CN104934410B - A kind of MOM capacitor and electric capacity method of adjustment - Google Patents
A kind of MOM capacitor and electric capacity method of adjustment Download PDFInfo
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Abstract
The present invention relates to capacitor area, more particularly to a kind of MOM capacitor and electric capacity method of adjustment, a voltage switchgear is connected in the first electrode and second electrode of every layer of metal level, the positive-negative polarity for the voltage being applied to by control voltage switching device in the first electrode and second electrode of every layer of metal level, change the interdigital positive-negative polarity interdigital with second electrode that is being connected to the second electrode side of first electrode for being connected to the first electrode side, to realize that the positive-negative polarity alternate intervals that each electrode is interdigital on line direction are arranged, the positive-negative polarity mixing arrangement that each electrode is interdigital on column direction, carry out the electric capacity of intense adjustment MOM capacitor.This method saves electric capacity Setup Cost, can realize that the capacitance of MOM capacitor after adjustment is differed with desired value less than 5%, to cause analog circuit more accurate.
Description
Technical field
The present invention relates to capacitor area, more particularly to a kind of MOM capacitor and electric capacity method of adjustment.
Background technology
Capacitor is the important composition unit in integrated circuit, is widely used in various chips.With the integrated electricity of semiconductor
The continuous progress of road manufacturing technology, the performance of semiconductor devices is also constantly lifted.In integrated circuit integrated level lifting process how
The electric capacity of capacitor is controlled to be accurately controlled analog circuit as an important problem.
During chip production, the change of the capacitance of MOM (metal-oxide-metal) capacitor is limited at
Within 10%.But the Analog Circuit Design of this capacitance for still not enough optimizing a certain MOM capacitor for needing more accurately to control.
In the prior art without a kind of method of the inexpensive capacitance in chip-scale intense adjustment MOM capacitor.Electricity
Capacitance adjustment uses fuse or OTP programmed methods, adds the complexity and chip size and cost of processing.
Transverse magnetic flux BEOL capacitors with multi-level metal interconnection layer, because of metal connecting line (interconnect) capacitor
And MOM capacitor is widely used in CMOS technology field as highdensity " free " capacitor.Existing MOM capacitor
Structure include into comb teeth-shaped arrangement the interdigital polarity in vertical direction of metal it is identical and into comb teeth-shaped arrange metallic tines
Refer to two kinds of structures of alternating polarity in vertical direction.Wherein, it is interdigital to be in intensive dielectric layer.
The control of traditional MOM capacitor is thrown by the technological parameter for controlling to interconnect, such as metal line-width, line space, metal
Attribute of light (depression), intermetallic distance and dielectric layer etc. is realized.But, these methods can only control MOM capacitor
The capacitance of device changes in the range of 10%, and can not realize finer adjustment.
The content of the invention
In view of the above problems, the present invention provides a kind of method of the capacitance of inexpensive intense adjustment MOM capacitor, makes
The capacitance for obtaining MOM capacitor is differed with desired value less than 5%, so that in the analog circuit for needing accurately to control.
The present invention solve the technical scheme that is used of above-mentioned technical problem for：
A kind of MOM capacitor is provided, it is characterised in that including：
Include in the metal level of the mutual parallel stacked of multilayer, and every layer of metal level first electrode, respectively with this
The connection of one electrode some first electrodes are interdigital, second electrode and
Some second electrodes being connected respectively with the second electrode are interdigital；
Insulating medium layer, the metal level insertion is arranged in the insulating medium layer, by between each metal level,
Isolated between first electrode and second electrode in the same metal level；
Voltage switchgear, is connected with the first electrode and the second electrode in every layer of metal level respectively；
Wherein, the second electrode using each first electrode of voltage switchgear adjustment and/or each
Positive-negative polarity, to adjust the capacitance of the capacitor.
It is preferred that, above-mentioned MOM capacitor, wherein, in every layer of metal level, the first electrode and second electrode are put down
Row is set.
It is preferred that, above-mentioned MOM capacitor, wherein, in every layer of metal level, each first electrode is interdigital into broach
Shape is arranged in first electrode side, and second electrode is interdigital to be arranged in the second electrode side into comb teeth-shaped.
It is preferred that, above-mentioned MOM capacitor, wherein, in every layer of metal level, the first electrode and second electrode
Positive-negative polarity is opposite.
It is preferred that, above-mentioned MOM capacitor, wherein, in every layer of metal level, the interdigital both positive and negative polarity of the first electrode
Property is consistent with first electrode, and the interdigital positive-negative polarity of the second electrode is consistent with second electrode.
It is preferred that, above-mentioned MOM capacitor, wherein, in every layer of metal level, the first electrode is interdigital with described the
The interdigital alternate intervals arrangement of two electrodes.
It is preferred that, above-mentioned MOM capacitor, wherein, the electric capacity of the MOM capacitor is included in every layer of metal level just
The arrangement of negative polarity alternate intervals first electrode is interdigital and second electrode it is interdigital between electric capacity, positive-negative polarity it is different adjacent two
Layer metal level first electrode is interdigital and second electrode it is interdigital between electric capacity and edge capacitance.
The present invention also provides a kind of electric capacity method of adjustment, the electric capacity for adjusting above-mentioned MOM capacitor, methods described bag
Include：
According to process requirements, control signal is sent to the voltage switchgear, to control and the voltage switchgear
The positive-negative polarity and the positive-negative polarity of each second electrode of each first electrode of connection；
Wherein, the first electrode and second electrode opposite polarity of every layer of control, to realize alternate intervals arrangement in every layer
The first electrode being connected with the first electrode interdigital opposite polarity of second electrode that is interdigital and being connected with the second electrode.
It is preferred that, above-mentioned electric capacity method of adjustment, wherein, by controlling the voltage switchgear to be applied to the institute of each layer
First electrode polarity is stated identical or different, corresponding second electrode polarity is identical or different, to adjust the electricity of the MOM capacitor
Hold.
It is preferred that, above-mentioned electric capacity method of adjustment, wherein, electric capacity Adjustment precision and the desired value phase of the MOM capacitor
Difference is less than 5%.
Above-mentioned technical proposal has the following advantages that or beneficial effect：MOM capacitor and the electric capacity adjustment that the present invention is provided
Method, the both positive and negative polarity of the first electrode of every layer of metal level and the voltage of second electrode is applied to by control voltage switching device
Property, to adjust the electric capacity of MOM capacitor.This method saves electric capacity Setup Cost, can realize the electric capacity of MOM capacitor after adjustment
Value is differed with desired value less than 5%, to cause analog circuit more accurate.
Brief description of the drawings
By reading the detailed description made with reference to the following drawings to non-limiting example, the present invention and its feature, outside
Shape and advantage will become more apparent.Identical mark indicates identical part in whole accompanying drawings.Not can according to than
Example draws accompanying drawing, it is preferred that emphasis is show the purport of the present invention.
Fig. 1 is a kind of structural representation of MOM capacitor of the invention；
Fig. 2 is the schematic diagram that voltage switchgear of the present invention is connected with electrode；
Fig. 3-Fig. 5 is to be applied to the different positive-negative polarity of electrode of MOM capacitor in three embodiments of the invention to adjust
The schematic diagram of electric capacity.
Embodiment
Reference picture 1, a kind of MOM capacitor that the present invention is provided, including more metal layers M1-M5 (5 layers are indicated in figure,
Depending on actual layer number can be according to specific process requirements, the invention is not limited in this regard).Every layer of metal level includes one first electricity
Pole and a second electrode, i.e., metal level M1 includes first electrode 11 and second electrode 12 shown in figure, and metal level M2 includes first
Electrode 21 and second electrode 22, by that analogy, metal level M3 include first electrode 31 and second electrode 32, and metal level M4 includes the
One electrode 41 and second electrode 42, metal level M5 include first electrode 51 and second electrode 52.It is connected with each first electrode
Some first electrodes in comb teeth-shaped arrangement are interdigital, and some second electrodes arranged in comb teeth-shaped are connected with each second electrode
Interdigital, i.e., to be connected with several first electrodes interdigital for the first metal layer M1 side of first electrode 11 shown in figure, indicates respectively
For 110,111,112, it is interdigital that the first metal layer M1 side of second electrode 12 is connected with several second electrodes, is respectively designated as
120th, 121 (for convenience of showing, every layer only indicates that three first electrodes are interdigital and two second electrodes are interdigital in figure, actually may be used
Interdigital interdigital, the invention is not limited in this regard with second electrode of multiple first electrodes is set according to specific process requirements)；With this
Analogize, it is interdigital that the second metal layer M2 side of first electrode 21 is equally connected with some first electrodes arranged in comb teeth-shaped, the
The side of two electrode 22 be connected with it is some in comb teeth-shaped arrange second electrodes it is interdigital, here is omitted.
Wherein, in each layer, by taking the first metal layer M1 as an example, first electrode 11 and second electrode 12 be arranged in parallel, equally
The first electrode interdigital 110,111 and 112 for being connected to the side of first electrode 11 and be connected to the side of second electrode 12
Two electrodes interdigital 120 and 121 also be arranged in parallel, that is to say, that within the same layer, and first electrode, first electrode are interdigital, second
Electrode and second electrode is interdigital is in same level.Meanwhile, first electrode is interdigital and second electrode is interdigital in comb teeth-shaped
Alternate intervals are arranged.The arrangement of other metal levels is with reference to the first metal layer M1, and here is omitted.
In whole MOM capacitor space, uniform dense distribution dielectric (not indicated in figure), by each metal
Layer, each first electrode, second electrode and each electrode is interdigital keeps apart.
Reference picture 2, each layer of first electrode and second electrode are connected and (for convenience of showing, schemed with voltage switchgear 6
In only indicate the first metal layer M1 first electrode 11 and second electrode 12 and the connection diagram of voltage switchgear 6, it is real
Each layer of first electrode and second electrode are connected with the voltage switchgear 6 in the utilization of border, or are needing adjustment a certain
The voltage switchgear 6 is connected to the first electrode and the second electricity of this layer by the first electrode of layer and the polarity chron of second electrode
Pole, actually can flexibly change, the invention is not limited in this regard according to concrete technology demand), voltage switchgear 6 is according to receiving
Control signal (being denoted as CS in Control Signal, figure) control be applied to each layer of first electrode and second electrode
The positive-negative polarity (V-or V+) of voltage, the electric capacity of MOM capacitor is adjusted with this.
Wherein, in each layer of metal level, equally by taking the first metal layer M1 as an example, first electrode 11 and second electrode 12
Opposite polarity, to cause the first electrode of alternate intervals arrangement interdigital and the interdigital opposite polarity of second electrode, is also even provided
The positive voltage of first electrode 11 is given, the negative voltage of second electrode 12 is supplied to accordingly, then the left side first electrode interdigital 110 from figure
Rise, the interdigital positive-negative polarity of electrode is respectively：It is positive and negative, positive and negative, positive and negative ....Such setting can cause MOM capacitor
Hold a basic capacitance (electric capacity between each adjacent electrode is interdigital in same layer metal level).Subsequently through change
The polarity of the polarity of first electrode and second electrode on longitudinal direction, it is possible to achieve accurately adjusted to the electric capacity of MOM capacitor.
The electric capacity method of adjustment of the present invention is further described with specific embodiment below in conjunction with the accompanying drawings, but not
It is used as the restriction of the present invention.
Embodiment one：
As shown in figure 3, being applied to the first metal layer M1 positive voltage of first electrode 11, the negative voltage of second electrode 12 so that
The interdigital positive-negative polarity of the first metal layer M1 each electrode from left to right shows as positive and negative, positive and negative, just in figure.It is applied to
The two metal level M2 negative voltage of first electrode 21, the positive voltage of second electrode 22 so that second metal layer M2 each electrode is interdigital
Positive-negative polarity from left to right shows as negative, positive, negative, positive, negative in figure.It is applied to the 3rd metal level M3 positive electricity of first electrode 31
Pressure, the negative voltage of second electrode 32 so that the positive-negative polarity that the 3rd metal level M3 each electrode is interdigital is from left to right showed in figure
To be positive and negative, positive and negative, just.By that analogy so that the interdigital positive-negative polarity of each electrode is alternately arranged on line direction, while column direction
The interdigital positive-negative polarity of upper each electrode is also alternately arranged, namely is applied in vertical direction each first electrode with alternate intervals not
The voltage of same polarity, while each layer of first electrode is different with the polarity of voltage of second electrode, can be realized each on line direction
The interdigital positive-negative polarity of electrode is alternately arranged, while the interdigital positive-negative polarity of each electrode is also alternately arranged this effect on column direction
Really.
In the MOM capacitor of the present embodiment, total electric capacity (C total) comes from each adjacent electrode in identical metal level
Longitudinal electric capacity Cv and some edges electricity between each electrode is interdigital in lateral capacitance Cl between interdigital and adjacent metal level
Hold (fringes).Namely total capacitance C total calculation formula is：C total=4x5xCl+4x5xCv+fringes=
20Cl+20Cv+fringes.The relative capacity of the present embodiment is 1, i.e., identical with desired value.
Embodiment two：
As shown in figure 4, being applied to the first metal layer M1 positive voltage of first electrode 11, the negative voltage of second electrode 12 so that
The interdigital positive-negative polarity of the first metal layer M1 each electrode from left to right shows as positive and negative, positive and negative, just in figure.It is applied to
The two metal level M2 positive voltage of first electrode 21, the negative voltage of second electrode 22 so that second metal layer M2 each electrode is interdigital
Positive-negative polarity from left to right shows as positive and negative, positive and negative, just in figure.It is applied to the 3rd metal level M3 positive electricity of first electrode 31
Pressure, the negative voltage of second electrode 32 so that the positive-negative polarity that the 3rd metal level M3 each electrode is interdigital is from left to right showed in figure
To be positive and negative, positive and negative, just.By that analogy so that the interdigital positive-negative polarity of each electrode is alternately arranged on line direction, it is each on column direction
The interdigital polarity all same of electrode, namely each first electrode is applied in vertical direction with the voltage of identical polar, and apply
It is different with the polarity of voltage of second electrode to each layer of first electrode, the interdigital both positive and negative polarity of each electrode on line direction can be realized
Property is alternately arranged, this identical effect of the interdigital polarity of each electrode on column direction.
Different from embodiment one, in the MOM capacitor of the present embodiment, total electric capacity (C total) comes solely from identical
Lateral capacitance Cl and some edge capacitances (fringes) between each adjacent electrode is interdigital in metal level.Namely total capacitance C
Total calculation formula is：C total=4x5xCl+fringes=20Cl+fringes.The relative capacity of the present embodiment is
0.92, i.e., differ 8% with desired value.
Embodiment three：
As shown in figure 5, being applied to the first metal layer M1 positive voltage of first electrode 11, the negative voltage of second electrode 12 so that
The interdigital positive-negative polarity of the first metal layer M1 each electrode from left to right shows as positive and negative, positive and negative, just in figure.It is applied to
The two metal level M2 negative voltage of first electrode 21, the positive voltage of second electrode 22 so that second metal layer M2 each electrode is interdigital
Positive-negative polarity from left to right shows as negative, positive, negative, positive, negative in figure.It is applied to the 3rd metal level M3 positive electricity of first electrode 31
Pressure, the negative voltage of second electrode 32 so that the positive-negative polarity that the 3rd metal level M3 each electrode is interdigital is from left to right showed in figure
To be positive and negative, positive and negative, just.It is applied to the 4th metal level M4 positive voltage of first electrode 41, the negative voltage of second electrode 42 so that the
The interdigital positive-negative polarity of four metal level M4 each electrode from left to right shows as positive and negative, positive and negative, just in figure.It is applied to the 5th
The metal level M5 positive voltage of first electrode 51, the negative voltage of second electrode 52 so that fifth metal layer M5 each electrode is interdigital just
Negative polarity from left to right shows as positive and negative, positive and negative, just in figure.So that the interdigital positive-negative polarity of each electrode on line direction
Be alternately arranged, the mixing of each electrode is interdigital on column direction polarity intersect (namely it is not necessarily positive and negative intersect, can be positive negative and positive
The diversified forms such as just, positive and negative negative, negative negative and positive is positive and negative).
In the MOM capacitor of the present embodiment, total electric capacity (C total) comes from each adjacent electrode in identical metal level
Longitudinal electric capacity Cv between electrode is interdigital in adjacent metal levels different with bipolarity lateral capacitance Cl between interdigital and
Some edge capacitances (fringes).Namely total capacitance C total calculation formula is：C total=4x5xCl+5x2xCv+
Fringes=20Cl+10Cv+fringes.The relative capacity of the present embodiment is 0.955, i.e., differ 4.5% with desired value.
By these three embodiments, by the positive-negative polarity for adjusting the electrode voltage between different metal layer so that
The interdigital positive-negative polarity mixed distribution of vertical direction Top electrode, you can realize capacitance with desired value in the range of 5% it is smart
Thin change.
In another preferred embodiment of the invention, obtained by adjusting minimum spacing (the interdigital width+spacing of electrode)
Obtain high capacitance.The accurate difference of MOM capacitor additionally depends on the area of capacitor and forms the interdigital number of electrode of capacitor.
The fine setting finer to the electric capacity of MOM capacitor can by using more metal levels (such as 8 grades metals), and
Realized (reference implementation example three) by applying more changes in mixing polarity connection.Therefore not to repeat here by the present invention.
In summary, the invention discloses a kind of MOM capacitor and electric capacity method of adjustment, switched and filled by control voltage
The voltage of the first electrode and second electrode that are applied to every layer of metal level is put, to adjust the electric capacity of MOM capacitor.This method is saved
Electric capacity Setup Cost, can realize that the capacitance of MOM capacitor after adjustment is differed with desired value less than 5%, to cause simulation electricity
Road is more accurate.
It should be appreciated by those skilled in the art that those skilled in the art combine prior art and above-described embodiment can be with
The change case is realized, be will not be described here.Such change case has no effect on the substantive content of the present invention, not superfluous herein
State.
Presently preferred embodiments of the present invention is described above.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, wherein the equipment and structure be not described in detail to the greatest extent are construed as giving reality with the common mode in this area
Apply；Any those skilled in the art, without departing from the scope of the technical proposal of the invention, all using the disclosure above
Methods and techniques content make many possible variations and modification to technical solution of the present invention, or be revised as equivalent variations etc.
Embodiment is imitated, this has no effect on the substantive content of the present invention.Therefore, every content without departing from technical solution of the present invention, foundation
The technical spirit of the present invention still falls within the present invention to any simple modifications, equivalents, and modifications made for any of the above embodiments
In the range of technical scheme protection.
Claims (7)
1. a kind of MOM capacitor, it is characterised in that including：
In the metal level of the mutual parallel stacked of multilayer, and every layer of metal level include first electrode, respectively with this first electricity
Pole connection some first electrodes are interdigital, second electrode and
Some second electrodes being connected respectively with the second electrode are interdigital；
Insulating medium layer, the metal level insertion is arranged in the insulating medium layer, by between each metal level, be located at
Isolated between first electrode and second electrode in the same metal level；
Voltage switchgear, is connected with the first electrode and the second electrode in every layer of metal level respectively；
Wherein, the both positive and negative polarity of each first electrode and each second electrode is adjusted using the voltage switchgear
Property, to adjust the capacitance of the capacitor；
In every layer of metal level, the interdigital polarity of the first electrode is consistent with first electrode, and the second electrode is interdigital
Polarity is consistent with second electrode；
In every layer of metal level, the first electrode is interdigital to be arranged with the interdigital alternate intervals of the second electrode；
In every layer of metal level, the positive-negative polarity of the first electrode and second electrode is opposite；
The positive-negative polarity of the voltage of the first electrode and the second electrode between adjustment different metal layer so that Vertical Square
The interdigital positive-negative polarity mixed distribution of the upward interdigital and described second electrode of the first electrode.
2. MOM capacitor according to claim 1, it is characterised in that in every layer of metal level, the first electrode and
The second electrode be arranged in parallel.
3. MOM capacitor according to claim 1, it is characterised in that in every layer of metal level, each first electrode
Interdigital to be arranged in the first electrode side into comb teeth-shaped, each second electrode is interdigital to be arranged in second electricity into comb teeth-shaped
Pole side.
4. MOM capacitor according to claim 1, it is characterised in that the electric capacity of the MOM capacitor is included described in every layer
In metal level positive-negative polarity alternate intervals arrange first electrode is interdigital and second electrode it is interdigital between electric capacity, positive-negative polarity not
With adjacent two layers metal level first electrode is interdigital and second electrode it is interdigital between electric capacity and edge capacitance.
5. a kind of electric capacity method of adjustment, it is characterised in that for adjusting any one MOM capacitor described in the claims 1-4
The electric capacity of device, methods described includes：
According to process requirements, control signal is sent to the voltage switchgear, to control to be connected with the voltage switchgear
Each first electrode positive-negative polarity and the positive-negative polarity of each second electrode；
Wherein, the first electrode and second electrode opposite polarity of every layer of control, to realize first of alternate intervals arrangement in every layer
Electrode is interdigital and the interdigital opposite polarity of second electrode；
Adjust the positive-negative polarity of the electrode voltage between different metal layer so that the interdigital positive-negative polarity of vertical direction Top electrode is mixed
Close distribution.
6. electric capacity method of adjustment according to claim 5, it is characterised in that by controlling the voltage switchgear to apply
The first electrode polarity to each layer is identical or different, and corresponding second electrode polarity is identical or different, to adjust the MOM
The electric capacity of capacitor.
7. electric capacity method of adjustment according to claim 6, it is characterised in that the electric capacity Adjustment precision of the MOM capacitor
Differed with desired value less than 5%.
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| CN106253904B (en) * | 2016-08-04 | 2019-11-26 | 成都博思微科技有限公司 | The layout design method of MOM capacitor is sampled in a kind of pipeline ADC system |
| EP3703124A4 (en) * | 2017-12-29 | 2020-11-11 | Huawei Technologies Co. Ltd. | Capacitor |
| CN108257952A (en) * | 2018-01-16 | 2018-07-06 | 北京智芯微电子科技有限公司 | The mos capacitance domain structure in parallel with MOM capacitor |
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| US6385033B1 (en) * | 2000-09-29 | 2002-05-07 | Intel Corporation | Fingered capacitor in an integrated circuit |
| CN102024806A (en) * | 2009-09-11 | 2011-04-20 | 联咏科技股份有限公司 | Metal-oxide layer-metal capacitor with low parasitic capacitance |
| CN104269394A (en) * | 2014-09-22 | 2015-01-07 | 武汉新芯集成电路制造有限公司 | Capacitor and manufacturing method thereof |
| CN104425441A (en) * | 2013-09-04 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | MOM (metal oxide metal) capacitor |
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| JP6161267B2 (en) * | 2012-11-28 | 2017-07-12 | ルネサスエレクトロニクス株式会社 | Capacitor and charge pump circuit |
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| US6385033B1 (en) * | 2000-09-29 | 2002-05-07 | Intel Corporation | Fingered capacitor in an integrated circuit |
| CN102024806A (en) * | 2009-09-11 | 2011-04-20 | 联咏科技股份有限公司 | Metal-oxide layer-metal capacitor with low parasitic capacitance |
| CN104425441A (en) * | 2013-09-04 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | MOM (metal oxide metal) capacitor |
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