CN104932057B - In fine type optics Echo Wall micro-cavity structure and preparation method thereof - Google Patents
In fine type optics Echo Wall micro-cavity structure and preparation method thereof Download PDFInfo
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- CN104932057B CN104932057B CN201510230444.9A CN201510230444A CN104932057B CN 104932057 B CN104932057 B CN 104932057B CN 201510230444 A CN201510230444 A CN 201510230444A CN 104932057 B CN104932057 B CN 104932057B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
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- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Surgery Devices (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
Abstract
One kind is in fine type optics Echo Wall micro-cavity structure, including optical fiber, and its innovation is：On the optical fiber annular groove is provided with the outside of fibre core, the axial direction of annular groove and optical fiber are radial parallel, spaced between the outer wall of annular groove and the fibre core outer wall of optical fiber, in the fibre core of optical fiber is covered in by the depth of annular groove, the annular groove is to form optics Echo Wall microcavity.The method have the benefit that：Echo Wall microcavity is embedded in a fiber, and preferably, Echo Wall microcavity is overall structure with the portion of exciting to the structural stability of Echo Wall microcavity, and integrated level is higher, and the processing method of Echo Wall microcavity is simple, and dimensional parameters are accurately adjustable.
Description
Technical field
The present invention relates to a kind of optical fiber sensing technology, more particularly to one kind is in fine type optics Echo Wall micro-cavity structure and its system
Make method.
Background technology
Light is limited in resonator by optics Echo Wall microcavity by the continuous total reflection on dielectric cavity border, possesses superelevation product
The characteristic of prime factor and extra small mode volume, is detected and ultralow in nonlinear optics, Eurytrema coelomatium, ultrahigh resolution
The fields such as threshold laser have important application prospect.
At present, can form the microcavity of optics Whispering-gallery-mode includes the structures, these resonator knots such as microballoon, micro- disk and micro-loop
Structure is typically made using modes such as mechanical lapping and surface tension；Wherein, the resonator produced using mechanical lapping mode, by
In the process conditions for being limited to mechanical milling tech, resonant cavity size is larger, it is difficult to realize miniaturization, it is integrated；In addition, passive
The Whispering-gallery-mode of microcavity is typically excited by three kinds of modes：Prism, grinding optical fiber and tapered fiber, prism and grinding optical fiber swash
The efficiency for sending out Whispering-gallery-mode is less than tapered fiber, but tapered fiber diametric requirements be less than 2 microns and tapered fiber easily by
Pollution and air agitation influence, and three of the above excites the system of optics Whispering-gallery-mode to be to separate, therefore whole system
Compactedness and stability it is relatively low.
The integrated research of optics Echo Wall microcavity is its practical inevitable requirement, by micro optical fiber, corroded
The microballoon of various materials is filled in the structure such as photonic crystal fiber and very thin wall capillary through excessive erosion can realize that optics is returned
Sound wall microcavity, but the technique of microballoon filling is sufficiently complex and selective to the size of ball, find a kind of Highgrade integration and
The simple method of manufacturing process is the major issue faced in current optics Echo Wall microcavity field.
The content of the invention
The problem of in background technology, the present invention proposes one kind in fine type optics Echo Wall micro-cavity structure, including light
Fibre, its innovation is：Annular groove is provided with the optical fiber on the outside of fibre core, the axial direction of annular groove and optical fiber are radial parallel, ring
It is spaced between the outer wall of shape groove and the fibre core outer wall of optical fiber, it is described in the fibre core of optical fiber is covered in by the depth of annular groove
Annular groove is to form optics Echo Wall microcavity.
The foregoing principle in fine type optics Echo Wall micro-cavity structure is same as the prior art, i.e., the light of fibre core is returned into optics
After sound wall microcavity, on the interface of optics Echo Wall microcavity and air occurring total reflection forms Whispering-gallery-mode, the present invention with
The difference of prior art is, for forming the solid section that the annular groove of optics Echo Wall microcavity is built-in on optical fiber
, namely optics Echo Wall microcavity, with exciting the fibre core of Whispering-gallery-mode to be overall structure, not only stability is preferable for this structure,
And operation difficulty is smaller, it is easy to process.
Understood according to existing theory, excite the efficiency of Whispering-gallery-mode between taper fibre core and optics Echo Wall microcavity
Spacing is determined（Correspond in the present invention, as the spacing distance between the fibre core outer wall of annular groove outer wall and optical fiber）, according to
Away from difference, exciting the efficiency of Whispering-gallery-mode typically has three kinds of undercoupling, Critical Coupling and overcoupling, wherein, during Critical Coupling
The quality factor highest of acquirement, but this is not the emphasis of the invention to be inquired into, when it is implemented, those skilled in the art can root
According to the existing theoretical specific spacing distance determined between annular groove outer wall and the fibre core outer wall of optical fiber；Focusing on for the present invention will
Optics Echo Wall microcavity is integrated in a fiber, the knot being separated from each other compared to Echo Wall microcavity in the prior art and exciting light waveguide
Structure, more preferably, integrated level is higher, is suitable for various optical fiber and fiber waveguide for structural stability of the invention；
Implement for the ease of those skilled in the art, the invention also provides one kind is in fine type optics Echo Wall micro-cavity structure
Preparation method, its step is：
1）Optical fiber surface is cut using femto-second laser, machined surface, institute are cut on the outside of the fibre core on optical fiber
Machined surface is stated for plane, machined surface and optical fiber it is axially in parallel, there is interval between machined surface and fibre core；Machined surface is set here
It is to consider from technological angle：The section of ordinary optic fibre is circle, and the outer peripheral face of optical fiber is cambered surface, if directly being returned in cambered surface
Sound wall microcavity is processed, and the difficulty for positioning Echo Wall microcavity position in optical fiber surface is larger, from reduction difficulty of processing, improves processing effect
From the point of view of rate, in the inventive method, before processing Echo Wall microcavity, a prefabricated machined surface on optical fiber, compared to
Positioned in cambered surface, the difficulty positioned in the plane is relatively low, this just can effectively reduce Echo Wall microcavity position
The positioning difficulty put, improves processing efficiency；
2）Fiber position is adjusted, makes the focusing laser pulses of femto-second laser on machined surface, and make the axle of laser pulse
To vertical with machined surface；Transmission optical fiber makees the circular motion of monoblock type in machined surface（When it is implemented, optical fiber can use three-dimensional position
Platform clamping is moved, makees accurate circular motion by three-D displacement platform）；
3）Carried out after multiple circular motion, control optical fiber it is parked, then be driven femto-second laser along itself axially to by
The fine direction movement of dipped beam, after moving a certain distance, then is driven the circular motion that optical fiber makees monoblock type in machined surface, circumference fortune
The dynamic center of circle and step 2）In it is identical；
4）By step 3）After middle mode is operated repeatedly, laser pulse has just cut out annular groove on the optical fiber, annular
The axial direction of groove and optical fiber are radial parallel, spaced between the outer wall of annular groove and the fibre core outer wall of optical fiber, the depth of annular groove
In the fibre core of optical fiber is covered in, the annular groove is to form optics Echo Wall microcavity.
Basic general knowledge based on this area, it will be apparent to those skilled in the art that after annular groove is shaped, also needing with super
Sound wave cleaning device washes the chip that optics Echo Wall microcavity surface is remained in process, then using high annealing etc.
Shaping is smooth again by optics Echo Wall microcavity surface for mode.
The optics Echo Wall microcavity produced using the inventive method, its internal diameter is the radius R of circular motion, and its external diameter is
R+S, S are the focused spot diameter of laser pulse, when it is implemented, the size that those skilled in the art can be as needed to R and S is carried out
Regulation.The inventive method is simple to operate, device size controllable precise, can be produced over the same fiber using the inventive method
The optics Echo Wall microcavity of multiple cascades, the parameter such as the radius of each optics Echo Wall microcavity can unrestricted choice tuning cascade microcavity
Resonance characteristic.
The method have the benefit that：Echo Wall microcavity is embedded in a fiber, the structural stability of Echo Wall microcavity
Preferably, Echo Wall microcavity and the portion of exciting are overall structure, and integrated level is higher, and the processing method of Echo Wall microcavity is simple, size
Parameter is accurately adjustable.
Brief description of the drawings
Fig. 1, the present invention preparation method principle schematic；
The corresponding title of the mark of each in figure is respectively：Optical fiber 1, optics Echo Wall microcavity 2, the cutting of femto-second laser
Portion 3.
Embodiment
One kind is in fine type optics Echo Wall micro-cavity structure, including optical fiber, and its innovation is：The outside of fibre core on the optical fiber
Annular groove is provided with, the axial direction of annular groove and optical fiber are radial parallel, are left between the outer wall of annular groove and the fibre core outer wall of optical fiber
Interval, in the fibre core of optical fiber is covered in by the depth of annular groove, the annular groove is to form optics Echo Wall microcavity.
One kind is in fine type optics Echo Wall micro-cavity structure preparation method, and its innovation is：Fine type is produced on as follows
Optics Echo Wall micro-cavity structure：
1）Optical fiber surface is cut using femto-second laser, machined surface, institute are cut on the outside of the fibre core on optical fiber
Machined surface is stated for plane, machined surface and optical fiber it is axially in parallel, there is interval between machined surface and fibre core；
2）Fiber position is adjusted, makes the focusing laser pulses of femto-second laser on machined surface, and make the axle of laser pulse
To vertical with machined surface；Transmission optical fiber makees the circular motion of monoblock type in machined surface；
3）Carried out after multiple circular motion, control optical fiber it is parked, then be driven femto-second laser along itself axially to by
The fine direction movement of dipped beam, after moving a certain distance, then is driven the circular motion that optical fiber makees monoblock type in machined surface, circumference fortune
The dynamic center of circle and step 2）In it is identical；
4）By step 3）After middle mode is operated repeatedly, laser pulse has just cut out annular groove on the optical fiber, annular
The axial direction of groove and optical fiber are radial parallel, spaced between the outer wall of annular groove and the fibre core outer wall of optical fiber, the depth of annular groove
In the fibre core of optical fiber is covered in, the annular groove is to form optics Echo Wall microcavity.
Claims (2)
1. one kind is in fine type optics Echo Wall micro-cavity structure, including optical fiber, it is characterised in that：Set on the optical fiber on the outside of fibre core
Annular groove is equipped with, the axial direction of annular groove and optical fiber are radial parallel, between being left between the outer wall of annular groove and the fibre core outer wall of optical fiber
In the fibre core of optical fiber is covered in by the depth of, annular groove, the annular groove is to form optics Echo Wall microcavity.
2. one kind is in fine type optics Echo Wall micro-cavity structure preparation method, it is characterised in that：Fine type light is produced on as follows
Learn Echo Wall micro-cavity structure：
1）Optical fiber surface is cut using femto-second laser, machined surface is cut on the outside of the fibre core on optical fiber, it is described to add
Work face is plane, machined surface and optical fiber it is axially in parallel, there is interval between machined surface and fibre core；
2）Adjust fiber position, make the focusing laser pulses of femto-second laser on machined surface, and make the axial direction of laser pulse with
Machined surface is vertical；Transmission optical fiber makees the circular motion of monoblock type in machined surface；
3）Carry out after multiple circular motion, control optical fiber is parked, be then driven femto-second laser along itself axially to close to light
Fine direction movement, after moving a certain distance, then is driven the circular motion that optical fiber makees monoblock type in machined surface, circular motion
The center of circle and step 2）In it is identical；
4）By step 3）After middle mode is operated repeatedly, laser pulse has just cut out annular groove on the optical fiber, annular groove
Axially radial parallel with optical fiber, spaced between the outer wall of annular groove and the fibre core outer wall of optical fiber, the depth of annular groove is by light
In fine fibre core is covered in, the annular groove is to form optics Echo Wall microcavity.
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| CN105158854B (en) * | 2015-10-22 | 2018-07-24 | 重庆大学 | The optics Echo Wall micro-cavity structure and method of focused ion beam process modification processing |
| CN105158851B (en) * | 2015-10-22 | 2018-07-24 | 重庆大学 | The optics Echo Wall micro-cavity structure and method of focused-ion-beam lithography processing |
| CN105305217A (en) * | 2015-10-26 | 2016-02-03 | 浙江师范大学 | Method of acquiring Raman laser based on in-fiber micro cavity |
| CN105244746A (en) * | 2015-10-26 | 2016-01-13 | 浙江师范大学 | Method for realizing narrow line width laser output |
| CN105375330A (en) * | 2015-12-15 | 2016-03-02 | 重庆大学 | In-fiber whispering gallery filter-based ultra-narrow line width semiconductor laser device |
| CN105890632B (en) * | 2016-04-06 | 2019-03-05 | 武汉纺织大学 | Fibre optical sensor and preparation method thereof |
| CN105759363A (en) * | 2016-05-17 | 2016-07-13 | 河南科技大学 | Method for embedding micro-ring resonator into D-shaped optical fiber |
| CN107870391A (en) * | 2016-09-27 | 2018-04-03 | 福州高意光学有限公司 | A kind of method that femto-second laser auxiliary prepares fiber coupler |
| CN106226971A (en) * | 2016-10-20 | 2016-12-14 | 重庆大学 | Echo Wall microcavity tuner and method |
| CN107037660A (en) * | 2017-04-19 | 2017-08-11 | 重庆大学 | The super narrow bandpass optical filter of light-operated Wavelength tunable based on graphene |
| CN110515159B (en) * | 2019-08-15 | 2020-06-02 | 华中科技大学 | LP based on fiber end face microstructure01-LPmnAll-fiber mode converter and preparation method thereof |
| CN111142183A (en) * | 2020-02-11 | 2020-05-12 | 山西大学 | Optical fiber mechanical vibrator with high mechanical quality factor and preparation method thereof |
| CN111458797A (en) * | 2020-04-27 | 2020-07-28 | 汕头大学 | Micro-tube whispering gallery mode coupling device and manufacturing method thereof |
| CN111487724B (en) * | 2020-04-27 | 2021-06-01 | 重庆大学 | In-fiber transmission band-pass echo wall micro-cavity filter and manufacturing method thereof |
| CN114895399B (en) * | 2022-05-19 | 2023-03-10 | 重庆大学 | Echo wall micro-cavity coupling system based on long-period fiber grating and manufacturing method thereof |
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