CN104880754A - Sub-wavelength three dimensional spiral circular polarization light filter and manufacturing method thereof - Google Patents
Sub-wavelength three dimensional spiral circular polarization light filter and manufacturing method thereof Download PDFInfo
- Publication number
- CN104880754A CN104880754A CN201510199322.8A CN201510199322A CN104880754A CN 104880754 A CN104880754 A CN 104880754A CN 201510199322 A CN201510199322 A CN 201510199322A CN 104880754 A CN104880754 A CN 104880754A
- Authority
- CN
- China
- Prior art keywords
- dimensional spiral
- circular polarization
- wavelength
- sub
- pillar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Polarising Elements (AREA)
Abstract
The present invention discloses a sub-wavelength three dimensional spiral circular polarization light filter and a manufacturing method thereof. The manufacturing method of the circular polarization light filter comprises the following steps of (1) spin coating a photoresis on a silicon dioxide substrate; (2) writing a three-dimensional spiral nanorod structure directly on the photoresis by a laser direct writing systems, and developing the nanorod structure; (3) introducing into the oxygen and etching by a reaction ion beam to remove the residual photoresist; (4) plating the metal film layers on the transferred silicon dioxide substrate and the three-dimensional spiral nanorod structure by a magnetron sputtering method. The sub-wavelength three dimensional spiral circular polarization light filter and the manufacturing method of the sub-wavelength three dimensional spiral circular polarization light filter of the present invention can distinguish the left-handed and right-handed circular polarized light, and have the characteristics of being simple in structure and being easy to manufacture.
Description
Technical field
The present invention relates to a kind of optical filter, be specifically related to a kind of sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof.
Background technology
In imaging technique, because polarization imaging technology can carry out remote image acquisition operations under rugged environment, in Background suppression noise, raising detection range, minutia acquisition and camouflage of target identification etc., there is absolute predominance.Therefore, it has application widely, such as: the detectable target hidden or pretend; The detecting and identifying of sea and submarine target can be realized; The navigation under smog climatic environment condition can be realized; Effective differentiation metal and insulator or distinguish real goal from decoy; The medical diagnosis such as cancer, burn can be carried out; Can identify object features (as fingerprint etc.); Spaceborne or aerial remote sensing can be realized; Also can combine with other technology, as multispectral polarized ir imaging, the imaging of ultraphotic spectrum polarized ir etc.In polarized light imaging technique, circular polarization imaging because of its unique advantage in bulky grain scattering medium in widespread attention.As in the bottom, smog, cloud layer and biological tissue, the image quality of circularly polarized light is better than linearly polarized light.The people such as S. A. Kartazayeva in 2005 insert the 2951USAF notch cuttype model of chromium plating and are dissolved with in the deionized water of granules of polystyrene (d=10.143um) as the detection of a target.Active Imaging is carried out as driving source respectively with liner polarization and circular polarization light.Result proves that circularly polarized light imaging effect in bulky grain turbid medium has superiority than line polarisation.
The left-handed dextrorotation of circular polarization is distinguished very important in optical image technology.The method that tradition distinguishes left-right rotary circularly polarized light is generally the linearly polarized light with quarter-wave plate, circular polarization being changed into different polarization direction, and then selects analyzer to filter according to required polarization direction.But the band-limited that is suitable for of this method in wave plate bandwidth and also be unfavorable for the miniaturization of element and integrated.In recent years, based on the sub-wavelength structure device of surface plasma-wave and technology as an emerging subject, there is much potential application in a lot of fields, thus more and more receive the concern of people.At present, a large amount of research work has been done utilizing nano-micro structure to distinguish in left-right rotary circularly polarized light by many seminars.2009, the people such as Justyna K. Gansel propose and have made a kind of circular polarization filter of broadband, namely in medium substrate, periodically place spiral metal gold thread, by controlling the sense of rotation of helix, can realize to the selectivity of left-handed and right-circularly polarized light through.They first deposit the negative electrode of indium tin oxide (ITO) as electrochemical deposition of one deck very thin (25nm) on the glass substrate, then positive photoresist is coated, by 3D laser direct writing system, spiral of air line is carved, the electrolytic solution put into again containing gold uses the method for electrochemical deposition that gold is filled into space, finally remove photoresist, obtain the wideband circular polarization sheet at 4um-8um circular dichroism average out to 0.7.This structural manufacturing process is complicated, is difficult to make.The people such as A. Al ù in 2013, utilize the structure that sheet metal Space Rotating is stacking, devise the visible light wave range circular polarization polarizer.They plate Au, SiO on the glass substrate successively
2and photoresist, then with electron beam directly and reactive ion beam etching (RIBE) at SiO
2on obtain 55nm cutting, reuse electron beam evaporation and plate 5nmTi, finally with photoresist stripping technology plating 50nmAu in cutting, obtain sheet metal.Piled up by such technique multiple-layer overlapped, obtain the sheet metal structure that Space Rotating is piled up.The function of the circular dichroism average out to 0.3 circular polarization polarizer is achieved at 500nm-800mn.2014, the people such as Wenshan Cai designed and have made double-deck curved metal (Ag) structure, and experimentally to obtain greatest circle dichromatism at 1.4um place be 0.35.2014, the people such as E.-B. Kley, made 2-D and 3-D starfish appearance metal (Au) structure, wherein three-dimensional structure obtained the circular dichroism of 0.4 at 660nm place.In sum, prior art has structural manufacturing process complexity, and manufacture difficulty is large, or the problem that discrimination is not high.
Summary of the invention
Goal of the invention of the present invention is to provide a kind of sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof, can realize the differentiation to left-right rotary circularly polarized light, and it is simple to have structure, is easy to the feature made.
To achieve the above object of the invention, the technical solution used in the present invention is: a kind of sub-wavelength three-dimensional spiral circular polarization filter, comprise silicon dioxide substrates, be located at the three-dimensional spiral nano-pillar in silicon dioxide substrates and be overlying on the metal film layer on silicon dioxide substrates and three-dimensional spiral nano-pillar surface, the radius of described three-dimensional spiral nano-pillar is 0.7 ~ 1.1um, height is 1.8 ~ 3um, the cycle of each three-dimensional spiral nano-pillar is 1.4 ~ 2.2um, and described metallic film layer thickness is 0.05 ~ 0.15um.
Preferred technical scheme, the radius of described three-dimensional spiral nano-pillar is 0.95um, and height is 2um, and the cycle of each three-dimensional spiral nano-pillar is 1.9um.
Preferred technical scheme, described metallic film layer thickness is 0.1um.
In technique scheme, the material of described metal film layer can adopt gold, silver, aluminium, copper or titanium nitride.
A method for making for sub-wavelength three-dimensional spiral circular polarization filter, comprises the steps:
(1) spin coating photoresist in silicon dioxide substrates;
(2) laser direct writing system is adopted directly to write out three-dimensional spiral nano-pillar structure on a photoresist and develop;
(3) pass into oxygen, adopt reactive ion beam to etch, remove residual photoresist;
(4) in the silicon dioxide substrates shifted and three-dimensional spiral nano-pillar structure, magnetically controlled sputter method is adopted to plate metal film layer.
Principle of the present invention is: because the three-dimensional chiral structure of spatial metal has the feature of circular dichroism, in order to realize the differentiation to left-right rotary circularly polarized light, the present invention designs three-dimensional spiral nano-pillar structure and plates layer of metal thin layer at body structure surface, due to the effect of chiral structure metal surface plasma, this structure is made to have very strong circular dichroism.Can realize the selection of left-right rotary circularly polarized light through effect by designing different helical structures.By the thickness of cycle of reasonably optimizing structure, height and metal level, to realize the differentiation to left-right rotary circularly polarized light, wherein, the cycle wavelength band of larger adaptation is longer, the cycle wavelength band of less adaptation is shorter, and the wavelength band of highly higher adaptation is wider, but manufacture difficulty is also larger.
Because technique scheme is used, the present invention compared with prior art has following advantages:
The present invention designs three-dimensional spiral nano-pillar structure and plates layer of metal thin layer at body structure surface, due to the effect of chiral structure metal surface plasma, this structure is made to have very strong circular dichroism, thus realize the function of circular polarization filter plate, its circular dichroism at 3um-5um wave band on average more than 0.7, and it is simple to have structure, be easy to the advantage made.
Accompanying drawing explanation
Fig. 1 is the structural representation of a primitive of three-dimensional spiral nano-pillar of the present invention in embodiment one.
Fig. 2 be in embodiment one left-right rotary circularly polarized light by the transmittance curve figure of substrate incident by circular polarization filter of the present invention.
Wherein: 1, silicon dioxide substrates; 2, three-dimensional spiral nano-pillar; 3, metal film layer.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described:
Embodiment one: shown in Figure 1, a kind of sub-wavelength three-dimensional spiral circular polarization filter, comprise silicon dioxide substrates 1, be located at the three-dimensional spiral nano-pillar 2 in silicon dioxide substrates and be overlying on the metal film layer 3 on silicon dioxide substrates and three-dimensional spiral nano-pillar surface, the radius of described three-dimensional spiral nano-pillar is r=0.95um, and height is H
1=2um, the cycle of each three-dimensional spiral nano-pillar is P=1.9um, and described metallic film layer thickness is H
2=0.1um.
In the present embodiment, the material of described metal film layer can adopt gold, silver, aluminium, copper or titanium nitride.
A method for making for sub-wavelength three-dimensional spiral circular polarization filter, comprises the steps:
(1) spin coating photoresist in silicon dioxide substrates;
(2) laser direct writing system is adopted directly to write out three-dimensional spiral nano-pillar structure on a photoresist and develop;
(3) pass into oxygen, adopt reactive ion beam to etch, remove residual photoresist;
(4) in the silicon dioxide substrates shifted and three-dimensional spiral nano-pillar structure, magnetically controlled sputter method is adopted to plate metal film layer.
Shown in Figure 2, in 3um-5um wave band circular dichroism on average more than 0.7.
Claims (4)
1. a sub-wavelength three-dimensional spiral circular polarization filter, it is characterized in that: comprise silicon dioxide substrates, be located at the three-dimensional spiral nano-pillar in silicon dioxide substrates and be overlying on the metal film layer on silicon dioxide substrates and three-dimensional spiral nano-pillar surface, the radius of described three-dimensional spiral nano-pillar is 0.7 ~ 1.1um, height is 1.8 ~ 3um, the cycle of each three-dimensional spiral nano-pillar is 1.4 ~ 2.2um, and described metallic film layer thickness is 0.05 ~ 0.15um.
2. a kind of sub-wavelength three-dimensional spiral circular polarization filter according to claim 1, it is characterized in that: the radius of described three-dimensional spiral nano-pillar is 0.95um, height is 2um, and the cycle of each three-dimensional spiral nano-pillar is 1.9um.
3. a kind of sub-wavelength three-dimensional spiral circular polarization filter according to claim 1, is characterized in that: described metallic film layer thickness is 0.1um.
4. a method for making for sub-wavelength three-dimensional spiral circular polarization filter, is characterized in that, comprises the steps:
(1) spin coating photoresist in silicon dioxide substrates;
(2) laser direct writing system is adopted directly to write out three-dimensional spiral nano-pillar structure on a photoresist and develop;
(3) pass into oxygen, adopt reactive ion beam to etch, remove residual photoresist;
(4) in the silicon dioxide substrates shifted and three-dimensional spiral nano-pillar structure, magnetically controlled sputter method is adopted to plate metal film layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510199322.8A CN104880754B (en) | 2015-04-24 | 2015-04-24 | Sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510199322.8A CN104880754B (en) | 2015-04-24 | 2015-04-24 | Sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104880754A true CN104880754A (en) | 2015-09-02 |
| CN104880754B CN104880754B (en) | 2017-07-07 |
Family
ID=53948319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510199322.8A Expired - Fee Related CN104880754B (en) | 2015-04-24 | 2015-04-24 | Sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104880754B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105480939A (en) * | 2015-12-03 | 2016-04-13 | 中国科学院物理研究所 | Preparation method of three-dimensional structure with liquid full super-hydrophobic function |
| CN107884865A (en) * | 2017-11-23 | 2018-04-06 | 武汉大学 | The circular polarization polarizer and preparation method based on silicon nano brick Meta Materials |
| CN111580340A (en) * | 2020-05-28 | 2020-08-25 | 南京南智先进光电集成技术研究院有限公司 | Preparation method of intermediate infrared filter |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000329953A (en) * | 1999-05-20 | 2000-11-30 | Nippon Telegr & Teleph Corp <Ntt> | Photonic crystal and its manufacture |
| CN101782666A (en) * | 2010-03-05 | 2010-07-21 | 华中科技大学 | Helical metal wire grating circuit polarizer |
| CN101852884A (en) * | 2010-07-01 | 2010-10-06 | 华中科技大学 | Double-helical metal grid circuit polarizer |
| CN102073088A (en) * | 2010-12-28 | 2011-05-25 | 华中科技大学 | Spiral metal wire grating circuit polarizer |
| CN102830499A (en) * | 2012-09-05 | 2012-12-19 | 山东大学 | Vector light field converter and polarized light converting method |
-
2015
- 2015-04-24 CN CN201510199322.8A patent/CN104880754B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000329953A (en) * | 1999-05-20 | 2000-11-30 | Nippon Telegr & Teleph Corp <Ntt> | Photonic crystal and its manufacture |
| CN101782666A (en) * | 2010-03-05 | 2010-07-21 | 华中科技大学 | Helical metal wire grating circuit polarizer |
| CN101852884A (en) * | 2010-07-01 | 2010-10-06 | 华中科技大学 | Double-helical metal grid circuit polarizer |
| CN102073088A (en) * | 2010-12-28 | 2011-05-25 | 华中科技大学 | Spiral metal wire grating circuit polarizer |
| CN102830499A (en) * | 2012-09-05 | 2012-12-19 | 山东大学 | Vector light field converter and polarized light converting method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105480939A (en) * | 2015-12-03 | 2016-04-13 | 中国科学院物理研究所 | Preparation method of three-dimensional structure with liquid full super-hydrophobic function |
| CN107884865A (en) * | 2017-11-23 | 2018-04-06 | 武汉大学 | The circular polarization polarizer and preparation method based on silicon nano brick Meta Materials |
| CN111580340A (en) * | 2020-05-28 | 2020-08-25 | 南京南智先进光电集成技术研究院有限公司 | Preparation method of intermediate infrared filter |
| CN111580340B (en) * | 2020-05-28 | 2023-03-31 | 南京南智先进光电集成技术研究院有限公司 | Preparation method of intermediate infrared filter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104880754B (en) | 2017-07-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105181144B (en) | Sub-wavelength circularly polarized light analyzer containing spiral of Archimedes and preparation method thereof | |
| CN105954826B (en) | All dielectric ultra-thin two-dimension circular polarization dichroics and preparation method thereof | |
| CN108957614B (en) | Double-layer spiral line chiral asymmetric plane metamaterial circular dichroism device | |
| EP3467552B1 (en) | Optical filter and sensor system | |
| US11733442B2 (en) | Optical filter | |
| CN105022106B (en) | The ultra wide band absorber and preparation method of a kind of visible near-infrared wave band | |
| CN104865628A (en) | Spiral-like metal chiral metamaterial circular polarizer | |
| CN104880754A (en) | Sub-wavelength three dimensional spiral circular polarization light filter and manufacturing method thereof | |
| TW201841002A (en) | Optical polarizing filter | |
| WO2012127744A1 (en) | Optical member and method for producing same | |
| CN108801461A (en) | A kind of super surface circularly polarized light detecting element and preparation method thereof | |
| CN106154388B (en) | The full Stokes imaging polarization device of all dielectric pixel type | |
| JP2011253093A (en) | Heat ray shield | |
| CN112881302A (en) | Chiral symmetric structure super-surface circularly polarized light detection element and preparation method thereof | |
| CN103308486A (en) | Surface-plasma-based infrared photon absorption device of composite resonator | |
| CN107430214A (en) | Antireflection film and its manufacture method | |
| CN113167928B (en) | Dielectric multilayer film, method for producing same, and optical member using same | |
| US10094956B2 (en) | Optical field enhancement device and manufacturing method of the same | |
| WO2014171149A1 (en) | Transparent conductive material and method for manufacturing same | |
| CN205002882U (en) | Inferior wavelength circularly polarized light analyser based on archimedes spiral | |
| CN103969843A (en) | Method for enhancing excitation intensity of surface plasma light field | |
| CN205749968U (en) | All dielectric ultra-thin two-dimension circular polarization dichroics | |
| CN209624816U (en) | A kind of tunable wave length narrow band filter based on gold nano grain | |
| CN105044813A (en) | Broadband depth cutoff blue light fluorescence filter | |
| JPH09258004A (en) | Antireflection multilayered film and its film formation, as well as its film forming device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170707 Termination date: 20200424 |