CN104907704A - Device for precisely processing deep groove and deep hole by variable-focus laser - Google Patents
Device for precisely processing deep groove and deep hole by variable-focus laser Download PDFInfo
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- CN104907704A CN104907704A CN201510300500.1A CN201510300500A CN104907704A CN 104907704 A CN104907704 A CN 104907704A CN 201510300500 A CN201510300500 A CN 201510300500A CN 104907704 A CN104907704 A CN 104907704A
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- 230000033001 locomotion Effects 0.000 claims abstract description 29
- 230000007246 mechanism Effects 0.000 claims abstract description 22
- 238000003754 machining Methods 0.000 claims description 33
- 238000009434 installation Methods 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000007306 turnover Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 35
- 230000008569 process Effects 0.000 abstract description 21
- 230000003287 optical effect Effects 0.000 abstract description 5
- 238000005553 drilling Methods 0.000 abstract description 4
- 238000010329 laser etching Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 13
- 230000000694 effects Effects 0.000 description 10
- 238000001704 evaporation Methods 0.000 description 10
- 230000008020 evaporation Effects 0.000 description 7
- 238000000608 laser ablation Methods 0.000 description 7
- 230000001133 acceleration Effects 0.000 description 6
- 238000010327 methods by industry Methods 0.000 description 6
- 238000004080 punching Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 238000007598 dipping method Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000007791 liquid phase Substances 0.000 description 4
- 239000002893 slag Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 239000010977 jade Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a device for precisely processing deep groove and deep hole by variable-focus laser. The device comprises a workbench, a laser and a focusing optical path system, wherein the focusing optical path system comprises a leftwards opened c-shaped bracket, a light-guiding mechanism, a plurality of focusing lenses, a focusing lens base, a focusing lens base rotating mechanism, a rotating cylinder and a fixed sleeve; the workbench is a two-shaft movement platform and can drive a workpiece to translate in X direction and Y direction; laser beam emitted by the laser is emitted into the focusing optical path system, and is vertically emitted and focused on the surface of the workpiece along the Z direction through some focusing lens central axis on the focusing lens base. Due to the fact that the focusing lens base is rotated, the pulse laser beam sequentially penetrates through the focusing lenses with different focuses, and the focuses can be gradually changed, the laser is always focused on a new surface which is exposed in a laser etching or drilling process, more energy is concentrated, the drilling depth is higher, and the efficiency is higher.
Description
The application is the applying date is on 04 02nd, 2014, and application number is 201410142394.4, the divisional application that name is called " a kind of method of varifocal laser precision machining deep trouth deep hole and device ".
Technical field
The invention belongs to field of laser processing, be specifically related to a kind of varifocal laser precision machining deep trouth device for Deep Hole.
Background technology
Laser ablation processing belongs to laser ablation class in Laser Processing, also can be referred to as evaporation processing, is to interact the ermal physics effect causing states of matter to change to be formed based on laser and machined material, realizes the processing effect of cutting or punching.The principal element affecting crudy depends on the parameters such as the physical characteristic of the wavelength of laser, laser power density, beam quality, focus state and machined material itself.
Laser grooving or punching principle utilize pulse laser 10
6~ 10
9w/cm
2high power density and excellent spatial coherence, make the material at the illuminated position of workpiece melt, evaporate, and auxiliary carry out the removal of various material to realize the processing of deep trouth or deep hole with high velocity air.Ermal physics-the chemism of process has works and document is set forth, and can be briefly described as follows: laser beam is initially radiated at and is on the workpiece of focal plane after condenser lens, makes the temperature on machined material surface increase rapidly.When temperature rises to the evaporating temperature close to material, the removal processing of laser to material starts to carry out.Now there is strong phase transformation in solid metallic, and metal starts fusing at first.Along with temperature constantly rises, part motlten metal and solid metallic start to produce evaporative effect, metallic vapour after gasification carries liquid phase substance with high speed from the fierce splash of liquid phase bottom out, thus surface new for bottom is exposed under laser beam irradiation, thus continue to produce fusing, evaporation and splash.Under laser Machining head assists air blowing airflow function, along with temperature constantly rises, metallic vapour carries liquid phase substance with high speed from the fierce splash of liquid phase bottom out and taken away by air-flow, exposes new lower surface and irradiates to accept laser.By this continuous irradiation, fusing-evaporation, splash, irradiation, until meet the requirements of the laser ablation degree of depth or penetrate whole workpiece material.Meanwhile, laser beam moves according to the speed set and path, to obtain the laser ablation processing groove of requirement.
Obviously, in laser grooving or drill process, along with laser irradiate, fusing-evaporation, constantly the carrying out of splash, newly-generated illuminated surface is more and more shorter, that is the initial focal plane of distance laser beam is more and more far away, thus producing increasing defocusing amount, the generation of this defocusing amount can cause laser facula to become large, power dissipation, makes that the groove processed broadens, working (machining) efficiency reduces further.
Laser accurate cheesing techniques generally all requires that aperture is little, the Aperture deviation of entrance and exit is little, hole circle degree is good, but adopt traditional laser drilling to be difficult to reach, because laser focal is fixed, the emission characteristics of laser beam makes that the discrepancy Aperture deviation of deep hole processing is very large, hole circle degree is bad, once hole depth is well beyond the focusing depth of focus of laser beam, cannot be able to process not due to laser energy density, the aspect ratio of deep hole is difficult to improve.
Further, from the ermal physics-chemism of above-mentioned laser grooving or punching, in laser processing procedure, there are fusing and evaporation two kinds of effects simultaneously, laser action regional temperature mainly melts time lower, just evaporate when temperature is enough high, temperature is higher, and evaporation Shaoxing opera is strong.In laser processing procedure, the mass ratio that material is melted or evaporates is determined by temperature, that is determined by irradiated laser power density.For crudy, along with the raising of groove depth or hole depth, that is the increase of laser beam defocusing amount, spot size synchronously increases, and the laser power density that machining area is subject to declines, evaporative effect in above-mentioned laser processing procedure declines, fusing ratio increases, and splash dynamics is inadequate, thus can cause there is more adhesion slags at the edge of deep trouth or deep hole or exit, that is so-called " burr " phenomenon, cannot eliminate.
Summary of the invention
The present invention is directed to above-mentioned the deficiencies in the prior art, provide a kind of method of varifocal laser precision machining deep trouth deep hole, the method of this varifocal laser precision machining deep trouth deep hole is adding focal length dynamic conditioning in man-hour, energy is more concentrated, material evaporation is more abundant, thus make cutting meticulousr, efficiency is higher, deep hole circularity and aspect ratio improve, greatly reduce burr phenomena, and processing unit (plant) light channel structure is simple, easy to assemble, inertia is little, kinematic accuracy is high, good heat dissipation effect, comparatively conventional method is applicable to long-time more, high efficiency, high-precision deep trouth or deep hole laser precision machining application demand.The present invention also provides a kind of device of varifocal laser precision machining deep trouth deep hole simultaneously.
The present invention is achieved through the following technical solutions:
A kind of varifocal laser precision machining deep trouth device for Deep Hole, comprise workbench, laser instrument and focused light passages system, described focused light passages system comprises コ shaped support frame, light-guiding mechanism, multi-disc condenser lens, condenser lens seat, condenser lens seat rotating mechanism, rotating cylinder and fixed muffle;
Described workbench is a diaxon motion platform, and workpiece can be driven to do the translational motion of X-Y both direction; The laser beam that laser instrument is launched incides in focused light passages system, by certain the condenser lens central axis on condenser lens seat, focuses on surface of the work along Z-direction vertical incidence, wherein, and XYZ form right angle coordinate system;
Described コ shaped support frame comprises the vertical gripper shoe of top board, base plate and connection top board and base plate, described vertical gripper shoe offers laser entrance aperture and for コ shaped support frame being fixed to the multiple screw holes on machining tool;
Described condenser lens seat is disc, is along the circumferential direction evenly provided with multiple measure-alike circular mounting hole inside the edge of condenser lens seat, and the center of circle of multiple circular mounting hole is positioned at circumferentially same; The central axis of multiple circular mounting hole should with the centerline axis parallel of condenser lens seat;
The focal length of described multi-disc condenser lens is different; Multiple condenser lens is fixedly mounted on multiple circular mounting hole respectively, and its installation position makes the central axis of described multiple condenser lens, and the central axis of condenser lens seat is parallel mutually;
Described multiple condenser lens at the erection sequence of multiple circular mounting hole is: in a clockwise direction according to focal length from long to short or be arranged on multiple circular mounting hole successively from being short to long order;
The upper end of described fixed muffle is fastenedly connected the inner side at top board, and the lower end of fixed muffle is connected with rotating cylinder by thrust roller bearing;
Described light-guiding mechanism comprises at least one 45 degree of speculum, and described 45 degree of speculums are arranged in fixed muffle, and the side of described fixed muffle is provided with light-conductive hole;
The installation position of described 45 degree of speculums should make from the laser beam of laser entrance aperture and light-conductive hole incidence after the reflection of 45 degree of speculums, and its light path direct of travel is transferred straight down, namely with the centerline axis parallel of condenser lens seat;
Described condenser lens seat rotating mechanism comprises drive motors, driving wheel and driven pulley, and described driving wheel is by drive motors driven rotary, and described driven pulley engages with driving wheel and realizes moving and the transmission of power; Described condenser lens seat rotating mechanism rotates along himself central axis for driving condenser lens seat;
Described driven pulley center is provided with circular hole, and the flange of its edge, upper surface and rotating cylinder lower end is fixed together, and the inwall of circular hole is provided with the first ring-shaped step for installing condenser lens seat; Rotating cylinder is hollow circular, the bottom of annular cavity is provided with the second ring-shaped step, the diameter of described condenser lens seat mates with the first ring-shaped step and the second ring-shaped step just, condenser lens seat is made level to be shelved on the first ring-shaped step, compressed by the second ring-shaped step, and make the central axis of condenser lens seat and the rotation axis coincident of driven pulley;
The installation position of described light-guiding mechanism and condenser lens seat should make the laser beam of external incident after the turnover of 45 degree of speculums, and vertical incidence enters any one condenser lens, focuses on surface of the work afterwards.
Preferably, the center of condenser lens seat is also provided with a gas hole, the central axis of gas hole and the centerline axis parallel of condenser lens seat.
Preferably, described driving wheel and driven pulley are gear.
Beneficial effect of the present invention is:
1, varifocal laser precision machining deep trouth deep hole method of the present invention, by the rotation of condenser lens seat, pulse laser beam is made to penetrate the focusing lens of different focal successively, focal length can realize gradual change, thus make laser focus in laser ablation or drill process the new surface of exposing all the time, energy is more concentrated, and the punching degree of depth is larger, and efficiency is higher.
2, well-known, the optical mirror slip in laser Machining head is easily-consumed products, and main cause is fire damage.In the present invention, multiple condenser lens eyeglass uses in turn, the rotation of eyeglass simultaneously also can make air flow faster near eyeglass, the gas hole that condenser lens seat center is arranged also effectively can take away the condenser lens eyeglass heat installed around, therefore center gas hole is not had than tradition, the radiating effect of the single optic formation used all the time is better, the optical mirror slip life-span of laser Machining head extends greatly, effectively can alleviate the thermal lensing effect because lens expanded by heating produces, lens surface plated film Yin Wendu can be prevented too high and damage is peeled off, traditional processing head requisite camera lens liquid cools assembly even can be saved for low power laser processing occasion.
3, conventional laser cutting or cheesing techniques, when processing metallic, the extension ancient piece of jade, round, flat and with a hole in its centre that the edge of deep trouth or deep hole and exit can exist liquid slag adheres to, final set and cause slag burr, also be difficult to remove, therefore this burr is the important indicator weighing Laser Processing deep trouth or deep hole quality afterwards.Present invention utilizes repeatedly varifocal processing, the laser beam defocusing amount of machining area is more traditional focus apart from processing method less, spot size is less, power density is higher, and material evaporation ratio is larger, thus it is less to remove liquid melt quantity in material, add more violent evaporation-splash effect, make the liquid slag in the edge of deep trouth or deep hole and exit hang ancient piece of jade, round, flat and with a hole in its centre adhesion quantity significantly to reduce, burr phenomena greatly reduces, and crudy effectively improves.
4, the deep hole circularity adopting method of the present invention to process is better, aspect ratio is larger, this is because invention make use of repeatedly multipulse progressive focal length processing, defocusing amount is little, material quantity is removed by less single process can be selected, similar laser grinding effect, make the deep hole circularity that processes better, aspect ratio is larger, the defocusing amount excessive deficiency causing power density cannot improve aspect ratio not when solving conventional laser deep hole processing, improve the horn mouth phenomenon that traditional drilling method causes due to defocusing amount, the entrance and exit Aperture deviation in hole is also less.
5, conventional laser processing method and equipment is substantially all by regulating the distance of condenser lens and surface of the work to regulate processing focal length, being realized by workpiece or laser Machining head along Z-direction relative motion.In the present invention, laser Machining head entirety maintains static, a part of assembly (condenser lens seat) rotary motion just in processing head, and realized the adjustment of processing focal length by the rotation of condenser lens, therefore process equipment need not arrange Z axis motion.Compare laser Machining head generally speaking, condenser lens seat moving component of the present invention is lightweight, inertia is little, thus the while of keeping acceleration large, fireballing, can also ensure very high kinematic accuracy of moving, and this underload makes processing power consumption less, and cost is lower.
6, in the present invention due to the reduction greatly of laser action region defocusing amount, laser energy is very concentrated, fusing, evaporation and splash more rapidly and violent when making cutting or punching, heat transfer dissipates and reduces, therefore this process has less laser energy consumption, higher cutting or perforating efficiency, can the lower laser energy of Selection radio conventional method during practical application, require lower to the laser power in process equipment, under energy of lasers level equal in other words, working ability is higher, comprehensive equipment cost and processing cost lower.
Accompanying drawing explanation
Fig. 1 is the structure chart of varifocal laser precision machining deep trouth device for Deep Hole;
Fig. 2 is the structure chart of focused light passages system;
Fig. 3 is the structure chart of condenser lens seat and rotating cylinder part;
Fig. 4 is the structure chart of condenser lens seat and condenser lens;
Fig. 5 is the structure chart of rotating cylinder;
In figure, the implication of each label is:
コ shaped support frame 1, condenser lens seat 2,45 degree of speculums 3, fixed muffle 4, rotating cylinder 5, thrust roller bearing 6, light-conductive hole 7, laser entrance aperture 8, screw hole 9, drive motors 10, driving wheel 11, driven pulley 12, circular mounting hole 21, gas hole 22, workbench 13, laser instrument 14, focused light passages systems 15.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the present invention will be further described in detail.
As Figure 1-5, the invention provides a kind of varifocal laser precision machining deep trouth device for Deep Hole, comprise workbench 13, laser instrument 14 and focused light passages system 15, described focused light passages system 15 comprises コ shaped support frame 1, light-guiding mechanism, multi-disc condenser lens, condenser lens seat 2, condenser lens seat rotating mechanism, rotating cylinder 5 and fixed muffle 4;
Described workbench 13 is a diaxon motion platform, and workpiece can be driven to do the translational motion of X-Y both direction.The laser beam that laser instrument 14 is launched incides in focused light passages system 15, by certain the condenser lens central axis on condenser lens seat 2, focuses on surface of the work along Z-direction vertical incidence.Wherein, XYZ form right angle coordinate system.
Described コ shaped support frame 1 comprises the vertical gripper shoe of top board, base plate and connection top board and base plate, described vertical gripper shoe offers laser entrance aperture 8 and for コ shaped support frame 1 being fixed to the multiple screw holes 9 on machining tool.
Described condenser lens seat 2 is in disc, and be along the circumferential direction evenly provided with multiple measure-alike circular mounting hole 21 inside the edge of condenser lens seat 2, the center of circle of multiple circular mounting hole 21 is positioned at circumferentially same; The central axis of multiple circular mounting hole 21 should with the centerline axis parallel of condenser lens seat 2;
The focal length of described multi-disc condenser lens is different; Multiple condenser lens is fixedly mounted on multiple circular mounting hole 21 respectively, and its installation position makes the central axis of described multiple condenser lens, and the central axis of condenser lens seat 21 is parallel mutually;
Described multiple condenser lens at the erection sequence of multiple circular mounting hole 21 is: by multiple condenser lens by the sequence of focal length length, be namely arranged on successively multiple circular mounting hole 21 from long to short or from being short to long order according to focal length in a clockwise direction.
The upper end of described fixed muffle 4 is connected to the inner side of top board by screw fastening, the lower end of fixed muffle 4 is connected with rotating cylinder 5 by thrust roller bearing 6, makes rotating cylinder 5 to rotate freely like this.
Described light-guiding mechanism comprises at least one 45 degree of speculum 3, and described 45 degree of speculums 3 are arranged in fixed muffle 4, and the side of described fixed muffle 4 is provided with light-conductive hole 7.
The laser beam that the installation position of described 45 degree of speculums 3 should make laser instrument 14 launch, from the laser beam of laser entrance aperture 8 and light-conductive hole 7 incidence after the reflection of 45 degree of speculums 3, its light path direct of travel is transferred straight down, namely with the centerline axis parallel of condenser lens seat 2.
Described condenser lens seat rotating mechanism comprises drive motors 10, driving wheel 11 and driven pulley 12, and described driving wheel 11 is by drive motors 10 driven rotary, and described driven pulley 12 engages with driving wheel 11 and realizes moving and the transmission of power;
Described condenser lens seat rotating mechanism 5 rotates along himself central axis for driving condenser lens seat 2, thus multiple condenser lens is also revolved round the sun around the central axis of condenser lens seat 2.
Described driven pulley 12 center is provided with circular hole, and its edge, upper surface is fixed together by the flange of screw and rotating cylinder 5 lower end, the inwall of circular hole is provided with the first ring-shaped step for installing condenser lens seat 2; Rotating cylinder 5 is hollow circular, the bottom of annular cavity is provided with the second ring-shaped step, the diameter of described condenser lens seat 2 mates with the first ring-shaped step and the second ring-shaped step just, condenser lens seat 2 is made level to be shelved on the first ring-shaped step, compressed by the second ring-shaped step, and make the central axis of condenser lens seat 2 and the rotation axis coincident of driven pulley 12;
The installation position of described light-guiding mechanism and condenser lens seat 2 should make the laser beam of external incident after the turnover of 45 degree of speculums 3, and vertical incidence enters any one condenser lens, focuses on surface of the work afterwards.
The center of condenser lens seat 2 is provided with a gas hole 22, the central axis of gas hole 22 and the centerline axis parallel of condenser lens seat 2; The top board of コ shaped support frame 1 is provided with an air admission hole, protective gas enters in fixed muffle 4 and rotating cylinder 5 through air admission hole, is blown out by gas hole 22, for the auxiliary air blowing in the process of Laser Processing.
Present invention also offers a kind of method of varifocal laser precision machining deep trouth deep hole, comprise the steps:
(1) condenser lenses different for multiple focal length is arranged on same condenser lens seat 2, its installation position is: multiple condenser lens is being circumferentially evenly arranging of R with condenser lens seat 2 central axis distance, the sequence of focal length length pressed by multiple condenser lens, install successively from long to short or from being short to long order according to focal length in a clockwise direction, the central axis of all condenser lenses all with the centerline axis parallel of condenser lens seat; Wherein, R is less than the radius of condenser lens seat;
(2) by trade union college on workbench 13, described workpiece can drive by workbench 13 translational motion doing X-Y both direction, laser beam is incident by certain the condenser lens central axis on condenser lens seat 2, focuses on surface of the work along Z-direction vertical incidence; Wherein, XYZ form right angle coordinate system;
(3) carry out single laser process operation, if Laser Processing type is deep trouth processing, then performs step (4), if Laser Processing type is deep hole machining, then perform step (5);
(4) open laser instrument 14, laser beam is exported continuously; Start workbench 13 to move simultaneously, make laser beam at the focal beam spot of surface of the work by initial position, be moved at surface of the work, its motion track is consistent with surface of the work graphics processing to be etched, until the position of surface of the work graphics processing to be etched all experiences go over laser ablation processing; Proceed to step (6);
(5) start workbench 13 to move, make laser beam be positioned at the position to be punctured of surface of the work at the focal beam spot of surface of the work; Then open laser instrument 14, according to the bright dipping time delay in the laser output parameter pre-set and Guan Guang time delay, control to export N (N > 0) individual laser pulse; Enter step (6) afterwards;
(6) close laser, workbench 13 is moved and gets back to initial position, that is laser beam gets back to initial position at the focal beam spot of surface of the work;
(7) whether the degree of depth detecting the deep trouth after judging (4) step or the processing of (5) step or deep hole meets the demands; If meet, then process finishing, proceeds to step (9); If do not meet, enter step (8);
(8) rotary-focusing lens mount 2, makes present convergence lens remove, exits process; Next condenser lens moves to the position of present convergence lens, adds process engineering; And satisfy condition: the focal length adding the condenser lens of process engineering is greater than the focal length of the condenser lens exiting process, and the focus difference delta_f of the two is within the scope of 0.005mm ~ 0.5mm;
Return step (3);
(9) terminate.
Before carrying out Laser Processing, need the technical requirement according to laser precision machining deep trouth or deep hole, laser output parameter, working table movement parameter, condenser lens seat rotational motion parameter are set, specifically:
The laser output parameter of pulse laser, comprises laser power, repetition rate, pulse width, bright dipping time delay, closes light time delay etc.; Working table movement parameter, comprises speed, acceleration, movement locus etc.; Condenser lens seat rotational motion parameter, comprises speed, acceleration, delay interval etc.
Wherein, laser output parameter, working table movement parameter, condenser lens seat rotational motion parameter three must coordinate, the timing requirements of the serial processing action of step after its co-ordination principle should meet.How above-mentioned each parameter is set to the state of the art, and the present invention does not repeat at this.
Embodiment one:
Utilize said apparatus to carry out the method for varifocal laser precision machining deep trouth, specifically comprise the steps:
(1) clamping workpiece on varifocal laser precision machining deep trouth device for Deep Hole, and condenser lens seat is evenly arranged installation 6 condenser lenses, make it meet following condition:
1) laser beam is incident by certain the condenser lens central axis on condenser lens seat, focuses on surface of the work along Z-direction vertical incidence;
2) workpiece can drive by workbench the translational motion doing X-Y both direction, namely makes laser beam focus hot spot in surface of the work generation relative movement;
3) XYZ form right angle coordinate system;
4) condenser lens seat diameter is 180mm, the diameter of 6 condenser lenses installed above is 25mm, focal length is respectively 120.0mm, 120.1mm, 120.2mm, 120.3mm, 120.4mm, 120.5mm, its installation position is: the condenser lens center of circle is circumferentially evenly arranging of 70mm in the distance with condenser lens seat central axis, the sequence of focal length length pressed by condenser lens, install successively from long to short according to focal length in a clockwise direction, the central axis of all condenser lenses all with the centerline axis parallel of condenser lens seat, wherein the focus difference delta_f of adjacent two condenser lenses is 0.1mm.
(2) open laser instrument, laser beam is exported continuously; Wherein, the parameter of laser instrument is: power output adjustable extent 1W ~ 1000W, repetition rate adjustable extent 10Hz ~ 300KHz, pulse width adjustable extent 200fs ~ 500ns, bright dipping time delay be less than 500us, close light time delay is less than 500us.
Start working table movement simultaneously, make laser beam at the focal beam spot of surface of the work by initial position, be moved at surface of the work, its motion track is consistent with surface of the work graphics processing to be etched, until the position of surface of the work graphics processing to be etched all experiences go over laser ablation processing; Wherein, the translational speed of workbench is set as adjustment, acceleration adjustable extent 10mm/s within the scope of 0.1mm/s ~ 100mm/s
2~ 10000mm/s
2.
(3) close laser, make working table movement get back to initial position, that is laser beam gets back to initial position at the focal beam spot of surface of the work;
(4) detect the deep trouth processed whether to meet the demands; If meet, then process finishing; If do not meet, then drive condenser lens seat to rotate by condenser lens seat rotating mechanism, present convergence lens are removed, exits process; Next condenser lens moves to the position of present convergence lens, adds process engineering; And satisfy condition: the focal length adding the condenser lens of process engineering is greater than the focal length of the condenser lens exiting process, returns step (3) and proceeds processing, until meet processing request.Wherein, condenser lens seat rotational motion parameter can be set to, angular velocity of rotation 0.1rad/s ~ 100rad/s, angular acceleration adjustable extent 0.1rad/s
2~ 1000rad/s
2, delay interval is greater than 10ms.
Embodiment two:
Utilize said apparatus to carry out the method for varifocal laser precision machining deep hole, specifically comprise the steps:
(1) clamping workpiece and 8 condenser lenses on varifocal laser precision machining deep trouth device for Deep Hole, make it meet following condition:
1) laser beam is incident by certain the condenser lens central axis on condenser lens seat, focuses on surface of the work along Z-direction vertical incidence;
2) workpiece can drive by workbench the translational motion doing X-Y both direction, namely makes laser beam focus hot spot in surface of the work generation relative movement;
3) XYZ form right angle coordinate system;
4) condenser lens seat diameter is 250mm, the diameter of 8 condenser lenses installed above is 30mm, focal length is respectively 100.0mm, 120.2mm, 120.4mm, 120.6mm, 120.8mm, 121.0mm, 121.2mm, 121.4mm, its installation position is: the condenser lens center of circle is circumferentially evenly arranging of 100mm in the distance with condenser lens seat central axis, the sequence of focal length length pressed by condenser lens, install successively from long to short according to focal length in a clockwise direction, the central axis of all condenser lenses all with the centerline axis parallel of condenser lens seat, wherein the focus difference delta_f of adjacent two condenser lenses is 0.2mm.
(2) start working table movement, make laser beam be positioned at the position to be punctured of surface of the work at the focal beam spot of surface of the work; Wherein, the translational speed of workbench is set as adjustment, acceleration adjustable extent 10mm/s within the scope of 0.1mm/s ~ 100mm/s
2~ 10000mm/s
2.
Then open laser instrument, according to the laser output parameter pre-set, control to export N (N > 0) individual laser pulse; Wherein, the parameter of laser instrument is: power output adjustable extent 1W ~ 2000W, repetition rate adjustable extent 10Hz ~ 1000KHz, pulse width adjustable extent 200fs ~ 1ms, bright dipping time delay be less than 500us, close light time delay is less than 500us.
(3) close laser, make working table movement get back to initial position, that is laser beam gets back to initial position at the focal beam spot of surface of the work;
(4) whether the degree of depth detecting the deep hole after judging processing meets the demands; If meet, then process finishing; If do not meet, then drive condenser lens seat to rotate by condenser lens seat rotating mechanism, present convergence lens are removed, exits process; Next condenser lens moves to the position of present convergence lens, adds process engineering; And satisfy condition: the focal length adding the condenser lens of process engineering is greater than the focal length of the condenser lens exiting process, returns step (3) and continues processing, until meet processing request.
It is apparent to one skilled in the art that the present invention can change into various ways, and such change is not thought and departed from the scope of the present invention.All like this to the apparent amendment of the technical staff in described field, by be included in this claim scope within.
Claims (3)
1. a varifocal laser precision machining deep trouth device for Deep Hole, it is characterized in that, comprise workbench (13), laser instrument (14) and focused light passages system (15), described focused light passages system (15) comprises コ shaped support frame (1), light-guiding mechanism, multi-disc condenser lens, condenser lens seat (2), condenser lens seat rotating mechanism, rotating cylinder (5) and fixed muffle (4);
Described workbench (13) is a diaxon motion platform, and workpiece can be driven to do the translational motion of X-Y both direction; The laser beam that laser instrument 14 is launched incides in focused light passages system (15), by certain the condenser lens central axis on condenser lens seat (2), surface of the work is focused on along Z-direction vertical incidence, wherein, XYZ form right angle coordinate system;
Described コ shaped support frame (1) comprises the vertical gripper shoe of top board, base plate and connection top board and base plate, described vertical gripper shoe offers laser entrance aperture (8) and for コ shaped support frame (1) being fixed to the multiple screw holes (9) on machining tool;
Described condenser lens seat (2) is in disc, along the circumferential direction evenly be provided with multiple measure-alike circular mounting hole (21) inside the edge of condenser lens seat (2), the center of circle of multiple circular mounting hole (21) is positioned at circumferentially same; The central axis of multiple circular mounting hole (21) should with the centerline axis parallel of condenser lens seat (2);
The focal length of described multi-disc condenser lens is different; Multiple condenser lens is fixedly mounted on multiple circular mounting hole (21) respectively, and its installation position makes the central axis of described multiple condenser lens, and the central axis of condenser lens seat (2) is parallel mutually;
Described multiple condenser lens at the erection sequence of multiple circular mounting hole (21) is: in a clockwise direction according to focal length from long to short or be arranged on multiple circular mounting hole (21) successively from being short to long order;
The upper end of described fixed muffle (4) is fastenedly connected the inner side at top board, and the lower end of fixed muffle (4) is connected with rotating cylinder (5) by thrust roller bearing (6);
Described light-guiding mechanism comprises at least one 45 degree of speculum (3), described 45 degree of speculums (3) are arranged in fixed muffle (4), the side of described fixed muffle (4) are provided with light-conductive hole (7);
The installation position of described 45 degree of speculums (3) should make from laser entrance aperture (8) and the incident laser beam of light-conductive hole (7) after the reflection of 45 degree of speculums (3), its light path direct of travel is transferred straight down, namely with the centerline axis parallel of condenser lens seat (2);
Described condenser lens seat rotating mechanism comprises drive motors (10), driving wheel (11) and driven pulley (12), described driving wheel (11) is by drive motors (10) driven rotary, and described driven pulley (12) engages with driving wheel (11) and realizes moving and the transmission of power; Described condenser lens seat rotating mechanism rotates along himself central axis for driving condenser lens seat (2);
Described driven pulley (12) center is provided with circular hole, the flange of its edge, upper surface and rotating cylinder (5) lower end is fixed together, and the inwall of circular hole is provided with the first ring-shaped step for installing condenser lens seat (2); Rotating cylinder (5) is hollow circular, the bottom of annular cavity is provided with the second ring-shaped step, the diameter of described condenser lens seat (2) mates with the first ring-shaped step and the second ring-shaped step just, condenser lens seat (2) is made level to be shelved on the first ring-shaped step, compressed by the second ring-shaped step, and make the central axis of condenser lens seat (2) and the rotation axis coincident of driven pulley (12);
The installation position of described light-guiding mechanism and condenser lens seat (2) should make the laser beam of external incident after the turnover of 45 degree of speculums (3), and vertical incidence enters any one condenser lens, focuses on surface of the work afterwards.
2. varifocal laser precision machining deep trouth device for Deep Hole according to claim 1, it is characterized in that, the center of condenser lens seat (2) is also provided with a gas hole (22), the central axis of gas hole (22) and the centerline axis parallel of condenser lens seat (2).
3. varifocal laser precision machining deep trouth device for Deep Hole according to claim 1, is characterized in that, described driving wheel (11) and driven pulley (12) are gear.
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|---|---|---|---|
| CN201510300500.1A CN104907704B (en) | 2014-04-02 | 2014-04-02 | A kind of zoom laser precision machining deep trouth device for Deep Hole |
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| CN201410142394.4A CN103878495B (en) | 2014-04-02 | 2014-04-02 | A kind of method of varifocal laser precision machining deep trouth deep hole and device |
| CN201510300500.1A CN104907704B (en) | 2014-04-02 | 2014-04-02 | A kind of zoom laser precision machining deep trouth device for Deep Hole |
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| CN201510300500.1A Expired - Fee Related CN104907704B (en) | 2014-04-02 | 2014-04-02 | A kind of zoom laser precision machining deep trouth device for Deep Hole |
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| CN109759716A (en) * | 2019-03-07 | 2019-05-17 | 韦怡 | A kind of vertical type curved face full angle laser marking machine |
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|---|---|
| CN103878495B (en) | 2015-10-07 |
| CN104907704B (en) | 2016-10-05 |
| CN103878495A (en) | 2014-06-25 |
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