CN1440504A - Capacity type pressure sensor and method of manufacturing pressure sensor - Google Patents
Capacity type pressure sensor and method of manufacturing pressure sensor Download PDFInfo
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- CN1440504A CN1440504A CN01812262.0A CN01812262A CN1440504A CN 1440504 A CN1440504 A CN 1440504A CN 01812262 A CN01812262 A CN 01812262A CN 1440504 A CN1440504 A CN 1440504A
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- substrate
- pressure
- plate electrode
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- frame section
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/01—Details
- H01G5/014—Housing; Encapsulation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
Abstract
A capacitive pressure sensor includes a first substrate (1), a first flat electrode (1a) formed on the first substrate (1), a pressure-sensing frame (4) surrounding the first flat electrode (1a) provided on the first substrate (1), second substrates (2, 3) connected to the pressure-sensing frame (4) opposedly to the first substrate (1) and forming a capacitance chamber (7) together with the first substrate (1) and the pressure-sensing frame (4), a stage (5) provided on the second substrates (2, 3) in the capacitance chamber (7), separated from the pressure-sensing frame (4), and opposed to and separated from the first flat electrode (1a), and a second flat electrode (2a) provided on the stage (5) and opposed to the first flat electrode (1a), wherein the pressure-sensing frame (4) deforms elastically according to a pressure applied to the first and second substrates (1, 2, 3).
Description
Technical field
The present invention relates to a kind of capacitance pressure transducer, and manufacture method thereof to detecting based on the capacitance variations (variation of interelectrode distance) that applies the chamber distortion of external pressure generation electric capacity.
Background technology
In the past, in general capacitance pressure transducer,, two electrode of opposite were set in that the electric capacity that is fenced up by elastic diaphragm and pedestal is indoor.In this constitutes, will detect as changes in capacitance based on the variation of the interelectrode distance of barrier film elastic deformation, measure the external pressure that is applied on the barrier film.
On the other hand, in WO96/27123 number (document 1), proposed based on conceived different pressure transducers in the past.In the pressure transducer that in the document 1, proposes, in having the flexible substrate of sapphire etc., the electric capacity chamber is set, two electrode of opposite is set in that this electric capacity is indoor.In this constitutes, make the substrate self that constitutes the electric capacity chamber that compression deformation take place by impressed pressure, will follow the variation of the interelectrode distance of base plate deformation to detect as changes in capacitance.
Fig. 9 is expression document 1 a disclosed pressure transducer.As shown in Figure 9, this pressure transducer, form by sapphire system substrate 101 that will in recess, form and sapphire system substrate 102 combinations that in recess, form, make electrode 101a relative with 102a by upper electrode 102a and lead-in wire 102b by lower electrode 101a and lead-in wire 101b.
So, in this pressure transducer, when impressed pressure,, export advantages such as linear property so have the maintenance sensor because lower electrode 101a and upper electrode 102a are close keeping under the state that is parallel to each other.In addition, compare, because pressure-sensitive frame section 104 is difficult to compression, so have the advantage that under high pressure to use spraying block press internal pressure mensuration etc. with barrier film.
But in this example in the past, when shortening interelectrode distance for the sensitivity of raising mensuration, the length of the longitudinal direction of pressure-sensitive frame section 104 shortens and is difficult for compression, also causes measuring sensitivity on the contrary and descends.So, in structure in the past, only be applicable under the high pressure and use to have the very narrow problem of measurement range.
The object of the present invention is to provide and to improve the capacitance pressure transducer, of measuring sensitivity.
Another object of the present invention is to provide the capacitance pressure transducer, that can enlarge measurement range.
Summary of the invention
To achieve the object of the present invention, capacitance pressure transducer, related to the present invention is provided with first substrate, be arranged at first plate electrode on first substrate, encirclement is arranged at the pressure-sensitive frame section of first plate electrode on first substrate, be combined on the pressure-sensitive frame section and relative with first substrate form second substrate of electric capacity chamber with first substrate and pressure-sensitive frame section, be arranged in the electric capacity chamber separating with pressure-sensitive frame section and the relative objective table that separates with first plate electrode and be arranged at second on the objective table and relative with first plate electrode plate electrode on second substrate, pressure-sensitive frame section produces elastic deformation along with being added on the pressure on first substrate and second substrate outward.
In addition, after the manufacture method of capacitance pressure transducer, related to the present invention is included in and forms recess on first substrate, in this recess, form the technology of first plate electrode; After the one side of rubber-like second substrate forms the groove of a circle certain depth, on this face directly in conjunction with the 3rd substrate, by the another side that grinds second substrate groove is exposed and form the objective table that is surrounded by groove, on this objective table, form the technology of second plate electrode; By directly forming the technology of the relative electric capacity chamber of first and second plate electrode in conjunction with a pair of structure of first substrate and second and third substrate.
By formation like this, the present invention can make the length of the pressure-sensitive frame section of elastic deformation keep the sufficiently long while by impressed pressure, can shorten the interelectrode distance in upper and lower by on objective table, forming upper electrode, measure sensitivity and further enlarge measurement range thereby can further improve.
Description of drawings
Fig. 1 is the exploded perspective view of the capacitance pressure transducer, of expression first embodiment of the invention.
Fig. 2 A is the cut-open view of A-A ' line in the presentation graphs 1, and Fig. 2 B is the cut-open view of B-B ' line in the presentation graphs 1.
Fig. 3 A is the vertical view of expression upper electrode shown in Figure 1, and Fig. 3 B is the cut-open view of C-C ' line among the presentation graphs 3A.
Fig. 4 A is the vertical view of the upper electrode of expression second embodiment of the invention, and Fig. 4 B is the cut-open view of D-D ' line among the presentation graphs 4A.
Fig. 5 A is the vertical view of the upper electrode of the expression third embodiment of the present invention, Fig. 5 B is the vertical view of the expression lower electrode relative with upper electrode shown in Fig. 5 A, Fig. 5 C is the cut-open view of E-E ' line among the presentation graphs 5A, and Fig. 5 D is the circuit diagram that is made of upper electrode and lower electrode shown in the presentation graphs 5C.
Fig. 6 A～6E is A-A ' the line cut-open view of pressure transducer manufacturing process in the presentation graphs 1.
Fig. 7 A～7C is B-B ' the line cut-open view of pressure transducer manufacturing process in the presentation graphs 1.
Fig. 8 A, 8B are the vertical view and the cut-open views of the pressure transducer of the expression sensitivity that is used to illustrate pressure transducer.
Fig. 9 represents the exploded perspective view of capacitance pressure transducer, in the past.
Figure 10 is the cut-open view of F-F ' line in the presentation graphs 9.
Embodiment
The present invention is described in detail below in conjunction with figure.
As shown in Figure 1, the pressure transducer relevant with present embodiment is the lower basal plate 1 by the sapphire system that is formed by rectangular lower electrode (fixed electorde) 1a and lead-in wire 1b in the recess 7a that constitutes electric capacity chamber 7 (Fig. 2 A, 2B); The Intermediate substrate 2 of the sapphire system that roughly foursquare upper electrode (movable electrode) 2a (Fig. 2 A, 2B) that is oppositely arranged with lower electrode 1a in electric capacity chamber 7 forms; And the flat sheet upper substrate 3 that is combined on the Intermediate substrate 2 constitutes.Above the lower basal plate 1 with Intermediate substrate 2 below in conjunction with, above the Intermediate substrate 2 with upper substrate 3 below in conjunction with.
Below the use of described pressure transducer is described.
Shown in Fig. 2 A, separate with the 4a of portion all around owing to will be provided with the objective table 5 of upper electrode 2a, so when impressed pressure, (compression direction) extends on the pressure-sensitive frame section 4 outside stressed directions of elastic deformation by groove 2c.So in this structure, it is longer to make distance between electrode 1a, 2a guarantee that keeping under the narrower state pressure is changed sensitive portions.So, can improve and measure sensitivity and enlarge measurement range according to the pressure transducer of the embodiment of the invention.
In addition, for the lead-in wire 2b that is connected on the upper electrode 2a is drawn, the bridge part 2d that is provided with on the part of groove 2c compares very little shown in Fig. 3 A, 3B with the size of whole groove 2c, so the compression deformation of pressure-sensitive frame section 4 is not influenced, also do not hinder the mensuration of pressure.
Followingly the additional embodiments of upper electrode 2a and lower electrode 1a is described with reference to Fig. 4 A, 4B, 5A～5D.
In a second embodiment, shown in Fig. 4 A, Intermediate substrate 2 form reference electrode 2e below by groove 2c, make the upper electrode 2a that surrounds on the objective table 5.Reference electrode 2e is used from bioassay standard electric capacity with lower electrode 1a one.At this moment, the recess of lower basal plate 1 is that the periphery of electric capacity chamber 7 expands to the periphery of groove 2c and stretches the setting reference electrode 2e relative with lower electrode 1a on part is stretched in this expansion.
The result who utilizes reference electrode 2e to measure can revise the result that movable electrode 2a measures.In addition, when additonal pressure, the interelectrode distance between reference electrode 2e and the lower electrode 1a depends on the length β of the sidewall of electric capacity chamber 7, and still, the interelectrode distance between upper electrode 2a and the lower electrode 1a depends on the length alpha of pressure-sensitive frame section 4.For example, just can make the mensuration sensitivity of upper electrode 1a keep enough big by α being set at greater than 100 β.
In the 3rd embodiment, shown in Fig. 5 A～5C, relative with upper electrode 2a lower electrode 1a-1, the 1a-2 that is split into two is arranged in the recess of lower basal plate 1.The upper electrode 2a of electricity suspended state shown in Fig. 5 D, constitutes the circuit of two capacitor polyphones combination with lower electrode 1a-1,1a-2.At this moment, even if make upper electrode 2a be in suspended state, can measure the pressure variation by preparing two lower electrode 1a-1 and 1a-2.If according to present embodiment, just need not be used for drawing the bridge part of lead-in wire, thereby make easily yet than first embodiment from upper electrode 2a.
Below the manufacture method of pressure transducer shown in Figure 1 is described with Fig. 6 A～6E.
At first, as shown in Figure 6A, carry out mirror ultrafinish below the pedestal 3 that the top and upper substrate of the pedestal 2 used by the Intermediate substrate of formation groove 2c such as laser is used after, under the atmosphere of hundreds of degree centigrade by directly in conjunction with and with the minute surface combination of two pedestals.Then, shown in Fig. 6 B, the bottom of grinding pedestal 2 exposes until groove 2c.The result makes the base board unit 10 that is made of Intermediate substrate 2 and upper substrate 1 shown in Fig. 6 C.
In the base board unit 10 that so constitutes, so the surface of trench bottom X is that the mirror ultrafinish face is smooth.In contrast, form groove with laser and when making described base unit in a pedestal, make the surface of trench bottom X form the mirror ultrafinish face is impossible basically.If making groove bottom is not the base board unit 10 of mirror status when being used for sensor, unbalanced stress will appear, and substrate ruptures easily.In contrast, if according to described manufacture method, stress homogeneous in sensor base plate can prevent the substrate fracture.
Then, shown in Fig. 6 D, on the objective table 5 of the base board unit made from Fig. 6 C 10, form upper electrode 2a.Then after forming recess and lower electrode 1a on the pedestal 1 that lower basal plate is used, base board unit 10 is combined with pedestal 1 by direct combination.Electrode 1a, 2a directly combination under the temperature of not damaging (fusion) at this moment.The result can make the pressure transducer with pressure-sensitive frame section 4 long on the impressed pressure direction shown in Fig. 6 E.
By with upper type, can be manufactured in the substrate towards forming the pressure transducer of groove 2c with the compression face mutually perpendicular direction.In the pressure transducer of making by this kind mode, can be under the narrower situation of the distance maintenance between lower electrode 1a and the upper electrode 2a, the constricted zone when directly increasing impressed pressure.
Below the manufacture method of bridge part 2d is described with Fig. 7 A～Fig. 7 C.
At first, when in pedestal 2, forming groove 2c, shown in Fig. 7 A, the partial depth with the corresponding groove 2c of bridge part 2d is shoaled.Shown in Fig. 7 B that pedestal 1 and pedestal 2 is direct in conjunction with making base board unit 10 then.When grinding the bottom of base board unit 10, make with the corresponding substrate portion of bridge part 2d remaining then.On bridge part 2d, form lead-in wire 2b as described.
Below the sensitivity of described pressure transducer is described with Fig. 8 A, 8B.
Used pressure transducer is pressure-sensitive direction length a=2 (mm), electrode gap b=0.1 (μ m), the compression face 6 of pressure-sensitive frame section 4 to the length f=10 (mm) of the y direction of 7 x direction length e=10 (mm) of the width d=0.4 (mm) of the length c=2 (mm) of the bottom of groove, pressure-sensitive frame section 4, electric capacity chamber, electric capacity chamber.Sapphire tensile elasticity rate is made as 30,000kg/mm
2
In this condition, the area of compression face 6=100 (mm
2), the area of pressure-sensitive frame section 4 (with the area of the joint portion of substrate 1) 15.36 (mm
2), pressure amplification degree 100/15.36 6.5.In addition, will be made as 1kg/cm at the impressed pressure on the compression face 6
2, electrode gap b displacement when being made as Δ b, Δ b/2=1/30000 * 0.01 * 6.5 (mm), Δ b=43 ().So when basic electric capacity was 100pF, sensitivity was 4.5pF.In addition, even during b=1 (μ m), sensitivity is 0.43pF.In order to make this structure more effectively bring into play function, the thickness of pressure-sensitive frame section 4 must be thicker than the distance between the objective table 5 on substrate 1 and the substrate 3.
In addition, in described embodiment, describe, the invention is not restricted to this use sapphire situation as base material.For example can use monocrystal materials such as silicon, glass or diamond.In addition, reference electrode is not to construct, and can add as required.So the present invention is to be essential structure with upper electrode 2a and lower electrode 1a.In addition, can also be arranged on the lower electrode 1a on objective table 5 being arranged on upper electrode 2a.
In addition, in described embodiment, the recess 7a that constitutes electric capacity chamber 7 can be set in lower basal plate 1, also can with upside substrate that lower basal plate 1 combines in recess is set.This moment, lower basal plate 1 can be flat sheet.
In addition, in described embodiment,, can make pressure transducer, also can under the situation that can finish the trench bottom minute surface, make pressure transducer by laser etc. in conjunction with two substrates in conjunction with three substrates for finishing groove 2c bottom minute surface.At this moment, for example can put upside down substrate 2 as shown in Figure 6A realizes by combining with the lower basal plate with recess.
As described above, the present invention can make the length in compression deformation zone when distance further increases impressed pressure between lower electrode and upper electrode under the narrower state of maintenance, thereby can realize measuring the raising of sensitivity and the expansion of measurement range.
Claims (7)
1. capacitance pressure transducer,, it is characterized in that: be provided with first substrate, be arranged at first plate electrode on first substrate, encirclement is arranged at the pressure-sensitive frame section of first plate electrode on first substrate, be combined on the pressure-sensitive frame section and relative with first substrate form second substrate of electric capacity chamber with first substrate and pressure-sensitive frame section, be arranged in the electric capacity chamber separating with pressure-sensitive frame section and the relative objective table that separates with first plate electrode and be arranged at second on the objective table and relative with first plate electrode plate electrode on second substrate, described pressure-sensitive frame section produces elastic deformation along with being added on the pressure on first substrate and second substrate outward.
2. capacitance pressure transducer, according to claim 1 is characterized in that: in the pressure-sensitive frame section of described part, form and the relative zone of described first plate electrode, be provided with and the relative reference electrode of described first plate electrode in this zone.
3. capacitance pressure transducer, according to claim 1 is characterized in that: described first and second substrates are made of sapphire, silicon, glass or diamond.
4. capacitance pressure transducer, according to claim 1 is characterized in that: be provided with the bridge part that connects described part objective table and the pressure-sensitive frame section of described part, be arranged at that a end on this bridge part is connected with described second plate electrode and the other end leads to the lead-in wire of the outside of described electric capacity chamber.
5. capacitance pressure transducer, according to claim 1, it is characterized in that: described first plate electrode is set to two mutual close plate electrodes, these two plate electrodes are connected with the lead-in wire that leads to described electric capacity outdoor respectively, and described second plate electrode is set to electric suspended state.
6. the manufacture method of a capacitance pressure transducer, is characterized in that: be included in form recess on first substrate after, in this recess, form the technology of first plate electrode; After the one side of rubber-like second substrate forms the groove of a circle certain depth, on this face directly in conjunction with the 3rd substrate, by the another side that grinds described second substrate groove is exposed and form the objective table that is surrounded by described groove, on this objective table, form the technology of second plate electrode; By directly forming the technology of the relative electric capacity chamber of described first and second plate electrode in conjunction with a pair of structure of described first substrate and described second and third substrate.
7. the manufacture method of capacitance pressure transducer, according to claim 6 is characterized in that: further comprise forming making the depth ratio other parts that are arranged at the part groove on described second substrate shallow and by grinding the lead-in wire technology that an end is connected with described upper electrode and other end formation is drawn to the outside on this bridge part when in described part groove bridge part being set.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP202367/2000 | 2000-07-04 | ||
| JP2000202367A JP3771425B2 (en) | 2000-07-04 | 2000-07-04 | Capacitive pressure sensor and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1440504A true CN1440504A (en) | 2003-09-03 |
| CN1181324C CN1181324C (en) | 2004-12-22 |
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ID=18699900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB018122620A Expired - Fee Related CN1181324C (en) | 2000-07-04 | 2001-07-03 | Capacity type pressure sensor and method of manufacturing pressure sensor |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6704186B2 (en) |
| EP (1) | EP1316786B1 (en) |
| JP (1) | JP3771425B2 (en) |
| CN (1) | CN1181324C (en) |
| DE (1) | DE60144094D1 (en) |
| WO (1) | WO2002003043A1 (en) |
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| CN105917205A (en) * | 2014-01-17 | 2016-08-31 | 株式会社村田制作所 | An improved pressure sensor structure |
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-
2000
- 2000-07-04 JP JP2000202367A patent/JP3771425B2/en not_active Expired - Lifetime
-
2001
- 2001-07-03 DE DE60144094T patent/DE60144094D1/en not_active Expired - Lifetime
- 2001-07-03 CN CNB018122620A patent/CN1181324C/en not_active Expired - Fee Related
- 2001-07-03 WO PCT/JP2001/005751 patent/WO2002003043A1/en active Application Filing
- 2001-07-03 EP EP01945787A patent/EP1316786B1/en not_active Expired - Lifetime
- 2001-07-03 US US10/332,242 patent/US6704186B2/en not_active Expired - Lifetime
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104884920A (en) * | 2013-02-04 | 2015-09-02 | 株式会社藤仓 | Pressure sensitive sensor |
| CN104884920B (en) * | 2013-02-04 | 2017-03-15 | 株式会社藤仓 | Voltage sensitive sensor |
| CN103148977A (en) * | 2013-02-27 | 2013-06-12 | 东南大学 | Flexible-substrate-based passive wireless pressure sensor with self-packaging function |
| US10161817B2 (en) | 2013-11-06 | 2018-12-25 | Invensense, Inc. | Reduced stress pressure sensor |
| CN104634501A (en) * | 2013-11-06 | 2015-05-20 | 盛思锐股份公司 | Pressure sensor |
| US10816422B2 (en) | 2013-11-06 | 2020-10-27 | Invensense, Inc. | Pressure sensor |
| CN104634501B (en) * | 2013-11-06 | 2019-02-15 | 应美盛股份有限公司 | Pressure sensor |
| CN105917205A (en) * | 2014-01-17 | 2016-08-31 | 株式会社村田制作所 | An improved pressure sensor structure |
| CN105917205B (en) * | 2014-01-17 | 2019-03-19 | 株式会社村田制作所 | Improved pressure sensor structure |
| US10254185B2 (en) | 2015-04-02 | 2019-04-09 | Invensense, Inc. | Pressure sensor |
| US10712218B2 (en) | 2015-04-02 | 2020-07-14 | Invensense, Inc. | Pressure sensor |
| CN107980024A (en) * | 2015-07-08 | 2018-05-01 | 旭硝子欧洲玻璃公司 | The windowpane of motor vehicles |
| CN107980024B (en) * | 2015-07-08 | 2020-11-03 | 旭硝子欧洲玻璃公司 | Glass window for motor vehicle |
| CN105575637B (en) * | 2015-12-23 | 2017-11-24 | 四方继保（武汉）软件有限公司 | A kind of GIS electronic type voltage transformers of suspension plate electrode structures |
| CN105575637A (en) * | 2015-12-23 | 2016-05-11 | 四方继保（武汉）软件有限公司 | Gas insulated switchgear (GIS) electronic type voltage transformer with suspension plate electrode structure |
| US11225409B2 (en) | 2018-09-17 | 2022-01-18 | Invensense, Inc. | Sensor with integrated heater |
Also Published As
| Publication number | Publication date |
|---|---|
| US6704186B2 (en) | 2004-03-09 |
| JP2002022583A (en) | 2002-01-23 |
| US20030189809A1 (en) | 2003-10-09 |
| DE60144094D1 (en) | 2011-04-07 |
| EP1316786A4 (en) | 2007-08-01 |
| JP3771425B2 (en) | 2006-04-26 |
| EP1316786A1 (en) | 2003-06-04 |
| CN1181324C (en) | 2004-12-22 |
| WO2002003043A1 (en) | 2002-01-10 |
| EP1316786B1 (en) | 2011-02-23 |
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