烧结金属球流动部件);
授予Jenkins的美国专利1,679,826(用于高压容器的流体压力调节器,利用隔板部件和包含毡条的气体过滤装置);
授予St.Clair的美国专利2,354,283(用于液化石油气罐的流体压力调节器,包含压力致动的隔板,同时节流器结构的振动最小);
授予Lhomer等的美国专利5,566,713(气流控制分配装置,包括活塞型的压力调节器和块型减压器/调节器装置);
授予Amidzich的美国专利5,645,192(解除容器中过压气体的阀装置,包含密封环/弹簧装置);
授予Cannet等的美国专利5,678,602(用于压缩气罐的气体控制和分配装置,包括具有变址流量计阀门的减压器和调节器装置);
授予Webster的美国专利2,793,504(用于压缩流体容器的阀门,包括减压器和调节器和弹簧偏压闭合装置);
授予Harris的美国专利1,659,263(用于压缩气缸的调节器,包括一个挡板和位于挡板和调节器环形机座之间的抗摩擦垫圈);
授予Thomas的美国专利2,047339(液化石油气存储装置,包括流动控制单元和泄漏防止阀);和
授予Baumann等的美国专利3,994,674(用于压缩液化燃烧气体容器的可拆离的燃烧器装置,包括一个调节阀装置)。
发明概述
本发明涉及一种存储和分配压缩气体的系统,用于例如生产半导体产品的应用。
在一个方面,本发明涉及到一种流体存储和分配系统,包含:
一个气体存储和分配容器,在其封闭的内部空间容纳压缩气体,其中容器包括一个出口;
一个阀头,安装在容器出口处;
一个气体分配组件,与阀头气流连通地连接;
一个位于容器内部空间的气压调节器,定位在阀头下面,用于使从容器中排出的气体压力保持在预定值;
气体分配组件可以选择性地触发以使气体穿过气压调节器、阀头和气体分配组件从容器的内部空间流出,用于从容器中排出气体。
在该系统的另一个方面,前面提到的气压调节器是第一气压调节器,该系统进一步包括位于容器内部空间中的第二气压调节器,与第一气压调节器串连。
在这种双调节器排列的特定实施例中,第一气压调节器在排放端与第一粒子过滤器连接,第二气压调节器在它的入口端与第二粒子过滤器连接。
这种双调节器布置的另一个特定实施例包括第一粒子过滤器,第一气压调节器,第二气压调节器和第二粒子过滤器,在容器内部彼此同轴对齐。
本发明的其他方面、特征和实施例从接下来的说明和所附的权利要求中将会完全明了。
附图说明
图1是根据本发明一个实施例的气体存储和分配系统的示意性截面正视图。
图2是图1所示的气体存储和分配系统的阀头组件的透视图。
图3是用于图1所示的气体存储和分配系统的过滤器单元的正视图。
图4是图1所示的气体存储和分配系统的调节器的部分剖开的视图。
图5是图1所示的气体存储和分配系统的气体存储和分配容器上边部分的截面正视图。
图6是根据本发明另一个实施例的气体存储和分配系统的示意性截面正视图。
具体实施方式
以下美国专利申请的内容在此引用作为参考:1999年4月28日由Luping Wang和Glenn M.Tom提交的名称为“流体存储和气体分配系统”的美国专利申请09/300,994和1998年4月28日由Luping Wang和Glenn M.Tom提交的名称为“流体存储和气体分配系统”的美国专利申请09/067,393。
本发明涉及一种气体存储和分配系统,在容纳压缩气体的容器内部具有一个或多个气压调节器。
在这样的布置中,调节器(或多个调节器组件)被置于受限制的压缩气体和气体分配组件之间。气体分配组件可以有各种布置,例如,包括一个气流控制部件例如气体关闭阀、质量流量控制器等等。
通过把调节器定位在气体存储和分配容器中,调节器受容器保护而不被撞击,外露和破坏。另外,调节器作为高压气体的一个安全容纳部件,因为调节器是在低压设定点设定的,所以从容器中分发出的气体压力低于容器中压缩气体的压力。
用在本发明的主要实际应用中的气压调节器可以是任何合适的类型。优选的调节器包括HF系列的可设定压力的调节器(从Swagelok公司可以得到,www.swagelok.com),它的设置点压力在从真空级到2550磅/每平方英寸的范围内。高精度调节器的使用使得气体,在想要的设置点压力级别,从内部包含调节器的容器中可靠地分发出来。
通常,气压调节器是提升阀类型的,包含一个提升阀部件,被偏压向一个阀座结构,当压力高于设置点值时防止流动。这样的调节器使用一个气动的压力传感装置来保持设置点压力,该传感装置通过压力传感装置的反应性膨胀/收缩和提升阀的移动来适应出口处压力的改变。
这样,气压调节器被设置到一个合适的级别,例如,700托,通过打开分配组件的流动控制阀或其他合适的手段,当分配组件和气体容器被打开可以流通时,在这样的设置点压力级别从气体存储和分配容器中提供气流。
分配组件和容器形成一个流路,它可以包含,例如,一个伸长长度的导管,或者一个集管,气体容器连接在其上用来执行分配操作。流路可以包括合适的仪器和控制装置来监测气体分配操作,来启动连接在流路中的多个气体容器(例如,在多容器集管布置中)之间的转换,和/或提供循环的或间歇的操作以适应下游的通过容器供气的用气设备。
本发明的气体存储和分配容器中容纳的气体可以包含任何合适的气体,例如用于半导体生产操作的氢化物气体。这种类型的氢化物气体的例子包括砷化三氢、磷化氢、锑化(三)氢、硅烷、氯代硅烷、乙硼烷。其他在半导体生产操作中有用的气体也可以使用,包括酸性气体例如氟化氢、三氯化硼、三氟化硼、氢氯化物、卤化硅烷(例如,SiF4)和卤化乙硅烷(例如,Si2F6)等等,在半导体生产操作中用作卤化腐蚀剂、清洁剂、源试剂等。其他试剂包括气态的有机金属试剂,用作金属有机化学蒸汽沉积(MOCVD)的预处理。
现在参考附图,图1是根据本发明一个示例性实施例的气体存储和分配系统100的示意性截面正视图。该系统100包括一个通常为圆柱形的流体存储和分配容器102,圆柱形的侧壁104在它的底端用一个底盘部件106封闭起来。在容器的上端是颈部108,包括一个圆柱形的套环110,它限定并外接容器的顶部开口。容器壁、底盘部件和颈部从而封闭成一个内部空间128,如图所示。
在容器的颈部,阀头组件114的螺纹栓塞112与套环110的内螺纹开口螺纹地啮合在一起。阀头组件114包括一个中间的流体流动通道120,与阀头组件中的中间工作体积腔流体连通地连接。中间工作体积腔转而与出口124连接,它可以车有外螺纹或另外的构造以使得连接器和连接管道、导管等与其连接。
阀部件122置于中间工作体积腔中,它与实施例中所示的一个手轮126连接,但可选地也可以与自动阀致动装置或其他的控制或致动装置连接。
阀头组件114的特征在于阀堵塞了与容器的填充口118和内部体积128连通的填充通道116。容器102从而可以用压缩气体填充,接着,填充口被关闭并且盖上帽子,如图所示。
阀头组件114中的中间流体流动通道120在它的底端与一个连接器流动管130连接,它又转而与调节器132连接。调节器被设定为使从容器中排出的流体保持选定的压力。
在调节器的底端连接于一个管状接头136,它转而,例如通过对焊,与一个在其最底端具有一个扩散端盖131的过滤器单元134连接。过滤器单元可以是不锈钢的,而扩散器的壁可以用烧结不锈钢例如316L不锈钢制成。过滤器单元壁的多孔性,在30升/每分钟的流速下,可以从系统中除去大于预定直径例如大于0.003微米的所有粒子。这种类型的过滤器单元可以从Mott公司(Farmington,CT)得到。
使用时,压缩气体被容纳在容器102的内部空间128中。气压调节器132被设置到一个选定的设置点,当阀头组件114中的阀门被打开时,提供分配气体的流通,与此同时,气体流动穿过过滤器单元134、接头136、调节器132、连接器流动管130、阀头组件114中的中间流体流动通道120、中间工作体积腔和出口124。阀头组件可以连接其他的管道、导管、流动控制器、监测装置等,在使用本发明的应用中作为想要的或所需的给定端。
图2是图1所示的流体存储和分配系统的阀头组件114的透视图。在图2中,其中对应部件是图1对应的标号,所示的栓塞112提供有互补螺纹113来拧在套环110的内表面,借此阀头组件的栓塞和容器可以相互密封地啮合在一起。
图3是用于图1所示的流体存储和分配系统100的过滤器单元134的正视图。所示的过滤器单元134具有一个车有螺纹137的管状接头部分,与图1所示的调节器132的外壳啮合在一起。
图4是图1所示的气体存储和分配系统100的调节器132的部分剖开的视图。所示的调节器132具有一个底部气体入口133,过滤器单元的管状接头螺纹地与它连接。调节器132在它的上端提供有一个气体出口135,它与图1所示的连接器流动管130连接。
图5是图1所示的气体存储和分配系统100的气体存储和分配容器102上边部分的截面正视图。容器102所示的部分包括圆柱形壁104、颈部108和套环110。套环的内表面车有螺纹109,它与阀头组件114的栓塞112上的螺纹113是互补的。容器可以用不锈钢材料或其他的铁合金或其他的金属或非金属材料制成,提供a>1英寸的NGT颈部开口和合适的NGT螺纹。
图6是根据本发明另一个实施例的气体存储和分配系统200的示意性截面正视图。气体存储和分配系统200包括一个气体存储和分配容器212,它包含一个圆柱形侧壁214和一个底盘216,整合在一起圈成了容器的内部空间218。侧壁和底盘可以用任何合适的材料制造,例如,金属、不透气的塑料、纤维树脂合成材料等等,适合于使气体容纳在容器中、装置的最终使用环境和在存储和分配使用时保持容器中的压力级别。
在它的上端220,容器的特征在于颈部221限定一个开口222,被颈部221的内壁223界定。内壁223可以车有螺纹或者是互补形式与包括阀体226的阀头225啮合在一起,其中阀体226具有互补螺纹或者适合于这种接口的形状。
在这样的形式中,阀头225与容器212啮合成无泄漏的形式,在想要的存储条件下把气体保存在内部空间218中。
阀头主体226在其中有一个中间的垂直通道228,用来分发从容器212排出的气体。中间的垂直通道228与气体排放口229的气体排放通道230连接,如图所示。
阀头主体包含一个阀部件227,它与手轮238连接在一起,可以选择性地手动打开或关闭阀门。在这种形式中,手轮可以被打开,使气体穿过中间的垂直通道228流动到气体排放口229,或者,手轮可以手动关闭,终止气体在分配操作过程中从中间的垂直通道228流动到气体排放口229。
阀部件227因此安装在调节器的下游,这样从容器分配出的流体可以在流动穿过包含阀部件227的流动控制阀门之前流动穿过调节器。
代替手轮阀门致动部件,可以提供一个自动的阀门致动装置,例如气动阀门致动装置,电动机械阀门致动装置,或者其他的合适在阀头处打开和关闭阀门的装置。
阀头主体226也包含一个形成在其中的填充通道232,在其上端与填充口234连通。当容器被填充好和放置用于存储和分配所含的气体时,在附图6所示的填充口234被填充口帽236盖上了,防止填充口被污染或损坏。
填充通道在它的下端脱离了阀头主体226的底面,如图所示。当填充口234与要容纳在容器中的气体源连通时,气体可以穿过填充通道流动到容器212的内部空间218中。
一个延伸管240连接在阀头主体226的下端,在其中包含第一粒子过滤器239。第一调节器242安装在延伸管240末端。在任何合适的形式中,第一调节器242固定在延伸管的下端,例如,通过在延伸管下端部分提供内螺纹来固定,调节器242通过螺纹与它啮合。
可选地,第一调节器可以通过,例如,焊接、铜焊、锡焊、熔融焊接、或者通过合适的机械接头和/或方法等连接在延伸管下端。
第一调节器242与第二调节器260串连在一起,如图所示。为了这样的目的,第一和第二调节器可以用螺纹相互啮合在一起,通过在第一调节器242的下面延伸部分和第二调节器260上面的延伸部分车出互补螺纹而啮合在一起。
可选地,第一和第二调节器可以用任何合适的方式连接在一起,例如,通过管接或接头方式,通过粘结、焊接、铜焊、锡焊等,或者第一和第二调节器可以作为双重调节器组件的部件整合制造。
在它的下端,第二调节器260与高效的粒子过滤器246连接在一起。
高效的粒子过滤器246用来防止调节器部件和上游的阀部件227受到粒子或其他的在装置操作过程中穿过调节器和阀门进入流体的污染物的污染。
图6所示的实施例还具有一个高效的粒子过滤器239,安装在延伸管240中,提供进一步的粒子去除能力和确保分配气体的高纯度。
优选地,调节器具有至少一个粒子过滤器与它串连。如图6的实施例所示,在从容器的内部空间218到气体排放口229的气体流路中,系统优选地包括一个位于调节器上游的粒子过滤器和一个位于调节器下游的粒子过滤器。
因此,在图6的实施例中的阀头225提供了一个双口的阀头组件—一个口是气体填充口234,另一个口是气体排放口229。
压力调节器的类型为包括一个与提升阀垫板连接在一起的膜片部件。该垫板转而与提升阀部件的阀杆连接,作为精确控制出口气体压力的压力传感装置的一部分。出口压力轻微地增加会使压力传感器装置收缩,出口压力轻微地增加会使压力传感器装置膨胀。收缩或膨胀被传递给提升阀来提供精确的控制。压力传感器装置具有一个预先确定的或根据气体存储和分配系统的特定应用而设置的设置点。
如图所示,在其中包含一个流动控制阀268的气体排放管线266与排放口229连接。通过这种布置,气体排放管线中的流动控制阀被打开,使得气体在流体存储和分配系统210的分配模式下,从容器212流动到相关的生产装置270中(例如,半导体生产装置或其他使用装置)。
在这种方式下,气体分配的压力由调节器242的设置点来确定。
在图6的实施例中,调节器260和调节器242各自的设置点可以选择或预设任何合适的值以适应特定的想要的最终应用。
例如,第二或“上游”调节器260可以具有一个从大约20磅/每平方英寸到大约2500磅/每平方英寸的设置点。第一或“下游”调节器242可以具有一个高于上游调节器260压力设置点的设置点,例如,从大约1托到2500磅/每平方英寸。
在一个所示的实施例中,上游的调节器260具有一个从大约100磅/每平方英寸到大约1500磅/每平方英寸的设置点压力值,而下游的调节器242具有一个从大约100托到大约50磅/每平方英寸的设置点压力值,其中上游的压力设置点高于下游调节器的设置点。
虽然串连调节器组件中的调节器的设置点可以相互以任何合适的比率确定,例如在图6所示的双调节器组件中,但是上游的调节器在优选的实际应用中具有的压力设置点至少为下游调节器设置点值的两倍(以相同的压力测量单位)。
在图6的实施例中,第一和第二调节器互相同轴对齐形成一个在两端都有粒子过滤器的调节器组件。作为这种布置的结果,从容器212中分配的气体具有极高的纯度。
作为进一步的修改,粒子过滤器可以被镀膜或用所选的吸附存在于分配气体中的杂物(例如,从容器中的气体反应或降级产生的分解物)的化学吸附剂浸润。在这种方式下,当气体被分配时,气体沿着流路流动穿过粒子过滤器现场就被净化了。
在图6所示类型的气体存储和分配系统的一个实施例中,容器212是3AA 2015 DOT 2.2升的汽缸。高效粒子过滤器246是一个GasShieldTM PENTATM的气体过滤器,可以从Mott公司(Farmington,CT)得到,在316L的VAR/电解抛光的不锈钢或镍外壳中具有一个烧结金属过滤介质,可以除去超过99.9999999%的小到0.003微米直径的粒子。高效粒子过滤器239是一个Mott标准的6610-1/4嵌入式的过滤器,可以从Mott公司(Farmington,CT)得到。调节器是HF系列的的压力调节器,第一调节器242具有从100托到50磅/每平方英寸的设置点压力,第二调节器260具有从100磅/每平方英寸到1500磅/每平方英寸的设置点压力,第二调节器260的设置点压力至少为第一调节器242的设置点压力的两倍。
尽管在此参考特定的部件、特征和实施例示例性地说明了本发明,但是可以认识到本发明并不局限于这种结构或操作,而是结合这里揭示的内容可以进行宽泛的构造,本领域技术人员可以轻易提出各种变化、修改和实施例。
Claims (21)
1.一种流体存储和分配系统,包括:
容器,所述容器限定用于容纳压缩气体的内部空间;
阀头,所述阀头与所述容器密封地啮合,所述阀头包括能够打开或关闭的阀,以从所述容器分配气体,
第一压力调节器和第二压力调节器,所述第一压力调节器和所述第二压力调节器在所述容器的所述内部空间中彼此串联连接,以使气体从所述容器流动到所述阀头以进行分配。
2.根据权利要求1所述的流体存储和分配系统,其中,所述第一压力分配器在所述第二压力分配器的下游,使得气体流径所述第二压力分配器然后流径所述第一压力分配器到达所述阀头以进行分配,并且其中,所述第二压力分配器具有高于所述第一压力调节器的第一设定点压力值的第二设定点压力值。
3.根据权利要求2所述的流体存储和分配系统,其中,所述第二压力调节器具有在从约20psig(0.14MPa)到约2500psig(17.2MPa)的范围内的第二设定点压力值。
4.根据权利要求3所述的流体存储和分配系统,其中,所述第二压力调节器的所述第二设定点压力值是所述第一压力调节器的所述第一设定点压力值的至少两倍。
5.根据权利要求3所述的流体存储和分配系统,其中,所述第一设定点压力值在从约1torr(0.13kPa)到约50psig(0.34MPa)的范围内。
6.根据权利要求2所述的流体存储和分配系统,其中,所述第一压力分配器包括压力传感组件以控制出口气体压力。
7.根据权利要求6所述的流体存储和分配系统,其中,所述第二压力分配器包括压力传感组件以控制出口气体压力。
8.根据权利要求6所述的流体存储和分配系统,其中,所述第二压力分配器限制气体向所述第一压力分配器的流动。
9.根据权利要求1所述的流体存储和分配系统,包括用于打开以及关闭所述阀头中的所述阀的阀门致动装置。
10.根据权利要求9所述的流体存储和分配系统,其中,所述阀门致动装置包括气动阀门致动装置。
11.根据权利要求1-10中的任一项所述的流体存储和分配系统,其中,所述容器容纳压缩气体。
12.根据权利要求11所述的流体存储和分配系统,其中,所述压缩气体包括选自氢化物气体、卤化合物气体和气态有机金属的气体。
13.根据权利要求11所述的流体存储和分配系统,其中,所述压缩气体包括选自砷化三氢、磷化氢、锑化三氢、硅烷、乙硼烷、氟化氢、三氯化硼、三氟化硼、氢氯化物、卤化硅烷和卤化乙硅烷的气体。
14.根据权利要求11所述的流体存储和分配系统,被布置成使气体流动到半导体制造设备。
15.一种提供气体的方法,包括使用根据权利要求11所述的流体存储和分配系统。
16.一种提供气体的方法,包括用压缩气体填充根据权利要求1-10中的任一项所述的流体存储和分配系统的容器。
17.根据权利要求16所述的方法,其中,所述压缩气体包括选自氢化物气体、卤化合物气体和气态有机金属的气体。
18.根据权利要求16所述的方法,其中,所述压缩气体包括选自砷化三氢、磷化氢、锑化三氢、硅烷、乙硼烷、氟化氢、三氯化硼、三氟化硼、氢氯化物、卤化硅烷和卤化乙硅烷的气体。
19.一种提供气体的方法,包括从根据权利要求11所述的流体存储和分配系统分配气体。
20.根据权利要求19所述的方法,其中,压缩气体包括选自氢化物气体、卤化合物气体和气态有机金属的气体。
21.根据权利要求19所述的方法,其中,压缩气体包括选自砷化三氢、磷化氢、锑化三氢、硅烷、乙硼烷、氟化氢、三氯化硼、三氟化硼、氢氯化物、卤化硅烷和卤化乙硅烷的气体。
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US09/552,347 US6343476B1 (en) | 1998-04-28 | 2000-04-19 | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein |
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CN01810427.4A CN1705846B (zh) | 2000-04-19 | 2001-04-09 | 包含内置于流体密封容器中并可在其内现场调节的调节器的气体储存和分配系统 |
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- 2001-04-09 AU AU2001251459A patent/AU2001251459A1/en not_active Abandoned
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Publication number | Priority date | Publication date | Assignee | Title |
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CN107771262A (zh) * | 2015-05-12 | 2018-03-06 | 恩特格里斯公司 | 阀组合件及包括阀组合件的流体储存与施配封装 |
CN109367997A (zh) * | 2018-09-14 | 2019-02-22 | 宁波铭匠扎啤设备有限公司 | 一种酒头可调的酒水饮料保鲜桶 |
CN109367997B (zh) * | 2018-09-14 | 2024-02-23 | 宁波铭匠扎啤设备有限公司 | 一种酒头可调的酒水饮料保鲜桶 |
CN109945069A (zh) * | 2019-03-25 | 2019-06-28 | 中国船舶科学研究中心(中国船舶重工集团公司第七0二研究所) | 水下气氧超压排放装置 |
CN112325146A (zh) * | 2019-08-05 | 2021-02-05 | 古丰愿 | 负压供气钢瓶 |
Also Published As
Publication number | Publication date |
---|---|
EP1328756B1 (en) | 2010-09-01 |
KR20120066082A (ko) | 2012-06-21 |
SG145554A1 (en) | 2008-09-29 |
AU2001251459A1 (en) | 2001-11-07 |
CN1705846B (zh) | 2015-05-13 |
TW490541B (en) | 2002-06-11 |
JP2003532033A (ja) | 2003-10-28 |
DE60142981D1 (de) | 2010-10-14 |
MY122718A (en) | 2006-04-29 |
KR100879152B1 (ko) | 2009-01-19 |
JP2010281459A (ja) | 2010-12-16 |
KR20020093056A (ko) | 2002-12-12 |
CN1705846A (zh) | 2005-12-07 |
WO2001081822A1 (en) | 2001-11-01 |
KR20080099342A (ko) | 2008-11-12 |
US6343476B1 (en) | 2002-02-05 |
KR100962625B1 (ko) | 2010-06-14 |
KR20100032923A (ko) | 2010-03-26 |
EP1328756A4 (en) | 2008-09-03 |
CN104989942B (zh) | 2018-03-06 |
EP1328756A1 (en) | 2003-07-23 |
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