WO2009075403A1 - High-temperature tactile sensor and method of manufacturing the same - Google Patents

High-temperature tactile sensor and method of manufacturing the same Download PDF

Info

Publication number
WO2009075403A1
WO2009075403A1 PCT/KR2007/006845 KR2007006845W WO2009075403A1 WO 2009075403 A1 WO2009075403 A1 WO 2009075403A1 KR 2007006845 W KR2007006845 W KR 2007006845W WO 2009075403 A1 WO2009075403 A1 WO 2009075403A1
Authority
WO
WIPO (PCT)
Prior art keywords
resistance
electrode pattern
forming
patterns
tactile sensor
Prior art date
Application number
PCT/KR2007/006845
Other languages
French (fr)
Inventor
Jong-Ho Kim
Hyun-Joon Kwon
Yon-Kyu Park
Min-Seok Kim
Dae-Im Kang
Jae-Hyuk Choi
Original Assignee
Korea Research Institute Of Standards And Science
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Research Institute Of Standards And Science filed Critical Korea Research Institute Of Standards And Science
Publication of WO2009075403A1 publication Critical patent/WO2009075403A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
    • H01C17/06513—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component
    • H01C17/0652—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component containing carbon or carbides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
    • H01C17/06573—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the permanent binder
    • H01C17/06586—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the permanent binder composed of organic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Definitions

  • the present invention relates to a tactile sensor and a method of manufacturing the same, and more particularly to a tactile sensor having a resistance pattern having abrasion resistance and excellent stability even at a high temperature and a method of manufacturing the same.
  • a tactile function for obtaining information regarding circumferential environment through touch for example, a contact force, vibration, surface roughness, heat conductivity versus temperature change and the like has been used for advanced information collection.
  • a biomimetic tactile sensor capable of replacing tactile sensation can be used for microsurgery of blood vessels, various medical diagnoses such as a cancer diagnosis and treatment. Further, the biomimetic tactile sensor can be applied to tactile display technology which will be important for virtual environment technology in the future.
  • the tactile sensor has been widely used in an industrial robot, a mouse, a touch pad and the like.
  • electrode patterns are formed on two films and resistance patterns are formed on the electrode patterns.
  • the tactile sensor detects whether there is a contact or not from a contact resistance between the two resistance patterns.
  • the resistance patterns forming the tactile sensor are formed of a composite material in which carbon black, ink, polydimethylsiloxane (PDMS) and polyurethane are mixed at a specified ratio. Since the resistance patterns have low abrasion resistance and impact resistance, the resistance patterns may be damaged in the operation to cause a malfunction. Further, there is a problem that it is difficult to adhere the resistance patterns to a film made of polyimide. Further, there is a problem that the resistance patterns cannot be used at a high temperature equal to or larger than 200 ° C.
  • the present invention has been made in view of the above problems, and it is an object of the present invention to provide a high-temperature tactile sensor having a resistance pattern capable of being operated even at a high temperature and a method of manufacturing the same. Further, it is another object of the present invention to provide a high-temperature tactile sensor having a resistance pattern with high abrasion resistance and impact resistance and a method of manufacturing the same.
  • a high-temperature tactile sensor comprising: an upper plate which is configured by forming an electrode pattern made of a conductive material on one surface of an upper film and forming a resistance pattern on a surface of the electrode pattern; and a lower plate which is configured by forming an electrode pattern made of a conductive material on one surface of a lower film and forming a resistance pattern on a surface of the electrode pattern, wherein the resistance patterns are arranged to face each other and spacers are installed between the resistance patterns to stack the upper plate and the lower plate, and wherein the resistance patterns are formed by mixing carbon nanotubes (CNTs) with a liquid polymer having excellent heat resistance and abrasion resistance.
  • CNTs carbon nanotubes
  • a method of manufacturing a tactile sensor comprising: an upper plate manufacturing process (PlI) in which an electrode pattern and a resistance pattern are sequentially formed on one surface of an upper film; a lower plate manufacturing process (P12) in which an electrode pattern and a resistance pattern are sequentially formed on one surface of a lower film; and a stacking process (P2) in which the upper and lower plates are stacked such that the resistance patterns face each other, and wherein in the upper plate manufacturing process and the lower plate manufacturing process, the resistance patterns are formed by screen printing a liquid in which liquid polyimide is mixed with carbon nanotube (CNT) powder.
  • PlI upper plate manufacturing process
  • P12 lower plate manufacturing process
  • P2 stacking process
  • the resistance patterns are formed by screen printing a liquid in which liquid polyimide is mixed with carbon nanotube (CNT) powder.
  • FIG. 1 illustrates a cross-sectional view of a high- temperature tactile sensor according to the present invention
  • FIGS. 2 to 6 illustrate cross-sectional views showing a process of manufacturing the high-temperature tactile sensor according to the present invention
  • FIGS. 2 and 3 illustrate cross-sectional views showing a process of manufacturing an upper plate
  • FIGS. 4 and 5 illustrate cross- sectional views showing a process of manufacturing a lower plate
  • FIG. ⁇ illustrates a cross-sectional view showing a process of stacking the upper plate and the lower plate
  • FIG. 7 illustrates a diagram for explaining a process of manufacturing the high-temperature tactile sensor according to the present invention.
  • FIG. 1 illustrates a cross-sectional view of a high- temperature tactile sensor according to the present invention.
  • FIGS. 2 to ⁇ illustrate cross-sectional views showing a process of manufacturing the high-temperature tactile sensor according to the present invention.
  • FIGS. 2 and 3 illustrate cross-sectional views showing a process of manufacturing an upper plate.
  • FIGS. 4 and 5 illustrate cross-sectional views showing a process of manufacturing a lower plate.
  • FIG. 6 illustrates a cross-sectional view showing a process of stacking the upper plate and the lower plate.
  • the high-temperature tactile sensor according to the present invention is characterized by that resistance patterns are formed of carbon nanotubes.
  • the tactile sensor according to the present invention includes an upper plate 1 which is configured by forming an electrode pattern 12 made of a conductive material on one surface of an upper film 11 and forming a resistance pattern 13 on the surface of the electrode pattern 12, and a lower plate 2 which is configured by forming an electrode pattern 22 made of a conductive material on one surface of a lower film 21 and forming a resistance pattern 23 on the surface of the electrode pattern 22.
  • the tactile sensor is configured by arranging the resistance patterns 13 and 23 to face each other and installing spacers 3 between the resistance patterns 13 and 23.
  • the resistance patterns 13 and 23 are configured by mixing carbon nanotubes (CNTs) with polyimide.
  • a polymer film (a polyimide film, a polyester film or the like) is used as the upper and lower films 11 and 21 for manufacturing the tactile sensor. Particularly, it is preferable to use a polyimide film having excellent heat resistance and abrasion resistance as a substrate.
  • the electrode patterns 12 and 22 are formed by depositing one selected from a group consisting of titanium, nickel, gold and copper using an E-beam or sputtering device. Further, the electrode patterns are formed by plating for convenience of the process.
  • the upper and lower films 11 and 21 and the electrode patterns 12 and 22 are manufactured by a FPCB process to simplify the manufacturing process and reduce the manufacturing cost .
  • the resistance patterns 13 and 23 are mixtures of a liquid polymer having excellent heat resistance and abrasion resistance and carbon nanotubes, which are formed by mixing carbon nanotubes with a liquid polymer.
  • a mixing ratio of carbon nanotubes may be adjusted according a desired surface resistance, a mixed amount of carbon nanotubes is 0.5 weight % to 8 weight % with respect to the total mixture with regard to the characteristics of the tactile sensor.
  • a polyimide-based material having excellent heat resistance and abrasion resistance is used as a liquid polymer.
  • the resistance patterns will fail to serve as a resistor due to increased conductivity. If the amount of carbon nanotubes is excessively small, the resistance patterns will serve as an insulator and fail to serve as a resistor.
  • the resistance patterns 13 and 23 are formed by a screen printing method.
  • the resistance patterns 13 and 23 are formed by printing liquid polyimide mixed with carbon nanotubes only on a pattern formation portion.
  • the upper and lower plates 1 and 2 with the resistance patterns 13 and 23 formed thereon may be cured at a temperature of 200 ° C to 400 ° C to improve strength and abrasion resistance of the resistance patterns.
  • the upper and lower films 11 and 21 are manufactured to have a thickness of 10 ⁇ m to 150 ⁇ m.
  • the electrode pattern and the resistance pattern are sequentially formed on one surface of the upper film.
  • the electrode pattern and the resistance pattern are sequentially formed on one surface of the lower film.
  • the upper and lower plates are arranged such that the resistance patterns face each other, and the spacers are installed between the resistance patterns.
  • the resistance patterns are formed by screen printing a liquid in which liquid polyimide is mixed with carbon nanotube (CNT) powder.
  • the upper plate manufacturing process includes a step of coating the electrode pattern 12 made of a conductive material on one surface of the upper film 11 made of a polymer film, and a step of forming the resistance pattern 13 by screen printing a liquid in which liquid polyimide is mixed with carbon nanotube (CNT) powder on the surface of the formed electrode pattern 12.
  • CNT carbon nanotube
  • the electrode patterns 12 and 22 are formed using an E-beam deposition method, a sputtering method or a plating method.
  • the carbon nanotubes forming the resistance patterns 13 and 23 occupy 0.5 weight % to 8 weight % with respect to the total weight of the mixture of polyimide and carbon nanotubes.
  • the resistance patterns 13 and 23 are formed by a screen printing method.
  • a curing process is performed at a temperature of 200 ° C to 450 ° C on the upper and lower plates manufactured in the upper and lower plate manufacturing processes. The curing process is performed to harden the resistance patterns 13 and 23 so that they have higher strength. As the resistance patterns are hardened through the curing process, abrasion resistance and impact resistance are further improved.
  • the lower plate manufacturing process is performed in the similar way as the above-described upper plate manufacturing process .
  • a process of installing the spacers 3 may be selectively performed. That is, the spacers 3 may be further installed in a space between the resistance patterns such that the resistance patterns 13 and 23 are not in contact with each other.
  • the upper and lower plates 1 and 2 are bonded to each other using a thermal adhesive double-sided tape or a thermal adhesive tape for film adhesion.
  • a high-temperature tactile sensor having a resistance pattern with high abrasion resistance and impact resistance by forming the resistance pattern using carbon nanotubes having excellent abrasion resistance and impact resistance.
  • the resistance pattern is formed by screen printing carbon nanotubes mixed with a liquid polymer and then cured. Accordingly, it is possible to use the tactile sensor even at a high temperature.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

A tactile sensor having a resistance pattern having abrasion resistance and excellent stability even at a high temperature and a method of manufacturing the same are disclosed. The high-temperature tactile sensor includes an upper plate which is configured by forming an electrode pattern made of a conductive material on one surface of an upper film and forming a resistance pattern on a surface of the electrode pattern, and a lower plate which is configured by forming an electrode pattern made of a conductive material on one surface of a lower film and forming a resistance pattern on a surface of the electrode pattern, wherein the resistance patterns are arranged to face each other and spacers are installed between the resistance patterns to stack the upper and lower plates, and wherein the resistance patterns are formed by mixing carbon nanotubes (CNTs) with polyimide.

Description

HIGH-TEMPERATURE TACTILE SENSOR AND METHOD OF MANUFACTURING THE SAME
BACKGROUND OF THE INVENTION
Field of the Invention
The present invention relates to a tactile sensor and a method of manufacturing the same, and more particularly to a tactile sensor having a resistance pattern having abrasion resistance and excellent stability even at a high temperature and a method of manufacturing the same.
Description of the Related Art
Recently, a tactile function for obtaining information regarding circumferential environment through touch, for example, a contact force, vibration, surface roughness, heat conductivity versus temperature change and the like has been used for advanced information collection. A biomimetic tactile sensor capable of replacing tactile sensation can be used for microsurgery of blood vessels, various medical diagnoses such as a cancer diagnosis and treatment. Further, the biomimetic tactile sensor can be applied to tactile display technology which will be important for virtual environment technology in the future. The tactile sensor has been widely used in an industrial robot, a mouse, a touch pad and the like.
In the tactile sensor, electrode patterns are formed on two films and resistance patterns are formed on the electrode patterns. The tactile sensor detects whether there is a contact or not from a contact resistance between the two resistance patterns. The resistance patterns forming the tactile sensor are formed of a composite material in which carbon black, ink, polydimethylsiloxane (PDMS) and polyurethane are mixed at a specified ratio. Since the resistance patterns have low abrasion resistance and impact resistance, the resistance patterns may be damaged in the operation to cause a malfunction. Further, there is a problem that it is difficult to adhere the resistance patterns to a film made of polyimide. Further, there is a problem that the resistance patterns cannot be used at a high temperature equal to or larger than 200 °C.
SUMMARY OF THE INVENTION
Therefore, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a high-temperature tactile sensor having a resistance pattern capable of being operated even at a high temperature and a method of manufacturing the same. Further, it is another object of the present invention to provide a high-temperature tactile sensor having a resistance pattern with high abrasion resistance and impact resistance and a method of manufacturing the same. In accordance with an aspect of the present invention, there is provided a high-temperature tactile sensor comprising: an upper plate which is configured by forming an electrode pattern made of a conductive material on one surface of an upper film and forming a resistance pattern on a surface of the electrode pattern; and a lower plate which is configured by forming an electrode pattern made of a conductive material on one surface of a lower film and forming a resistance pattern on a surface of the electrode pattern, wherein the resistance patterns are arranged to face each other and spacers are installed between the resistance patterns to stack the upper plate and the lower plate, and wherein the resistance patterns are formed by mixing carbon nanotubes (CNTs) with a liquid polymer having excellent heat resistance and abrasion resistance. In accordance with another aspect of the present invention, there is provided a method of manufacturing a tactile sensor comprising: an upper plate manufacturing process (PlI) in which an electrode pattern and a resistance pattern are sequentially formed on one surface of an upper film; a lower plate manufacturing process (P12) in which an electrode pattern and a resistance pattern are sequentially formed on one surface of a lower film; and a stacking process (P2) in which the upper and lower plates are stacked such that the resistance patterns face each other, and wherein in the upper plate manufacturing process and the lower plate manufacturing process, the resistance patterns are formed by screen printing a liquid in which liquid polyimide is mixed with carbon nanotube (CNT) powder.
BRIEF DESCRIPTION OF THE DRAWINGS
The above and other objects, features and other advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:
FIG. 1 illustrates a cross-sectional view of a high- temperature tactile sensor according to the present invention;
FIGS. 2 to 6 illustrate cross-sectional views showing a process of manufacturing the high-temperature tactile sensor according to the present invention; wherein FIGS. 2 and 3 illustrate cross-sectional views showing a process of manufacturing an upper plate, FIGS. 4 and 5 illustrate cross- sectional views showing a process of manufacturing a lower plate, and FIG. β illustrates a cross-sectional view showing a process of stacking the upper plate and the lower plate; and FIG. 7 illustrates a diagram for explaining a process of manufacturing the high-temperature tactile sensor according to the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Hereinafter, a high-temperature tactile sensor and a manufacturing process thereof according to the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 illustrates a cross-sectional view of a high- temperature tactile sensor according to the present invention.
FIGS. 2 to β illustrate cross-sectional views showing a process of manufacturing the high-temperature tactile sensor according to the present invention. FIGS. 2 and 3 illustrate cross-sectional views showing a process of manufacturing an upper plate. FIGS. 4 and 5 illustrate cross-sectional views showing a process of manufacturing a lower plate. FIG. 6 illustrates a cross-sectional view showing a process of stacking the upper plate and the lower plate.
First, the high-temperature tactile sensor according to the present invention is explained.
The high-temperature tactile sensor according to the present invention is characterized by that resistance patterns are formed of carbon nanotubes. The tactile sensor according to the present invention includes an upper plate 1 which is configured by forming an electrode pattern 12 made of a conductive material on one surface of an upper film 11 and forming a resistance pattern 13 on the surface of the electrode pattern 12, and a lower plate 2 which is configured by forming an electrode pattern 22 made of a conductive material on one surface of a lower film 21 and forming a resistance pattern 23 on the surface of the electrode pattern 22. The tactile sensor is configured by arranging the resistance patterns 13 and 23 to face each other and installing spacers 3 between the resistance patterns 13 and 23. The resistance patterns 13 and 23 are configured by mixing carbon nanotubes (CNTs) with polyimide.
A polymer film (a polyimide film, a polyester film or the like) is used as the upper and lower films 11 and 21 for manufacturing the tactile sensor. Particularly, it is preferable to use a polyimide film having excellent heat resistance and abrasion resistance as a substrate.
The electrode patterns 12 and 22 are formed by depositing one selected from a group consisting of titanium, nickel, gold and copper using an E-beam or sputtering device. Further, the electrode patterns are formed by plating for convenience of the process. The upper and lower films 11 and 21 and the electrode patterns 12 and 22 are manufactured by a FPCB process to simplify the manufacturing process and reduce the manufacturing cost .
As described above, the resistance patterns 13 and 23 are mixtures of a liquid polymer having excellent heat resistance and abrasion resistance and carbon nanotubes, which are formed by mixing carbon nanotubes with a liquid polymer. Although a mixing ratio of carbon nanotubes may be adjusted according a desired surface resistance, a mixed amount of carbon nanotubes is 0.5 weight % to 8 weight % with respect to the total mixture with regard to the characteristics of the tactile sensor. A polyimide-based material having excellent heat resistance and abrasion resistance is used as a liquid polymer.
If the amount of carbon nanotubes is excessively large, the resistance patterns will fail to serve as a resistor due to increased conductivity. If the amount of carbon nanotubes is excessively small, the resistance patterns will serve as an insulator and fail to serve as a resistor.
The resistance patterns 13 and 23 are formed by a screen printing method.
That is, the resistance patterns 13 and 23 are formed by printing liquid polyimide mixed with carbon nanotubes only on a pattern formation portion.
Further, the upper and lower plates 1 and 2 with the resistance patterns 13 and 23 formed thereon may be cured at a temperature of 200 °C to 400 °C to improve strength and abrasion resistance of the resistance patterns. In the tactile sensor having the above configuration, the upper and lower films 11 and 21 are manufactured to have a thickness of 10 μm to 150 μm.
A method of manufacturing the tactile sensor having the above configuration according to the present invention is explained below.
In an upper plate manufacturing process PlI, the electrode pattern and the resistance pattern are sequentially formed on one surface of the upper film. In a lower plate manufacturing process P12, the electrode pattern and the resistance pattern are sequentially formed on one surface of the lower film. In a stacking process P2, the upper and lower plates are arranged such that the resistance patterns face each other, and the spacers are installed between the resistance patterns. In the upper plate manufacturing process and the lower plate manufacturing process, the resistance patterns are formed by screen printing a liquid in which liquid polyimide is mixed with carbon nanotube (CNT) powder.
In the method of manufacturing the tactile sensor formed through the above processes, the process of manufacturing the upper and lower plates is described below.
First, the upper plate manufacturing process includes a step of coating the electrode pattern 12 made of a conductive material on one surface of the upper film 11 made of a polymer film, and a step of forming the resistance pattern 13 by screen printing a liquid in which liquid polyimide is mixed with carbon nanotube (CNT) powder on the surface of the formed electrode pattern 12.
In such a process, the electrode patterns 12 and 22 are formed using an E-beam deposition method, a sputtering method or a plating method. The carbon nanotubes forming the resistance patterns 13 and 23 occupy 0.5 weight % to 8 weight % with respect to the total weight of the mixture of polyimide and carbon nanotubes. Further, the resistance patterns 13 and 23 are formed by a screen printing method. Further, a curing process is performed at a temperature of 200 °C to 450 °C on the upper and lower plates manufactured in the upper and lower plate manufacturing processes. The curing process is performed to harden the resistance patterns 13 and 23 so that they have higher strength. As the resistance patterns are hardened through the curing process, abrasion resistance and impact resistance are further improved.
The lower plate manufacturing process is performed in the similar way as the above-described upper plate manufacturing process .
However, if it is necessary to install the spacers 3, a process of installing the spacers 3 may be selectively performed. That is, the spacers 3 may be further installed in a space between the resistance patterns such that the resistance patterns 13 and 23 are not in contact with each other. In a method of bonding the upper and lower plates 1 and 2 using the spacers, the upper and lower plates 1 and 2 are bonded to each other using a thermal adhesive double-sided tape or a thermal adhesive tape for film adhesion.
According to the present invention, it is possible to provide a high-temperature tactile sensor having a resistance pattern with high abrasion resistance and impact resistance by forming the resistance pattern using carbon nanotubes having excellent abrasion resistance and impact resistance.
Further, according to the present invention, the resistance pattern is formed by screen printing carbon nanotubes mixed with a liquid polymer and then cured. Accordingly, it is possible to use the tactile sensor even at a high temperature.
Although the preferred embodiment of the present invention has been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims .

Claims

WHAT IS CLAIMED IS:
1. A high-temperature tactile sensor comprising: an upper plate which is configured by forming an electrode pattern made of a conductive material on one surface of an upper film and forming a resistance pattern on a surface of the electrode pattern; and a lower plate which is configured by forming an electrode pattern made of a conductive material on one surface of a lower film and forming a resistance pattern on a surface of the electrode pattern, wherein the resistance patterns are arranged to face each other and spacers are installed between the resistance patterns to stack the upper plate and the lower plate, and wherein the resistance patterns are formed by mixing carbon nanotubes (CNTs) with a liquid polymer having excellent heat resistance and abrasion resistance.
2. The high-temperature tactile sensor according to claim 1, wherein the carbon nanotubes forming the resistance patterns occupy 0.5 weight % to 8 weight % with respect to a total weight of a mixture of polyimide or high-temperature silicon and carbon nanotubes.
3. The high-temperature tactile sensor according to claim 1 or 2, wherein the resistance patterns are screen printed.
4. The high-temperature tactile sensor according to claim 1 or 2, wherein a polyimide film having excellent abrasion resistance and heat resistance is used as the upper and lower films.
5. A method of manufacturing a tactile sensor comprising: an upper plate manufacturing process (PIl) in which an electrode pattern and a resistance pattern are sequentially formed on one surface of an upper film; a lower plate manufacturing process (P12) in which an electrode pattern and a resistance pattern are sequentially formed on one surface of a lower film; and a stacking process (P2) in which the upper and lower plates are stacked such that the resistance patterns face each other, and wherein in the upper plate manufacturing process and the lower plate manufacturing process, the resistance patterns are formed by screen printing a liquid in which liquid polyimide is mixed with carbon nanotube (CNT) powder.
6. The method according to claim 5, wherein spacers are disposed between the upper plate and the lower plate.
7. The method according to claim 5 or 6, wherein the upper plate manufacturing process includes: coating the electrode pattern made of a conductive material on one surface of the upper film made of a polymer film; and forming the resistance pattern by screen printing a liquid in which liquid polyimide is mixed with carbon nanotube (CNT) powder on a surface of the formed electrode pattern, and wherein the lower plate manufacturing process includes: coating the electrode pattern made of a conductive material on one surface of the lower film made of a polymer film; and forming the resistance pattern by screen printing a liquid in which liquid polyimide is mixed with carbon nanotube (CNT) powder on a surface of the formed electrode pattern.
8. The method according to claim 7, wherein the upper and lower films have a thickness of 10 μm to 150 μm.
9. The method according to claim 8, wherein the electrode patterns are formed using an E-beam deposition method, a sputtering method or a plating method.
10. The method according to claim 9, wherein the carbon nanotubes forming the resistance patterns occupy 0.5 weight % to 8 weight % with respect to a total weight of a mixture of polyimide and carbon nanotubes.
11. The method according to claim 10, wherein the resistance patterns are formed by a screen printing method.
12. The method according to claim 11, wherein a curing process is further performed at a temperature of 200 °C to 450 °C on the upper and lower plates manufactured in the upper and lower plate manufacturing processes.
PCT/KR2007/006845 2007-12-10 2007-12-26 High-temperature tactile sensor and method of manufacturing the same WO2009075403A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2007-0127843 2007-12-10
KR1020070127843A KR20090060877A (en) 2007-12-10 2007-12-10 High temperature tactile sensor and method for manufacturing thereof

Publications (1)

Publication Number Publication Date
WO2009075403A1 true WO2009075403A1 (en) 2009-06-18

Family

ID=40755626

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2007/006845 WO2009075403A1 (en) 2007-12-10 2007-12-26 High-temperature tactile sensor and method of manufacturing the same

Country Status (2)

Country Link
KR (1) KR20090060877A (en)
WO (1) WO2009075403A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102374910A (en) * 2010-08-23 2012-03-14 清华大学 Carbon nanotube / polymer composite membrane array type flexible force sensor and manufacturing method thereof
WO2014119658A1 (en) * 2013-02-04 2014-08-07 株式会社フジクラ Pressure sensitive sensor
GB2563908A (en) * 2017-06-29 2019-01-02 Impact Tech Labs Ag A force sensitive resistor
JP2019200188A (en) * 2018-05-18 2019-11-21 オムロン株式会社 Pressure sensor, pressure sensor module, and robot hand
JP2019200189A (en) * 2018-05-18 2019-11-21 オムロン株式会社 Pressure sensor, pressure sensor module, and robot hand

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101115419B1 (en) * 2009-09-08 2012-02-15 한국표준과학연구원 Method for manufacturing capacitive type force sensor using thermal tape
KR101909490B1 (en) 2012-01-19 2018-10-19 삼성전자주식회사 Flexible tactile sensor apparatus
KR101956105B1 (en) * 2013-03-18 2019-03-13 삼성전자주식회사 Apparatus and method for sensing tactile and method for manufacturing tactile sensing apparatus
KR101477010B1 (en) * 2013-04-18 2014-12-31 안동대학교 산학협력단 A tactile sensor and manufacturing method for thereof
KR102067117B1 (en) * 2018-03-05 2020-01-16 주식회사 카이트로닉스 Pressure distribution sensor
KR102171318B1 (en) 2019-07-10 2020-10-28 한국과학기술원 High Elasticity Polymer Composite Strain Sensor And Method for Manufacturing the Same
CN114112128B (en) * 2021-10-15 2024-01-23 中国人民解放军海军工程大学 Large-range high-temperature-resistant high-pressure-resistant resistance type pressure sensor and preparation method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050103409A (en) * 2004-04-26 2005-10-31 경상대학교산학협력단 Method for nondestructive damage sensing of carbon nanotube and nanofiber/epoxy composites using electro-micromechanical test and acoustic emission
KR20050112917A (en) * 2004-05-28 2005-12-01 한국표준과학연구원 A tactile sensor for measurement force and temperature and its manufacturing method
US20060267140A1 (en) * 2005-05-26 2006-11-30 Korea Advanced Institute Of Science And Technology Electrode layer for capacitors, method of manufacturing the electrode layer, unit sensor using the electrode layer, and tactile sensor using the unit sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050103409A (en) * 2004-04-26 2005-10-31 경상대학교산학협력단 Method for nondestructive damage sensing of carbon nanotube and nanofiber/epoxy composites using electro-micromechanical test and acoustic emission
KR20050112917A (en) * 2004-05-28 2005-12-01 한국표준과학연구원 A tactile sensor for measurement force and temperature and its manufacturing method
US20060267140A1 (en) * 2005-05-26 2006-11-30 Korea Advanced Institute Of Science And Technology Electrode layer for capacitors, method of manufacturing the electrode layer, unit sensor using the electrode layer, and tactile sensor using the unit sensor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MA, HUIZHONG ET AL.: "Electron field emission properties of carbon nanotubes-deposited flexible film", APPLIED SURFACE SCIENCE, vol. 251, 25 April 2005 (2005-04-25), pages 258 - 261 *
QIAN KAIYOU ET AL.: "Simulation and fabrication of carbon nanotubes field emission pressure sensors", APPLIED SURFACE SCIENCE, vol. 252, 1 August 2005 (2005-08-01), pages 4198 - 4201 *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102374910A (en) * 2010-08-23 2012-03-14 清华大学 Carbon nanotube / polymer composite membrane array type flexible force sensor and manufacturing method thereof
WO2014119658A1 (en) * 2013-02-04 2014-08-07 株式会社フジクラ Pressure sensitive sensor
CN104884920A (en) * 2013-02-04 2015-09-02 株式会社藤仓 Pressure sensitive sensor
JP5938111B2 (en) * 2013-02-04 2016-06-22 株式会社フジクラ Pressure sensor
CN104884920B (en) * 2013-02-04 2017-03-15 株式会社藤仓 Voltage sensitive sensor
TWI586946B (en) * 2013-02-04 2017-06-11 Fujikura Ltd Sensing detectors
GB2563908A (en) * 2017-06-29 2019-01-02 Impact Tech Labs Ag A force sensitive resistor
US10876910B2 (en) 2017-06-29 2020-12-29 Nurvv Limited Force sensitive resistor
JP2019200188A (en) * 2018-05-18 2019-11-21 オムロン株式会社 Pressure sensor, pressure sensor module, and robot hand
JP2019200189A (en) * 2018-05-18 2019-11-21 オムロン株式会社 Pressure sensor, pressure sensor module, and robot hand
JP7059795B2 (en) 2018-05-18 2022-04-26 オムロン株式会社 Pressure sensor, pressure sensor module, and robot hand
JP7119566B2 (en) 2018-05-18 2022-08-17 オムロン株式会社 Pressure sensor, pressure sensor module, and robot hand

Also Published As

Publication number Publication date
KR20090060877A (en) 2009-06-15

Similar Documents

Publication Publication Date Title
WO2009075403A1 (en) High-temperature tactile sensor and method of manufacturing the same
Clevenger et al. Binder-free printed PEDOT wearable sensors on everyday fabrics using oxidative chemical vapor deposition
Wang et al. Printed strain sensor with high sensitivity and wide working range using a novel brittle–stretchable conductive network
Liu et al. Skin‐integrated graphene‐embedded lead zirconate titanate rubber for energy harvesting and mechanical sensing
JP5813103B2 (en) Touch position sensor with force measurement
Dinh et al. Advances in rational design and materials of high‐performance stretchable electromechanical sensors
CN104205030B (en) Touch sensor and manufacture method thereof and touch sensor manufacture transfer printing ribbon
US8049591B2 (en) Tactile sensor for curved surface and manufacturing method thereof
CN107003763A (en) Membrane contact sensor and its manufacture method
Hu et al. Nanoengineering ultrathin flexible pressure sensor with superior sensitivity and perfect conformability
KR20190010162A (en) Flexible electronic device and pressure and temperature sensor comprising the same
Farman et al. All-polydimethylsiloxane-based highly flexible and stable capacitive pressure sensors with engineered interfaces for conformable electronic skin
KR100812318B1 (en) A curved surface attaching type tactile sensor and method for manufacturing the same
Shi et al. Flexible electronic skin with nanostructured interfaces via flipping over electroless deposited metal electrodes
JP6257088B2 (en) Capacitance type three-dimensional sensor and manufacturing method thereof
JP2008522374A (en) Foil-type switch element with reinforced carrier foil
Du et al. Flexible and simply degradable MXene–methylcellulose piezoresistive sensor for human motion detection
Cheng et al. Multifunctional Ti3C2Tx MXene/Poly (Styrene‐Methacrylic Acid)@ Polypyrrole Nanospheres/Thermoplastic Polyurethane Electrospinning Membrane for High Sensitivity Pressure Sensing and Pressure‐Electrothermal
JP2003344185A (en) Pressure sensitive sensor
Wang et al. Highly Stable Liquid Metal Conductors with Superior Electrical Stability and Tough Interface Bonding for Stretchable Electronics
Le Goupil et al. Fully Printed Sensors for In Situ Temperature, Heat Flow, and Thermal Conductivity Measurements in Flexible Devices
Gao et al. A method for simultaneously preparing crack-based and composite-based PDMS strain sensors by mixing AgNWs and Ag microparticles
Khan et al. Printing of high concentration nanocomposites (MWNTs/PDMS) using 3D-printed shadow masks
KR101178791B1 (en) Resistive tactile sensor and method of manufacturing thereof
Mosallaei et al. Improvements in the electromechanical properties of stretchable interconnects by locally tuning the stiffness

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07860665

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07860665

Country of ref document: EP

Kind code of ref document: A1