TWI586946B - Sensing detectors - Google Patents

Description

Pressure detector

The present invention relates to a resistive sense detector.

A pressure sensitive device in which the first and second substrates are fixed by a bonding member by forming a contact between the first substrate and the second substrate, and forming a contact between the first substrate and the second substrate (see, for example, Patent Document 1) .

[advance technical documents] [Patent Document]

[Patent Document 1] Japanese Patent Publication No. 2001-165788

In the pressure sensitive device described above, the joint member is formed to be thinner than the thickness of the contact portion. Therefore, in the vicinity of the contact portion, the first and second substrates are often moved in the direction in which they are pulled apart. Therefore, the portion between the substrates is peeled off, and there is a problem that the pressure sensitive characteristics may vary depending on the initial value. Further, in the above-described pressure-sensing device, when the thickness of the contact portion is deviated from the thickness, the initial load applied between the contact portions is different from the design value, and the direct initial pressure-sensing characteristic is affected, and the initial pressure-sensing property is not Match the design value.

The problem to be solved by the invention can detect the same micro load In the meantime, a pressure sensor that can ensure stable pressure characteristics for a long period of time is provided.

[1] The pressure-sensing device according to the present invention is characterized by comprising: a first substrate; a second substrate facing the first substrate; a first electrode provided on the first surface of the first substrate; and a second electrode The first electrode is disposed on the second surface of the second substrate, and the spacer has an opening at a position corresponding to the first electrode and the second electrode, and interposed between the first substrate and the first substrate Between the second substrates, at least one of the first electrode and the second electrode has an insertion portion into which the opening is inserted, and the total thickness of the insertion portion has substantially the same thickness as the thickness of the spacer, a part of the first electrode or the first substrate is in contact with one surface of the spacer, and a part of the second electrode is in contact with the other surface of the spacer, and in the region including the first electrode and the second electrode, the first The surface is substantially parallel to the second surface.

[2] In the above invention, the insertion portion may be spaced apart from an inner wall surface of the opening.

[3] In the above invention, the first electrode includes a main body portion including the insertion portion; and a low back portion provided around the main body portion and having a height lower than the main body portion; wherein the low back portion may be the same as the above One side of the spacer is in contact.

[4] In the above invention, the main body portion includes a first electrode layer provided on the first substrate, and the second electrode layer is provided to cover the first electrode layer and has a resistance value higher than that of the first electrode layer a high resistance value; wherein the low back portion may include at least one of the first electrode layer or the second electrode layer.

[5] In the above invention, the thickness of the first electrode layer and the second electrode layer are different, and the low back portion may have a thickness of the first electrode layer or a thickness of the second electrode layer. The larger one has an electrode layer of substantially equal thickness.

[6] In the above invention, the low back portion may be continuously formed in the radial direction from the main body portion.

[7] In the above invention, the low back may be a dummy electrode formed to be apart from the main body portion in the radial direction.

[8] In the above invention, at least one of the first electrode layer or the second electrode layer may have a surface layer containing elastic beads.

[9] The pressure-sensing device according to the present invention includes: a first substrate; a second substrate facing the first substrate; a first electrode provided on the first substrate; and a second electrode; The first electrode is disposed on the second substrate; and the spacer has an opening at a position corresponding to the first electrode and the second electrode, and is interposed between the first substrate and the second substrate; At least one of the first electrode and the second electrode has an insertion portion that is inserted into the opening, and the total thickness of the insertion portion has substantially the same thickness as the thickness of the spacer, and the first substrate and one side of the spacer Contacting, a part of the second electrode is in contact with the other surface of the spacer, and a portion of the second electrode that is in contact with the other surface of the spacer and the total thickness of the spacer is substantially equal to the first electrode The portion corresponding to the opening and the total thickness of the portion corresponding to the opening in the second electrode.

[10] The pressure-sensing device according to the present invention includes a first substrate, a second substrate facing the first substrate, and a first electrode disposed on the first electrode On the first substrate, the second electrode is disposed on the second substrate opposite to the first electrode, and the spacer has an opening at a position corresponding to the first electrode and the second electrode Between the first substrate and the second substrate; at least one of the first electrode and the second electrode has an insertion portion inserted into the opening, and a total thickness of the insertion portion is substantially the same as a thickness of the spacer a thickness of the first electrode is in contact with one surface of the spacer, a part of the second electrode is in contact with the other surface of the spacer, and a portion of the first electrode that is in contact with one surface of the spacer, The portion of the second electrode that is in contact with the other surface of the spacer and the total thickness of the spacer is substantially equal to the total thickness of the portion of the first electrode corresponding to the opening and the portion of the second electrode corresponding to the opening. .

[11] The pressure-sensing device according to the present invention includes: a first substrate; a second substrate facing the first substrate; a first electrode provided on the first substrate; and a second electrode; The first electrode is disposed on the second substrate; and the spacer has an opening at a position corresponding to the first electrode and the second electrode, and is interposed between the first substrate and the second substrate; At least one of the first electrode and the second electrode has an insertion portion that is inserted into the opening, and the total thickness of the insertion portion has substantially the same thickness as the thickness of the spacer, wherein the first electrode has a body portion. And the low back portion is disposed around the main body portion and has a height lower than the main body portion; the low back portion is in contact with one surface of the spacer, and the second electrode is partially connected to the other side of the spacer The contact between the lower back, the portion of the second electrode that is in contact with the other surface of the spacer, and the total thickness of the spacer are substantially equal to the main body and the second electric The total thickness of the portion of the pole corresponding to the above opening.

A pressure-sensing device according to the present invention includes a first substrate; a second substrate facing the first substrate; a first electrode provided on the first substrate; and a second electrode facing the first electrode Provided on the second substrate; and the spacer having an opening at a position corresponding to the first electrode and the second electrode, and interposed between the first substrate and the second substrate; the first electrode and At least one of the second electrodes has an insertion portion that is inserted into the opening, and the total thickness of the insertion portion has a thickness substantially equal to a thickness of the spacer, wherein the first electrode has a body portion including the insertion And a low back portion provided around the main body portion and having a height lower than the main body portion; the second electrode has a second main body portion facing the insertion portion; and the second lower back is disposed on the second portion The periphery of the main body portion has a lower height than the second main body portion; the lower back portion is in contact with one surface of the spacer, and the second low back portion is in contact with the other surface of the spacer, the lower portion Total thickness portion, the second low back, and said spacer is substantially equal to said main body portion, and the total thickness of the second body portion.

According to the invention, since the holding insertion portion is close to the second electrode provided on the second substrate, various loads including a minute load can be detected. Further, the insertion portion has substantially the same thickness as the thickness of the spacer, and the first surface of the first substrate and the second surface of the second substrate are substantially in the region including the first electrode and the second electrode. The upper side is parallel, and there is no operating force in the direction in which the first and second substrates are pulled apart. Further, since a part of the second electrode contacts the other surface of the spacer, the initial load applied between the contact portions depends only on the thick portion of the insertion portion. It is possible to ensure stable initial pressure-sensing characteristics without being affected by the thickness deviation of the second electrode. Therefore, stable pressure-sensing characteristics can be ensured for a long period of time.

1‧‧ ‧ Pressure Detector

1B‧‧‧ Pressure Detector

1C‧‧‧ Pressure Detector

1D‧‧‧ Pressure Detector

2‧‧‧1st substrate

21‧‧‧ first side

3‧‧‧2nd substrate

31‧‧‧2nd

4‧‧‧1st electrode

4B‧‧‧1st electrode

4C‧‧‧1st electrode

40‧‧‧Insert Department

40B‧‧‧Insert Department

41‧‧‧1st electrode layer

41B‧‧‧1st electrode layer

42‧‧‧2nd electrode layer

421‧‧‧2nd electrode layer

421B‧‧‧2nd electrode layer

422‧‧‧2nd electrode layer

422B‧‧‧2nd electrode layer

43‧‧‧ Body Department

44‧‧‧Flange (low back)

45‧‧‧1st detection electrode

46‧‧‧1st dummy electrode

5‧‧‧2nd electrode

5B‧‧‧2nd electrode

51‧‧‧3rd electrode layer

52‧‧‧4th electrode layer

511‧‧‧3rd electrode layer

512‧‧‧3rd electrode layer

512B‧‧‧3rd electrode layer

521‧‧‧4th electrode layer

522‧‧‧4th electrode layer

53‧‧‧2nd detection electrode

54‧‧‧2nd dummy electrode

6‧‧‧ Spacer

6B‧‧‧ Spacer

6C‧‧‧ Spacer

61‧‧‧ openings

62‧‧‧above

63‧‧‧ below

7‧‧‧diameter

D‧‧‧ area

D1‧‧‧Minimum continuous area

D2‧‧‧Minimum continuous area

W1‧‧‧ thickness

W6‧‧‧ thickness

W7‧‧‧ thickness

[Fig. 1] is a cross-sectional view showing a pressure sensitive detector in a first embodiment of the present invention; [Fig. 2] is a sectional view showing a pressure sensitive detector in a second embodiment of the present invention; 3] is a cross-sectional view showing a modification of the pressure-sensing detector in the second embodiment of the present invention; [Fig. 4] is a cross-sectional view showing the pressure-sensing detector in the third embodiment of the present invention; 5 is a cross-sectional view showing a pressure-sensing detector in a fourth embodiment of the present invention; [FIG. 6] is a cross-sectional view showing a pressure-sensing detector of Comparative Example 2; [FIG. 7] is a display feeling A diagram showing the relationship between the load and the resistance value of the pressure detector; [Fig. 8] shows a temporal change diagram of the relationship between the load and the resistance value in the pressure sensitive detector in the second embodiment; [Fig. 9] A time-dependent change diagram showing the relationship between the load and the resistance value in the pressure-sensing detector in the first embodiment; and [FIG. 10] showing the relationship between the load and the resistance value in the pressure-sensing detector of Comparative Example 2 Time-lapse map;

Hereinafter, embodiments of the present invention will be described based on the drawings.

<<First embodiment>>

Fig. 1 is a cross-sectional view showing the pressure sensitive detector 1 in the present embodiment.

The pressure-sensing detector 1 of the present embodiment has a first substrate 2 as shown in FIG. 1 , a second substrate 3 facing the first substrate 2 , and a first electrode 4 provided on the first substrate 2 . The first electrode 21 is disposed on the second surface 31 of the second substrate 3 opposite to the first electrode 4, and the spacer 6 is interposed between the first substrate 2 and the second electrode 5.

The first substrate 2 and the second substrate 3 are flexible insulating films, for example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polyimine ( PI) or polyetherimide resin (PEI) and the like. Further, as shown in FIG. 1, the first surface 4 of the first substrate 2 is formed as a first electrode 4 to be described later. Further, as shown in FIG. 1, the second substrate 3 is disposed in parallel with the first substrate 2, and the second surface 5 to be described later is formed on the second surface 31 of the second substrate 3.

As shown in FIG. 1, the first electrode 4 is composed of a first electrode layer 41 and a second electrode layer 42. The second electrode 5 is also composed of the third electrode layer 51 and the fourth electrode layer 52 as shown in Fig. 1 . The first electrode 4 and the second electrode 5 have a shape such as a circle, a triangle, or a square shape, as shown in a plan, although not shown.

The first electrode layer 41 is formed by printing a conductive paste such as a silver paste material, a gold paste material, or a copper paste material on the first surface 21 of the first substrate 2 and then curing it. Further, the third electrode layer 51 is formed by printing the same conductive paste as that used in the first electrode layer 41 on the second surface 31 of the second substrate 3 and then hardening it. The specific printing method for forming the first electrode layer 41 and the third electrode layer 51 as described above may be, for example, a screen printing method, a gravure lithography method, an inkjet printing method, or the like. Moreover, the same printing method was used for all the electrode layers formed by the conductive paste described below.

As shown in FIG. 1, the second electrode layer 42 covers the first electrode layer 41, and is formed by printing a conductive paste on the first surface 21 of the first substrate 2 and then curing it. Further, as shown in FIG. 1, the fourth electrode layer 52 covers the third electrode layer 51, and is printed on the second surface 31 of the second substrate 3 by printing a conductive paste. The second electrode layer 42 and the fourth electrode layer 52 have higher electrical resistance than the first electrode layer 41 and the third electrode layer 51, and the conductive paste of the second electrode layer 42 and the fourth electrode layer 52 are formed. Specific examples may be, for example, a carbon paste or the like. In the present embodiment, the first electrode layer 41 and the third electrode layer 51 are formed relatively thinner than the second electrode layer 42 and the fourth electrode layer 52. However, the present invention is not limited thereto, and may have the same thickness or may be thick. form.

In the present embodiment, as shown in Fig. 1, all of the first electrodes 4 are inserted into the openings 61 of the spacer 6 to be described later, and the first electrode 4 in this example corresponds to an example of the insertion portion in the present invention. The first electrode 4 in the present embodiment is separated from the inner wall surface of the opening 61 of the spacer 6. Therefore, the pressing operation of the pressure sensitive detector 1 can be smoothly performed, and the thickness deviation which is likely to occur in the radial direction (the horizontal direction in the first drawing) of the first electrode 4 can be absorbed. The second electrode 5 is provided to face the first electrode 4, is wider than the opening 61 of the spacer 6 to be described later, and is in contact with the periphery of the opening 61 in the vicinity of the outer peripheral portion. Further, a convex portion is provided at a substantially central portion of the second electrode 5, and the convex portion may have a configuration facing the first electrode 4.

Further, the method for forming the first to fourth electrode layers 41, 42, 51, and 52 is not particularly limited. For example, after forming a plating layer on the surface of the substrate, A photoresist pattern is formed by photo lithography, and then an electrode layer may be formed by performing an etching treatment.

Further, in the present embodiment, the first electrode 4 is composed of two electrodes 41 and 42, and the second electrode 5 is also composed of two electrodes 51 and 52, but is not particularly limited thereto. For example, either the first electrode 4 or the second electrode 5 or one of the first electrode 4 and the second electrode 5 may be formed of a single electrode layer, and three or more electrode layers may be used.

The spacer 6 is a member interposed between the first substrate 2 and the second electrode 5, thereby defining the distance between the first electrode 4 and the second electrode 5, and is composed of polyethylene terephthalate (PET) and poly It is composed of an insulating material such as polyethylene naphthalate (PEN), polyimine (PI) or polyether amide resin (PEI).

In the present embodiment, the upper surface 62 of the spacer 6 is in contact with the first surface 21 of the first substrate 2, and the lower surface 63 of the spacer 6 is in contact with the second electrode 5. Further, the upper surface 62 of the spacer 6 in the present embodiment corresponds to an example of one side of the spacer in the present invention, and the lower surface 63 of the spacer 6 in the present embodiment corresponds to the other side of the spacer in the present invention. example.

Further, in the spacer 6, as shown in FIG. 1, an opening 61 larger than the first electrode 4 is provided corresponding to the first electrode layer 41. Moreover, the thickness of the spacer 6 is substantially equal to the thickness of the first electrode 4. Therefore, the entire first electrode 4 is incorporated in the opening 61 of the spacer 6.

According to the pressure-sensing detector 1 of the present embodiment, the first substrate 2 on which the first electrode 4 is provided on the first surface 21, the spacer 6 and the second electrode 5 on the second surface 31 are laminated. The substrate 3 is fixed between the first substrate 2 and the spacer 6, and between the second electrode 5 and the spacer 6, by an adhesive or the like. So, the package In the region D including the first electrode 4 and the second electrode 5, the first surface 21 and the second surface 31 are substantially parallel. Such an adhesive material may be, for example, an adhesive material such as an acryl resin series, a urethane resin series, or a silicone resin series. Moreover, by using a thin plate having two-sided adhesiveness or the like as the spacer 6, the space between the first substrate 2 and the spacer 6, and between the second electrode 5 and the spacer 6 can be fixed. Incidentally, the region D including the first electrode 4 and the second electrode 5 is a minimum continuous region D1 surrounding the first electrode 4 and a minimum continuous region D2 surrounding the second electrode 5 as viewed in plan. Larger area (D2 in this case).

The first electrode 4 and the second electrode 5 are connected to a pressure detecting device not specifically shown. When a load is applied to the direction of the arrow in FIG. 1 in a state where a predetermined voltage is applied between the first electrode 4 and the second electrode 5, the first electrode 4 and the second electrode 5 are between the first electrode 4 and the second electrode 5 depending on the magnitude of the load. The resistance changes, and based on this resistance change, the magnitude of the pressure applied to the pressure detector is detected.

Next, the effect on the present embodiment will be explained.

In the present embodiment, the spacer 6 is interposed between the first surface 21 of the first substrate 2 and the second electrode 5. Moreover, the thickness of the first electrode 4 provided on the first substrate 2 is substantially equal to the thickness of the spacer 6. Therefore, while maintaining the state in which the first electrode 4 and the second electrode 5 are close to each other, the resistance value (initial resistance) of the pressure-sensing detector 1 before the load is applied can be increased. Therefore, when a minute load is applied, the amount of change in the resistance value of the pressure sensitive detector 1 becomes large, and the load can be detected with high accuracy. In the present embodiment, the entire first electrode 4 is accommodated in the opening 61 of the spacer 6, and the first electrode 4 is not around the opening 61 of the place where the pressing force applied to the pressure sensitive detector 1 is likely to concentrate. Will be pinched at the 1st Between the substrate 2 and the spacer 6. Therefore, the deterioration of the first electrode 4 over time is suppressed, and the durability of the pressure sensitive sensor 1 can be improved.

Further, in addition to the above configuration, in the region D including the first electrode 4 and the second electrode 5, the first surface 21 and the second surface 31 are substantially parallel. Therefore, the substrates 2 and 3 are not pulled apart by the stress of the first substrate 2 and the second substrate 3, and stable pressure-sensing characteristics can be ensured even after the pressure-sensing detector 1 is used for a long period of time.

Further, the first electrode 4 has substantially the same thickness as the thickness of the spacer 6, and a part of the second electrode 5 is in contact with the spacer 6, and the initial load applied between the contact portions depends only on the first electrode 4. The thickness is hardly affected by the thickness deviation of the second electrode 5. As a result, stable initial pressure sensitive characteristics can be ensured.

In detail, the thickness of the spacer 6 is substantially fixed, and the thickness of the first electrode 4 and the second electrode 5 may be deviated. The initial load is defined by the thickness of the spacer 6 and the opening of the spacer 6 . The relationship between the thicknesses of the insertion portions is determined. Therefore, when all of the first electrode and the second electrode are the insertion portions, the initial load is affected by the thickness deviation between the first electrode 4 and the second electrode 5, and as a result, the value of the initial pressure sensitive characteristic may not match the design value. On the other hand, in the present embodiment, the spacer 6 is interposed between the first substrate 2 and the second electrode 5, and the insertion portion is only the first electrode 4. Even if the thickness of the second electrode 5 is deviated, the initial load is not affected. influences. In other words, the initial load is not affected by the first electrode 4, and a relatively stable initial pressure sensitive characteristic can be secured.

<<Second embodiment>>

Fig. 2 is a cross-sectional view showing the pressure sensitive detector 1B in the second embodiment of the present invention. Fig. 3 is a cross-sectional view showing a pressure sensitive detector according to a modification of the second embodiment of the present invention. Here, the pressure sensitive detector 1B in the second embodiment is different from the first embodiment except that the first electrode 4B is different from the spacer 6B, and only the parts different from the first embodiment are explained, and The same portions as those of the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

As shown in Fig. 2, the first electrode 4B in the present embodiment has a main body portion 43 and a flange portion 44 continuously formed in the radial direction from the main body portion 43.

The main body portion 43 of the first electrode 4B is composed of a first electrode layer 41 provided on the first surface 21 of the first substrate 2 and a second electrode layer 421 formed to cover the first electrode layer 41.

On the other hand, the flange portion 44 of the first electrode 4B is formed around the main body portion 43 on the first surface 21 of the first substrate 2, and is composed only of the second electrode layer 422.

Moreover, the layer structure of the main body portion 43 and the flange portion 44 is not particularly limited. For example, as shown in FIG. 3, the first electrode layer 41B is formed on the first surface 21 of the first substrate 2, and the lower surface of the first electrode layer 41B may be formed to be relatively narrower than the first electrode layer 41B. The second electrode layer 421B of the width. In this case, the overlapping portion of the first electrode layer 41B and the second electrode layer 421B in the first electrode 4B constitutes the main body portion 43, and the portion of the first electrode layer 41B that protrudes in the radial direction from the second electrode layer 421B constitutes a convex portion. Edge 44. The flange portion 44 in this embodiment corresponds to an example of the low back in the present invention.

Returning to Fig. 2, the second electrode layer 421 of the main body portion 43 and the second electrode layer 422 of the flange portion 44 are simultaneously printed as the second electrode layer 42. It is hardened to form. Therefore, the thickness W1 of the second electrode layer 421 covering the first electrode layer 41 is substantially equal to the thickness W2 of the flange portion 44 (W1 = W2). Further, the main body portion 43 has an insertion portion 40 that protrudes toward the lower side in the second view from the flange portion 44. The thickness W3 of the insertion portion 40 is substantially equal to the thickness W4 of the first electrode layer 41 (W3 = W4). .

In the present embodiment, as shown in Fig. 2, the spacer 6B is interposed between the flange portion 44 and the fourth electrode layer 52 of the second electrode 5. For the spacer 6B, the same material as the spacer 6 can be used.

In the spacer 6B, an opening 61 is provided corresponding to the first electrode layer 41, and the insertion portion 40 of the main body portion 43 is inserted into the opening 61. Further, the thickness W3 of the insertion portion 40 is substantially equal to the thickness W5 of the spacer 6B (W3 = W5).

Therefore, in the present embodiment, since the main body portion 43 and the second electrode 5 in the first electrode 4B can be kept in a close state, even a slight load can be detected with high accuracy. Further, a convex portion is provided at a slightly center of the second electrode 5, and the convex portion may be opposed to the insertion portion 40 of the first electrode 4B.

Further, in the present embodiment, in the region D including the first electrode 4B and the second electrode 5, since the first surface 21 and the second surface 31 are substantially parallel, even if the pressure sensitive detector 1B is used for a long period of time, Ensure stable pressure characteristics. Further, in the present embodiment, the minimum continuous region D1 surrounding the first electrode 4B is equal to the minimum continuous region D2 surrounding the second electrode 5 (D1 = D2) as viewed in plan, and the above regions D1 and D2 correspond to the above region. D.

Further, the thickness W3 of the insertion portion 40 has substantially the same thickness as the thickness W5 of the spacer, and substantially depends only on the thickness W4 of the first electrode layer 41. Further, the spacer 6B is interposed between the flange portion 44 and the second electrode 5. therefore, The initial load applied between the contact portions depends only on the thickness W4 of the first electrode layer 41, and is hardly affected by the thickness deviation of the other electrode layers. As a result, stable initial pressure sensitive characteristics can be ensured. Moreover, the insertion portion 40B of the first electrode 4B in the present embodiment is also separated from the inner wall surface of the opening 61 of the spacer 6B. Therefore, the pressing operation of the pressure-sensing detector 1B can be smoothly performed, and the thickness of the end portion of the insertion portion 40B can be absorbed in the radial direction (the horizontal direction in FIG. 2) of the first electrode 4B.

Further, as the film thickness of the electrode layer is larger, the film thickness deviation is larger, and the initial load is likely to be different from the design value. Therefore, when the second electrode layer 42 is formed to be relatively thicker than the first electrode layer 41, the film thickness deviation of the first electrode layer 41 is relatively small, and a more stable initial pressure sensitive characteristic can be secured.

Further, in the case of the present embodiment, the flange portion 44 formed around the main body portion 43 is formed, and since the flange portion 44 can also be used as a pressure sensitive detector, the resistance change of the pressure sensitive detector can be increased. , improve the pressure characteristics.

<<Third embodiment>>

Fig. 4 is a cross-sectional view showing the pressure sensitive detector 1C in the third embodiment of the present invention. Here, the pressure sensitive detector 1C in the third embodiment is different from the second embodiment except for the first electrode 4C, and only the portion different from the second embodiment will be described, and the second embodiment The same portions are denoted by the same reference numerals as those of the second embodiment, and the description is omitted.

As shown in FIG. 4, the first electrode 4C in the present embodiment has a first detecting electrode 45 and a first dummy electrode 46 which is formed apart from the first detecting electrode 45 in the radial direction.

The first detecting electrode 45 is provided by the first substrate 2 The first electrode layer 41 on the surface 21 and the second electrode layer 421B formed to cover the first electrode layer 41 are formed.

On the other hand, the first dummy electrode 46 is formed around the first detecting electrode 45 on the first surface 21 of the first substrate 2, and is composed only of the second electrode layer 422B. Further, the second electrode layer 422B can be formed in the same manner as the second electrode layer 42. Further, the layer configuration of the first dummy electrode 46 is not limited to the second electrode layer 422B. For example, the first dummy electrode 46 may be composed only of the first electrode layer 41, or may be composed of two layers of the first electrode layer 41 and the second electrode layer 422B. The first dummy electrode 46 in this embodiment corresponds to an example of the low back of the present invention.

The second electrode layer 421B of the first detecting electrode 45 and the second electrode layer 422B of the first dummy electrode 46 are formed by simultaneous printing and re-hardening. Therefore, the thickness W6 of the second electrode layer 421B covering the first electrode layer 41 is substantially equal to the thickness W7 of the first dummy electrode 46 (W6=W7). Further, the first detecting electrode 45 has an insertion portion 40B that protrudes toward the lower side of the fourth drawing from the first dummy electrode 46. The thickness W8 of the insertion portion 40B is substantially equal to the thickness W4 of the first electrode layer 41 (W8). =W4).

In the present embodiment, the spacer 6C is interposed between the first dummy electrode 46 and the second electrode 5. For the spacer 6C, the same material as the spacer 6 can be used.

In the spacer 6C, an opening 61 is provided corresponding to the first electrode layer 41, and the insertion portion 40B of the first detecting electrode 45 is inserted into the opening 61. Further, the thickness W8 of the insertion portion 40B is substantially equal to the thickness W9 of the spacer 6C (W8 = W9). Therefore, in the present embodiment, the state in which the first detecting electrode 45 and the second electrode 5 in the first electrode 4C are kept close to each other can be maintained. High accuracy detects all loads that contain tiny loads. Further, a convex portion is provided at a substantially central portion of the second electrode 5, and the convex portion may have a configuration facing the second electrode layer 421B.

Further, in the present embodiment, in the region D including the first electrode 4C and the second electrode 5, since the first surface 21 and the second surface 31 are substantially parallel, even if the pressure sensitive detector 1C is used for a long period of time, Ensure stable pressure characteristics. Further, in the present embodiment, the minimum continuous region D1 surrounding the first electrode 4C and the minimum continuous region D2 surrounding the second electrode 5 are equal to each other as viewed in a plane (D1 = D2), and the above regions D1 and D2 correspond to the above region. D.

Further, the thickness W8 of the insertion portion 40B has substantially the same thickness as the thickness W9 of the spacer, and substantially depends only on the thickness W4 of the first electrode layer 41. Further, the spacer 6C is interposed between the flange portion 422B and the second electrode 5. Therefore, the initial load applied between the contact portions depends only on the thickness W4 of the first electrode layer 41, and is hardly affected by the thickness deviation of the other electrode layers. As a result, stable initial pressure sensitive characteristics can be ensured. Further, the insertion portion 40B of the first electrode 4C in the present embodiment is also separated from the inner wall surface of the opening 61 of the spacer 6C. Therefore, the pressing operation of the pressure sensitive detector 1C can be smoothly performed, and the thickness deviation of the end portion of the insertion portion 40B in the radial direction (the horizontal direction in FIG. 4) of the first electrode 4C can be absorbed.

<<Fourth embodiment>>

Fig. 5 is a cross-sectional view showing the pressure sensitive detector 1D in the fourth embodiment of the present invention. The pressure sensitive detector 1D in the fourth embodiment is different from the third embodiment except that the second electrode 5B is different, and only the portion different from the third embodiment is explained, and the third embodiment or the first The same part of the embodiment, attached and third The same reference numerals are used for the embodiments or the first embodiment, and the description is omitted.

As shown in FIG. 5, the second electrode 5B in the present embodiment has the second detecting electrode 53 that is disposed to face the first detecting electrode 45 and the second detecting electrode 53 that is disposed apart from the second detecting electrode 53. The dummy electrode 54 is provided.

The second detecting electrode 53 is composed of a third electrode layer 511 provided on the second surface 31 of the second substrate 3 and a fourth electrode layer 521 formed to cover the third electrode layer 511.

On the other hand, the second dummy electrode 54 is formed around the second detecting electrode 53 on the second surface 31 of the second substrate 3. The second dummy electrode 54 is composed of a third electrode layer 512 provided on the second surface 31 of the second substrate 3 and a fourth electrode layer 522 formed to cover the third electrode layer 512. Further, the third electrode layers 511 and 512 and the third electrode layer 51 are formed by using the same material and method as the fourth electrode layers 521 and 522 and the fourth electrode layer 52. Further, the second dummy electrode 54 is not limited to the above configuration, and may be constituted only by the third electrode layer 512 or the fourth electrode layer 522.

In the present embodiment, the second detecting electrode 53 has a width equal to that of the first detecting electrode 45, but is not particularly limited thereto. Further, the second dummy electrode 54 has a width equal to that of the first dummy electrode 46, but is not particularly limited thereto. Incidentally, in the present embodiment, also in the region D including the first electrode 4C and the second electrode 5B, the first surface 21 and the second surface 31 are substantially parallel. Further, in the present embodiment, the minimum continuous region D1 surrounding the first electrode 4C and the minimum continuous region D2 surrounding the second electrode 5B are also equal (D1 = D2) as viewed in plan, and the above regions D1 and D2 correspond to the above region D. .

Moreover, in this embodiment, it is also possible to obtain the same as the third embodiment. The effect of the effect.

The embodiments described above are described in order to facilitate the understanding of the present invention and are not intended to limit the present invention. Therefore, each element disclosed in the above embodiments is intended to include all design changes or equivalents falling within the technical scope of the present invention.

For example, the configurations described in the first to fourth embodiments may be reversed. In other words, the first electrode is provided on the first surface 21 of the first substrate 2, and the first electrode is provided on the second surface 31 of the second substrate 3.

In addition, for example, at least one of the first electrode and the second electrode may be formed by dispersing a conductive paste rich in elastic beads such as nylon, and a layer containing elastic beads may be formed on the surface of the electrode. Therefore, as long as the surface of the electrode contains a portion of the elastic beads, the surface of the electrode has an uneven shape. Therefore, the change in resistance between the first and second electrodes becomes gentle with respect to the load change applied to the pressure sensitive detector, and the detection of the load can be performed more accurately. Further, in this case, the surface of the electrode has a concavo-convex shape, and since the film thickness deviation becomes large, the initial load may become easier to differ from the design value. However, even in this case, the electrode layer in contact with the spacer 6 is hardly affected by the thickness deviation of the above electrode layer. Therefore, while maintaining this effect, the correct load detection due to the above-described gentle resistance change can be achieved.

[Examples]

Hereinafter, the effects of the present invention will be confirmed by further embodying the examples and comparative examples of the present invention. The following examples and comparative examples were used to confirm the temporal stability of the pressure sensitive characteristics in the above examples.

<Example 1>

In the first embodiment, the pressure sensitive detector shown in Fig. 2 explained in the second embodiment is produced.

Specifically, first, a polyethylene paste (FA) is printed on the first substrate 2 by a screen printing method using polyethylene terephthalate (PET) having a thickness of 100 [μm (micrometer)]. -353 Fujikura Kasei Co., Ltd.) was dried and cured at a temperature of 150 ° C for 30 minutes to form a first electrode layer 41 having a thickness of 10 [μm (micrometer)] of 6 [mm (mm)].

Next, the same printing was carried out on the first electrode layer 41 using a carbon paste (BTU-500k (ASA) ASAHI Chemical Research Institute), and dried and cured at a temperature of 150 ° C for 60 minutes to form a thickness of 10 [μm (micrometer)] The second electrode layer 42 having a diameter of 8 [mm (mm)] is combined with the first electrode layer 41 as the first electrode 4B.

Then, the second substrate 3 is formed with a third electrode layer 51 having a thickness of 10 [μm (micrometer)] and a diameter of 7.5 [mm (mm)] according to conditions equivalent to those of the first substrate 2.

Then, the fourth electrode layer 52 having a thickness of 10 [μm (micrometer)] diameter of 8 [mm (mm)] is formed under the same conditions as the second electrode layer 42, and is combined with the third electrode layer 51 as the second Electrode 5.

Next, as the spacer 6B, a double-sided adhesive sheet (manufactured by TL-410S-02 LINTEC Co., Ltd.) having a thickness of 10 [mm (mm)] of the opening 61 (manufactured by TL-410S-02 LINTEC Co., Ltd.) is provided, and the center of the opening 61 and the first The center of the electrode 4B corresponds to the end of the first electrode 4B. Then, the first electrode 4B faces the second electrode 5, and the second substrate 3 is attached to the first substrate 2, whereby the pressure-sensing detector 1B is produced.

The following two tests were carried out on the sample of Example 1 having the above-described configuration.

The first test is a measurement test of the load and resistance values as follows. Specifically, the first electrode 4B and the second electrode 5 of the pressure sensitive detector 1B are connected to the pressure detecting device, and the starter of Φ 20 mm, rubber hardness of 20 degrees, and flat silicone is measured at a starter speed of 1 mm/min. The relationship between the load and the resistance value.

In addition, the second test is a test for confirming the change with time in the relationship between the negative cut and the resistance value. Specifically, in the above-described conditions, immediately after the pressure-sensing detector 1B is manufactured, the relationship between the load and the resistance value is measured, and the relationship between the load and the resistance value measured 200 hours after the pressure-sensing detector 1B is produced.

<Example 2>

In the second embodiment, the flange portion 44 of the first electrode 4B is omitted, and a double-sided bonded sheet (manufactured by LINTEC Co., Ltd.) having a thickness of 20 [μm (micrometer)] is used as the spacer 6, and the diameter of the first electrode layer 41 is 5 [ Mm (mm)], the diameter of the second electrode layer 42 is 6 [mm (mm)], the diameter of the third electrode layer 51 is 8 [mm (mm)], and the diameter of the fourth electrode layer 52 is 9 [mm] In the same manner as in the first embodiment, the pressure-sensing detector 1 having the configuration described in Fig. 1 was produced.

With respect to this pressure-sensing detector 1, the above two tests were carried out under the same conditions as in the first embodiment.

<Example 3>

In the third embodiment, the pressure sensitive detector 1D having the structure shown in Fig. 5 is produced.

Specifically, the first electrode layer 41 having a thickness of 10 [μm (micrometer)] and a diameter of 4 [mm (mm)] was formed on the first substrate 2 in the same manner as in the first embodiment. Then, the second electrode layer 421B having a thickness of 10 [μm (micrometer)] and a diameter of 4.5 [mm (mm)] is formed on the first electrode layer 41, and is 3.5 [mm (m) from the center of the second electrode layer 421B. MM)], reach the width The second electrode layer 422B is formed at the center of the second electrode layer 422B of 2.0 [mm (mm)].

Next, on the second substrate 3, a third electrode layer 511 having a thickness of 10 [μm (micrometer)] and a diameter of 4 [mm (mm)] is formed in the same manner as in the first embodiment, and the third electrode layer is separated from the third electrode layer. At the center of 3.5 [mm (mm)] of 511, the center of the third electrode layer 512 having a width of 1.0 [mm (mm)] is reached, and the third electrode layer 512 is formed. Then, a fourth electrode layer 521 having a thickness of 10 [μm (micrometer)] and a diameter of 4.5 [mm (mm)] is formed on the third electrode layer 511, and a thickness of 10 [μm (micrometer) is formed on the third electrode layer 512. The fourth electrode layer 522 having a width of 2.0 [mm (mm)]. Then, the first substrate 2 is attached to the second substrate 3 by the same method as in the first embodiment, and the pressure-sensing detector 1D is produced.

With respect to the pressure sensitive detector 1D, the above-described measurement test of the load and the resistance value was carried out under the same conditions as in the first embodiment.

<Comparative Example 1>

In Comparative Example 1, a pressure-sensing detector having the same configuration as that of the first embodiment was produced except for the same configuration as the first electrode and the second electrode 5.

With respect to this pressure-sensing detector, the above-described measurement test of the load and the resistance value was carried out under the same conditions as in the first embodiment.

<Comparative Example 2>

In the second comparative example, a pressure-sensing detector having the configuration shown in Fig. 6 was produced in the same manner as in the first embodiment except that the second electrode 5C was the same as the first electrode 4B. In this case, in the region D including the first electrode 4B and the second electrode 5C, the first surface 21 and the second surface 31 are not parallel. Further, in this example, the smallest continuous region D1 surrounding the first electrode 4B and the second electrode are viewed as a plane. The minimum continuous region D2 of 5C is equal (D1=D2), and the above regions D1 and D2 correspond to the region D.

With respect to this pressure sensor, the above two tests were carried out under the same conditions as in the above-described first embodiment.

<Comparative Example 3>

In the comparative example 3, in the same manner as in the first embodiment, the pressure sensitive detection of the configuration described in the second embodiment of the above-mentioned Patent Document 1 was produced, except that the spacer was not attached to the first electrode. Device.

With respect to this pressure-sensing detector, the above-described load and resistance value measurement test was also performed under the same conditions as in the first embodiment.

Figures 7, 8 and 1 show the measurement results of Example 1, and Figures 7, 9 and 1 show the measurement results of Example 2, Figure 7 shows the measurement results of Example 3, and Figure 7 shows Comparative Example 1. The measurement results, Figs. 7, 10 and Table 1 show the measurement results of Comparative Example 2, and Fig. 7 shows the measurement results of Comparative Example 3.

According to the results shown in Fig. 7, it is understood that the resistance value of the pressure-sensing detector of the first embodiment is about 100,000 Ω when the load is 0N, and the resistance value is about 900 Ω when the load is 5N. Further, it is understood that the resistance value of the pressure-sensing detector of the second embodiment is about 30,000 Ω when the load is 0N, and the resistance value is about 1500 Ω when the load is 5N. Also, understand the load when the 0N The resistance detector of the third embodiment has a resistance value of about 100,000 Ω, and the resistance value is about 1500 Ω when the load is 5N.

On the other hand, according to the results shown in Fig. 7, it is understood that the voltage-sensing detector of Comparative Example 1 does not change the resistance value until the load reaches 0.6 N, and the load of the imprint cannot be detected. Further, the resistance values of the pressure-sensing detectors of Comparative Example 2 and Comparative Example 3 when the load was 5 N were about 2000 Ω and 250 Ω, respectively, and the resistance values were about 4500 Ω and about 1500 Ω when the load was 0 N. Therefore, the amount of change in the resistance value of the voltage-sensing detectors of Comparative Examples 2 and 3 when the load is 0N to 5N is compared with the amount of change in the resistance value of the pressure-sensing detectors of Embodiments 1 to 3 when the load is 0N to 5N. Larger and smaller.

Further, according to the results shown in Figs. 8, 9 and 1, the pressure-sensing detectors of the first embodiment and the second embodiment are immediately after the load and the resistance value after the production, and the load after 200 hours from the start of the production. The difference between the characteristics of the resistance value and the characteristic of the resistance value was not observed, and the change with time of the characteristics of the load and the resistance value was small.

On the other hand, in the pressure-sensing detector of Comparative Example 2, according to the results of FIG. 10 and Table 1, the load and the resistance value immediately after the production and the characteristics of the load and the resistance value after 200 hours from the start of the production were obtained. The difference is seen between, and it is understood that the characteristics of the load and the resistance value change greatly with time.

As described above, according to the pressure-sensing detector 1B of the first embodiment, it is possible to detect the micro load as a larger resistance value with high accuracy, and to confirm that the pressure-sensing characteristics which are stable over a long period of use can be ensured.

1‧‧ ‧ Pressure Detector

2‧‧‧1st substrate

21‧‧‧ first side

3‧‧‧2nd substrate

31‧‧‧2nd

4‧‧‧1st electrode

41‧‧‧1st electrode layer

42‧‧‧2nd electrode layer

5‧‧‧2nd electrode

51‧‧‧3rd electrode layer

52‧‧‧4th electrode layer

6‧‧‧ Spacer

61‧‧‧ openings

62‧‧‧above

63‧‧‧ below

D‧‧‧ area

D1‧‧‧Minimum continuous area

D2‧‧‧Minimum continuous area

Claims (8)

A pressure sensor includes: a first substrate; a second substrate facing the first substrate; a first electrode disposed on a first surface of the first substrate; and a second electrode opposite to the first electrode a spacer disposed on the second surface of the second substrate; and a spacer having an opening between the first substrate and the second substrate at a position corresponding to the first electrode and the second electrode; Only the first electrode of the first electrode and the second electrode has an insertion portion inserted into the opening; the total thickness of the insertion portion has a thickness substantially the same as a thickness of the spacer; and the first electrode a part of the first substrate or the first substrate is in contact with one surface of the spacer; a part of the surface of the second electrode closest to the first substrate is in contact with the other surface of the spacer, and includes the first electrode and the first In the region of the two electrodes, the first surface is substantially parallel to the second surface. The pressure-sensing device according to claim 1, wherein the insertion portion is spaced apart from an inner wall surface of the opening. The pressure-sensing detector according to claim 1 or 2, wherein the first electrode has: The main body portion includes the insertion portion, and the lower back portion is disposed around the main body portion and has a height lower than the main body portion. The lower back portion is in contact with one surface of the spacer piece. The pressure-sensing device according to claim 3, wherein the main body portion includes: a first electrode layer provided on the first substrate; and a second electrode layer provided to cover the first electrode layer The resistance value is higher than a resistance value of the first electrode layer; and the low back includes the first electrode layer or the second electrode layer. The pressure-sensing device according to claim 4, wherein the first electrode layer and the second electrode layer have different thicknesses; and the low back portion has a thickness of the first electrode layer or the first Among the thicknesses of the two electrode layers, an electrode layer having a thickness substantially equal to the thickness of the larger one may be provided. The pressure-sensing device according to claim 3, wherein the low back portion is continuously formed in the radial direction from the main body portion. The pressure-sensing device according to claim 3, wherein the low back portion is a dummy electrode formed in a radial direction from the main body portion. The pressure-sensing device according to claim 1, wherein at least one of the first electrode layer or the second electrode layer has a surface layer containing elastic beads.