CN104884920A - Pressure sensitive sensor - Google Patents
Pressure sensitive sensor Download PDFInfo
- Publication number
- CN104884920A CN104884920A CN201480003666.0A CN201480003666A CN104884920A CN 104884920 A CN104884920 A CN 104884920A CN 201480003666 A CN201480003666 A CN 201480003666A CN 104884920 A CN104884920 A CN 104884920A
- Authority
- CN
- China
- Prior art keywords
- electrode
- substrate
- mentioned
- thickness
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0044—Constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
Abstract
A pressure sensitive sensor (1) is characterized by being provided with: a first substrate (2); a second substrate (3) which faces the first substrate; a first electrode (4) which is provided on a first surface (21) of the first substrate; a second electrode (5) which is provided on a second surface (31) of the second substrate so as to face the first electrode; and a spacer (6) which has an opening (61) at a position corresponding to the first electrode and the second electrode, and which is interposed between the first substrate and the second substrate. This pressure sensitive sensor (1) is also characterized in that: the first electrode has at least an insertion part (4) that is inserted into the opening; the total thickness of the insertion part is substantially equal to the thickness of the spacer; the first substrate is in contact with one surface (62) of the spacer; a part of the second electrode is in contact with the other surface (63) of the spacer; and the first surface and the second surface are substantially parallel to each other in a region (D) that contains the first electrode and the second electrode.
Description
Technical field
The present invention relates to the voltage sensitive sensor of resistance-type.
For permitting based on the designated state quoted of document reference, the content described in No. 2013-19176, the Japanese Patent Application proposed in Japan by referring on February 4th, 2013 and be introduced into this instructions, becomes a part for the record of this instructions.
Background technology
There will be a known by configuring conductor layer overlappingly and resistor layer forms contact portion between first substrate and second substrate, utilize bonding part by this first and the fixing pressure-responsive device (such as with reference to patent documentation 1) of second substrate.
Patent documentation 1: Japanese Unexamined Patent Publication 2001-165788 publication
In above-mentioned pressure-responsive device, bonding part is formed as thinner than the gauge of contact portion.Therefore, near contact portion always to first and second substrate along the direction acting force that pulls open, thus, exist and there is substrate peel off thus the problem of situation that changes from initial value of pressure-sensitive character local each other.In addition, in above-mentioned pressure-responsive device, the thickness of contact portion exists thickness deviation, the initial load applied between docking point portion is also different from design load, impact is brought directly to initial pressure-sensitive character, the problem of initial pressure-sensitive character off-design value so exist.
Summary of the invention
The present invention wants the problem solved to be to provide can detect small load, and can guarantee the voltage sensitive sensor of stable pressure-sensitive character chronically.
[1] feature of voltage sensitive sensor of the present invention is to possess: first substrate, second substrate, it is opposed with above-mentioned first substrate, first electrode, it is arranged at the first surface of above-mentioned first substrate, second electrode, it is arranged at second of above-mentioned second substrate according to the mode with above-mentioned first electrode contraposition, and spacer, the position that it is being answered with above-mentioned first electrode and above-mentioned second electrode pair has opening, and be clipped between above-mentioned first substrate and above-mentioned second substrate, at least one party in above-mentioned first electrode and above-mentioned second electrode has the insertion section being inserted into above-mentioned opening, the gross thickness of above-mentioned insertion section has the thickness identical in fact with the thickness of above-mentioned spacer, a part for above-mentioned first electrode or above-mentioned first substrate contact with a face of above-mentioned spacer, a part for above-mentioned second electrode contacts with another face of above-mentioned spacer, in the region comprising above-mentioned first electrode and above-mentioned second electrode, above-mentioned first surface and above-mentioned second substantial parallel.
[2] in the present invention as stated above, also can be separated with the internal face of above-mentioned opening above-mentioned insertion section.
[3] in the present invention as stated above, also can have by above-mentioned first electrode: main part, it comprises above-mentioned insertion section; And lower curtate, it is arranged on around aforementioned body portion, has the height lower than aforementioned body portion, and above-mentioned lower curtate contacts with a face of above-mentioned spacer.
[4] in the present invention as stated above, also can possess in aforementioned body portion: the first electrode layer, it is arranged on above-mentioned first substrate; And the second electrode lay, it is arranged according to the mode covering above-mentioned first electrode layer, and have the resistance value higher than the resistance value of above-mentioned first electrode layer, above-mentioned lower curtate possesses at least one party in above-mentioned first electrode layer or above-mentioned the second electrode lay.
[5] in the present invention as stated above, also can above-mentioned first electrode layer different from the thickness of above-mentioned the second electrode lay, above-mentioned lower curtate has the electrode layer of the thickness equal in fact with the thickness of the larger side in the thickness of above-mentioned first electrode layer or the thickness of above-mentioned the second electrode lay.
[6] in the present invention as stated above, also can radially be formed continuously from aforementioned body portion by above-mentioned lower curtate.
[7] in the present invention as stated above, also can above-mentioned lower curtate be radially with the dummy electrode of the liftoff formation of aforementioned body part.
[8] in the present invention as stated above, also at least one party in above-mentioned first electrode or above-mentioned second electrode superficial layer containing elastic beads can be had.
[9] feature of voltage sensitive sensor of the present invention is to possess: first substrate, second substrate, it is opposed with above-mentioned first substrate, first electrode, it is arranged at above-mentioned first substrate, second electrode, it is arranged at above-mentioned second substrate according to the mode with above-mentioned first electrode contraposition, and spacer, the position that it is being answered with above-mentioned first electrode and above-mentioned second electrode pair has opening, and be clipped between above-mentioned first substrate and above-mentioned second substrate, at least one party in above-mentioned first electrode and above-mentioned second electrode has the insertion section being inserted into above-mentioned opening, the gross thickness of above-mentioned insertion section has the thickness identical in fact with the thickness of above-mentioned spacer, above-mentioned first substrate contacts with a face of above-mentioned spacer, a part for above-mentioned second electrode contacts with another face of above-mentioned spacer, the part contacted with another face of above-mentioned spacer in above-mentioned second electrode and the gross thickness of above-mentioned spacer, equal in fact with the gross thickness of the part corresponding with above-mentioned opening in above-mentioned first electrode and the part corresponding with above-mentioned opening in above-mentioned second electrode.
[10] feature of voltage sensitive sensor of the present invention is to possess: first substrate, second substrate, it is opposed with above-mentioned first substrate, first electrode, it is arranged at above-mentioned first substrate, second electrode, it is arranged at above-mentioned second substrate according to the mode with above-mentioned first electrode contraposition, and spacer, the position that it is being answered with above-mentioned first electrode and above-mentioned second electrode pair has opening, and be clipped between above-mentioned first substrate and above-mentioned second substrate, at least one party in above-mentioned first electrode and above-mentioned second electrode has the insertion section being inserted into above-mentioned opening, the gross thickness of above-mentioned insertion section has the thickness identical in fact with the thickness of above-mentioned spacer, a part for above-mentioned first electrode contacts with a face of above-mentioned spacer, a part for above-mentioned second electrode contacts with another face of above-mentioned spacer, the part contacted with a face of above-mentioned spacer in above-mentioned first electrode, the part contacted with another face of above-mentioned spacer in above-mentioned second electrode and the gross thickness of above-mentioned spacer, equal in fact with the gross thickness of the part corresponding with above-mentioned opening in above-mentioned first electrode and the part corresponding with above-mentioned opening in above-mentioned second electrode.
[11] feature of voltage sensitive sensor of the present invention is to possess: first substrate; Second substrate, it is opposed with above-mentioned first substrate; First electrode, it is arranged at above-mentioned first substrate; Second electrode, it is arranged at above-mentioned second substrate according to the mode with above-mentioned first electrode contraposition; And spacer, the position that it is being answered with above-mentioned first electrode and above-mentioned second electrode pair has opening, and be clipped between above-mentioned first substrate and above-mentioned second substrate, at least one party in above-mentioned first electrode and above-mentioned second electrode has the insertion section being inserted into above-mentioned opening, the gross thickness of above-mentioned insertion section has the thickness identical in fact with the thickness of above-mentioned spacer, above-mentioned first electrode has: main part, and it comprises above-mentioned insertion section; And lower curtate, it is arranged on around aforementioned body portion, there is the height lower than aforementioned body portion, above-mentioned lower curtate contacts with a face of above-mentioned spacer, a part for above-mentioned second electrode contacts with another face of above-mentioned spacer, the part contacted with another face of above-mentioned spacer in above-mentioned lower curtate, above-mentioned second electrode and the gross thickness of above-mentioned spacer are equal in fact with the gross thickness of the part corresponding with above-mentioned opening in aforementioned body portion and above-mentioned second electrode.
[12] feature of voltage sensitive sensor of the present invention is to possess: first substrate; Second substrate, it is opposed with above-mentioned first substrate; First electrode, it is arranged at above-mentioned first substrate; Second electrode, it is arranged at above-mentioned second substrate according to the mode with above-mentioned first electrode contraposition; And spacer, the position that it is being answered with above-mentioned first electrode and above-mentioned second electrode pair has opening, and be clipped between above-mentioned first substrate and above-mentioned second substrate, at least one party in above-mentioned first electrode and above-mentioned second electrode has the insertion section being inserted into above-mentioned opening, the gross thickness of above-mentioned insertion section has the thickness identical in fact with the thickness of above-mentioned spacer, above-mentioned first electrode has: main part, and it comprises above-mentioned insertion section; And lower curtate, it is arranged on around aforementioned body portion, has the height lower than aforementioned body portion, and above-mentioned second electrode has: the second main part, and it is opposed with above-mentioned insertion section; And second lower curtate, it is arranged on around above-mentioned second main part, there is the height lower than above-mentioned second main part, above-mentioned lower curtate contacts with a face of above-mentioned spacer, above-mentioned second lower curtate contacts with another face of above-mentioned spacer, and the gross thickness of above-mentioned lower curtate, above-mentioned second lower curtate and above-mentioned spacer is equal in fact with the gross thickness of aforementioned body portion and above-mentioned second main part.
According to the present invention, owing to keeping insertion section, so the various loads comprising small load can be detected with the close state being arranged at the second electrode of second substrate.In addition, insertion section has the thickness identical in fact with the thickness of spacer, and in the region comprising above-mentioned first electrode and above-mentioned second electrode, the first surface of first substrate and second of second substrate substantial parallel, so do not exist along first and second substrate are pulled open direction effect power.In addition, a part for second electrode contacts with another face of spacer, so the thickness of insertion section is only depended in the initial load applied between contact portion, be subject to the impact of the thickness deviation of the second electrode hardly, thus stable initial pressure-sensitive character can be guaranteed.Therefore, it is possible to guarantee stable pressure-sensitive character chronically.
Accompanying drawing explanation
Fig. 1 is the sectional view of the voltage sensitive sensor represented in the first embodiment of the present invention.
Fig. 2 is the sectional view of the voltage sensitive sensor represented in the second embodiment of the present invention.
Fig. 3 is the sectional view of the variation of the dependent sensor represented in the second embodiment of the present invention.
Fig. 4 is the sectional view of the voltage sensitive sensor represented in the 3rd embodiment of the present invention.
Fig. 5 is the sectional view of the voltage sensitive sensor represented in the 4th embodiment of the present invention.
Fig. 6 is the sectional view of the voltage sensitive sensor representing comparative example 2.
Fig. 7 is the curve map representing the load of voltage sensitive sensor and the relation of resistance value.
Fig. 8 is the time history plot of the load of the voltage sensitive sensor representing the second embodiment and the relation of resistance value.
Fig. 9 is the time history plot of the load of the voltage sensitive sensor representing the first embodiment and the relation of resistance value.
Figure 10 is the time history plot of the load of the voltage sensitive sensor representing comparative example 2 and the relation of resistance value.
Embodiment
Below, based on accompanying drawing, embodiments of the present invention are described.
" the first embodiment "
Fig. 1 is the sectional view of the voltage sensitive sensor 1 representing present embodiment.
As shown in Figure 1, the voltage sensitive sensor 1 of present embodiment has: first substrate 2; Second substrate 3, it is opposed with first substrate 2; First electrode 4, it is arranged on the first surface 21 of first substrate 2; Second electrode 5, it is arranged on the second face 31 of second substrate 3 according to the mode opposed with the first electrode 4; And spacer 6, it is clipped between first substrate 2 and the second electrode 5.
First substrate 2 and second substrate 3 have flexual insulativity film, such as, be made up of polyethylene terephthalate (PET), PEN (PEN), polyimide resin (PI), polyetherimide resin (PEI) etc.As shown in Figure 1, the first electrode 4 described later is formed with at the first surface 21 of this first substrate 2.In addition, as shown in Figure 1, second substrate 3 and first substrate 2 configure abreast, are formed with the second electrode 5 described later in the second face 31 of second substrate 3.
As shown in Figure 1, the first electrode 4 is made up of the first electrode layer 41 and the second electrode lay 42.As shown in Figure 1, the second electrode 5 is also made up of the 3rd electrode layer 51 and the 4th electrode layer 52.First electrode 4 and the second electrode 5 are also not particularly illustrated, and have the shapes such as circle, triangle, quadrilateral when overlooking.
First electrode layer 41 is by being printed on the first surface 21 of first substrate 2 by conductive pastes such as silver paste, gold paste, copper cream and being solidified to form.In addition, the 3rd electrode layer 51 is also by being printed on the second face 31 of second substrate 3 by the conductive paste identical with the material that the first electrode layer 41 uses and being solidified to form.As the concrete printing process for the formation of the first such electrode layer 41 and the 3rd electrode layer 51, silk screen print method, intaglio plate flexographic printing process, ink-jet method etc. can be illustrated.In addition, the whole electrode layer formed by conductive paste below illustrated all uses identical printing process.
As shown in Figure 1, the second electrode lay 42 is by the first surface 21 that according to the mode covering above-mentioned the first electrode layer 41 conductive paste is printed on first substrate 2 makes it be solidified to form.In addition, as shown in Figure 1, the 4th electrode layer 52 is also by the second face 31 of according to the mode covering above-mentioned the 3rd electrode layer 51 conductive paste being printed on second substrate 3 makes it be solidified to form.This second electrode lay 42 and the 4th electrode layer 52 have than the first electrode layer 41 and the high resistance of the 3rd electrode layer 51, as the concrete example of conductive paste forming such the second electrode lay 42 and the 4th electrode layer 52, can illustrate carbon paste etc.In the present embodiment, first electrode layer 41 and the 3rd electrode layer 51 are formed in relatively thin mode compared with the second electrode lay 42 and the 4th electrode layer 52, but not being confined to this especially, also can be identical thickness, also can be formed in thicker mode.
In the present embodiment, as shown in Figure 1, the first electrode 4 is fully inserted in the opening 61 of spacer 6 described later, and the first electrode 4 in this example is equivalent to an example of the insertion section in the present invention.The first electrode 4 in present embodiment is separated with the internal face of the opening 61 of spacer 6.Thereby, it is possible to carry out the pressing operation of voltage sensitive sensor 1 swimmingly, and the thickness deviation easily produced in the end of the radial direction (left and right directions in Fig. 1) of the first electrode 4 can be absorbed.Second electrode 5 is arranged in the mode opposed with the first electrode 4, wider than the opening 61 of spacer 6 described later, with the peripheral contact of this opening 61 near peripheral part.In addition, also can for arrange protuberance in the substantial middle of the second electrode 5, the structure that this protuberance is opposed with the first electrode 4.
In addition, the method for the formation of the first ~ four electrode layer 41,42,51,52 is not particularly limited.Such as, also after the surface of substrate defines coating, lithographically can form Resist patterns, carry out etch processes afterwards, form electrode layer thus.
In addition, in the present embodiment, the first electrode 4 is made up of 2 electrode layers 41,42, and the second electrode 5 is also made up of 2 electrode layers 51,52, but is not particularly limited to this.Such as, any one party in the first electrode 4 and second these both sides of electrode 5 or the first electrode 4 and the second electrode 5 can be made up of single electrode layer, also can be the electrode layer of more than 3.
Spacer 6 is by being clipped between first substrate 2 and the second electrode 5, specify the parts of the distance of the first electrode 4 and the second electrode 5, formed by Ins. ulative material such as polyethylene terephthalate (PET), PEN (PEN), polyimide resin (PI), polyetherimide resins (PEI).
In the present embodiment, the upper surface 62 of spacer 6 contacts with the first surface 21 of first substrate 2, and the lower surface 63 of spacer 6 contacts with the second electrode 5.In addition, the upper surface 62 of the spacer 6 in present embodiment is equivalent to an example in a face of the spacer in the present invention, and the lower surface 63 of the spacer 6 in present embodiment is equivalent to an example in another face of the spacer in the present invention.
In addition, as shown in Figure 1, at spacer 6, the mode corresponding with the first electrode layer 41 is provided with the opening 61 larger than the first electrode 4.In addition, the thickness of spacer 6 is equal in fact with the thickness of the first electrode 4.Therefore, the entirety of the first electrode 4 is accommodated in the opening 61 of spacer 6.
Like this, the voltage sensitive sensor 1 of present embodiment is laminated with and is provided with the first substrate 2 of the first electrode 4, spacer 6 at first surface 21 and is provided with the second substrate 3 of the second electrode 5 in the second face 31, fixing by adhesives etc. between first substrate 2 and spacer 6 and between the second electrode 5 and spacer 6.And, comprising the region D of the first electrode 4 and the second electrode 5, first surface 21 and the second face 31 substantial parallel.As such adhesives, can the adhesives such as exemplary propylene acid resin class, polyurethane type resin, organic siliconresin class.In addition, also by the sheet material etc. with both-sided adhesive is used as spacer 6, can be fixed between first substrate 2 and spacer 6 and between the second electrode 5 and spacer 6.By the way, the so-called region D comprising the first electrode 4 and the second electrode 5, mean when overlooking, the minimum continuum D1 surrounding the first electrode 4 and the region surrounding the larger side in the minimum continuum D2 of the second electrode 5 (being D2 in this example).
First electrode 4 is connected with the pressure-detecting device be not particularly illustrated with the second electrode 5.If under the state being applied with the voltage of regulation between the first electrode 4 and the second electrode 5, direction along the arrow in Fig. 1 applies load, resistance then between the first electrode 4 and the second electrode 5 changes according to the size of this load, so detect the size to voltage sensitive sensor applied pressure based on this resistance variations.
Next, the effect of present embodiment is described.
In the present embodiment, spacer 6 is sandwiched between the first surface 21 of first substrate 2 and the second electrode 5.In addition, the thickness being arranged at the first electrode 4 of first substrate 2 is equal in fact with the thickness of this spacer 6.Thereby, it is possible to the first electrode 4 and the second electrode 5 are kept with close state, and the resistance value (initial resistance) of the voltage sensitive sensor 1 before applying load can be increased.Therefore, the variable quantity of the resistance value of the voltage sensitive sensor 1 when applying small load increases, and can detect this load accurately.In addition, in the present embodiment, because the first electrode 4 entirety is accommodated in the opening 61 of spacer 6, so at the periphery of the position that the pressing force applied voltage sensitive sensor 1 is easily concentrated that is opening 61, the first electrode 4 is not sandwiched between first substrate 2 and spacer 6.Thereby, it is possible to suppress the deterioration in time of the first electrode 4, and realize the raising of the permanance of voltage sensitive sensor 1.
In addition, except above-mentioned structure, comprising the region D of the first electrode 4 and the second electrode 5, first surface 21 and the second face 31 substantial parallel.Therefore, can not be this substrate 2,3 drawn apart from one another because of the stress of first substrate 2 and second substrate 3, even if Long-Time Service voltage sensitive sensor 1, also stable pressure-sensitive character can be guaranteed.
And, because the first electrode 4 has the thickness identical in fact with the thickness of spacer 6, a part for second electrode 5 contacts with spacer 6, so the thickness of the first electrode 4 is only depended in the initial load applied between docking point portion, hardly by the impact of the deviation of the thickness of the second electrode 5.Consequently, stable initial pressure-sensitive character can be guaranteed.
Specifically, thickness due to spacer 6 is in fact fixing, there is the possibility producing deviation in the thickness of the first electrode 4 and the second electrode 5 on the other hand, so initial load is decided with the relation of the thickness being inserted into the insertion section in the opening of spacer 6 by the thickness of spacer 6.Therefore, if the first electrode and the second electrode all become insertion section, then initial load can be subject to the impact of the thickness deviation of the first electrode 4 and second these both sides of electrode 5, as a result, there is the situation of the value off-design value of initial pressure-sensitive character.On the other hand, in the present embodiment, because spacer 6 is sandwiched between first substrate 2 and the second electrode 5, so insertion section is the first electrode 4, even if the thickness deviation of the second electrode 5, initial load is not also affected.In other words, initial load only by the impact of the first electrode 4, can guarantee more stable initial pressure-sensitive character.
" the second embodiment "
Fig. 2 is the sectional view of the voltage sensitive sensor 1B represented in the second embodiment of the present invention, and Fig. 3 is the sectional view of the voltage sensitive sensor of the variation of expression second embodiment represented in the present invention.Here, voltage sensitive sensor 1B in second embodiment is except the first electrode 4B is different with spacer 6B, all the other are identical with the first above-mentioned embodiment, so be only described the part different from the first embodiment, the Reference numeral identical with the first embodiment marked for the part identical with the first embodiment and omits the description.
As shown in Figure 2, the first electrode 4B of present embodiment flange part 44 of there is main part 43 and radially being formed continuously from this main part 43.
The main part 43 of the first electrode 4B is formed by the first electrode layer 41 on the first surface 21 being arranged on first substrate 2 with according to the second electrode lay 421 that the mode covering this first electrode layer 41 is formed.
On the other hand, the flange part 44 of the first electrode 4B is formed in main part 43 on the first surface 21 of first substrate 2 around, is only made up of the second electrode lay 422.
In addition, the Rotating fields of main part 43 and flange part 44 is not particularly limited.Such as, also as shown in Figure 3, the first surface 21 of first substrate 2 can form the first electrode layer 41B, lower surface in the figure of this first electrode layer 41B, form the second electrode lay 421B of the width had than the first electrode layer 41B relative narrowness.In this case, the first electrode layer 41B in the first electrode 4B and the lap of the second electrode lay 421B form main part 43, form flange part 44 at the first electrode layer 41B from the part that the second electrode lay 421B is outstanding to radial direction.Flange part 44 in present embodiment is equivalent to an example of the lower curtate in the present invention.
Turn back to Fig. 2, the second electrode lay 421 of main part 43 and the second electrode lay 422 of flange part 44 are by printing as the second electrode lay 42 and be solidified to form simultaneously.Therefore, the thickness W1 equal in fact with the thickness W2 of flange part 44 (W1=W2) of the second electrode lay 421 of the first electrode layer 41 is covered.In addition, main part 43 has the insertion section 40 more outstanding to the downside in Fig. 2 than flange part 44, and the thickness W3 of this insertion section 40 is equal in fact with the thickness W4 of the first electrode layer 41 (W3=W4).
In the present embodiment, as shown in Figure 2, between the 4th electrode layer 52 in flange part 44 and the second electrode 5, spacer 6B is accompanied.As spacer 6B, the material identical with spacer 6 can be used.
At spacer 6B, the mode corresponding with the first electrode layer 41 is provided with opening 61, in this opening 61, is inserted with the insertion section 40 of main part 43.In addition, the thickness W3 of this insertion section 40 equal in fact with the thickness W5 of spacer 6B (W3=W5).
Therefore, in the present embodiment, also the main part 43 in the first electrode 4B and the second electrode 5 can be kept with close state, even so small load also can detect accurately.In addition, also can for arrange protuberance in the substantial middle of the second electrode 5, the structure that this protuberance is opposed with the insertion section 40 of the first electrode 4B.
In addition, in the present embodiment, due at the region D comprising the first electrode 4B and the second electrode 5, first surface 21 and the second face 31 substantial parallel, even if so Long-Time Service voltage sensitive sensor 1B, also stable pressure-sensitive character can be guaranteed.In addition, in the present embodiment, when overlooking, surround the minimum continuum D1 of the first electrode 4B and the minimum continuum D2 equal (D1=D2) surrounding the second electrode 5, this region D1 and D2 is equivalent to above-mentioned region D.
In addition, the thickness W3 of insertion section 40 has the thickness identical in fact with the thickness W5 of spacer, in fact only depends on the thickness W4 of the first electrode layer 41.Further, between flange part 44 and the second electrode 5, spacer 6B is accompanied.Therefore, the thickness W4 of the first electrode layer 41 is only depended in the initial load applied between docking point portion, is subject to the impact of the deviation of the thickness of other electrode layer hardly.Consequently, stable initial pressure-sensitive character can be guaranteed.In addition, the insertion section 40B of the first electrode 4B in present embodiment is also separated with the internal face of the opening 61 of spacer 6B.Thereby, it is possible to carry out the pressing operation of voltage sensitive sensor 1B swimmingly, and at the radial direction of the first electrode 4B (left and right directions in Fig. 2), the thickness deviation of the end of insertion section 40B can be absorbed.
In addition, because the thickness of electrode layer is larger, thickness deviation is larger, so initial load is also easily different from design load.Therefore, when the second electrode lay 42 is formed in relatively thick mode compared with the first electrode layer 41, the thickness deviation that the first electrode layer 41 has reduces relatively, can guarantee more stable initial pressure-sensitive character.
In addition, in this case, be formed with the flange part 44 of the surrounding being formed in main part 43, because this flange part 44 also can utilize as voltage sensitive sensor, so the resistance variations of voltage sensitive sensor can be increased, improve pressure-sensitive character.
" the 3rd embodiment "
Fig. 4 is the sectional view of the voltage sensitive sensor 1C represented in the 3rd embodiment of the present invention.Here, voltage sensitive sensor 1C in 3rd embodiment is except the first electrode 4C difference, all the other are identical with the second above-mentioned embodiment, so be only described the part different from the second embodiment, for the part identical with the second embodiment, the mark Reference numeral identical with the second embodiment also omits the description.
As shown in Figure 4, the first dummy electrode 46 that the first electrode 4C in present embodiment has the first detection electrode 45 and radially formed discretely with the first detection electrode 45.
First detection electrode 45 is formed by the first electrode layer 41 on the first surface 21 being arranged on first substrate 2 with according to the second electrode lay 421B that the mode covering this first electrode layer 41 is formed.
On the other hand, the first dummy electrode 46 is formed in the first detection electrode 45 on the first surface 21 of first substrate 2 around, is only made up of the second electrode lay 422B.In addition, the second electrode lay 422B can be identically formed with the second electrode lay 42.In addition, the Rotating fields of the first dummy electrode 46 is not limited in the second electrode lay 422B.Such as, the first dummy electrode 46 also can be only made up of the first electrode layer 41, also can be made up of the first electrode layer 41 and the second electrode lay 422B these 2 layers.The first dummy electrode 46 in present embodiment is equivalent to an example of lower curtate of the present invention.
The second electrode lay 421B of the first detection electrode 45 and the second electrode lay 422B of the first dummy electrode 46 is by printing and be solidified to form simultaneously.Therefore, the thickness W6 equal in fact with the thickness W7 of the first dummy electrode 46 (W6=W7) of the second electrode lay 421B of the first electrode layer 41 is covered.In addition, the first detection electrode 45 has the insertion section 40B more outstanding to the downside in Fig. 4 than the first dummy electrode 46, and the thickness W8 of this insertion section 40B is equal in fact with the thickness W4 of the first electrode layer 41 (W8=W4).
In the present embodiment, between the first dummy electrode 46 and the second electrode 5, spacer 6C is accompanied.As this spacer 6C, the material identical with spacer 6 can be used.
At spacer 6C, the mode corresponding with the first electrode layer 41 is provided with opening 61, in this opening 61, is inserted with the insertion section 40B of the first detection electrode 45.In addition, the thickness W8 of this insertion section 40B equal in fact with the thickness W9 of spacer 6C (W8=W9).Therefore, in the present embodiment, also the first detection electrode 45 in the first electrode 4C and the second electrode 5 can be kept with close state, so can detect all loads comprising small load accurately.In addition, also can for arrange protuberance in the substantial middle of the second electrode 5, the structure that this protuberance is opposed with the second electrode lay 421B.
In addition, in the present embodiment, in the region D comprising the first electrode 4C and the second electrode 5, first surface 21 and the second face 31 also substantial parallel, even if so Long-Time Service voltage sensitive sensor 1C, also stable pressure-sensitive character can be guaranteed.In addition, in the present embodiment, when overlooking, also equal (D1=D2), this region D1 and D2 is equivalent to above-mentioned region D to the minimum continuum D1 surrounding the first electrode 4C and the minimum continuum D2 surrounding the second electrode 5.
In addition, the thickness W8 of insertion section 40B has the thickness identical in fact with the thickness W9 of spacer, in fact only depends on the thickness W4 of the first electrode layer 41.Further, between flange part 422B and the second electrode 5, spacer 6C is accompanied.Therefore, the thickness W4 of the first electrode layer 41 is only depended in the initial load applied between docking point portion, is not subject to the impact of the deviation of the thickness of other electrode layer.Consequently, stable initial pressure-sensitive character can be guaranteed.In addition, the insertion section 40B of the first electrode 4C in present embodiment is also separated with the internal face of the opening 61 of spacer 6C.Thereby, it is possible to carry out the pressing operation of voltage sensitive sensor 1C swimmingly, and the thickness deviation of the end of the insertion section 40B of the radial direction (left and right directions in Fig. 4) of the first electrode 4C can be absorbed.
" the 4th embodiment "
Fig. 5 is the sectional view of the voltage sensitive sensor 1D represented in the 4th embodiment of the present invention.Here, voltage sensitive sensor 1D in 4th embodiment is except the second electrode 5B difference, all the other are identical with the 3rd above-mentioned embodiment, so be only described the part different from the 3rd embodiment, for the part identical with the 3rd embodiment or the first embodiment, the mark Reference numeral identical with the 3rd embodiment or the first embodiment also omits the description.
As shown in Figure 5, the second electrode 5B in present embodiment has the second detection electrode 53 arranged in the mode opposed with the first detection electrode 45 and the second dummy electrode 54 arranged discretely with this second detection electrode 53.
Second detection electrode 53 is formed by the 3rd electrode layer 511 on the second face 31 being arranged on second substrate 3 with according to the 4th electrode layer 521 that the mode covering the 3rd electrode layer 511 is formed.
On the other hand, the second dummy electrode 54 is formed in the second detection electrode 53 on the second face 31 of second substrate 3 around.This second dummy electrode 54 is formed by the 3rd electrode layer 512 on the second face 31 being arranged on second substrate 3 with according to the 4th electrode layer 522 that the mode covering the 3rd electrode layer 512 is formed.In addition, the 3rd electrode layer 511,512 uses the material identical with the 3rd electrode layer 51, method is formed, and the 4th electrode layer 521,522 uses the material identical with the 4th electrode layer 52, method is formed.In addition, the second dummy electrode 54 is not limited to above-mentioned structure, also can only be made up of the 3rd electrode layer 512 or the 4th electrode layer 522.
In addition, in the present embodiment, the second detection electrode 53 has the width equal with the first detection electrode 45, but is not particularly limited to this.In addition, the second dummy electrode 54 has the width equal with the first dummy electrode 46, but is not particularly limited to this.By the way, in the present embodiment, in the region D comprising the first electrode 4C and the second electrode 5B, first surface 21 and the second face 31 also substantial parallel.In addition, in the present embodiment, when overlooking, the minimum continuum D1 surrounding the first electrode 4C with surround the minimum continuum D2 of the second electrode 5B also equal (D1=D2), this region D1 and D2 is equivalent to above-mentioned region D.
In addition, in the present embodiment, the action effect be equal to the 3rd embodiment can also be obtained.
In addition, embodiment for the above-described, recording in order to easy understand the present invention, is not record to limit the present invention.Therefore, each key element that purport is disclosed in above-mentioned embodiment also comprise belong to technical scope of the present invention whole design alteration, equivalent.
Such as, the structure that illustrates in the first ~ four embodiment also can be made contrary up and down.That is, also the second electrode can be set at the first surface 21 of first substrate 2, and the first electrode is set in the second face 31 of second substrate 3.
In addition, such as, also can carry out the method for printing etc. by using the conductive paste that is dispersed with the whippy beads such as the nylon at least one party to the first electrode or the second electrode, forming the layer containing elastic beads on the surface of this electrode.Thus, to contain elastic beads corresponding with the surface of electrode, has concaveconvex shape on the surface of electrode.Therefore, relative to the change of the load applied voltage sensitive sensor, the first and second interelectrode resistance variations becomes mild, can carry out the detection of this load more exactly.In addition, in this case, because the surface of electrode has concaveconvex shape, thickness deviation increases, so there is more easily different from the design load situation of initial load.But, in this case, about the electrode layer contacted with spacer 6, be also subject to the impact of the deviation of the thickness of this electrode layer hardly.Therefore, it is possible to keep this effect, and the detection of the load accurately based on above-mentioned mild resistance variations can be realized.
Embodiment
Below, embodiment the present invention specialized further and comparative example is utilized to confirm effect of the present invention.Following embodiment and comparative example are the examples of the stability in time in order to confirm the pressure-sensitive character in above-mentioned embodiment.
< embodiment 1 >
In embodiment 1, the voltage sensitive sensor as shown in Figure 2 illustrated in embodiment 2 has been made.
Specifically, first, the polyethylene terephthalate of thickness 100 [μm] is used as first substrate 2, silk screen print method is used to print silver paste (FA-353 Teng Cang changes into (strain) system) at this first substrate 2, and at temperature 150 DEG C heated drying 30 minutes and make it solidify, thus form the first electrode layer 41 of thickness 10 [μm], diameter 6 [mm].
Then, carbon paste (BTU-500k (strain) rising sun chemistry institute (ア サ ヒ chemistry institute)) is used to carry out identical printing on this first electrode layer 41, and at temperature 150 DEG C heated drying 60 minutes and make it solidify, thus formed thickness 10 [μm], diameter 8 [mm] the second electrode lay 42, using its together with the first electrode layer 41 as the first electrode 4B.
Next, as second substrate 3, utilize the condition equal with first substrate 2, define the 3rd electrode layer 51 of thickness 10 [μm], diameter 7.5 [mm].
Then, utilize and the equal condition of the second electrode lay 42, form the 4th electrode layer 52 of thickness 10 [μm], diameter 8 [mm], using its together with the 3rd electrode layer 51 as the second electrode 5.
Next, as spacer 6B, the double faced adhesive sheet (TL-410S-02 Lin get Ke company (リ ンテック society) system) being provided with the thickness 10 [μm] of the opening 61 of diameter 7 [mm] is pasted onto in the mode that the center of opening 61 is corresponding with the center of the first electrode 4B on the end of the first electrode 4B.Then, with the first electrode 4B and the second electrode 5 opposed mode, second substrate 3 is pasted onto first substrate 2, has made voltage sensitive sensor 1B thus.
To the sample of the embodiment 1 of structure described above, 2 following tests are carried out.
First test is load as follows and the determination test of resistance value.Specifically, the first electrode 4B of voltage sensitive sensor 1B is connected with pressure-detecting device with the second electrode 5, utilizes φ 20mm, rubber hardness 20 degree, dull and stereotyped silicon rubber actuator, determine the relation of load and resistance value with the actuator velocity of 1mm/min.
In addition, second test is the time dependent test of the relation confirming load and resistance value.Specifically, utilize above-mentioned condition, measure voltage sensitive sensor 1B just make after load and the relation of resistance value, and determine the relation from the load of making voltage sensitive sensor 1B after 200 hours and resistance value.
< embodiment 2 >
In example 2, except omitting the flange part 44 of the first electrode 4B and using the double faced adhesive sheet of thickness 10 [μm] (manufacture of Lin get Ke company) as spacer 6, the diameter of the first electrode layer 41 be made 5 [mm], the diameter of the second electrode lay 42 be made 6 [mm], the diameter of the 3rd electrode layer 51 be made 8 [mm], the diameter of the 4th electrode layer 52 is made except 9 [mm], all the other are identical with embodiment 1, thus have made the voltage sensitive sensor 1 of such structure that Fig. 1 records.
About this voltage sensitive sensor 1, also under the condition equal with embodiment 1,2 above-mentioned tests are carried out.
< embodiment 3 >
In embodiment 3, the voltage sensitive sensor 1D of structure has as shown in Figure 5 been made.
Specifically, by the method identical with embodiment 1, define the first electrode layer 41 of thickness 10 [μm], diameter 4 [mm] at first substrate 2.Then, this first electrode layer 41 is formed the second electrode lay 421B of thickness 10 [μm], diameter 4.5 [mm], and defines the second electrode lay 422B in the mode being the center of the second electrode lay 422B of width 2.0 [mm] at the position at the center 3.5 [mm] apart from this second electrode lay 421B.
Then, by the method identical with embodiment 1, form the 3rd electrode layer 511 of thickness 10 [μm], diameter 4 [mm] at second substrate 3, and be that the mode at the center of the 3rd electrode layer 512 of width 1.0 [mm] defines the 3rd electrode layer 512B with the position at the center 3.5 [mm] apart from the 3rd electrode layer 511.Then, the 3rd electrode layer 511 defines the 4th electrode layer 521 of thickness 10 [μm], diameter 4.5 [mm], the 3rd electrode layer 512 defines the 4th electrode layer 522 of thickness 10 [μm], width 2.0 [mm].Then, utilize the method identical with embodiment 1, second substrate 3 is pasted on first substrate 2, has made voltage sensitive sensor 1D thus.
For this voltage sensitive sensor 1D, under the condition equal with embodiment 1, carry out the determination test of above-mentioned load and resistance value.
< comparative example 1 >
In comparative example 1, make except the first electrode being made the voltage sensitive sensor except the structure identical with the second electrode 5 with the structure identical with embodiment 1.
For this voltage sensitive sensor, under the condition equal with embodiment 1, carry out the determination test of above-mentioned load and resistance value.
< comparative example 2 >
In comparative example 2, make except the second electrode 5C being made except the structure identical with the first electrode 4B all the other thus the voltage sensitive sensors of structure as Fig. 6 described in identical with embodiment 1.In this case, in the region D comprising the first electrode 4B and the second electrode 5C, first surface 21 and the second face 31 not parallel.In addition, in this example, when overlooking, surround the minimum continuum D1 of the first electrode 4B and surround the minimum continuum D2 equal (D1=D2) of the second electrode 5C, this region D1 and D2 is equivalent to region D.
For this voltage sensitive sensor, also under the condition equal with embodiment 1,2 above-mentioned tests are carried out.
< comparative example 3 >
In comparative example 3, make except not being paste spacer on the first electrode but to paste on the first substrate that all the other are identical with embodiment 1, thus the voltage sensitive sensor of the such structure described in Fig. 2 of patent documentation 1 described above.
For this voltage sensitive sensor, under the condition equal with embodiment 1, carry out the determination test of above-mentioned load and resistance value.
The measurement result of embodiment 1 is shown in Fig. 7, Fig. 8 and table 1, the measurement result of embodiment 2 is shown in Fig. 7, Fig. 9 and table 1, the measurement result of embodiment 3 is shown in Fig. 7, the measurement result of comparative example 1 is shown in Fig. 7, the measurement result of comparative example 2 is shown in Fig. 7, Figure 10 and table 1, the measurement result of comparative example 3 is shown in Fig. 7.
[table 1]
| Result | |
| Embodiment 1 | Change little in time |
| Embodiment 2 | Change little in time |
| Comparative example 1 | Change is large in time |
Result according to Fig. 7, the load of the voltage sensitive sensor of embodiment 1 is the resistance value of 0N is about 100000 Ω, and load is the resistance value of 5N is about 300 Ω.In addition, the load of the voltage sensitive sensor of known embodiment 2 is the resistance value of 0N is about 12000 Ω, and load is the resistance value of 5N is about 1050 Ω.Further, the load of the voltage sensitive sensor of known embodiment 3 is the resistance value of 0N is about 100000 Ω, and load is the resistance value of 5N is about 1050 Ω.
On the other hand, the result according to Fig. 7, voltage sensitive sensor resistance value before load reaches about 1N of comparative example 1 does not change, and can not detect applied load.In addition, load is the resistance value of the comparative example 2 of 5N and the voltage sensitive sensor of comparative example 3 is about 300 Ω with the voltage sensitive sensor 1B same degree of embodiment 1, and another aspect load is that the resistance value of 0N is respectively about 1500 Ω, is about 1100 Ω.Thus, known load be resistance change amount and the load of the voltage sensitive sensor of the comparative example 2,3 of 0N ~ 5N be the voltage sensitive sensor of the embodiment 1 ~ 3 of 0N ~ 5N resistance change amount compared with, significantly reduce.
In addition, result according to Fig. 8, Fig. 9 and table 1, the voltage sensitive sensor of embodiment 1 and embodiment 2, between the characteristic of the load after just making and the characteristic of resistance value and the load that have passed through from making after 200 hours and resistance value, do not observe significant difference, the change in time of the characteristic of load and resistance value is less.
On the other hand, result according to Figure 10 and table 1, the voltage sensitive sensor of comparative example 2, between the characteristic of the load after just making and the characteristic of resistance value and the load that have passed through from making after 200 hours and resistance value, there is no difference, changing greatly in time of the characteristic of load and resistance value.
As previously discussed, confirm the voltage sensitive sensor 1B according to embodiment 1, small load can be made to detect accurately as the change of larger resistance value, and Long-Time Service also can guarantee stable pressure-sensitive character.
Description of reference numerals: 1,1B, 1C, 1D ... voltage sensitive sensor; 2 ... first substrate; 21 ... first surface; 3 ... second substrate; 31 ... second; 4,4B, 4C ... first electrode; 40 ... insertion section; 41 ... first electrode layer; 42,421,422 ... the second electrode lay; 43 ... main part; 44 ... lower curtate; 45 ... first detection electrode; 46 ... first dummy electrode; 5,5B ... second electrode; 51,511,512 ... 3rd electrode layer; 52,521,522 ... 4th electrode layer; 53 ... second detection electrode; 54 ... second detection electrode; 6 ... spacer; 61 ... opening; 62 ... upper surface; 63 ... lower surface.
Claims (8)
1. a voltage sensitive sensor, is characterized in that, possesses:
First substrate;
Second substrate, it is opposed with described first substrate;
First electrode, it is arranged at the first surface of described first substrate;
Second electrode, it is arranged at second of described second substrate according to the mode with described first electrode contraposition; And
Spacer, the position that it is being answered with described first electrode and described second electrode pair has opening, and is clipped between described first substrate and described second substrate,
At least one party in described first electrode and described second electrode has the insertion section being inserted into described opening,
The gross thickness of described insertion section has the thickness identical in fact with the thickness of described spacer,
A part for described first electrode or described first substrate contact with a face of described spacer,
A part for described second electrode contacts with another face of described spacer,
In the region comprising described first electrode and described second electrode, described first surface and described second substantial parallel.
2. voltage sensitive sensor according to claim 1, is characterized in that,
Described insertion section is separated with the internal face of described opening.
3. voltage sensitive sensor according to claim 1 and 2, is characterized in that,
Described first electrode has:
Main part, it comprises described insertion section; And
Lower curtate, it is arranged on around described main part, has the height lower than described main part,
Described lower curtate contacts with a face of described spacer.
4. voltage sensitive sensor according to claim 3, is characterized in that,
Described main part possesses:
First electrode layer, it is arranged on described first substrate; And
The second electrode lay, it is arranged according to the mode covering described first electrode layer, has the resistance value higher than the resistance value of described first electrode layer,
Described lower curtate possesses described first electrode layer or described the second electrode lay.
5. voltage sensitive sensor according to claim 4, is characterized in that,
The thickness of described first electrode layer and described the second electrode lay is different in essence,
Described lower curtate has the electrode layer of the thickness equal in fact with the thickness of the larger side in the thickness of described first electrode layer or the thickness of described the second electrode lay.
6., according to the voltage sensitive sensor in claim 3 ~ 5 described in any one, it is characterized in that,
Described lower curtate is radially formed continuously from described main part.
7., according to the voltage sensitive sensor in claim 3 ~ 5 described in any one, it is characterized in that,
Described lower curtate be radially with the dummy electrode of the liftoff formation of described main part.
8., according to the voltage sensitive sensor in claim 1 ~ 7 described in any one, it is characterized in that,
At least one party in described first electrode or described second electrode has the superficial layer containing elastic beads.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-019176 | 2013-02-04 | ||
| JP2013019176 | 2013-02-04 | ||
| PCT/JP2014/052083 WO2014119658A1 (en) | 2013-02-04 | 2014-01-30 | Pressure sensitive sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104884920A true CN104884920A (en) | 2015-09-02 |
| CN104884920B CN104884920B (en) | 2017-03-15 |
Family
ID=51262369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480003666.0A Expired - Fee Related CN104884920B (en) | 2013-02-04 | 2014-01-30 | Voltage sensitive sensor |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5938111B2 (en) |
| CN (1) | CN104884920B (en) |
| TW (1) | TWI586946B (en) |
| WO (1) | WO2014119658A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109791080A (en) * | 2016-10-13 | 2019-05-21 | 日写株式会社 | Pressure sensor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021521451A (en) * | 2018-04-16 | 2021-08-26 | オーピクス メディカル テクノロジーズ インコーポレイテッド | High resistance sensor and how to use it |
| CN117109782A (en) * | 2023-08-31 | 2023-11-24 | 广州埔慧科技有限公司 | Pressure sensor and method for producing the same |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001165788A (en) * | 1999-12-06 | 2001-06-22 | Alps Electric Co Ltd | Pressure-sesitive device |
| CN1440504A (en) * | 2000-07-04 | 2003-09-03 | 株式会社山武 | Capacity type pressure sensor and method of manufacturing pressure sensor |
| US20040000195A1 (en) * | 2002-06-27 | 2004-01-01 | Kenichi Yanai | Pressure sensor |
| CN1605870A (en) * | 2002-05-13 | 2005-04-13 | 株式会社和广 | Acceleration sensor and manufacturing method for the same |
| CN1789940A (en) * | 2004-12-17 | 2006-06-21 | 电子科技大学 | Compositely packaged foil type manganin superhigh pressure sensor |
| EP1775738A2 (en) * | 2000-09-07 | 2007-04-18 | Fujikura Ltd. | Film pressure sensitive resistor and pressure sensitive sensor |
| CN101079342A (en) * | 2007-05-28 | 2007-11-28 | 上海神沃电子有限公司 | Surface mounted macromolecule ESD protection part and its making method |
| WO2009075403A1 (en) * | 2007-12-10 | 2009-06-18 | Korea Research Institute Of Standards And Science | High-temperature tactile sensor and method of manufacturing the same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4978775U (en) * | 1972-10-26 | 1974-07-08 | ||
| JP2002131155A (en) * | 2000-10-30 | 2002-05-09 | Denso Corp | Pressure sensitive resistance sensor |
| JP2004205377A (en) * | 2002-12-25 | 2004-07-22 | Kyocera Corp | Package for pressure detection device |
| JP2008175570A (en) * | 2007-01-16 | 2008-07-31 | Fujikura Ltd | Pressure-sensitive membrane sensor |
| WO2011024902A1 (en) * | 2009-08-28 | 2011-03-03 | 日本写真印刷株式会社 | Pressure detection unit and pressure detection device |
-
2014
- 2014-01-29 TW TW103103434A patent/TWI586946B/en not_active IP Right Cessation
- 2014-01-30 WO PCT/JP2014/052083 patent/WO2014119658A1/en active Application Filing
- 2014-01-30 JP JP2014559737A patent/JP5938111B2/en active Active
- 2014-01-30 CN CN201480003666.0A patent/CN104884920B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001165788A (en) * | 1999-12-06 | 2001-06-22 | Alps Electric Co Ltd | Pressure-sesitive device |
| CN1440504A (en) * | 2000-07-04 | 2003-09-03 | 株式会社山武 | Capacity type pressure sensor and method of manufacturing pressure sensor |
| EP1775738A2 (en) * | 2000-09-07 | 2007-04-18 | Fujikura Ltd. | Film pressure sensitive resistor and pressure sensitive sensor |
| CN1605870A (en) * | 2002-05-13 | 2005-04-13 | 株式会社和广 | Acceleration sensor and manufacturing method for the same |
| US20040000195A1 (en) * | 2002-06-27 | 2004-01-01 | Kenichi Yanai | Pressure sensor |
| CN1789940A (en) * | 2004-12-17 | 2006-06-21 | 电子科技大学 | Compositely packaged foil type manganin superhigh pressure sensor |
| CN101079342A (en) * | 2007-05-28 | 2007-11-28 | 上海神沃电子有限公司 | Surface mounted macromolecule ESD protection part and its making method |
| WO2009075403A1 (en) * | 2007-12-10 | 2009-06-18 | Korea Research Institute Of Standards And Science | High-temperature tactile sensor and method of manufacturing the same |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109791080A (en) * | 2016-10-13 | 2019-05-21 | 日写株式会社 | Pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2014119658A1 (en) | 2017-01-26 |
| TW201447249A (en) | 2014-12-16 |
| TWI586946B (en) | 2017-06-11 |
| JP5938111B2 (en) | 2016-06-22 |
| WO2014119658A1 (en) | 2014-08-07 |
| CN104884920B (en) | 2017-03-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20160062517A1 (en) | Multi-Layer Transparent Force Sensor | |
| EP3132335A1 (en) | An apparatus and method for sensing | |
| EP2413120A1 (en) | Pressure sensitive transducer assembly and control method for a system including such an assembly | |
| WO2015099034A1 (en) | Electronic device and electronic device control method | |
| CN102834794A (en) | Pressure detecting unit and information input device having pressure detecting unit | |
| JP5111071B2 (en) | Piezoelectric sensor | |
| CN104884920A (en) | Pressure sensitive sensor | |
| JP2013068563A (en) | Pressure sensor | |
| JP2018039478A (en) | Gripping detecting device, capacitance sensor, method of manufacturing gripping detecting device, and method of manufacturing capacitance sensor | |
| JP6257088B2 (en) | Capacitance type three-dimensional sensor and manufacturing method thereof | |
| US8714020B2 (en) | Pressure measurement member | |
| CN105992938A (en) | Input device and input device production method | |
| JP4075248B2 (en) | Pressure sensor | |
| US20120204657A1 (en) | Pressure Detection Unit | |
| WO2021053977A1 (en) | Pressure sensor | |
| US20230008926A1 (en) | Sensor | |
| CN211042547U (en) | High-density distributed flexible pressure sensor | |
| CN103091005A (en) | Pressure sensing component | |
| KR20220062785A (en) | Piezoresistive sensor based on single medium which can detect localized pressure and breakage individually and manufacturing method thereof | |
| EP3614245B1 (en) | Touch sensor | |
| JP6489710B2 (en) | Capacitance type 3D sensor | |
| JP7466214B2 (en) | Tactile sensor element, tactile sensor, three-axis tactile sensor, and method for manufacturing tactile sensor element | |
| US20230392998A1 (en) | Force Sensing Device | |
| CN117740202A (en) | Sensor connection structure and array type pressure sensor | |
| US20240077370A1 (en) | Sensor Device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170315 Termination date: 20210130 |