CN104880754B - Sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof - Google Patents
Sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof Download PDFInfo
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- CN104880754B CN104880754B CN201510199322.8A CN201510199322A CN104880754B CN 104880754 B CN104880754 B CN 104880754B CN 201510199322 A CN201510199322 A CN 201510199322A CN 104880754 B CN104880754 B CN 104880754B
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- dimensional spiral
- circular polarization
- wavelength
- polarization filter
- pillar
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
Abstract
The invention discloses a kind of sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof, the preparation method of the circular polarization filter comprises the following steps：（1）The spin coating photoresist in silicon dioxide substrates；（2）Directly write out three-dimensional spiral nanometer rod structure on a photoresist using laser direct writing system and developed；（3）Oxygen is passed through, is performed etching using reactive ion beam, remove residual photoresist；（4）Metal film layer is plated using magnetically controlled sputter method on silicon dioxide substrates and three-dimensional spiral the nanometer rod structure for having shifted.The present invention can realize the differentiation to left-right rotary circularly polarized light, and with simple structure, it is easy to the characteristics of making.
Description
Technical field
The present invention relates to a kind of optical filter, and in particular to a kind of sub-wavelength three-dimensional spiral circular polarization filter and its making side
Method.
Background technology
In imaging technique, behaviour is obtained because polarization imaging technology can carry out remote image under rugged environment
Make, have at aspects such as suppression ambient noise, raising detection range, minutia acquisition and camouflage of target identifications absolute excellent
Gesture.Therefore, it has application widely, for example：The detectable target hidden or pretend；It is capable of achieving sea and under water mesh
Target is detected and recognized；It is capable of achieving the navigation under the conditions of smog climatic environment；Effective district parting belongs to and insulator or from luring
Real goal is distinguished in thing；The medical diagnosis such as cancer, burn can be carried out；Can be to object features（Such as fingerprint）It is identified；Can
Realize spaceborne or aerial remote sensing；Can be also combined with other technologies, such as multispectral polarized ir imaging, ultraphotic compose polarized ir into
As etc..In polarised light imaging technique, circular polarization imaging is weighed extensively because of its unique advantage in bulky grain scattering medium
Depending on.Such as in the bottom, smog, cloud layer and the image quality of circularly polarized light is better than linearly polarized light in biological tissue.S. in 2005
A. Kartazayeva et al. inserts the 2951USAF step type models of chromium plating dissolved with granules of polystyrene（d=10.143um）
Deionized water in as detection target.Respectively Active Imaging is carried out with liner polarization and circular polarization light as driving source.Result is demonstrate,proved
Bright circularly polarized light imaging effect in bulky grain turbid medium is more advantageous than line polarisation.
The left-handed dextrorotation of circular polarization is distinguished in optical image technology particularly important.Tradition distinguishes the side of left-right rotary circularly polarized light
Method is usually the linearly polarized light for circular polarization being changed into quarter-wave plate different polarization direction, then further according to required
Filtered from analyzer polarization direction.But the applicable band-limited of this method in wave plate bandwidth and also be unfavorable for element
Miniaturization with it is integrated.In recent years, the sub-wavelength structure device based on surface plasma-wave and technology are used as emerging
, there are many potential applications in section in many fields, thus is increasingly paid close attention to by people.At present, many seminars are in profit
Left-right rotary circularly polarized light aspect is distinguished with nano-micro structure done substantial amounts of research work., Justyna K. Gansel in 2009
Et al. propose and made a kind of circular polarization filter in broadband, i.e., in medium substrate periodically place spiral metal
Gold thread, by controlling the direction of rotation of helix, is capable of achieving to pass through left-handed and right-circularly polarized light selectivity.They first exist
One layer of deposition is very thin in substrate of glass（25nm）Indium tin oxide（ITO）As the negative electrode of electrochemical deposition, it is then coated with just
Property photoresist, spiral of air line is carved by 3D laser direct writing systems, it is heavy using electrochemistry in the electrolyte containing gold to place into
Be filled into gold in space by long-pending method, finally removes photoresist, obtains in the broadband of 4um-8um circular dichroism average out to 0.7
Circular polarizing disk.This structural manufacturing process is complicated, it is difficult to make.A. Al ù in 2013 et al., are stacked using sheet metal Space Rotating
Structure, devises the visible light wave range circular polarization polarizer.They plate Au, SiO successively on the glass substrate2And photoresist, then
With electron beam directly and reactive ion beam etching (RIBE) in SiO2On obtain 55nm cuttings, reuse electron beam evaporation and plate 5nmTi
, finally stripping technology plates 50nmAu and sheet metal is obtained in cutting with photoresist.Piled up by such technique multiple-layer overlapped, obtained
To the sheet metal structure that Space Rotating is piled up.The circular polarization polarizer of circular dichroism average out to 0.3 is realized in 500nm-800mn
Function.2014, Wenshan Cai et al. were designed and have been made double-deck curved metal (Ag) structure, and experimentally at 1.4um
It is 0.35 to obtain maximum circular dichroism.2014, E.-B. Kley et al. made 2-D and 3-D starfish appearance metals（Au）Knot
Structure, wherein three-dimensional structure obtain 0.4 circular dichroism at 660nm.In sum, prior art has structural manufacturing process complicated,
Manufacture difficulty is big, or discrimination problem not high.
The content of the invention
Goal of the invention of the invention is to provide a kind of sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof, can
The differentiation to left-right rotary circularly polarized light is realized, and with simple structure, it is easy to the characteristics of making.
To achieve the above object of the invention, the technical solution adopted by the present invention is：A kind of sub-wavelength three-dimensional spiral circular polarization filter
Mating plate, including silicon dioxide substrates, the three-dimensional spiral nano-pillar in silicon dioxide substrates and be overlying on silicon dioxide substrates with
The metal film layer on three-dimensional spiral nano-pillar surface, the radius of the three-dimensional spiral nano-pillar is 0.7~1.1um, a height of 1.8~
3um, the cycle of each three-dimensional spiral nano-pillar is 1.4~2.2um, and the metal film layer thickness is 0.05~0.15um.
Preferred technical scheme, the radius of the three-dimensional spiral nano-pillar is 0.95um, a height of 2um, each three-dimensional spiral
The cycle of nano-pillar is 1.9um.
Preferred technical scheme, the metal film layer thickness is 0.1um.
In above-mentioned technical proposal, the material of the metal film layer can use gold, silver, aluminium, copper or titanium nitride.
A kind of preparation method of sub-wavelength three-dimensional spiral circular polarization filter, comprises the following steps：
（1）The spin coating photoresist in silicon dioxide substrates；
（2）Directly write out three-dimensional spiral nanometer rod structure on a photoresist using laser direct writing system and developed；
（3）Oxygen is passed through, is performed etching using reactive ion beam, remove residual photoresist；
（4）Using magnetically controlled sputter method plated with gold on silicon dioxide substrates and three-dimensional spiral the nanometer rod structure for having shifted
Category film layer.
Principle of the invention is：The characteristics of there is circular dichroism due to spatial metal three-dimensional chiral structure, it is right in order to realize
The differentiation of left-right rotary circularly polarized light, the present invention designs three-dimensional spiral nanometer rod structure and to plate layer of metal in body structure surface thin
Film layer, due to the effect of chiral structure metal surface plasma so that the structure has very strong circular dichroism.It is different by designing
Helical structure can realize to the selection of left-right rotary circularly polarized light through effect.By the cycle of reasonably optimizing structure, height
With the thickness of metal level, to realize the differentiation to left-right rotary circularly polarized light, wherein, the cycle wavelength band of bigger adaptation is more long,
The cycle wavelength band of smaller adaptation is shorter, and the wavelength band of height adaptation higher is wider, but manufacture difficulty is also bigger.
Because above-mentioned technical proposal is used, the present invention has following advantages compared with prior art：
The present invention designs three-dimensional spiral nanometer rod structure and plates layer of metal film layer in body structure surface, due to chirality
Structured metal surface plasma is acted on so that the structure has very strong circular dichroism, so as to realize the work(of circular polarization filter plate
Can, its circular dichroism is average more than 0.7 in 3um-5um wave bands, and with simple structure, it is easy to the advantage of making.
Brief description of the drawings
Fig. 1 is a structural representation for primitive of three-dimensional spiral nano-pillar of the invention in embodiment one.
Fig. 2 is the transmitance that left-right rotary circularly polarized light passes through circular polarization filter of the present invention by substrate incident in embodiment one
Curve map.
Wherein：1st, silicon dioxide substrates；2nd, three-dimensional spiral nano-pillar；3rd, metal film layer.
Specific embodiment
Below in conjunction with the accompanying drawings and embodiment the invention will be further described：
Embodiment one：It is shown in Figure 1, a kind of sub-wavelength three-dimensional spiral circular polarization filter, including silicon dioxide substrates
1st, in silicon dioxide substrates three-dimensional spiral nano-pillar 2 and silicon dioxide substrates and three-dimensional spiral nano-pillar surface are overlying on
Metal film layer 3, the radius of the three-dimensional spiral nano-pillar is r=0.95um, a height of H1=2um, each three-dimensional spiral nano-pillar
Cycle be P=1.9um, the metal film layer thickness be H2=0.1um。
In the present embodiment, the material of the metal film layer can use gold, silver, aluminium, copper or titanium nitride.
A kind of preparation method of sub-wavelength three-dimensional spiral circular polarization filter, comprises the following steps：
（1）The spin coating photoresist in silicon dioxide substrates；
（2）Directly write out three-dimensional spiral nanometer rod structure on a photoresist using laser direct writing system and developed；
（3）Oxygen is passed through, is performed etching using reactive ion beam, remove residual photoresist；
（4）Using magnetically controlled sputter method plated with gold on silicon dioxide substrates and three-dimensional spiral the nanometer rod structure for having shifted
Category film layer.
It is shown in Figure 2, it is average more than 0.7 in 3um-5um wave bands circular dichroism.
Claims (4)
1. a kind of sub-wavelength three-dimensional spiral circular polarization filter, it is characterised in that：Including silicon dioxide substrates, located at silica
Three-dimensional spiral nano-pillar on substrate and the metal film layer of silicon dioxide substrates and three-dimensional spiral nano-pillar surface is overlying on, it is described
The radius of three-dimensional spiral nano-pillar is 0.7~1.1um, a height of 1.8~3um, cycle of each three-dimensional spiral nano-pillar for 1.4~
2.2um, the metal film layer thickness is 0.05~0.15um.
2. a kind of sub-wavelength three-dimensional spiral circular polarization filter according to claim 1, it is characterised in that：The three-dimensional spiral shell
The radius for revolving nano-pillar is 0.95um, a height of 2um, and the cycle of each three-dimensional spiral nano-pillar is 1.9um.
3. a kind of sub-wavelength three-dimensional spiral circular polarization filter according to claim 1, it is characterised in that：The metal foil
Thicknesses of layers is 0.1um.
4. a kind of preparation method of sub-wavelength three-dimensional spiral circular polarization filter, it is characterised in that comprise the following steps：
（1）The spin coating photoresist in silicon dioxide substrates；
（2）Directly write out three-dimensional spiral nanometer rod structure on a photoresist using laser direct writing system and developed；
（3）Oxygen is passed through, is performed etching using reactive ion beam, remove residual photoresist；
（4）Metal foil is plated using magnetically controlled sputter method on silicon dioxide substrates and three-dimensional spiral the nanometer rod structure for having shifted
Film layer.
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| CN201510199322.8A CN104880754B (en) | 2015-04-24 | 2015-04-24 | Sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof |
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| CN201510199322.8A CN104880754B (en) | 2015-04-24 | 2015-04-24 | Sub-wavelength three-dimensional spiral circular polarization filter and preparation method thereof |
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| CN105480939A (en) * | 2015-12-03 | 2016-04-13 | 中国科学院物理研究所 | Preparation method of three-dimensional structure with liquid full super-hydrophobic function |
| CN107884865B (en) * | 2017-11-23 | 2019-05-10 | 武汉大学 | The circular polarization polarizer and preparation method based on silicon nano brick Meta Materials |
| CN111580340B (en) * | 2020-05-28 | 2023-03-31 | 南京南智先进光电集成技术研究院有限公司 | Preparation method of intermediate infrared filter |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101782666A (en) * | 2010-03-05 | 2010-07-21 | 华中科技大学 | Helical metal wire grating circuit polarizer |
| CN101852884A (en) * | 2010-07-01 | 2010-10-06 | 华中科技大学 | Double-helical metal grid circuit polarizer |
| CN102073088A (en) * | 2010-12-28 | 2011-05-25 | 华中科技大学 | Spiral metal wire grating circuit polarizer |
| CN102830499A (en) * | 2012-09-05 | 2012-12-19 | 山东大学 | Vector light field converter and polarized light converting method |
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| JP3488919B2 (en) * | 1999-05-20 | 2004-01-19 | 日本電信電話株式会社 | How to make a photonic crystal |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101782666A (en) * | 2010-03-05 | 2010-07-21 | 华中科技大学 | Helical metal wire grating circuit polarizer |
| CN101852884A (en) * | 2010-07-01 | 2010-10-06 | 华中科技大学 | Double-helical metal grid circuit polarizer |
| CN102073088A (en) * | 2010-12-28 | 2011-05-25 | 华中科技大学 | Spiral metal wire grating circuit polarizer |
| CN102830499A (en) * | 2012-09-05 | 2012-12-19 | 山东大学 | Vector light field converter and polarized light converting method |
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