CN104907704B - A kind of zoom laser precision machining deep trouth device for Deep Hole - Google Patents
A kind of zoom laser precision machining deep trouth device for Deep Hole Download PDFInfo
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- CN104907704B CN104907704B CN201510300500.1A CN201510300500A CN104907704B CN 104907704 B CN104907704 B CN 104907704B CN 201510300500 A CN201510300500 A CN 201510300500A CN 104907704 B CN104907704 B CN 104907704B
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- hole
- seat
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- 238000003754 machining Methods 0.000 title claims abstract description 34
- 230000033001 locomotion Effects 0.000 claims abstract description 32
- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 238000009434 installation Methods 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000007306 turnover Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 30
- 230000008569 process Effects 0.000 abstract description 13
- 238000000608 laser ablation Methods 0.000 abstract description 8
- 230000008859 change Effects 0.000 abstract description 6
- 238000004080 punching Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 10
- 238000001704 evaporation Methods 0.000 description 9
- 230000001133 acceleration Effects 0.000 description 6
- 238000010327 methods by industry Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000007791 liquid phase Substances 0.000 description 4
- 239000002893 slag Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010977 jade Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 239000000289 melt material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a kind of zoom laser precision machining deep trouth device for Deep Hole, including workbench, laser instrument and focused light passages system, described focused light passages system includes U-shaped bracing frame, light-guiding mechanism, multi-disc condenser lens, condenser lens seat, condenser lens seat rotating mechanism, rotating cylinder and fixing sleeve；Described workbench is one or two axle motion platform, and workpiece can be driven to do the translational motion of X Y both direction；The laser beam that laser instrument is launched incides in focused light passages system, by certain the condenser lens central axis on condenser lens seat, along Z-direction vertical incidence and focus on surface of the work.The present invention rotation by condenser lens seat so that pulse laser beam penetrates the focusing lens of different focal successively, and focal length can realize gradual change, so that laser focuses on the new surface exposed in laser ablation or drill process all the time, energy is more concentrated, and the punching degree of depth is bigger, in hgher efficiency.
Description
The application is filing date on 04 02nd, 2014, Application No. 201410142394.4, entitled " a kind of
The method and device of zoom laser precision machining deep trouth deep hole " divisional application.
Technical field
The invention belongs to field of laser processing, be specifically related to a kind of zoom laser precision machining deep trouth deep
Aperture apparatus.
Background technology
Laser ablation processing belongs to laser ablation class in Laser Processing, it is also possible to referred to as evaporate processing,
It is to interact based on laser and machined material to cause the ermal physics effect of states of matter change formation, it is achieved
Cutting or the processing effect of punching.The principal element affecting crudy depends on the wavelength of laser, swashs
The parameters such as the physical characteristic of optical power density, beam quality, focus state and machined material itself.
Laser grooving or punching principle are to utilize pulse laser 106～109W/cm2High power density and
Excellent spatial coherence, makes the melt material at the illuminated position of workpiece, evaporation, and assists with at a high speed
Air-flow carries out the removal of various material to realize the processing of deep trouth or deep hole.Ermal physics-the change of the course of processing
Learn the existing works of mechanism and document illustrates, can be briefly described as follows: laser beam is initially through over-focusing
It is radiated at after mirror on the workpiece being in focal plane, makes the temperature on machined material surface increase rapidly.When
Temperature rises towards when the evaporating temperature of material, and the removal of material is processed and proceeded by by laser.
Now there is strong phase transformation in solid metallic, and metal starts fusing at first.Along with temperature constantly rises,
A part of motlten metal and solid metallic start to produce evaporative effect, and the metallic vapour after gasification carries
Liquid phase substance with high speed from the fierce splash of liquid phase bottom out, thus by surface new for bottom
It is exposed under laser beam irradiation, thus persistently produces fusing, evaporation and splash.At laser Machining head
Under auxiliary air blowing airflow function, along with temperature constantly rises, metallic vapour carries liquid phase substance with pole
High speed out and is entrained by the flow of air from the splash that liquid phase bottom is fierce, expose new lower surface with
Accept laser to irradiate.By this continuous irradiation, fusing-evaporation, splash, irradiation, until it reaches
Require the laser ablation degree of depth or penetrate whole workpiece material.Meanwhile, laser beam is according to setting
Speed and path are moved, to obtain the laser ablation processing groove required.
Obviously, in laser grooving or drill process, along with laser irradiate, fusing-evaporation, splash
Constantly carrying out, newly-generated illuminated surface is more and more shorter, that is the initial focal plane of distance laser beam
More and more remote, thus produce increasing defocusing amount, the generation of this defocusing amount can cause laser light
Speckle becomes big, power dissipation, further such that the groove of processing broadens, working (machining) efficiency reduces.
Laser accurate cheesing techniques is typically desirable that aperture Aperture deviation little, entrance and exit is little, hole
Circularity is good, but uses traditional laser drilling to be extremely difficult to, and owing to laser focal is fixed, swashs
The emission characteristics of light beam makes that the discrepancy Aperture deviation of deep hole processing is very big, hole circularity is bad, once hole
The degree of depth, well beyond the focusing depth of focus of laser beam, cannot be able to be processed due to laser energy density not,
The aspect ratio of deep hole is difficult to improve.
Further, from above-mentioned laser grooving or the ermal physics-chemism of punching, laser processing procedure
Middle simultaneously generation is melted and two kinds of effects of evaporation, mainly fusing when laser action regional temperature is relatively low,
Just evaporating when temperature is sufficiently high, temperature is the highest, evaporates the most violent.In laser processing procedure,
The mass ratio that material is melted or evaporates is to be determined by temperature, that is by the laser power irradiated
Density determines.For crudy, along with groove depth or the raising of hole depth, that is laser
The increase of bundle defocusing amount, spot size synchronizes to increase so that the laser power density that machining area is subject to
Declining, the evaporative effect in above-mentioned laser processing procedure declines, and fusing ratio increases, and splash dynamics is not
Enough, thus can cause there is more adhesion slag at deep trouth or the edge of deep hole or exit, that is
So-called " burr " phenomenon, it is impossible to eliminate.
Summary of the invention
The present invention is directed to above-mentioned the deficiencies in the prior art, it is provided that a kind of zoom laser precision machining is deep
The method in groove depth hole, the method for this zoom laser precision machining deep trouth deep hole is to add man-hour focal length dynamic
Adjust, energy is more concentrated, material evaporation more fully so that cutting is finer, in hgher efficiency,
Deep hole circularity and aspect ratio improve, greatly reduce burr phenomena, and the letter of processing unit (plant) light channel structure
Single, easy to assemble, inertia is little, kinematic accuracy is high, good heat dissipation effect, and relatively traditional method is more suitable for long
Time, high efficiency, high-precision deep trouth or deep hole laser precision machining application demand.The present invention is the most same
Time provide the device of a kind of zoom laser precision machining deep trouth deep hole.
The present invention is achieved through the following technical solutions:
A kind of zoom laser precision machining deep trouth device for Deep Hole, including workbench, laser instrument and focusing
Light path system, described focused light passages system includes that U-shaped bracing frame, light-guiding mechanism, multi-disc focus on thoroughly
Mirror, condenser lens seat, condenser lens seat rotating mechanism, rotating cylinder and fixing sleeve；
Described workbench is one or two axle motion platform, and workpiece can be driven to do the translation fortune of X-Y both direction
Dynamic；The laser beam that laser instrument is launched incides in focused light passages system, by certain on condenser lens seat
Individual condenser lens central axis, along Z-direction vertical incidence and focus on surface of the work, wherein, XYZ
Form right angle coordinate system；
Described U-shaped bracing frame includes the vertical gripper shoe of top board, base plate and connection top board and base plate,
Laser light incident hole is offered and for U-shaped bracing frame is fixed to processing machine in described vertical gripper shoe
Multiple screw holes on bed；
Described condenser lens seat is in disk form, the most uniformly sets inside the edge of condenser lens seat
Being equipped with multiple equivalently-sized circular mounting hole, the center of circle of multiple circular mounting hole is positioned on same circumference；
The central axis of multiple circular mounting hole should be with the centerline axis parallel of condenser lens seat；
The focal length of described multi-disc condenser lens is different；Multiple condenser lenses are respectively and fixedly installed to many
On individual circular mounting hole, its installation position makes the central axis of the plurality of condenser lens, Yi Jiju
The central axis of focus lens seat is the most parallel；
The plurality of condenser lens at the erection sequence of multiple circular mounting hole is: press in a clockwise direction
From long to short or it is sequentially arranged at multiple circular mounting hole from being short to long order according to focal length；
The upper end of described fixing sleeve is fastenedly connected the inner side at top board, and the lower end of fixing sleeve is by pushing away
Power roller bearing is connected with rotating cylinder；
It is solid that described light-guiding mechanism includes that at least one 45 degree of reflecting mirror, described 45 degree of reflecting mirrors are arranged on
Determine in sleeve, the side of described fixing sleeve is provided with light-conductive hole；
The installation position of described 45 degree of reflecting mirrors should make incident from laser light incident hole and light-conductive hole
Laser beam is after the reflection of 45 degree of reflecting mirrors, and its light path direct of travel is transferred straight down, i.e. with poly-
The centerline axis parallel of focus lens seat；
Described condenser lens seat rotating mechanism includes driving motor, drivewheel and driven pulley, described active
Taking turns by driving driven by motor to rotate, described driven pulley engages realization motion and the transmission of power with drivewheel；
Described condenser lens seat rotating mechanism is used for driving condenser lens seat to rotate along himself central axis；
Described driven pulley is provided centrally with circular hole, and the flange of its edge, upper surface and rotating cylinder lower end is fixed
Link together, the inwall of circular hole is provided with the first annular step for installing condenser lens seat；
Rotating cylinder is hollow circular, and the bottom of annular cavity is provided with the second ring-shaped step, described condenser lens
The diameter of seat mates with first annular step and the second ring-shaped step just so that condenser lens seat is permissible
Level is shelved on first annular step, the second ring-shaped step compress, and make condenser lens seat
The rotation axis coincident of central axis and driven pulley；
Described light-guiding mechanism should make the laser beam of external incident pass through with the installation position of condenser lens seat
After the turnover of 45 degree of reflecting mirrors, vertical incidence enters any one condenser lens, focuses on work afterwards
Part surface.
Preferably, the center of condenser lens seat is additionally provided with a gas hole, the central shaft of gas hole
Line and the centerline axis parallel of condenser lens seat.
Preferably, described drivewheel and driven pulley are gear.
The beneficial effects of the present invention is:
1, zoom laser precision machining deep trouth deep hole method of the present invention, by condenser lens seat
Rotation so that pulse laser beam penetrates the focusing lens of different focal successively, and focal length can realize gradually
Enter change, so that laser focuses on the new surface exposed in laser ablation or drill process all the time,
Energy is more concentrated, and the punching degree of depth is bigger, in hgher efficiency.
2 it is known that the optical glass in laser Machining head is easily-consumed products, and main cause is hot injury.
In the present invention, multiple condenser lens eyeglasses use in turn, and the rotation of eyeglass is it is also possible that eyeglass is attached simultaneously
Near-space flow of air is accelerated, and the centrally disposed gas hole of condenser lens seat can also effectively be taken away and around install
Condenser lens eyeglass heat, the single eyeglass therefore do not have center gas hole than tradition, using all the time
The radiating effect of form is more preferable, and the optical glass life-span of laser Machining head is greatly prolonged, and can effectively subtract
The thermal lensing effect gently produced because of lens expanded by heating, is possible to prevent lens surface plated film too high because of temperature
And damage peeling, even can save tradition processing head for low power laser processing occasion essential
Camera lens liquid cooling assembly.
3, conventional laser cutting or cheesing techniques, when processing metal material, deep trouth or the edge of deep hole
With exit can exist liquid slag an extension ancient piece of jade, round, flat and with a hole in its centre adhere to, final set and cause slag burr, the most also
Being very difficult to remove, the most this burr is to weigh Laser Processing deep trouth or the important indicator of deep hole quality.This
Invention make use of repeatedly zoom to process, and the laser beam defocusing amount of machining area is more traditional to be focused away from processing
Method is less, and spot size is less, and power density is higher, and material evaporation ratio is bigger, thus removes
In material, liquid melt quantity is less, adds more intensive evaporation-splash effect so that deep trouth or deep hole
Edge and exit liquid slag hang an ancient piece of jade, round, flat and with a hole in its centre adhere to quantity substantially reduce, burr phenomena greatly reduces,
Crudy effectively improves.
4, the deep hole circularity using the method for the present invention to process is more preferable, aspect ratio is bigger, this is because
Invention make use of the most multipulse progressive focal length to process, and defocusing amount is little, less by selecting
Single process removes material quantity, similar laser grinding effect so that the deep hole circularity processed more preferably,
Aspect ratio is bigger, and when solving conventional laser deep hole processing, defocusing amount is excessive causes the inadequate nothing of power density
Method improves the deficiency of aspect ratio, improves the horn mouth phenomenon that tradition drilling method causes due to defocusing amount,
The entrance and exit Aperture deviation in hole is the least.
5, conventional laser processing method and equipment, is substantially by regulation condenser lens and surface of the work
Distance regulate processing focal length, workpiece or laser Machining head realize along Z-direction relative motion.This
In invention, laser Machining head entirety maintains static, and simply a part of assembly in processing head (focuses on thoroughly
Microscope base) rotary motion, the rotation of condenser lens realize the regulation of processing focal length, therefore process equipment
Z axis motion need not be set.Compare laser Machining head generally speaking, the condenser lens seat of the present invention
Moving component is lightweight, inertia is little, thus the while of keeping acceleration big, fireballing, moreover it is possible to ensure
Moving the highest kinematic accuracy, and this light load makes processing power consumption less, cost is lower.
6, being greatly reduced due to laser action region defocusing amount in the present invention, laser energy is extremely concentrated,
Making to melt, evaporate and splash more rapidly and be violent when cutting or punching, conduction of heat dissipates and reduces,
The most this course of processing has less laser energy consumption, higher cutting or perforating efficiency, reality
The laser energy lower than traditional method can be selected, to the laser instrument merit in process equipment during the application of border
Rate requires lower, and under the most equal energy of lasers level, working ability is higher, comprehensive for set
Standby cost and processing cost are lower.
Accompanying drawing explanation
Fig. 1 is the structure chart of zoom laser precision machining deep trouth device for Deep Hole；
Fig. 2 is the structure chart of focused light passages system；
Fig. 3 is condenser lens seat and the structure chart of rotating cylinder part；
Fig. 4 is the structure chart of condenser lens seat and condenser lens；
Fig. 5 is the structure chart of rotating cylinder；
In figure, the implication of each label is:
U-shaped bracing frame 1,2,45 degree of reflecting mirrors 3 of condenser lens seat, fixing sleeve 4, rotating cylinder
5, thrust roller bearing 6, light-conductive hole 7, laser light incident hole 8, screw hole 9, driving motor 10, master
Driving wheel 11, driven pulley 12, circular mounting hole 21, gas hole 22, workbench 13, laser instrument 14,
Focused light passages system 15.
Detailed description of the invention
The present invention will be further described in detail with detailed description of the invention below in conjunction with the accompanying drawings.
As Figure 1-5, the invention provides a kind of zoom laser precision machining deep trouth device for Deep Hole,
Including workbench 13, laser instrument 14 and focused light passages system 15, described focused light passages system 15 includes
U-shaped bracing frame 1, light-guiding mechanism, multi-disc condenser lens, condenser lens seat 2, condenser lens seat revolve
Rotation mechanism, rotating cylinder 5 and fixing sleeve 4；
Described workbench 13 is one or two axle motion platform, and workpiece can be driven to do the translation of X-Y both direction
Motion.The laser beam that laser instrument 14 is launched incides in focused light passages system 15, passes through condenser lens
Certain condenser lens central axis on seat 2, along Z-direction vertical incidence and focus on surface of the work.
Wherein, XYZ form right angle coordinate system.
Described U-shaped bracing frame 1 includes the vertical gripper shoe of top board, base plate and connection top board and base plate,
Laser light incident hole 8 is offered and for being fixed to add by U-shaped bracing frame 1 in described vertical gripper shoe
Multiple screw holes 9 on work lathe.
Described condenser lens seat 2 is in disk form, the most equal inside the edge of condenser lens seat 2
Even be provided with multiple equivalently-sized circular mounting hole 21, the center of circle of multiple circular mounting hole 21 be positioned at
On one circumference；The central axis of multiple circular mounting hole 21 should be with the central axis of condenser lens seat 2
Parallel；
The focal length of described multi-disc condenser lens is different；Multiple condenser lenses are respectively and fixedly installed to many
On individual circular mounting hole 21, its installation position makes the central axis of the plurality of condenser lens, and
The central axis of condenser lens seat 21 is the most parallel；
The plurality of condenser lens at the erection sequence of multiple circular mounting hole 21 is: by saturating for multiple focusing
The sequence of focal length length pressed by mirror, the most in a clockwise direction according to focal length from long to short or from being short to long order
It is sequentially arranged on multiple circular mounting hole 21.
The upper end of described fixing sleeve 4 is fastenedly connected the inner side at top board by screw, fixing sleeve 4
Lower end be connected with rotating cylinder 5 by thrust roller bearing 6, so make the rotating cylinder 5 can be free
Rotate.
Described light-guiding mechanism includes that at least one 45 degree of reflecting mirror 3, described 45 degree of reflecting mirrors 3 are installed
In fixing sleeve 4, the side of described fixing sleeve 4 is provided with light-conductive hole 7.
The installation position of described 45 degree of reflecting mirrors 3 should make the laser beam that laser instrument 14 is launched, from
The laser beam of laser light incident hole 8 and light-conductive hole 7 incidence after the reflection of 45 degree of reflecting mirrors 3, its light path
Direct of travel is transferred straight down, i.e. with the centerline axis parallel of condenser lens seat 2.
Described condenser lens seat rotating mechanism includes driving motor 10, drivewheel 11 and driven pulley 12,
Described drivewheel 11 is by driving motor 10 to be rotated, and described driven pulley 12 engages with drivewheel 11
Realize the transmission of motion and power；
Described condenser lens seat rotating mechanism 5 is used for driving condenser lens seat 2 along himself central axis
Rotate, so that multiple condenser lens also revolves round the sun around the central axis of condenser lens seat 2.
Described driven pulley 12 is provided centrally with circular hole, and its edge, upper surface is by screw and rotating cylinder 5 times
The flange of end is fixed together, and the inwall of circular hole has been provided with for installing condenser lens seat 2
First annular step；Rotating cylinder 5 is hollow circular, and the bottom of annular cavity is provided with the second annular
Step, the diameter of described condenser lens seat 2 mates with first annular step and the second ring-shaped step just,
Condenser lens seat 2 level can be shelved on first annular step, the second ring-shaped step compress,
And make the central axis of condenser lens seat 2 and the rotation axis coincident of driven pulley 12；
The installation position of described light-guiding mechanism and condenser lens seat 2 should make the laser beam warp of external incident
After crossing the turnover of 45 degree of reflecting mirrors 3, vertical incidence enters any one condenser lens, focuses on afterwards
At surface of the work.
The center of condenser lens seat 2 is provided with a gas hole 22, the central axis of gas hole 22 with
The centerline axis parallel of condenser lens seat 2；An air inlet it is provided with on the top board of U-shaped bracing frame 1,
Protective gas, in air inlet enters fixing sleeve 4 and rotating cylinder 5, is blown out by gas hole 22, uses
Auxiliary during Laser Processing is blown.
A kind of method that present invention also offers zoom laser precision machining deep trouth deep hole, including as follows
Step:
(1) condenser lenses different for multiple focal lengths is arranged on same condenser lens seat 2, its peace
Dress orientation be: multiple condenser lenses with condenser lens seat 2 central axis distance be R circumferencial direction
Upper uniformly arrangement, the sequence of focal length length pressed by multiple condenser lenses, in a clockwise direction according to focal length from length
To short or install successively from being short to long order, the central axis of all condenser lenses is all and condenser lens
The centerline axis parallel of seat；Wherein, R is less than the radius of condenser lens seat；
(2) being arranged on by workpiece on workbench 13, described workpiece can be driven by workbench 13 and be X-Y
The translational motion of both direction, laser beam is by certain the condenser lens central axis on condenser lens seat 2
Incidence, along Z-direction vertical incidence and focus on surface of the work；Wherein, XYZ form right angle coordinate
System；
(3) carry out single laser process operation, if Laser Processing type is deep trouth processing, then perform step
Suddenly (4), if Laser Processing type is deep hole machining, then step (5) is performed；
(4) open laser instrument 14, make laser beam export continuously；Start workbench 13 to move simultaneously,
Make laser beam at the focal beam spot of surface of the work by initial position, be moved at surface of the work,
The graphics processing to be etched with surface of the work of its motion track is consistent, until surface of the work manuscript to be etched
The position of shape all experiences goes over laser ablation processing；Proceed to step (6)；
(5) start workbench 13 to move so that laser beam is positioned at work at the focal beam spot of surface of the work
The position to be punctured on part surface；It is then turned on laser instrument 14, according to the laser output parameter pre-set
In go out light time delay and Guan Guang time delay, control output N (N ＞ 0) individual laser pulse；Enter step afterwards
(6)；
(6) close laser, make workbench 13 move back into initial position, that is laser beam is at workpiece
The focal beam spot on surface returns to initial position；
(7) deep trouth or the degree of depth of deep hole after detection judgement (4th) step or (5th) step are processed are
No meet requirement；If meeting, then process finishing, proceed to step (9)；If being unsatisfactory for, enter step
(8)；
(8) rotating focus lens mount 2 so that present convergence lens are removed, and exit the course of processing；Under
One condenser lens moves to the position of present convergence lens, adds process engineering；And meet condition:
Add the focal length of condenser lens of process engineering more than exiting the focal length of condenser lens of the course of processing, two
The focus difference delta_f of person is in the range of 0.005mm～0.5mm；
Return step (3)；
(9) terminate.
Before laser machining, need the technology requirement according to laser precision machining deep trouth or deep hole,
Laser output parameter, working table movement parameter, condenser lens seat rotational motion parameter are set, specifically:
The laser output parameter of pulse laser, including laser power, repetition rate, pulse width,
Go out light time delay, close light time delay etc.；Working table movement parameter, including speed, acceleration, movement locus
Deng；Condenser lens seat rotational motion parameter, including speed, acceleration, delay interval etc..
Wherein, laser output parameter, working table movement parameter, condenser lens seat rotational motion parameter three
Person must coordinate, its co-ordination principle should meet after the timing requirements of serial processing action of step.
How above-mentioned each parameter is set to the state of the art, and the present invention does not repeats at this.
Embodiment one:
The method utilizing said apparatus to carry out zoom laser precision machining deep trouth, specifically includes following step
Rapid:
(1) clamping workpiece on zoom laser precision machining deep trouth device for Deep Hole, and condenser lens
6 condenser lenses of installation it are evenly arranged so that it meets following condition on Zuo:
1) laser beam is incident, along Z side by certain the condenser lens central axis on condenser lens seat
To vertical incidence and focus on surface of the work；
2) workpiece can be driven the translational motion doing X-Y both direction by workbench, i.e. makes laser
Bundle focal beam spot is in surface of the work generation relative movement；
3) XYZ form right angle coordinate system；
4) a diameter of 180mm of condenser lens seat, the diameter of 6 condenser lenses installed above is equal
For 25mm, focal length be respectively 120.0mm, 120.1mm, 120.2mm, 120.3mm,
120.4mm, 120.5mm, its installation position is: the condenser lens center of circle with in condenser lens seat
The distance of mandrel line is uniformly to arrange on the circumferencial direction of 70mm, and focal length length pressed by condenser lens
Sequence, installs according to focal length, in all condenser lenses in a clockwise direction the most successively
Mandrel line all with the centerline axis parallel of condenser lens seat, Jiao of the most adjacent two condenser lenses
It is 0.1mm away from difference delta_f.
(2) open laser instrument, make laser beam export continuously；Wherein, the parameter of laser instrument is: output
Power adjustable scope 1W～1000W, repetition rate adjustable extent 10Hz～300KHz, pulse width can
Tune scope 200fs～500ns, go out light time delay less than 500us, close light time delay less than 500us.
Start working table movement simultaneously so that laser beam at the focal beam spot of surface of the work by initial position
Starting, be moved at surface of the work, the graphics processing to be etched with surface of the work of its motion track is consistent,
Until the position of surface of the work graphics processing to be etched all experiences goes over laser ablation processing；Wherein,
The translational speed of workbench regulates in the range of being set as 0.1mm/s～100mm/s, acceleration adjustable extent
10mm/s2～10000mm/s2。
(3) close laser, make working table movement return to initial position, that is laser beam is at surface of the work
Focal beam spot return to initial position；
(4) whether the deep trouth that detection processes meets requirement；If meeting, then process finishing；If it is discontented
Foot, then drive condenser lens seat to rotate by condenser lens seat rotating mechanism so that present convergence lens
Remove, exit the course of processing；Next condenser lens moves to the position of present convergence lens, adds
Process engineering；And meeting condition: the focal length of the condenser lens adding process engineering is processed more than exiting
The focal length of the condenser lens of journey, returns step (3) and proceeds processing, until meeting processing request.
Wherein, condenser lens seat rotational motion parameter can be set to, angular velocity of rotation 0.1rad/s～100rad/s,
Angular acceleration adjustable extent 0.1rad/s2～1000rad/s2, delay interval is more than 10ms.
Embodiment two:
The method utilizing said apparatus to carry out zoom laser precision machining deep hole, specifically includes following step
Rapid:
(1) clamping workpiece and 8 condenser lenses on zoom laser precision machining deep trouth device for Deep Hole,
It is made to meet following condition:
1) laser beam is incident, along Z side by certain the condenser lens central axis on condenser lens seat
To vertical incidence and focus on surface of the work；
2) workpiece can be driven the translational motion doing X-Y both direction by workbench, i.e. makes laser
Bundle focal beam spot is in surface of the work generation relative movement；
3) XYZ form right angle coordinate system；
4) a diameter of 250mm of condenser lens seat, the diameter of 8 condenser lenses installed above is equal
For 30mm, focal length be respectively 100.0mm, 120.2mm, 120.4mm, 120.6mm,
120.8mm, 121.0mm, 121.2mm, 121.4mm, its installation position is: condenser lens
The center of circle is uniformly being arranged on the circumferencial direction that distance is 100mm of condenser lens seat central axis
Cloth, condenser lens presses the sequence of focal length length, in a clockwise direction according to focal length the most successively
Install, the central axis of all condenser lenses all with the centerline axis parallel of condenser lens seat, its
In the focus difference delta_f of adjacent two condenser lenses be 0.2mm.
(2) working table movement is started so that laser beam is positioned at workpiece table at the focal beam spot of surface of the work
The position to be punctured in face；Wherein, the translational speed of workbench is set as 0.1mm/s～100mm/s scope
Interior regulation, acceleration adjustable extent 10mm/s2～10000mm/s2。
It is then turned on laser instrument, according to the laser output parameter pre-set, controls output N (N ＞ 0)
Individual laser pulse；Wherein, the parameter of laser instrument is: output adjustable extent 1W～2000W, weight
Complex frequency adjustable extent 10Hz～1000KHz, pulse width adjustable extent 200fs～1ms, go out light time delay
Less than 500us, close light time delay less than 500us.
(3) close laser, make working table movement return to initial position, that is laser beam is at surface of the work
Focal beam spot return to initial position；
(4) whether the degree of depth of the deep hole after detection judges processing meets requirement；If meeting, then process knot
Bundle；If being unsatisfactory for, then condenser lens seat is driven to rotate by condenser lens seat rotating mechanism so that when
Prefocusing lens are removed, and exit the course of processing；Next condenser lens moves to present convergence lens
Position, adds process engineering；And meeting condition: the focal length of the condenser lens adding process engineering is more than
Exit the focal length of the condenser lens of the course of processing, return step (3) and continue processing, until meeting processing
Requirement.
It is apparent to one skilled in the art that the present invention can change into various ways, such
Change and be not regarded as a departure from the scope of the present invention.All such technical staff to described field are aobvious and easy
The amendment seen, is included within the scope of present claims.
Claims (3)
1. a zoom laser precision machining deep trouth device for Deep Hole, it is characterised in that include workbench
(13), laser instrument (14) and focused light passages system (15), described focused light passages system (15) bag
Include U-shaped bracing frame (1), light-guiding mechanism, multi-disc condenser lens, condenser lens seat (2), focus on
Lens mount rotating mechanism, rotating cylinder (5) and fixing sleeve (4)；
Described workbench (13) is one or two axle motion platform, and workpiece can be driven to do X-Y both direction
Translational motion；The laser beam that laser instrument (14) is launched incides in focused light passages system (15), logical
Certain condenser lens central axis on over-focusing lens mount (2), along Z-direction vertical incidence and focus on
At surface of the work, wherein, XYZ form right angle coordinate system；
Described U-shaped bracing frame (1) includes the vertical support of top board, base plate and connection top board and base plate
Plate, described vertical gripper shoe offers laser light incident hole (8) and for by U-shaped bracing frame (1)
The multiple screw holes (9) being fixed on machining tool；
Described condenser lens seat (2) is in disk form, inside the edge of condenser lens seat (2) circumferentially
Direction is evenly arranged with multiple equivalently-sized circular mounting hole (21), multiple circular mounting hole (21)
The center of circle be positioned on same circumference；The central axis of multiple circular mounting hole (21) should with focusing thoroughly
The centerline axis parallel of microscope base (2)；
The focal length of described multi-disc condenser lens is different；Multiple condenser lenses are respectively and fixedly installed to many
On individual circular mounting hole (21), its installation position makes the central axis of the plurality of condenser lens,
And the central axis of condenser lens seat (2) is the most parallel；
The plurality of condenser lens erection sequence in multiple circular mounting hole (21) is: with clockwise
Direction from long to short or is sequentially arranged at multiple circular mounting hole (21) from being short to long order according to focal length
On；
The upper end of described fixing sleeve (4) is fastenedly connected the inner side at top board, fixing sleeve (4)
Lower end is connected with rotating cylinder (5) by thrust roller bearing (6)；
Described light-guiding mechanism includes at least one 45 degree of reflecting mirror (3), described 45 degree of reflecting mirrors (3)
It is arranged in fixing sleeve (4), the side of described fixing sleeve (4) is provided with light-conductive hole (7)；
The installation position of described 45 degree of reflecting mirrors (3) should make from laser light incident hole (8) and leaded light
The laser beam of hole (7) incidence is after the reflection of 45 degree of reflecting mirrors (3), and its light path direct of travel is transferred
To straight down, i.e. with the centerline axis parallel of condenser lens seat (2)；
Described condenser lens seat rotating mechanism includes driving motor (10), drivewheel (11) and driven pulley
(12), described drivewheel (11) is rotated by driving motor (10), described driven pulley (12)
Realization motion and the transmission of power is engaged with drivewheel (11)；Described condenser lens seat rotating mechanism is used
Rotate along himself central axis in driving condenser lens seat (2)；
Described driven pulley (12) is provided centrally with circular hole, its edge, upper surface and rotating cylinder (5) lower end
Flange be fixed together, the inwall of circular hole is provided with for installing condenser lens seat (2)
First annular step；Rotating cylinder (5) is hollow circular, and the bottom of annular cavity is provided with the second annular
Step, the diameter of described condenser lens seat (2) just with first annular step and the second ring-shaped step
Join so that condenser lens seat (2) can level be shelved on first annular step, by the second annular table
Rank compress, and make the central axis of condenser lens seat (2) and the rotation axis of driven pulley (12)
Overlap；
The installation position of described light-guiding mechanism and condenser lens seat (2) should make the laser beam of external incident
After the turnover of 45 degree of reflecting mirrors (3), vertical incidence enters any one condenser lens, it
After focus on surface of the work.
Zoom laser precision machining deep trouth device for Deep Hole the most according to claim 1, its feature
Being, the center of condenser lens seat (2) is additionally provided with a gas hole (22), gas hole (22)
The centerline axis parallel of central axis and condenser lens seat (2).
Zoom laser precision machining deep trouth device for Deep Hole the most according to claim 1, its feature
Being, described drivewheel (11) and driven pulley (12) are gear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510300500.1A CN104907704B (en) | 2014-04-02 | 2014-04-02 | A kind of zoom laser precision machining deep trouth device for Deep Hole |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410142394.4A CN103878495B (en) | 2014-04-02 | 2014-04-02 | A kind of method of varifocal laser precision machining deep trouth deep hole and device |
| CN201510300500.1A CN104907704B (en) | 2014-04-02 | 2014-04-02 | A kind of zoom laser precision machining deep trouth device for Deep Hole |
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| CN201410142394.4A Division CN103878495B (en) | 2014-04-02 | 2014-04-02 | A kind of method of varifocal laser precision machining deep trouth deep hole and device |
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| CN201410142394.4A Expired - Fee Related CN103878495B (en) | 2014-04-02 | 2014-04-02 | A kind of method of varifocal laser precision machining deep trouth deep hole and device |
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| US11292081B2 (en) * | 2015-01-08 | 2022-04-05 | General Electric Company | Method and system for confined laser drilling |
| CN105414770B (en) * | 2015-12-04 | 2017-07-25 | 湖北三江航天红阳机电有限公司 | A kind of laser cutting machine |
| CN106938370B (en) * | 2015-12-30 | 2019-12-24 | 上海微电子装备（集团）股份有限公司 | Laser processing system and method |
| CN107443075B (en) * | 2016-05-31 | 2019-06-21 | 中国科学院福建物质结构研究所 | A kind of super vibration sound numerically-controlled machine tool of five axis of recombination laser processing |
| CN106312567B (en) * | 2016-08-26 | 2019-04-12 | 长春理工大学 | The orthogonal micro-cutting device and method of laser assisted followed automatically with laser spot |
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| US20210339359A1 (en) * | 2018-10-31 | 2021-11-04 | Nikon Corporation | Processing system and processing method |
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| CN112074096A (en) * | 2020-10-13 | 2020-12-11 | 安捷利（番禺）电子实业有限公司 | Drilling method for 5G high-frequency LCP material |
| CN112828480B (en) * | 2021-01-15 | 2024-06-18 | 西安建筑科技大学 | Curve slender hole reflection inclined plane processingequipment |
| CN113020810B (en) * | 2021-01-27 | 2023-03-24 | 重庆恒格光电科技有限公司 | Nine unification battery of lens cutting device |
| CN113369719B (en) * | 2021-05-14 | 2023-01-31 | 惠州中京电子科技有限公司 | Laser drilling method for LED carrier plate |
| CN115255652B (en) * | 2022-09-05 | 2023-03-24 | 深圳市智鼎自动化技术有限公司 | Multi-angle laser emission self-adaptive control method and device for laser engraving machine |
| CN116727900B (en) * | 2023-08-11 | 2023-10-20 | 中国人民解放军空军工程大学 | Laser hole making and opening method and device for aviation composite material |
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| CN104907704A (en) | 2015-09-16 |
| CN103878495A (en) | 2014-06-25 |
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