CN106153578A - Optical fiber mach pool based on femtosecond laser parallel micromachining moral sensor and preparation method thereof - Google Patents
Optical fiber mach pool based on femtosecond laser parallel micromachining moral sensor and preparation method thereof Download PDFInfo
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- CN106153578A CN106153578A CN201510140762.6A CN201510140762A CN106153578A CN 106153578 A CN106153578 A CN 106153578A CN 201510140762 A CN201510140762 A CN 201510140762A CN 106153578 A CN106153578 A CN 106153578A
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Abstract
The manufacture method of a kind of optical fiber mach pool based on femtosecond laser parallel micromachining moral sensor, comprises the following steps: take single-mode fiber, with peeling plier peeling optical fibre coat, cuts out a clean and tidy fiber end face with cutter；Using femtosecond laser parallel micromachining, optical maser wavelength is 800nm, repetition rate 1KHz, pulsewidth 120fs, maximum power output 100mW, it is adjusted to about 1mW through shutter and attenuator, being then passed through 20 times of object lens and focus on fiber end face, optical fiber is fixed on the D translation platform of precision 0.1 μm；On fiber end face, ablation goes out a rectangle, width 28 μm length 32 μm, degree of depth 40-50 μm, and rectangular centre is 18 μm with the distance of fiber optic hub axis；By through the fiber end face of ablation with after alcohol washes 1 minute, carry out welding with the other end without the fiber end face processed, air bubble can be formed after welding in a fiber, thus obtain an optical fiber mach pool moral sensor.This beneficial effect of the invention is: need not Fluohydric acid. corrosion treatmentCorrosion Science, it is not required that draw cone, carries out micro Process, have processing and fabricating safely, quickly, be easily controlled on fiber end face, compact, the advantages such as fastness is good.
Description
Technical field
The invention belongs to Fibre Optical Sensor field, be specifically related to a kind of optical fiber mach pool moral sensor and preparation method thereof.
Background technology
Fibre Optical Sensor is one of small size sensing head that at present can be practical, and it has electromagnetism interference, radioprotective, sensitivity
High, lightweight, insulation explosion-proof, the excellent performance such as corrosion-resistant, specifically the size of optical fiber is small and has good light
Transmission characteristic, will become the important selection of preparation networking microsensor, therefore, by favor and the weight of domestic and international researcher
Depending on.The development trend of Fibre Optical Sensor be miniaturization and high-performance, therefore have small size, high sensitivity, fast-response speed and
The novel optical fiber sensor of the advantages such as trace detection becomes the focus of Recent study.In recent years, along with various micro-processing technologies not
Being broken into ripe, the micro structure carried out based on fiber end face and inside of optical fibre has prepared and has developed rapidly, femtosecond laser parallel micromachining skill
Art becomes a kind of important method making mini optical fibre sensor.Existing Fibre Optical Sensor uses Mach-Zehnder interferometer mostly
The patent of invention of structure, such as Publication No. CN104215270A " full-fiber sensor of femto-second laser pulse serial processing and
Its manufacture method ", use femto-second laser pulse sequence micro Process and the method for Fluohydric acid. corrosion, processing and making process is the most complicated, no
It is easy to mass production, is restricted in actual use.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art, it is provided that a kind of optical fiber mach pool based on femtosecond laser parallel micromachining moral
Sensor and preparation method thereof, has the advantages such as making is simple, compact size, fastness are good.
In order to solve above-mentioned technical problem, the technical solution adopted in the present invention is:
A kind of optical fiber mach pool based on femtosecond laser parallel micromachining moral sensor, including fibre core (1), covering (2), air bubble (3)；
Air bubble (3) is positioned at optical fiber, and for ellipse, major axis is 50 μm, and short axle is 40 μm, the center of air bubble and fiber core
The distance at center is 8-10 μm.
The manufacture method of a kind of optical fiber mach pool based on femtosecond laser parallel micromachining moral sensor, comprises the following steps:
(1) take single-mode fiber, with peeling plier peeling optical fibre coat, cut out a clean and tidy fiber end face with cutter；
(2) using femtosecond laser parallel micromachining, optical maser wavelength is 800nm, repetition rate 1KHz, and pulsewidth 120fs is the highest defeated
Go out power 100mW, be adjusted to about 1mW through shutter and attenuator, be then passed through 20 times of object lens and focus on optical fiber
On end face, optical fiber is fixed on the D translation platform of precision 0.1 μm；
(3) on fiber end face, ablation goes out a rectangle, width 28 μm length 32 μm, degree of depth 40-50 μm, rectangular centre
It is 18 μm with the distance at fiber core center；
(4) by through the fiber end face of ablation with after alcohol washes 1 minute, carry out welding with the other end without the fiber end face processed,
Air bubble can be formed after welding in a fiber, thus obtain an optical fiber mach pool moral sensor.
The working method of a kind of optical fiber mach pool based on femtosecond laser parallel micromachining moral sensor is: light enters from single-mode fiber left end
Fibre core, when arriving the air bubble left side, a part of light is on the right of air bubble straightline propagation to air bubble, and another part light is reflected
Entering covering, then at the separating surface secondary reflection again of covering Yu external substance, reflection light continues reflection when arriving on the right of air bubble,
Thus with together with the light of air bubble, enter fibre core, export from the right-hand member of single-mode fiber, due to the light of two parts light process
Road is different, creates optical path difference, thus creates interference spectrum；The contrast of interference spectrum can be along with the thing outside fibre cladding
Matter refractive index changes, and can obtain the big of material refractive index by the interference spectrum contrast demarcated in advance with the relation of refractive index
Little.
The invention have benefit that:
1. the present invention need not Fluohydric acid. corrosion treatmentCorrosion Science, it is not required that draws cone, and processing and fabricating is safely, quickly.
2. first the present invention carries out micro Process on fiber end face, then carries out fused fiber splice, and the whole course of processing is easily controlled,
Effect is obvious.
3. the air bubble size that micro Process is formed is small, maintains the fastness of optical fiber, improves the practicality of sensor.
Accompanying drawing explanation
Below in conjunction with the accompanying drawings and specific embodiment the invention will be further described.
Fig. 1 is the structure chart of the present invention；
Fig. 2 is that optical fiber mach pool based on the femtosecond laser parallel micromachining moral sensor of the present invention carries out the dry of acquisition during refractometry
Relate to spectrogram.
In accompanying drawing, 1: fibre core；2: covering；3: air bubble.
Specific implementation method
It is described in detail below in conjunction with the accompanying drawings:
In Fig. 1, a kind of optical fiber mach pool based on femtosecond laser parallel micromachining moral sensor, including fibre core 1, covering 2, air bubble
3；Air bubble 3 is positioned at optical fiber, and for ellipse, major axis is 50 μm, and short axle is 40 μm, the center of air bubble and fiber core
The distance at center is 8-10 μm.
The manufacture method of a kind of optical fiber mach pool based on femtosecond laser parallel micromachining moral sensor, comprises the following steps:
(1) take single-mode fiber, with peeling plier peeling optical fibre coat, cut out a clean and tidy fiber end face with cutter；
(2) using femtosecond laser parallel micromachining, optical maser wavelength is 800nm, repetition rate 1KHz, pulsewidth 120fs, the highest output
Power 100mW, is adjusted to about 1mW through shutter and attenuator, is then passed through 20 times of object lens and focuses on fiber end face,
Optical fiber is fixed on the D translation platform of precision 0.1 μm；
(3) on fiber end face, ablation goes out a rectangle, width 28 μm length 32 μm, degree of depth 40-50 μm, rectangular centre with
The distance of fiber optic hub axis is 18 μm；
(4) by through the fiber end face of ablation with after alcohol washes 1 minute, carry out welding with the other end without the fiber end face processed,
Air bubble can be formed after welding in a fiber, thus obtain an optical fiber mach pool moral sensor.
As it is shown in figure 1, the working method of a kind of optical fiber mach pool based on femtosecond laser parallel micromachining moral sensor is: light is from single mode
Optical fiber left end enter fibre core, arrive the air bubble left side time, a part of light on the right of air bubble straightline propagation to air bubble, another
Part light is reflected entrance covering, and then at the separating surface secondary reflection again of covering Yu external substance, reflection light arrives on the right of air bubble
Shi Jixu reflects, thus with together with the light of air bubble, enter fibre core, export from the right-hand member of single-mode fiber, due to two
The light path of light splitting process is different, creates optical path difference, thus creates interference spectrum；The contrast of interference spectrum can be along with optical fiber
Material refractive index outside covering changes, and can obtain thing by the relation of the interference spectrum contrast demarcated in advance and refractive index
The size of matter refractive index.
Fig. 2 is that optical fiber mach pool based on the femtosecond laser parallel micromachining moral sensor of the present invention carries out the dry of acquisition during refractometry
Relate to spectrogram.In figure, when the material refractive index outside fibre cladding is 1.0, the spectral contrast at wavelength 1552nm is
7.2dB；When refractive index is 1.333, spectral contrast is 2.32dB；When refractive index is 1.37, spectral contrast is 1.85dB；
When refractive index is 1.39, spectral contrast is 1.55dB.The interference spectrum contrast (Y) demarcated according to experimental data and refraction
The relation of rate (X) is: Y=-14.4*X+21.6, therefore, as long as recording spectral contrast, substitutes into this relational expression, it is possible to meter
Calculate the size of material refractive index.
Claims (3)
1. optical fiber mach pool based on a femtosecond laser parallel micromachining moral sensor, including fibre core (1), covering (2), air
Bubble (3)；It is characterized in that, described air bubble (3) is positioned at optical fiber, and for ellipse, major axis is 50 μm, and short axle is 40 μm,
The center of air bubble is 8-10 μm with the distance at fiber core center.
2. the manufacture method of optical fiber mach pool based on a femtosecond laser parallel micromachining moral sensor, it is characterised in that include with
Lower step:
(1) take single-mode fiber, with peeling plier peeling optical fibre coat, cut out a clean and tidy fiber end face with cutter；
(2) using femtosecond laser parallel micromachining, optical maser wavelength is 800nm, repetition rate 1KHz, and pulsewidth 120fs is the highest defeated
Go out power 100mW, be adjusted to about 1mW through shutter and attenuator, be then passed through 20 times of object lens and focus on
On fiber end face, optical fiber is fixed on the D translation platform of precision 0.1 μm；
(3) on fiber end face, ablation goes out a rectangle, width 28 μm length 32 μm, degree of depth 40-50 μm, rectangular centre
It is 18 μm with the distance at fiber core center；
(4) by through the fiber end face of ablation with after alcohol washes 1 minute, melt without the fiber end face processed with the other end
Connect, air bubble can be formed after welding in a fiber, thus obtain an optical fiber mach pool moral sensor.
A kind of optical fiber mach pool based on femtosecond laser parallel micromachining the most according to claim 1 moral sensor, its feature exists
In, the contrast of interference spectrum can change along with the material refractive index outside fibre cladding, by the interference light demarcated in advance
The relation of spectrum contrast and refractive index can obtain the size of material refractive index.
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| CN107314960A (en) * | 2017-08-15 | 2017-11-03 | 深圳大学 | A kind of hematocrite concentration sensor and preparation method thereof, test device |
| CN107490396A (en) * | 2017-09-27 | 2017-12-19 | 中国计量大学 | Mach-Zehnder interferometer in the optical fiber cable of waveguide is inscribed based on femtosecond laser |
| CN108051020A (en) * | 2017-12-29 | 2018-05-18 | 中国计量大学 | Mach-Zehnder interferometer in the optical fiber cable led based on a pair of of shortwave |
| CN108732102A (en) * | 2018-09-06 | 2018-11-02 | 深圳大学 | Index sensor and preparation method thereof based on self-focusing optical fiber |
| WO2019033260A1 (en) * | 2017-08-15 | 2019-02-21 | 深圳大学 | Blood cell concentration sensor and preparation method thereofr, and test device |
| CN110375777A (en) * | 2019-07-09 | 2019-10-25 | 中国电子科技集团公司电子科学研究院 | A kind of fibre optical sensor and its prepare and measure method |
| WO2020047795A1 (en) * | 2018-09-06 | 2020-03-12 | 深圳大学 | Self-focusing optical fiber-based refractive index sensor and preparation method thereof |
| CN111239078A (en) * | 2020-02-18 | 2020-06-05 | 南京信息工程大学 | F-P optical fiber interferometer humidity and transverse pressure sensor based on mixing cavity |
| CN111609874A (en) * | 2019-02-22 | 2020-09-01 | 中国计量大学 | Reflective Mach-Zehnder interferometer based on optical fiber internal inclined beam splitter |
| CN112710633A (en) * | 2020-12-08 | 2021-04-27 | 北京信息科技大学 | Method for preparing splicing structure Mach-Zehnder refractive index sensor |
| CN113671631A (en) * | 2021-08-09 | 2021-11-19 | 南京大学 | Femtosecond laser-based optical fiber multifunctional integrated processing device and processing method |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107314960A (en) * | 2017-08-15 | 2017-11-03 | 深圳大学 | A kind of hematocrite concentration sensor and preparation method thereof, test device |
| CN107314960B (en) * | 2017-08-15 | 2023-09-29 | 深圳大学 | Blood cell concentration sensor, preparation method thereof and testing device |
| WO2019033260A1 (en) * | 2017-08-15 | 2019-02-21 | 深圳大学 | Blood cell concentration sensor and preparation method thereofr, and test device |
| CN107490396A (en) * | 2017-09-27 | 2017-12-19 | 中国计量大学 | Mach-Zehnder interferometer in the optical fiber cable of waveguide is inscribed based on femtosecond laser |
| CN108051020A (en) * | 2017-12-29 | 2018-05-18 | 中国计量大学 | Mach-Zehnder interferometer in the optical fiber cable led based on a pair of of shortwave |
| WO2020047795A1 (en) * | 2018-09-06 | 2020-03-12 | 深圳大学 | Self-focusing optical fiber-based refractive index sensor and preparation method thereof |
| CN108732102A (en) * | 2018-09-06 | 2018-11-02 | 深圳大学 | Index sensor and preparation method thereof based on self-focusing optical fiber |
| CN108732102B (en) * | 2018-09-06 | 2023-12-15 | 深圳大学 | Refractive index sensor based on self-focusing optical fiber and preparation method thereof |
| CN111609874A (en) * | 2019-02-22 | 2020-09-01 | 中国计量大学 | Reflective Mach-Zehnder interferometer based on optical fiber internal inclined beam splitter |
| CN110375777A (en) * | 2019-07-09 | 2019-10-25 | 中国电子科技集团公司电子科学研究院 | A kind of fibre optical sensor and its prepare and measure method |
| CN111239078A (en) * | 2020-02-18 | 2020-06-05 | 南京信息工程大学 | F-P optical fiber interferometer humidity and transverse pressure sensor based on mixing cavity |
| CN111239078B (en) * | 2020-02-18 | 2022-09-27 | 南京信息工程大学 | F-P optical fiber interferometer humidity and transverse pressure sensor based on mixing cavity |
| CN112710633A (en) * | 2020-12-08 | 2021-04-27 | 北京信息科技大学 | Method for preparing splicing structure Mach-Zehnder refractive index sensor |
| CN113671631A (en) * | 2021-08-09 | 2021-11-19 | 南京大学 | Femtosecond laser-based optical fiber multifunctional integrated processing device and processing method |
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