CN104942661B - A kind of MRF bistrique and device suitable for planar wave part - Google Patents
A kind of MRF bistrique and device suitable for planar wave part Download PDFInfo
- Publication number
- CN104942661B CN104942661B CN201510385822.0A CN201510385822A CN104942661B CN 104942661 B CN104942661 B CN 104942661B CN 201510385822 A CN201510385822 A CN 201510385822A CN 104942661 B CN104942661 B CN 104942661B
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- CN
- China
- Prior art keywords
- mrf
- generating unit
- magnetic
- field generating
- bistrique
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/0018—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor for plane optical surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The present invention relates to precision optics polishing technical field, more particularly to a kind of MRF bistrique and device suitable for planar wave part, mainly include installing plate and several are fixed on the positive field generating unit of installing plate, the field generating unit is made up of two blocks of magnet being mutually attached together, and magnetic flow liquid produces Bingham body on the surface in two pieces of magnet splicing gaps.The present invention is simple in construction, convenient and practical, by setting some field generating units, greatly increase the raised area of workpiece contact Bingham body in MRF, and the magnetic field homogeneity of each Bingham body is consistent, it is possible to achieve the quick MRF of large area, processing efficiency is substantially increased.
Description
Technical field
The present invention relates to precision optics polishing technical field, more particularly to a kind of magnetic suitable for planar wave part
Rheology grinding head for polishing and device.
Background technology
Modern shortwave optics, strong light optics, the demand for development optical element of electronics and membrane science should have high reflection
Rate, high surface figure accuracy, low roughness and high intensity, therefore the requirement to optical element surface is extremely harsh, such as surface is without crystalline substance
Lattice deformations, are substantially not present residual stress, extremely low surface roughness (Ra≤1nm), without exogenous impurity pollution, high geometry
Precision and substrate surface should have accurate crystal orientation etc..Substantial amounts of planar wave part is needed in especially large-scale high power device, this
The optical effect correction quality that class bears high power laser light load proposes very harsh requirement.
Technique of Magnetorheological Finishing is to be combined electromagnetism and fluid dynamic theory and be applied to one kind of optical manufacturing
Technology.Magnetorheological process technology is presently more satisfactory high-precision optical part process technology, the biggest advantage is that
The problem of in the absence of tool wear, machining accuracy is high；It is easily achieved computer control；Its polishing tool utilizes the spy of magnetic rheological body
Different characteristic, will not produce sub-surface destruction, can fundamentally solve problem present in conventional polishing method, meet modern science
The demand for development of development with technology to optical element.
Existing Technique of Magnetorheological Finishing can be used for the processing of planar wave part, and the processing on optical element surface
Quality can reach a very high quality.Chinese patent CN101579833B discloses the controllable many magnetorheological throwings of bistriques of high efficiency
Electro-optical device, its field generator for magnetic is made up of a ring shielding device and the individually controllable electromagnet unit of at least one, each
Controllable field region drives these serial small abrasive noses to be connect with workpiece with annular spread by the rotation of buff spindle and polishing disk
Burnishing is touched, realizes and controllable many bistriques of workpiece is efficiently polished.Chinese patent ZL200910052609.2 is disclosed efficiently
Rate controllable multiple wheel head magnetic rheology buffing device, using monocyclic or polycyclic circumference field structure, while using array arrangement with reality
The processing of existing different purposes workpiece.
It is well known that improving the polishing efficiency of planar wave part, the Main Means of MRF include：Improve relative
The Ben-Hur bulk area that movement velocity, increasing magnetic field and increase are contacted with workpiece.Above-mentioned MRF grinding head device is all
The surface polishing of flat work pieces can be realized, with certain novelty, but there is certain application system in these techniques
About, these technologies are difficult to expand to contact the raised area of Bingham body with workpiece, that is, allow to be expanded to certain scope, its is uniform
Property can by certain restriction, and its use electromagnetism produce magnetic field structure want increasing magnetic field to be also extremely difficult.
The content of the invention
In view of the deficienciess of the prior art, it is an object of the invention to provide a kind of Bingham body and the uniform contact surface of workpiece
The product MRF bistrique and device suitable for planar wave part big, high in machining efficiency.
To achieve the above object, the present invention can be achieved by the following technical programs：
A kind of MRF bistrique suitable for planar wave part, including installing plate are fixed on installing plate with several
Positive field generating unit, the field generating unit is made up of two blocks of magnet being mutually attached together, and magnetic flow liquid exists
The surface in two pieces of magnet splicing gaps produces Bingham body.A unit is constituted together using two pieces of magnet adsorptions, utilizes magnetic field
The characteristics of there is a natural attraction between the sexes, same face is formed by the S poles of the N poles of one of magnet and another block of magnet, is so combined, is being added
Plus after magnetic flow liquid, because two blocks of magnet are all the magnetic field intensity maximums of N poles or S poles, the magnetic line of force is followed most from N poles to S poles
The mode of short distance distribution, most of magnetic line of force can form a closed loop from the N poles of first magnet to the S poles of second magnet
Loop, i.e., the locus on the junction surface of two faces produces stable high-intensity magnetic field, can be in two pieces of magnet joint portion partings
At gap, especially slit surfaces space forms the Bingham body of projection, and this is difficult to realize on electromagnet.
Further, the magnet is permanent magnet, using permanent magnet as field generating unit, can so ensure each list
The uniformity of first magnetic field intensity.
Further, the magnet is square, cuboid, cylinder, torus or irregular body, and its magnetic pole strength is continuous
Plane or discontinuous plane.
Further, because magnetic pole strength is continuous level or discontinuous plane, the Ben-Hur produced by the field generating unit
Body is for connection or discontinuously.
Further, the installing plate uses permeability magnetic material, the field generating unit by magnetic-adsorption on a mounting board.
Further, it is described provided with the positive limited block of installing plate is fixed between the two neighboring field generating unit
The width of limited block is equal with the spacing of two neighboring field generating unit, prevents field generating unit from moving.
Further, the MRF bistrique also includes sealing ring, telecontrol equipment contiguous block, bearing block, clutch shaft bearing
And connecting shaft, the telecontrol equipment contiguous block connected by the back side of sealing ring and installing plate, the bearing block and telecontrol equipment
Contiguous block, installing plate are fixedly connected, and the clutch shaft bearing is fixedly mounted in bearing block, and the connecting shaft is arranged on clutch shaft bearing
It is interior.
A kind of magnetorheological finishing device, including described MRF bistrique, support, live spindle, belt transmission system
System, motor and reductor system and workpiece plate, motor and the reductor system and workpiece plate are fixedly mounted on support, described
Live spindle is arranged on support by second bearing, and the MRF bistrique is fixedly connected with live spindle, the electricity
Machine and reductor system drive live spindle to rotate by belt drive system, and then drive the rotation of MRF bistrique, institute
State the lower section that workpiece plate is arranged on MRF bistrique.
The present invention is simple in construction, convenient and practical, by setting some field generating units, greatly increases in MRF
The raised area of middle workpiece contact Bingham body, and the magnetic field homogeneity of each Bingham body is consistent, it is possible to achieve the quick magnetic of large area
Rheology is polished, and substantially increases processing efficiency, be particularly suitable for use in planar wave part.
Brief description of the drawings
Fig. 1 is the overall structure diagram of the MRF bistrique of the present invention；
Fig. 2 is the part-structure schematic diagram of the MRF bistrique of the present invention；
Fig. 3 is the field generating unit of the present invention and the structural representation of Bingham body；
Fig. 4 is the magnet arrangement that magnetic pole strength is continuous level；
Fig. 5 is the magnet arrangement that one of magnetic pole strength is discontinuous plane；
Fig. 6 is to splice the field generating unit structure that gap is continuous, interrupted straight line；
Fig. 7 is to splice the field generating unit structure that gap is continuous, interrupted circular arc line segment；
Fig. 8 is the field generating unit structure for splicing gap for continuous, interrupted irregular line segment；
Fig. 9 is the field generating unit structure for splicing gap for continuous, interrupted circle；
Figure 10 is the structural representation of the magnetorheological finishing device of the present invention；
In figure：1- MRFs bistrique, 11- installing plates, 12- field generating units, 121- magnet, 13- Bingham body,
14- limited blocks, 15- sealing rings, 16- telecontrol equipments contiguous block, 17- bearing blocks, 18- clutch shaft bearings, 19- connecting shafts, 2- supports,
3- live spindles, 4- belt drive systems, 5- motors and reductor system, 6- workpiece plates, 7- workpiece.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention is further illustrated：
As shown in Fig. 1~2, the MRF bistrique of the present invention suitable for planar wave part mainly includes
Installing plate 11 and field generating unit 12, installing plate 11 use permeability magnetic material, and field generating unit 12 is by being mutually attached together
Two blocks of magnet 121 constitute, several field generating units 12 are being fixed on installing plate 11 just by the magnetic adsorptive power of itself
On face, the arrangement mode of field generating unit 12 according to rule to be arranged as most preferably, it would however also be possible to employ rambling mode is entered
Row arrangement.It is preferred that, magnet 121 uses permanent magnet, it is ensured that the magnetic field homogeneity of each Bingham body 13 is consistent.As shown in figure 3, magnetic
Rheology liquid produces Bingham body 13 on the surface in the two pieces of splicing of magnet 121 gaps.
In actual applications, the size of installing plate 11 can accomplish very big, can be in theory infinity, can reach
The dimension limit being machined now, therefore the size of MRF bistrique 1 can also increase to infinity, thus increase
Be added in the raised area of the contact of workpiece in MRF Bingham body 13, and each Bingham body 13 magnetic field homogeneity be it is consistent,
The quick MRF of large area can be realized.
MRF bistrique 1 also includes limited block 14, sealing ring 15, telecontrol equipment contiguous block 16, bearing block 17, first
Bearing 18 and connecting shaft 19.Limited block 14 is located between two neighboring field generating unit and is fixed on the front of installing plate 11
On, specifically, the width of limited block 14 is equal with the spacing of adjacent two pieces of field generating units 12, prevent field generating unit 12
It is mobile.Telecontrol equipment contiguous block 16 is connected by sealing ring 15 with the back side of installing plate 11, and bearing block 17 is connected with telecontrol equipment
Block 16, installing plate 11 are fixedly connected by screw, and clutch shaft bearing 18 is fixedly mounted in bearing block 17, and connecting shaft 19 is arranged on the
In one bearing 18.Sealing ring 15 plays a part of preventing pollutant from entering installing plate 11 and polluting field generating unit 12, connecting shaft
19 may be fixedly attached on support 2, and then reach the spacing purpose of the limitation vertical direction of installing plate 11.Telecontrol equipment contiguous block
16 can connect with the kinematic driving unit of equipment, can so drive whole MRF bistrique 1 rotated or
Person moves along a straight line, and after addition magnetic flow liquid, due to the presence of motion, can form shearing force, reach the effect of polishing.
It is preferred that, magnet 121 is square, cuboid, cylinder, torus or irregular body, and its magnetic pole strength is continuous
Plane or discontinuous plane, and certain particular form is not limited to, as long as magnet 121 can be such that field generating unit 12 produces surely
Determine the magnetic field of intensity and then make the Bingham body of magnetic flow liquid formation stable and uniform.
As shown in figure 4, magnet can be square, cuboid, cylinder, torus and irregular body, N magnetic pole strengths and S
Magnetic pole strength is connection plane.
As shown in figure 5, magnet can be square, cuboid, cylinder, torus and irregular body, N magnetic pole strengths or S
Magnetic pole strength is discontinuous plane.
As shown in fig. 6, two blocks of magnet 121 are attached together, a field generating unit 12 is constituted, magnetic flow liquid is added
Afterwards, the uniform projection of Bingham body 13 can be produced in the two pieces of splicing of magnet 121 slit surfaces.Top view is carried out, using two pieces
Magnetic pole strength is the square or rectangular magnet body of continuous level, and splicing gap can be continuous linear；One magnetic pole strength or two
Individual magnetic pole strength is the square or rectangular magnet body of discontinuous plane, and splicing gap is interrupted straight line.
As shown in fig. 7, using two blocks of magnet of respective shapes to splice the gap produced for continuous or interrupted circular arc line
Section.
As shown in figure 8, using two blocks of magnet of respective shapes to splice the gap produced for continuous or discontinuously irregular
Line segment.
As shown in figure 9, using two blocks of magnet of respective shapes to splice the gap produced for continuous or interrupted circle.
As shown in Figure 10, a kind of magnetorheological finishing device, including MRF bistrique 1, support 2, live spindle 3, skin
Belt transmission system 4, motor and reductor system 5 and workpiece plate 6.Motor and reductor system 5 and workpiece plate 6 are fixedly mounted on machine
On seat 2, workpiece 7 is fixedly mounted on workpiece plate 6, and live spindle 3 is arranged on support 2 by second bearing.MRF
Bistrique 1 is fixed by screws in live spindle 3, and motor and reductor system 5 drive live spindle by belt drive system 4
3 rotations, and then drive MRF bistrique 1 to rotate, workpiece plate 6 is arranged on the lower section of MRF bistrique 1.In addition magnetic
After rheology liquid, the gap location of workpiece 7 and MRF bistrique 1 can form Bingham body 13, after addition polishing fluid, Bingham body 13
Drive polishing fluid to glass surface formation shear removal, be finally reached the purpose of MRF.
For those skilled in the art, other can be made various corresponding according to above technical scheme and design
Change and deformation, and all these change and deformation should all belong within the protection domain of the claims in the present invention.
Claims (4)
1. a kind of MRF bistrique suitable for planar wave part, it is characterised in that：Consolidate including installing plate with several
The positive field generating unit of installing plate is scheduled on, the field generating unit is made up of two blocks of magnet being mutually attached together,
Magnetic flow liquid produces Bingham body on the surface in two pieces of magnet splicing gaps；
The installing plate uses permeability magnetic material, the field generating unit by magnetic-adsorption on a mounting board；Described adjacent two
It is provided between individual field generating unit and is fixed on the positive limited block of installing plate, the width of the limited block and two neighboring magnetic field
The spacing of generating unit is equal；
The MRF bistrique also includes sealing ring, telecontrol equipment contiguous block, bearing block, clutch shaft bearing and connecting shaft, institute
State telecontrol equipment contiguous block to connect by the back side of sealing ring and installing plate, the bearing block and telecontrol equipment contiguous block, installation
Plate is fixedly connected, and the clutch shaft bearing is fixedly mounted in bearing block, and the connecting shaft is arranged in clutch shaft bearing.
2. the MRF bistrique according to claim 1 suitable for planar wave part, it is characterised in that：The magnetic
Iron is permanent magnet.
3. the MRF bistrique according to claim 2 suitable for planar wave part, it is characterised in that：The magnetic
Iron is square, cuboid, cylinder, torus or irregular body, and its magnetic pole strength is continuous level or discontinuous plane.
4. the MRF bistrique according to claim 3 suitable for planar wave part, it is characterised in that：The magnetic
Bingham body produced by field generating unit is connection or interrupted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510385822.0A CN104942661B (en) | 2015-06-30 | 2015-06-30 | A kind of MRF bistrique and device suitable for planar wave part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510385822.0A CN104942661B (en) | 2015-06-30 | 2015-06-30 | A kind of MRF bistrique and device suitable for planar wave part |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104942661A CN104942661A (en) | 2015-09-30 |
| CN104942661B true CN104942661B (en) | 2017-08-25 |
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| CN201510385822.0A Expired - Fee Related CN104942661B (en) | 2015-06-30 | 2015-06-30 | A kind of MRF bistrique and device suitable for planar wave part |
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| CN (1) | CN104942661B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109048506B (en) * | 2018-08-10 | 2020-10-23 | 太原理工大学 | Permanent magnet type liquid magnetic grinding tool surface finishing processing device and method |
| CN110722428B (en) * | 2019-10-23 | 2021-09-07 | 中国科学院光电技术研究所 | Magnetorheological sub-aperture polishing device suitable for large-aperture optical element |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10244451A (en) * | 1997-03-03 | 1998-09-14 | Nikon Corp | Polishing tool and polishing method using it |
| CN201026589Y (en) * | 2006-12-31 | 2008-02-27 | 广东工业大学 | Magnetorheological device for grinding and polishing plane surface |
| CN101559571A (en) * | 2009-03-11 | 2009-10-21 | 清华大学 | Method and device for polishing magnetic field auxiliary flexible rotary brush for optical element |
| CN103072069B (en) * | 2012-12-19 | 2015-12-23 | 广东工业大学 | The electroceramics substrate flexible grinding and polishing device of magnetic rheology effect viscoplasticity clamping and method |
| CN104308672B (en) * | 2014-10-27 | 2016-09-14 | 白素华 | A kind of rotation MRF grinding wheel device |
| CN205057684U (en) * | 2015-06-30 | 2016-03-02 | 深圳市智博高科光电装备有限公司 | Magnetic current becomes polish grinding head and device suitable for plane optical element |
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Granted publication date: 20170825 Termination date: 20210630 |