CN104862769A - Electroplate liquid circulating filtration system - Google Patents
Electroplate liquid circulating filtration system Download PDFInfo
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- CN104862769A CN104862769A CN201510248943.0A CN201510248943A CN104862769A CN 104862769 A CN104862769 A CN 104862769A CN 201510248943 A CN201510248943 A CN 201510248943A CN 104862769 A CN104862769 A CN 104862769A
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Abstract
The invention provides an electroplate liquid circulating filtration system which comprises an inner electroplate tank, an outer electroplate tank, a PH value test pen, a temperature control system, an ultrasonic control system, a magnetic pump, a 100-micron-sized filter and a 10-micron-sized filter. The PH value test pen is inserted in the inner electroplate tank or the outer electroplate tank. The temperature control system and the ultrasonic control system are fixedly arranged on the outer portion of a bottom plate of the inner electroplate tank. The magnetic pump is communicated with the bottom of the outer electroplate tank, the 100-micron-sized filter is communicated with the magnetic pump, the 10-micron-sized filter is communicated with the 100-micron-sized filter, and the 10-micron-sized filter is communicated with the bottom of the inner electroplate tank. The system maintains the freshness of electroplate liquid in micro-electroplating and uniformity and stability of the performance of the electroplate liquid, a solid foundation is laid for further electroplating work, the development of the domestic UV-Liga technology based on electroplating is also promoted, and the whole industry is driven to develop better.
Description
Technical field
The present invention relates to electroplating technology field, be specially a kind of electroplating solution of cyclic filtering system.
Background technology
UV-Liga technique is divided into photoetching, micro-electroforming, micro-ly copies three steps.Wherein micro-electroforming failure, coating may occur: grow dim or send out mist, do not work, coarse, have pit, have striped, loose, jagged, long knurl, minute hand hole, decortication, orange peel, the phenomenon such as tear stains and pinniform.Therefore, the success or not of electroforming directly determines and micro-ly copies success, and the key of the quality of electroforming solution performance electroplating technology just.Proverb is said right " three points of plating seven points are clean ", namely the cleanliness factor of electroplate liquid can talk about very tremendous influence to final electroplating effect, and traditional electroplating industry is not all considered this part of circulating filtration, or take into account and do not propose realistic plan and solve this problem.Have the electroplate liquid prepared has been electroplated onto always does not all have once filtered, and what have is then continue to use with after filter paper simple filtration one time after plating for some time.Obviously these are far from being enough for the quite high electroplating technology of purity requirements.
Summary of the invention
The object of the invention is to solve above-mentioned problems of the prior art, and a kind of electroplating solution of cyclic filtering system is provided.
The present invention is achieved through the following technical solutions:
A kind of electroplating solution of cyclic filtering system, comprises plating tank, pH value test pen, temperature controlling system, ultrasonic control system, magnetic drive pump, 100 micron filter and 10 micron filter; Wherein, plating tank is divided into plating inside groove and plating water jacket, and plating water jacket is around the outer side wall middle and upper part being fixed on plating inside groove; PH value test pen is inserted in plating inside groove or plating water jacket; Temperature controlling system and ultrasonic control system are fixed on the base plate external of plating inside groove; Magnetic drive pump is connected communicates with the bottom of plating water jacket, and 100 micron filter are connected with magnetic drive pump and communicate, and 10 micron filter are connected with 100 micron filter and communicate, and 10 micron filter are connected with the bottom of electroplating inside groove and communicate.
Further, the notch of notch higher than plating inside groove of water jacket is electroplated.Plating inside groove and plating water jacket adopt spray fluorine stainless material to be made.The integral outer of temperature controlling system and ultrasonic control system is set with Vibration Box, and Vibration Box adopts spray fluorine stainless material to be made.
After technique starts, temperature controlling system, ultrasonic control system, magnetic drive pump start simultaneously, electroplate liquid in plating water jacket is pressed into 100 micron filter by magnetic drive pump, then through 10 micron filter, filtered clean electroplate liquid enters plating inside groove again bottom plating inside groove, plating water jacket is entered after plating inside groove electroplate liquid overflows, so, move in circles, until technique terminates, as shown in Figure 1, arrow wherein represents solution circulated path.For messy electroplate liquid, please change filter element in time.
Plating tank cell body adopts spray fluorine stainless material, ensure that stability and the erosion resistance of the structure of plating tank; PH value test pen is tested at any time to facilitate and controls the pH value of electroplate liquid; Temperature controlling system, for monitoring and controlling the temperature of electroplate liquid in plating tank, can be heated and can freeze; The ultrasonic frequency of ultrasonic control system is 80KHZ, and power is 450W to the maximum, the stable homogeneous of electroplate liquid composition and the ability that strengthens the plating of micro-structure especially micron scale construction when being ensured to electroplate; 10 micron filter and 100 micron filter form two-layer filter system, one is prevent large granular impurity from directly blocking 10 micron filter, be to make electroplate liquid cleaner again, be then the reduction of the replacing number of times of 10 micron filter in addition, thus saved cost; The piping material connected between each device adopts corrosion-resistant PP tubing, and strainer and magnetic drive pump also adopt corrosion resistant material.Last outfit on this plating tank sprays fluorine copper electrode, or with the corrosion phenomenon avoiding electrode to be placed in electroplate liquid malaria.
Present system design science, Stability Analysis of Structures, corrosion-resistant good, the basis that ensure that electroplate liquid cleaning also makes the character stable homogeneous more of electroplate liquid, the temperature of setting up in this system, ultrasonic control system not only make its performance in microplating be better than other electroplating systems, especially for the microstructure of high aspect ratio.Present system maintains the fresh and maintenance electroplate liquid performance stable homogeneous of electroplate liquid in microplating, solid basis has been descended for further electroplating work pads, also accelerate this development based on electroplating technology of domestic picture UV-Liga simultaneously, and then drive whole industry better to develop.
Accompanying drawing explanation
Fig. 1 is the structural representation of present system.
In figure: 1-PH value test pen, 2-temperature controlling system, 3-ultrasonic control system, 4-magnetic drive pump, 5-100 micron filter, 6-10 micron filter, 7-electroplate inside groove, 8-electroplates water jacket, 9-Vibration Box.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described:
As shown in Figure 1, a kind of electroplating solution of cyclic filtering system, comprises plating tank, pH value test pen 1, temperature controlling system 2, ultrasonic control system 3, magnetic drive pump 4,100 micron filter 5 and 10 micron filter 6; Wherein, plating tank is divided into plating inside groove 7 and plating water jacket 8, and plating water jacket 8 is around the outer side wall middle and upper part being fixed on plating inside groove 7; PH value test pen 1 is inserted in plating inside groove 7 or plating water jacket 8; Temperature controlling system 2 and ultrasonic control system 3 are fixed on the base plate external of plating inside groove 7; Magnetic drive pump 4 is connected communicates with the bottom of plating water jacket 8, and 100 micron filter 5 are connected with magnetic drive pump 4 and communicate, and 10 micron filter 6 are connected with 100 micron filter 5 and communicate, and 10 micron filter 6 are connected with the bottom of electroplating inside groove 7 and communicate.
During concrete enforcement, the notch of plating water jacket 8 is higher than the notch electroplating inside groove 7; Plating inside groove 7 and plating water jacket 8 adopt spray fluorine stainless material to be made; The integral outer of temperature controlling system 2 and ultrasonic control system 3 is set with Vibration Box 9, and Vibration Box 9 adopts spray fluorine stainless material to be made.
Claims (5)
1. an electroplating solution of cyclic filtering system, comprise plating tank, it is characterized in that: also comprise pH value test pen (1), temperature controlling system (2), ultrasonic control system (3), magnetic drive pump (4), 100 micron filter (5) and 10 micron filter (6); Wherein, plating tank is divided into plating inside groove (7) and plating water jacket (8), and plating water jacket (8) is around the outer side wall middle and upper part being fixed on plating inside groove (7); PH value test pen (1) is inserted in plating inside groove (7) or plating water jacket (8); Temperature controlling system (2) and ultrasonic control system (3) are fixed on the base plate external of plating inside groove (7); Magnetic drive pump (4) is connected communicates with the bottom of plating water jacket (8), 100 micron filter (5) are connected with magnetic drive pump (4) and communicate, 10 micron filter (6) are connected with 100 micron filter (5) and communicate, and 10 micron filter (6) are connected with the bottom of plating inside groove (7) and communicate.
2. electroplating solution of cyclic filtering system according to claim 1, is characterized in that: the notch of plating water jacket (8) is higher than the notch electroplating inside groove (7).
3. electroplating solution of cyclic filtering system according to claim 1 and 2, is characterized in that: plating inside groove (7) and plating water jacket (8) adopt spray fluorine stainless material to be made.
4. electroplating solution of cyclic filtering system according to claim 1 and 2, is characterized in that: the integral outer of temperature controlling system (2) and ultrasonic control system (3) is set with Vibration Box (9), and Vibration Box (9) adopts spray fluorine stainless material to be made.
5. electroplating solution of cyclic filtering system according to claim 3, is characterized in that: the integral outer of temperature controlling system (2) and ultrasonic control system (3) is set with Vibration Box (9), and Vibration Box (9) adopts spray fluorine stainless material to be made.
Priority Applications (1)
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CN201510248943.0A CN104862769A (en) | 2015-05-16 | 2015-05-16 | Electroplate liquid circulating filtration system |
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CN201510248943.0A CN104862769A (en) | 2015-05-16 | 2015-05-16 | Electroplate liquid circulating filtration system |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107119303A (en) * | 2017-05-15 | 2017-09-01 | 西华大学 | Device for removing micro-arc oxidation tank liquid sediment in real time |
CN108914158A (en) * | 2018-07-27 | 2018-11-30 | 珠海市万顺睿通科技有限公司 | A kind of method and device thereof recycling lead from battery waste |
CN113832528A (en) * | 2021-10-22 | 2021-12-24 | 合肥新汇成微电子股份有限公司 | Can wash gold lug electroplating system of plating solution fast |
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CN113832528A (en) * | 2021-10-22 | 2021-12-24 | 合肥新汇成微电子股份有限公司 | Can wash gold lug electroplating system of plating solution fast |
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Application publication date: 20150826 |
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