CN105890632B - Fibre optical sensor and preparation method thereof - Google Patents
Fibre optical sensor and preparation method thereof Download PDFInfo
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- CN105890632B CN105890632B CN201610209372.4A CN201610209372A CN105890632B CN 105890632 B CN105890632 B CN 105890632B CN 201610209372 A CN201610209372 A CN 201610209372A CN 105890632 B CN105890632 B CN 105890632B
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- 239000000835 fiber Substances 0.000 title claims abstract description 108
- 230000003287 optical effect Effects 0.000 title claims abstract description 65
- 238000002360 preparation method Methods 0.000 title description 4
- 239000013307 optical fiber Substances 0.000 claims abstract description 146
- 239000002121 nanofiber Substances 0.000 claims abstract description 77
- 238000004519 manufacturing process Methods 0.000 claims abstract description 24
- 238000001514 detection method Methods 0.000 claims description 33
- 239000007788 liquid Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 9
- 238000005459 micromachining Methods 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 7
- BVPWJMCABCPUQY-UHFFFAOYSA-N 4-amino-5-chloro-2-methoxy-N-[1-(phenylmethyl)-4-piperidinyl]benzamide Chemical compound COC1=CC(N)=C(Cl)C=C1C(=O)NC1CCN(CC=2C=CC=CC=2)CC1 BVPWJMCABCPUQY-UHFFFAOYSA-N 0.000 claims description 6
- 238000003672 processing method Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000013519 translation Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 238000002679 ablation Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000005253 cladding Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 210000003739 neck Anatomy 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 241000208340 Araliaceae Species 0.000 description 1
- 229920001410 Microfiber Polymers 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003658 microfiber Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000002910 structure generation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XHGGEBRKUWZHEK-UHFFFAOYSA-L tellurate Chemical compound [O-][Te]([O-])(=O)=O XHGGEBRKUWZHEK-UHFFFAOYSA-L 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
Abstract
The present invention provides a kind of fibre optical sensor, and the fibre optical sensor includes the first optical fiber portion, the second optical fiber portion and draws tapering, and first optical fiber portion, second optical fiber portion and the drawing tapering are the different piece of same root micro-nano fiber；Wherein, the drawing tapering is between first optical fiber portion and second optical fiber portion, it includes micro-nano fiber covering and the optical fiber micro-cavity structure that is formed in inside the micro-nano fiber covering, the optical fiber micro-cavity structure is along the extending direction for drawing tapering, and fibre core of its both ends respectively with the fibre core in first optical fiber portion and second optical fiber portion aligns；Also, the drawing tapering further includes at least one microfluidic channel, and the microfluidic channel is connected with the optical fiber micro-cavity structure, and extends to the outer surface of the micro-nano fiber covering.The present invention also provides a kind of production methods of fibre optical sensor.
Description
Technical field
The present invention relates to optic Fiber Detecting Technologies, particularly, are related to a kind of fibre optical sensor and preparation method thereof.
Background technique
Fibre optical sensor is since with small in size, light weight, corrosion-resistant, anti-electromagnetic interference capability is strong and is easy to point
The advantages of cloth many reference amounts measure simultaneously, is widely used in the numerous areas such as aerospace, petroleum, chemical industry, electric power.It is integrated
Change, intelligent, networking are the development trends of fibre optical sensor, and high performance and micromation are the above-mentioned trend of fibre optical sensor
Basis.
For example, in field of biomedicine, need using the small optical fiber sensing probe of high sensitivity, size to small or be difficult to
The position (such as blood vessel, cranium) of measurement carries out minimally invasive detection.In aerospace field, hundreds of optical fiber is generally then needed to pass
The strain of sensor monitoring aircraft, temperature, vibrate, rise and fall control, ultrasound field and acceleration situation, therefore the ruler of fibre optical sensor
It is very little to want as small as possible, to reduce aircraft weight and energy consumption, extend the flight time.In addition, in industry and intelligent clothing neck
Domain is also required to parameters such as Fibre Optical Sensor embedded composite material internal measurement temperature, strains, these are all to the spirit of fibre optical sensor
Sensitivity, precision and size propose requirements at the higher level.
Micro-nano fiber sensing technology be exactly answer the demand and it is fast-developing get up novel optical fiber method for sensing.Wherein,
Interference-type micro-nano fiber sensor by detection moving interference fringes come realize to extraneous dielectric property change measurement, have compared with
High sensitivity and response speed, because receiving more and more attention.In recent years, industry uses oxygen on low-refraction substrate respectively
SiClx and tellurate glass micro-nano fiber successfully have developed micro-nano fiber Mach-Zender interferometer (Microfiber-based
Mach-Zehnder Interferometer, MMZI), and index sensor, current sense are produced based on above-mentioned MMZI
The a series of interference-type micro-nano fiber sensor such as device, ammonia gas sensor and pressure sensor.
Although being had made some progress at present to the research of interference-type micro-nano fiber sensor, but, existing interference-type
Micro-nano fiber sensor is generally required to be formed by two micro-nano fiber weldings, the interference-type micro-nano light based on single micro-nano fiber
The work of fibre sensing aspect is seldom, and achievement is very limited.In order to further increase the sensitivity of interference-type micro-nano fiber sensor
And optimize its size, it is further full there is an urgent need to study the sensing technology and preparation method thereof based on the interference of single micro-nano fiber
Sufficient fibre optical sensor high performance and miniaturization need.
Summary of the invention
One of purpose of the invention is to provide a kind of Fibre Optical Sensor to improve the drawbacks described above of the prior art
Device；It is a further object to provide a kind of production methods using the fibre optical sensor.
Fibre optical sensor provided by the invention, including the first optical fiber portion, the second optical fiber portion and drawing tapering, first optical fiber
Portion, second optical fiber portion and the different piece for drawing tapering as same root micro-nano fiber；Wherein, the drawing tapering is located at institute
It states between the first optical fiber portion and second optical fiber portion comprising micro-nano fiber covering and be formed in the micro-nano fiber covering
The optical fiber micro-cavity structure in portion, the optical fiber micro-cavity structure is along the extending direction for drawing tapering, and its both ends is respectively with described the
The fibre core in one optical fiber portion and the fibre core in second optical fiber portion align；Also, the drawing tapering further includes at least one miniflow
Body channel, the microfluidic channel are connected with the optical fiber micro-cavity structure, and extend to the outer of the micro-nano fiber covering
Surface.
In a kind of preferred embodiment of fibre optical sensor provided by the invention, the drawing tapering includes that two microfluids are logical
Road, described two microfluidic channels are respectively formed at the company for drawing tapering and first optical fiber portion and second optical fiber portion
Meet place.
In a kind of preferred embodiment of fibre optical sensor provided by the invention, the microfluidic channel is using unilateral circulation
Mode extends vertically up to the outer surface of the micro-nano fiber covering from the wherein one side edge of the optical fiber micro-cavity structure.
In a kind of preferred embodiment of fibre optical sensor provided by the invention, the microfluidic channel is using circulation up and down
Mode is respectively perpendicular from the wherein one side edge of the optical fiber micro-cavity structure and extends to the micro-nano fiber covering or more two sides
Outer surface.
In a kind of preferred embodiment of fibre optical sensor provided by the invention, first optical fiber portion is for receiving detection
Light, and the detection light is divided into first via detection light and the second tunnel detection light after the transmission of first optical fiber portion, it is described
First via detection light is transferred to second optical fiber portion by the micro-nano fiber covering for drawing tapering, and second tunnel is detected
Light is transferred to second optical fiber portion by the optical fiber micro-cavity structure for drawing tapering, and mutually folded with the first via detection light
Adduction generates interference；Wherein the fibre optical sensor passes through the phase of the interference signal of detection second optical fiber portion output and strong
Degree variation detects to realize to be measured.
The production method of fibre optical sensor provided by the invention, for making fibre optical sensor as described above, the light
The production side of fiber sensor includes: by drawing cone mode to form the first optical fiber portion, the second optical fiber portion and drawing in single micro-nano fiber
Tapering；At least one microfluidic channel is produced in the drawing tapering of the micro-nano fiber, the microfluidic channel is bored from the drawing
The micro-nano fiber covering outer surface in portion extends to inside it；Light is formed inside the drawing tapering using femtosecond laser processing method
Fine micro-cavity structure, the optical fiber micro-cavity structure are connected with the microfluidic channel, and the optical fiber microcavity in process
The clast of structure is flowed out by auxiliary liquid from the microfluidic channel.
It is described to be added using femtosecond laser in a kind of preferred embodiment of the production method of fibre optical sensor provided by the invention
It includes: to provide a displacement platform that work mode forms optical fiber micro-cavity structure inside the drawing tapering, and institute's translation stage includes
The container of auxiliary liquid is contained, and the bottom of the container is provided with fixed device；There to be the micro-nano fiber to soak
It steeps in the auxiliary liquid, and the fixed device is fixed on using the downward opening mode of the microfluidic channel；Using fly
Second laser is to progress femtosecond laser parallel micromachining processing inside the drawing tapering of the micro-nano fiber, thus inside the drawing tapering
Produce the optical fiber micro-cavity structure.
In a kind of preferred embodiment of the production method of fibre optical sensor provided by the invention, the femto-second laser is used
Radial scan and the superimposed scanning mode of transversal scanning carry out femtosecond laser parallel micromachining processing to the inside for drawing tapering.
In a kind of preferred embodiment of the production method of fibre optical sensor provided by the invention, the drawing of the micro-nano fiber is bored
The junction in portion both ends and first optical fiber portion and second optical fiber portion is respectively formed with microfluidic channel.
In a kind of preferred embodiment of the production method of fibre optical sensor provided by the invention, the femto-second laser is from institute
The microfluidic channel for stating the drawing tapering both ends of micro-nano fiber starts, and the helical form scanning mode being gradually reduced with diameter is to the drawing
The inside in tapering carries out femtosecond laser scanning.
Fibre optical sensor provided by the invention forms the light by removing completely the fibre core inside the drawing tapering
Fine micro-cavity structure, so that detection light is dry by the micro-nano fiber covering and optical fiber micro-cavity structure generation
It relates to, realizes the detection to parameter to be measured.Compared to the prior art, fibre optical sensor provided by the invention may be implemented based on single
The interferometric sensor that micro-nano fiber is made, to meet the high performance and demand miniaturization of fibre optical sensor.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, used in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure, in which:
Fig. 1 is a kind of structural schematic diagram of embodiment of fibre optical sensor provided by the invention；
Fig. 2 is the structural schematic diagram of fibre optical sensor another kind embodiment provided by the invention；
Fig. 3 is a kind of flow diagram of embodiment of production method of fibre optical sensor provided by the invention；
Fig. 4 is the femtosecond laser machining sketch chart of the production method of fibre optical sensor shown in Fig. 3.
Specific embodiment
The technical scheme in the embodiments of the invention will be clearly and completely described below, it is clear that described implementation
Example is only a part of the embodiments of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
Technical staff's all other embodiment obtained without making creative work belongs to the model that the present invention protects
It encloses.
Referring to Fig. 1, it is a kind of structural schematic diagram of embodiment of fibre optical sensor provided by the invention, the optical fiber is passed
Sensor 100 is the fibre optical sensor being made based on single micro-nano fiber comprising the first optical fiber portion 110, the second optical fiber portion
120 and draw tapering 130.Wherein, first optical fiber portion 110, second optical fiber portion 120 and the drawing tapering 130 are same
The different piece of root optical fiber.In the present embodiment, the drawing tapering 130 can be by drawing cone mode to be formed in first optical fiber
Between portion 110 and second optical fiber portion 120, therefore its diameter is less than first optical fiber portion 110 and second optical fiber portion
120 diameter, and first optical fiber portion 110 and second optical fiber portion 120 can be single mode optical fiber.
First optical fiber portion 110 includes the first fibre core 111 and the first fibre cladding for coating first fibre core 111
111；Second optical fiber portion 120 includes the second fibre core 121 and the second fibre cladding 122 for coating second fibre core 121.Its
In, first fibre core 111 in first optical fiber portion 110 and second fibre core 121 in second optical fiber portion 120 are mutually aligned.
The micro-nano fiber packet for drawing tapering 130 to include optical fiber micro-cavity structure 131 and coat the optical fiber micro-cavity structure 131
Layer 132.In a particular embodiment, the optical fiber micro-cavity structure 131 can open up for the extending direction along the drawing tapering 130
Miniature cavities can use femtosecond laser parallel micromachining technology and be process.The both ends of the optical fiber micro-cavity structure 131 respectively with
First fibre core 111 in first optical fiber portion 110 and second fibre core 121 in second optical fiber portion 120 are mutually aligned.Also,
The cross-sectional area of the optical fiber micro-cavity structure 131 is greater than the cross-sectional area of first fibre core 111 and second fibre core 121；
In other words, described to draw tapering 130 in the region where the optical fiber micro-cavity structure 111, the micro-nano fiber covering 132 coats
Fibre core be completely removed.
In addition, the drawing tapering 130 can also include microfluidic channel 133, described in the fibre optical sensor 100
Microfluidic channel 133 can be provided with the micro-nano fiber covering 132, the optical fiber that can be connected to inside the drawing tapering 130
The external environment of micro-cavity structure 131 and the fibre optical sensor 100, in order to be completed the process in the optical fiber micro-cavity structure 131
The clast of the optical fiber micro-cavity structure 131 is removed by auxiliary liquid later.
In the present embodiment, as shown in Figure 1, the microfluidic channel 133 can be formed in 130 both ends of drawing tapering with
The junction in first optical fiber portion 110 and second optical fiber portion 120, and each microfluidic channel 133 can be from described
A kind of one side edge of optical fiber micro-cavity structure 131 extends vertically up to the outer surface of the micro-nano fiber covering 132, i.e., the described miniflow
Body channel 133 is by the way of the circulation of unilateral side.Alternatively, in another embodiment shown in Fig. 2, the microfluidic channel
133 are similarly formed in the junction for drawing 130 two sides of tapering and first optical fiber portion 110 and second optical fiber portion 120,
But, unlike embodiment shown in FIG. 1, in the embodiment shown in Figure 2, the microfluidic channel for drawing tapering 130
133 by the way of circulating up and down, is each microfluidic channel 133 from the both sides of the edge of the optical fiber micro-cavity structure 131
It is respectively perpendicular the outer surface for extending to the two opposite sides (such as two sides up and down) of the micro-nano fiber covering 132, consequently facilitating institute
It states clast and is flowed out by auxiliary liquid from the two opposite sides of the micro-nano fiber covering 132.
In the course of work of the fibre optical sensor 100, detection light is incident on the light from first optical fiber portion 110
Fiber sensor 100, and the drawing tapering 130 is transmitted to by first fibre core 111.Due to the fibre core for drawing tapering 130
It is removed and forms the optical fiber micro-cavity structure 131, therefore two-way will be divided into from the detection light that first fibre core 111 exports,
It is first via detection light and the second tunnel detection light, is denoted as I respectively1And I2.Wherein, the first via detection light I1Institute will be entered
It states micro-nano fiber covering 132 and second optical fiber portion 120 is transmitted to by the micro-nano fiber covering 132, and described second
Road detection light I2The optical fiber micro-cavity structure 131 will be entered and second light is transmitted to by the optical fiber micro-cavity structure 131
Fine portion 120.Also, the first via detection light I1With the second tunnel detection light I2Second in second optical fiber portion 120 is fine
Core 121 is overlapped mutually and generates interference, therefore can specifically pass through following table from the interference signal that second fibre core 121 exports
It is indicated up to formula (1):
Wherein, I indicates the intensity of the interference signal, and L is the length of the optical fiber micro-cavity structure 131, and Δ n is described micro-
The refractive index n of nano fiber covering 132fiberWith the refractive index n of the optical fiber micro-cavity structure 131cavityDifference.By described in detection
The phase and Strength Changes of the interference signal of second fibre core 121 output, may be implemented to detection to be measured.
For example, the parameters such as temperature, pressure, refractive index can make the interference light path inside the fibre optical sensor 100 when changing
Difference changes, and interference spectrum phase changes therewith, therefore may be implemented by the fibre optical sensor 100 to above-mentioned ginseng
Several detections.It, can be in the micro-nano fiber for drawing tapering 130 if the fibre optical sensor 100 is applied to biological detection
Biological sensitive materials are arranged in 132 surface of covering, and the biological sensitive materials and measured matter effect generate fluorescence, part of glimmering
Light enters the fibre optical sensor 100, is analyzed by detecting whether to inspire the intensity size of fluorescence signal and fluorescence signal
The presence or absence of determinand and content.
Fibre optical sensor 100 provided by the invention is formed by removing completely the fibre core inside the drawing tapering 130
The optical fiber micro-cavity structure 131, so that detection light is passing through the micro-nano fiber covering 132 and the optical fiber microcavity
Structure 131 generates interference, realizes the detection to parameter to be measured.Compared to the prior art, fibre optical sensor 100 provided by the invention
The interferometric sensor being made based on single micro-nano fiber may be implemented, thus meet fibre optical sensor high performance and
Demand miniaturization.
Based on above-mentioned fibre optical sensor 100, the production method for furthermore providing a kind of fibre optical sensor is invented, it can be with
For making fibre optical sensor 100 as described in above embodiments.Referring to Fig. 3, it is Fibre Optical Sensor provided by the invention
A kind of flow diagram of embodiment of the manufacturing method of device.The manufacturing method of the fibre optical sensor mainly comprises the steps that
Step S1 forms the first optical fiber portion, the second optical fiber portion in single micro-nano fiber and draws tapering；
As shown in Figure 1, the micro-nano fiber can be single mode optical fiber, described the can be formed after cone processing by drawing
One optical fiber portion 110, second optical fiber portion 120 and the drawing tapering 130；Wherein, the drawing tapering 130 is located at first light
Between fine portion 110 and second optical fiber portion 120, and its diameter is less than first optical fiber portion 110 and second optical fiber portion
120 diameter.
Step S2 produces at least one microfluidic channel in the drawing tapering of the micro-nano fiber；
Specifically, in this step, the microfluidic channel 133 can be two, and the two can be respectively formed at
The junction for drawing 130 both ends of tapering and first optical fiber portion 110 and second optical fiber portion 120.As shown in Figure 1,
In a kind of optional implementation, the microfluidic channel 133 can be outside the micro-nano fiber covering 132 for drawing tapering 130
Surface extends vertically up to inside the micro-nano fiber covering 132, for example it may extend into the core segment for drawing tapering 130.
Alternatively, in another optional implementation, the microfluidic channel 133 can also be from the micro-nano fiber covering
A 132 wherein side external surface extends vertically up to another side external surface, to form the structure to circulate up and down.
Step S3 forms optical fiber micro-cavity structure using femtosecond laser processing method inside the drawing tapering；
Referring to Fig. 4, in step s3, firstly, providing a displacement platform 400, institute's translation stage 400 includes receiving
There is the container 401 of auxiliary liquid 402, and the bottom of the container 401 is provided with fixed device 403, the fixed device
403 are mainly used for fixing micro-nano fiber to be processed.The auxiliary liquid 402 can be distilled water or deionized water, it is optional
Ground, to obtain thinner liquid film, volatile liquid can also be further added in the auxiliary liquid 402.
Secondly, the micro-nano fiber with the microfluidic channel 133 is fixed on the fixed device 403, and described micro-
Nano fiber is integrally soaked among the auxiliary liquid 402, also, the micro-nano fiber is opened using the microfluidic channel 133
The mode of mouth down is fixed.
Then, it is carried out at femtosecond laser parallel micromachining using femto-second laser to inside the drawing tapering 130 of the micro-nano fiber
Reason, to go out the optical fiber micro-cavity structure 131 in 130 internal production of drawing tapering.As depicted in figs. 1 and 2, the optical fiber is micro-
Cavity configuration 131, which is specifically as follows, is formed in first optical fiber portion 110 and described second along the extending direction for drawing tapering 130
Miniature cavities between optical fiber portion 120, and be connected with the microfluidic channel 133, and the two of the optical fiber micro-cavity structure 131
End is mutually right with second fibre core 121 in first fibre core 111 in first optical fiber portion 110 and second optical fiber portion 120 respectively
It is quasi-.Also, the cross-sectional area of the optical fiber micro-cavity structure 131 is greater than the cross of first fibre core 111 and second fibre core 121
Sectional area；In other words, in the optical fiber micro-cavity structure 111, what the micro-nano fiber covering 132 for drawing tapering 130 coated
Fibre core is completely removed.
It should be understood that in the femtosecond laser process of the optical fiber micro-cavity structure 131, the drawing tapering 130
Internal fibre core will be generated clast due to the ablation of the femtosecond laser.Due in fibre optical sensor provided by the invention
Manufacturing method, the micro-nano fiber are immersed in progress femtosecond laser parallel micromachining in the auxiliary liquid 402, therefore described broken
Bits will voluntarily be flowed out by the mobilization of auxiliary liquid from the microfluidic channel 133, to obtain the optical fiber microcavity
Structure 133.
The manufacturing method of the fibre optical sensor provided for a better understanding of the invention, the in detail below femtosecond of introduction step S3
The principle and processing method of Laser Micro-Machining.Specifically, since the micro-nano fiber is transparent material, the femto-second laser
The femtosecond laser of offer can be penetrated into inside transparent micro-nano fiber, and be more than the office for etching energy threshold near focal plane
Portion region can just play the role of ablation；Therefore, the laser spot by the change femto-second laser and the micro-nano fiber
Relative position, the focal spot of the femtosecond laser is progressed into the drawing from the side in the drawing tapering 130 of the micro-nano fiber
The inside in tapering 130 is scanned, so that satisfaction goes out the optical fiber microcavity in 130 internal production of drawing tapering of the micro-nano fiber
The requirement of structure 131.
Also, when the femto-second laser uses the laser flux close to ablation threshold to carry out micro Process, the auxiliary
The bubble volume that liquid 402 generates is small and uniform, stickiness is higher, Reynolds number is lower, will not brutal fracture to making material produce
Raw micro-crack, and then processing quality can be improved.In addition, in a certain range, the drop of the scanning speed of the femto-second laser
It is low to obtain deeper microchannel, but if the laser energy constantly accumulated is easy to cause described auxiliary if scanning speed is too low
It helps liquid 402 to generate excessive bubble, prevents the ejection of clast, it is possible to machining accuracy and processing efficiency are influenced, so scanning speed
Degree is not more slower better.It is thereby possible to select suitable scanning speed, takes into account microchannel draw ratio, machining accuracy and adds
Work efficiency rate.
In a particular embodiment, the femto-second laser can use two kinds of scanning modes of radial scan or transversal scanning,
Wherein, the radial scan mode enables to the optical fiber micro-cavity structure 131 to keep preferable hole shape circularity, and the transverse direction
Scanning mode is then conducive to prepare longer optical fiber micro-cavity structure 131.In the present embodiment, the femto-second laser can use
The mode of the superposition of both scanning modes carries out the production of the optical fiber micro-cavity structure 131.Also, due to the femtosecond laser
Focal spot progresses into the inside for drawing tapering 130 from 130 side of drawing tapering of the micro-nano fiber and is scanned, therefore remote
Taper from the optical fiber micro-cavity structure 131 may become larger, and therefore, the present embodiment can be bored from the drawing of the micro-nano fiber respectively
The microfluidic channel 131 at 130 both ends of portion starts, and the helical form scanning that diameter is gradually reduced is carried out, to reduce or even eliminate in institute
Stating femtosecond laser is the taper formed in process.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright description is applied directly or indirectly in other relevant technology necks
Domain similarly includes within scope of patent protection of the invention.
Claims (9)
1. a kind of fibre optical sensor, which is characterized in that including the first optical fiber portion, the second optical fiber portion and draw tapering, first light
Fine portion, second optical fiber portion and the different piece for drawing tapering as same root micro-nano fiber；Wherein, the drawing tapering is located at
Between first optical fiber portion and second optical fiber portion comprising micro-nano fiber covering and be formed in the micro-nano fiber covering
Internal optical fiber micro-cavity structure, first optical fiber portion include the first fibre core, and second optical fiber portion includes the second fibre core, described
Optical fiber micro-cavity structure along it is described draw tapering extending direction, and its both ends respectively with first fibre core and the second fibre core phase
Alignment, the cross-sectional area of the optical fiber micro-cavity structure are greater than the cross-sectional area of first fibre core and second fibre core；Also,
The drawing tapering further includes at least one microfluidic channel, and the microfluidic channel is connected with the optical fiber micro-cavity structure, and
And the outer surface of the micro-nano fiber covering is extended to, the microfluidic channel is formed in the drawing tapering and first optical fiber
The junction in portion and second optical fiber portion.
2. fibre optical sensor as described in claim 1, which is characterized in that the drawing tapering includes two microfluidic channels.
3. fibre optical sensor as claimed in claim 2, which is characterized in that the microfluidic channel uses unilateral circulation style,
Its outer surface that the micro-nano fiber covering is extended vertically up to from the wherein one side edge of the optical fiber micro-cavity structure.
4. fibre optical sensor as claimed in claim 2, which is characterized in that the microfluidic channel uses upper and lower circulation style,
It is respectively perpendicular from the wherein one side edge of the optical fiber micro-cavity structure extends to the outer of the micro-nano fiber covering or more two sides
Surface.
5. fibre optical sensor as described in claim 1, which is characterized in that first optical fiber portion is used to receive detection light, and
The detection light is divided into first via detection light and the second tunnel detection light, the first via after the transmission of first optical fiber portion
Detection light is transferred to second optical fiber portion by the micro-nano fiber covering for drawing tapering, and second tunnel detection light is passed through
The optical fiber micro-cavity structure for drawing tapering is transferred to second optical fiber portion, and is overlapped mutually and produces with the first via detection light
Raw interference；Wherein phase and Strength Changes that the fibre optical sensor passes through the interference signal of detection second optical fiber portion output
It is detected to realize to be measured.
6. a kind of production method of fibre optical sensor, for making the Fibre Optical Sensor as described in any one of claims 1 to 5
Device, which is characterized in that the production method of the fibre optical sensor includes:
By drawing cone mode to form the first optical fiber portion, the second optical fiber portion in single micro-nano fiber and drawing tapering；
At least one microfluidic channel is produced in the drawing tapering of the micro-nano fiber, and the microfluidic channel is from the drawing tapering
Micro-nano fiber covering outer surface extend to inside it, the microfluidic channel is formed in the drawing tapering and first optical fiber
The junction in portion and second optical fiber portion；
Optical fiber micro-cavity structure, the optical fiber micro-cavity structure and institute are formed inside the drawing tapering using femtosecond laser processing method
It states microfluidic channel to be connected, the cross-sectional area of the optical fiber micro-cavity structure is greater than first fibre core and second fibre core
Cross-sectional area, and the clast of the optical fiber micro-cavity structure passes through auxiliary liquid from the microfluidic channel stream in process
Out.
7. the production method of fibre optical sensor as claimed in claim 6, which is characterized in that described to utilize femtosecond laser processing side
Formula forms optical fiber micro-cavity structure inside the drawing tapering
There is provided a displacement platform, institute's translation stage includes the container for containing auxiliary liquid, and the bottom of the container
Portion is provided with fixed device；
There to be the micro-nano fiber to be soaked in the auxiliary liquid, and solid using the downward opening mode of the microfluidic channel
It is scheduled on the fixed device；
Using femto-second laser to progress femtosecond laser parallel micromachining processing inside the drawing tapering of the micro-nano fiber, thus described
Tapering internal production is drawn to go out the optical fiber micro-cavity structure.
8. the production method of fibre optical sensor as claimed in claim 7, which is characterized in that the femto-second laser is using radial
Scanning and the superimposed scanning mode of transversal scanning carry out femtosecond laser parallel micromachining processing to the inside for drawing tapering.
9. the production method of fibre optical sensor as claimed in claim 7, which is characterized in that the femto-second laser is from described micro-
The microfluidic channel at the drawing tapering both ends of nano fiber starts, and the helical form scanning mode being gradually reduced with diameter is to the drawing tapering
Inside carry out femtosecond laser scanning.
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| CN108731713B (en) * | 2018-05-31 | 2020-09-25 | 燕山大学 | Three-clad quartz-based special optical fiber micro-cavity structure sensor and preparation method thereof |
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