CN104858551A - Manufacturing method of optical microstructure, machine table and light guide plate of machine table - Google Patents
Manufacturing method of optical microstructure, machine table and light guide plate of machine table Download PDFInfo
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- CN104858551A CN104858551A CN201510309165.1A CN201510309165A CN104858551A CN 104858551 A CN104858551 A CN 104858551A CN 201510309165 A CN201510309165 A CN 201510309165A CN 104858551 A CN104858551 A CN 104858551A
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- laser beam
- substrate
- machine table
- laser
- optical microstructures
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0013—Means for improving the coupling-in of light from the light source into the light guide
- G02B6/0015—Means for improving the coupling-in of light from the light source into the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0016—Grooves, prisms, gratings, scattering particles or rough surfaces
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0038—Linear indentations or grooves, e.g. arc-shaped grooves or meandering grooves, extending over the full length or width of the light guide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0065—Manufacturing aspects; Material aspects
Abstract
The invention discloses a manufacturing method of an optical microstructure, a machine table and a light guide plate of the machine table. The manufacturing method of the optical microstructure of the multimode laser machining machine table includes the steps that a substrate is provided; a first laser beam and a second laser beam are irradiated to a beam combiner, and the first laser beam and the second laser beam have different laser modes. The multimode laser machine table used for executing and manufactured through the manufacturing method of the optical microstructure of the multimode laser machining machine table comprises a first laser resonant cavity, a second laser resonant cavity, a bearing platform and a machining unit. The light guide plate is provided with a plurality of optical microstructures. According to the multimode laser machining machine table, the method and the light guide plate of the machine table, the first laser beam coincides with the second laser beam through the beam combiner, a micro concave part and a sunken part can be formed in the substrate through one-time machining and irradiating, the time needed for machining is effectively shortened, and therefore the production efficiency is improved, and a better flattening effect can be achieved on the surface of the substrate.
Description
Technical field
The present invention about radium-shine manufacture field, especially about a kind of by the radium-shine processing of multimode to form the manufacture method of optical microstructures, board and light guide plate thereof.
Background technology
Light guide plate is a kind ofly be used in backlight module the assembly being provided with directing light, it is long-range that it conducts to light guide plate in advance through the light that light source provides by total reflection principle, and utilize several optical textures that it is laid to destroy light total reflection, so that ray guidance is formed uniform area light source to exiting surface.
The mode that tradition adopts in light guide plate formation optical texture, that the optical texture pattern designed directly is formed site in light guide plate through wire mark mode, but this kind of mode due to ink viscosity during printing wayward and make the size-constrained of optical texture because of ink characteristics, and then affect output quality and outgoing light homogeneity.And when forming light guide plate, optical texture cannot be provided with in the lump, must secondary operations be carried out, and not be inconsistent mass-produced demand.Comprehensive above-mentioned shortcoming, the therefore follow-up manufacture method of stretching out and belonging to non-printing formula light guide plate of spreading out.
In order to optical texture being incorporated in the lump when light guide plate injection molding, or employing directly carries out machining for light guiding board mould core, or make optical texture pattern form in die surface through etching mode, in order to directly directly producing optical texture on light guide plate.But the mode of employing machining is very consuming time and the size of optical texture also easily has error, or cannot reach required microsize requirement.Etching mode then through cumbersome process as coating, exposure and electroforming etc. formality, need also promote time cost and the difficulty of die manufacture.
Think the manufacture efficiency that can promote optical structure chart sample on die or light guide plate, occurred as TaiWan, China patent application TW200537199A (application number: TW93113610) the light conducting plate structure that discloses and manufacture method thereof, it utilizes at least one radium-shine diverse location irradiated in a substrate surface, and form gauffer site to form a die on each position, and the shaping light guide plate of die described in mat.Also have directly on a base material, optical texture pattern according to design forms several miniature shrinkage pool with radium-shine irradiation, and make base material can be light conducting plate body or the mode for metal base and stamping die as light guide plate, by this fast and accurately directly to form optical texture pattern in light guide plate or die surface.But, under radium-shine high temperature irradiates, described substrate or base material also effectively cannot be avoided to produce the phenomenon of slag splash, therefore can form one or more protrusion around described miniature shrinkage pool or gauffer site.Described protrusion very easily falls in described miniature shrinkage pool or gauffer site because of bending or avalanche, and then affects the shape of optical texture pattern, causes the usefulness of all light and directing light when practical application.
The described protrusion produced when utilizing laser beam to manufacture optical texture pattern to diminish, there is the levelling method at a kind of radium-shine processing volcanic crater as described in TaiWan, China patent application TW201231204A (application number: TW100103674), it is applicable to making one optical microstructure patterns, method in a base material according to a design, radium-shine processing is carried out to an outer surface of described base material, so that described outer surface forms multiple miniature shrinkage pool, wherein described in each, the opening periphery of miniature shrinkage pool has at least one protrusion, the protrusion of each miniature shrinkage pool periphery is removed after radium-shine completion of processing, so that the periphery of the miniature shrinkage pool of leveling, miniature shrinkage pool is made to form described optical microstructure patterns.Wherein, in TaiWan, China patent application TW201231204A (application number: TW100103674) patent, further prompting can excise described protrusion by a cutter, or to spray high pressure gravel to clash into described substrate surface, or grind the described outer surface of base material to remove the modes such as described protrusion by a milling tool.But no matter remove described protrusion in which kind of mode above-mentioned, be all and carry out other procedure for processing again after radium-shine processing, and the fabrication steps such as excision, shock and grinding are also quite complicated, and it is not cause making optical microstructure patterns to need the at substantial time, and also evident for the effect removing protrusion.
Then, a kind of preparation method of optical microstructure patterns of light guide plate that discloses of TaiWan, China patent application TW201232069A (application number: TW100103673).Described preparation method first bombards the surface of a base material by one first laser beam, after multiple protrusions of described miniature shrinkage pool to be formed and its periphery, along the clockwise of shrinkage pool periphery miniature described in each, described protrusion is bombarded, to destroy protrusion and to form multiple depressed part by multiple second beam separation.Its in time eliminating described protrusion by a mobile radium-shine transmitter to make described second laser beam sequentially bombard described protrusion clockwise or counterclockwise.By this, eliminate the volcanic crater kenel that described miniature shrinkage pool is formed by described protrusion affects, avoid the light guide effect causing light guide plate to decline, or the light guide plate optical pattern that the stamping die with described miniature shrinkage pool manufactures produces error.
But, though aforesaid way can reduce the impact of described protrusion on overall optical texture pattern, but have to pass through the radium-shine processing of secondary, the distribution aspect of described protrusion there is no necessarily again, therefore the second laser beam also must one by one according to the distribution adjustment bombardment position of described protrusion.And need irradiate along described miniature shrinkage pool periphery compartment of terrain, extremely long process time need be expended.Moreover the shrinkage pool quantity comprised with optical texture pattern improves, and process time also must be elongated with this.
Therefore, how effectively to reduce the process time of eliminating needed for described protrusion, guarantee the integrality of described miniature shrinkage pool simultaneously, need badly for current radium-shine processing and improve part.Therefore the present inventor conceives a kind of multimode laser processing machine table, method and light guide plate thereof, to solve the disappearance being set forth in current method for manufacturing light guide plate and remaining.
Summary of the invention
The technical problem to be solved in the present invention is the technological deficiency remained to overcome above-mentioned current method for manufacturing light guide plate, provides a kind of manufacture method of optical microstructures, board and light guide plate thereof.
An optical microstructures manufacture method for multimode laser processing machine table, its feature is, its step comprises:
One substrate is provided;
Irradiate one first laser beam and one second laser beam to light combination mirror, and this first laser beam and this second laser beam has different radium-shine mode; And
Overlapped by this first laser beam of this light combination mirror and this second laser beam and expose to this substrate, this first laser beam forms a miniature recess in this substrate, and produce a splash zone in all sides of this miniature recess simultaneously, this second laser beam then bombards this splash zone and forms a depressed part, and the degree of depth of this depressed part is less than the degree of depth of this miniature recess.
Preferably, the transverse mode image of this first laser beam and this second laser beam is Rotational Symmetry, and when exposing to this substrate, the transverse mode image magnetic distribution state of this first laser beam and this second laser beam is for mutually to stagger.
Preferably, the transverse mode image of this second laser beam is plural number connected petal-shaped arrangement block.
Preferably, this substrate is a metal die.
The present invention also provides a kind of multimode Laser machine stand of the optical microstructures manufacture method in order to perform multimode laser processing machine table, comprising:
One first radium-shine resonant cavity, in order to produce this first laser beam;
One second radium-shine resonant cavity, in order to produce this second laser beam;
One carrying platform, in order to this substrate accommodating; And
One processing combination, comprises this light combination mirror and a driving member, and this driving member, in order to according to optical microstructures distribution design data, utilizes this first laser beam and this second laser beam of overlapping through this light combination mirror, processes this substrate.
Preferably, the transverse mode image of this first laser beam and this second laser beam is Rotational Symmetry, and in time exposing to this substrate, the transverse mode image magnetic distribution state of this first laser beam and this second laser beam is for mutually to stagger.
The present invention also provides a kind of light guide plate, and its feature is:
There is a plurality of optical microstructures, these optical microstructures arbitrary are made through the optical microstructures manufacture method of multimode laser processing machine table as claimed in claim 4, thus there is this miniature recess, and annular arrangement is in those depressed parts of this splash zone, and those depressed parts are in the petal-shaped arrangement that is not connected.
Positive progressive effect of the present invention is: multimode laser processing machine table, method and light guide plate thereof proposed by the invention, utilize described light combination mirror described first laser beam of coincidence and the second laser beam, described miniature recess and depressed part can be formed in described substrate under single process is irradiated, effectively shorten machining to take time, use improving production efficiency, and compared to known radium-shine procedure for processing, the planarization effects that substrate surface tool is better can be made.
In addition, manufacture method provided by the invention, freely can adjust the parameters of described first laser beam and the second laser beam as mode, mutual spacing and energy power etc., except shortening except process time, the miniature recess after also can making processing more meets designed optical microstructures pattern demand.
Accompanying drawing explanation
Fig. 1 is the method step figure of experimental example 1 of the present invention.
Fig. 2 A is the machining sketch chart of experimental example 1 of the present invention.
Fig. 2 B is the machining sketch chart of experimental example 1 of the present invention.
Fig. 3 is the method step figure of experimental example 2 of the present invention.
Fig. 4 is the machining state of experimental example 2 of the present invention and miniature shrinkage pool schematic diagram.
Fig. 5 is the method step figure of the embodiment of the present invention 1.
Fig. 6 is the first laser beam transverse mode image schematic diagram of the embodiment of the present invention 1.
Fig. 7 A is the second laser beam transverse mode image schematic diagram () of the embodiment of the present invention 1.
Fig. 7 B is the second laser beam transverse mode image schematic diagram (two) of the embodiment of the present invention 1.
Fig. 7 C is the second laser beam transverse mode image schematic diagram (three) of the embodiment of the present invention 1.
Fig. 8 is the transverse mode aspect schematic diagram after the first laser beam of the embodiment of the present invention 1 and the second laser beam overlap.
Fig. 9 is the schematic diagram () of the radium-shine substrate processing of the embodiment of the present invention 1.
Figure 10 is the schematic diagram (two) of the radium-shine substrate processing of the embodiment of the present invention 1.
Figure 11 is the board schematic diagram of the embodiment of the present invention 1.
Figure 12 is the light guide plate schematic diagram of the embodiment of the present invention 1.
Description of reference numerals
10: substrate
101: miniature recess
102: protrusion
11: the first laser beams
12: the first optical lens
13: the second laser beams
14: the second optical lens
S101 ~ S103: step
20: substrate
201: miniature recess
202: depressed part
21: the first laser beams
S201 ~ S202: step
30: substrate
301: miniature recess
302: splash zone
303: depressed part
31: the first laser beams
32: the second laser beams
4: multimode Laser machine stand
40: the first radium-shine resonant cavities
41: the second radium-shine resonant cavities
42: carrying platform
43: processing combination
431: light combination mirror
432: driving member
5: light guide plate
50: optical microstructures
S301 ~ S303: step
Detailed description of the invention
Experimental example 1
Please refer to Fig. 1 and Fig. 2 A, Fig. 2 B, it is method step figure and the machining sketch chart of experimental example 1 of the present invention.The method disappearance manufacturing optical texture for light guide plate in view of known applications is radium-shine, the present inventor, for effectively can solve more described disappearance and to promote working (machining) efficiency, carries out many experiments to obtain through a radium-shine best approach of carrying out optical microstructures processing in radium-shine manufacture field.Experimental example 1 below for the present inventor is described.
Common laser beam exports and utilizes electromagnetic wave through gain media to adjust the characteristic of outgoing laser beam.And gain media can be closed in optical cavity, covibration can be produced in optical cavity to make electromagnetic wave further, electromagnetic wave is being come and gone in process back and forth constantly through gain media, when getting final product outgoing laser beam after arrival critical condition, the only running of electromagnetic wave in optical cavity and the design etc. of optical cavity, be technology very general at present, namely no longer repeated in this.And electromagnetic wave when transmitting in optical cavity, optical cavity border specification can be subject to and affect its electromagnetic field aspect, therefore namely electromagnetic electromagnetic field can produce different distributions with different boundary condition, and above-mentioned state is the pattern of electromagnetic field, referred to as mould (Mode).The mould of laser beam can be divided into longitudinal mode (Longitudinal Mode) and transverse mode (Transverse Mode), between different longitudinal modes and transverse mode, except the difference having luminous intensity, also has the difference of frequency.For different transverse mode light intensity distributions, can be learnt the aspect of its transverse mode image by the image (Patten) visually observing laser beam, longitudinal mode then cannot by visually seeing its light intensity distributions.Furtherly, when in optical cavity, stably roundtrip shakes electromagnetic wave, it allows to there is stable transverse electric and magnetic field distributional pattern, and it is above-mentioned alleged transverse mode image.And common transverse mode image has two kinds of forms, one is axial symmetry image, is commonly referred to as Hermite-Gaussian Modes, and another kind is then Rotational Symmetry, is commonly referred to as Laguerre-Gaussian Modes.
Because the transverse mode pattern of laser beam can change over required aspect according to the adjustment of boundary condition, therefore the present inventor utilizes the mode changing radium-shine transverse mode pattern to manufacture optical microstructures, wishes that can reduce machining takes time.In this experimental example, disclose a kind of method manufacturing optical microstructures, the steps include: step S101, a substrate 10 is provided; Step S102, carry out focusing on through one first optical lens 12 with one first laser beam 11 and bombard to described substrate 10 surface, to form a miniature recess 101 at described substrate 10, and the periphery of described miniature recess 101 is formed with at least one protrusion 102; Step S103, then, changes one second optical lens 14 and focuses on through described second optical lens 14 with one second laser beam 13, bombarding described protrusion 102 with smooth described miniature recess 101 periphery.
Compared to the mode that known technology discloses, this experimental example is by described first optical lens 12 and the second optical lens 14 of replacing, the transverse mode image of whole described second laser beam 13 of a step of going forward side by side make it meet for the form in bombardment region, to reduce the bombardment number of times of described second laser beam 13, wish that the second laser beam 13 can eliminate described protrusion 102 described in single fraction irradiation whereby simultaneously, reach the object shortening process time.But because second time is radium-shine adds man-hour carrying out, the position of described second laser beam 13 need be irradiated in described miniature recess 101 weeks sides accurately, described protrusion 102 can be eliminated by single-shot bombardment to make described second laser beam 13.Therefore when changing described second optical lens 14, position correction need be carried out for the irradiation central point of described first laser beam 11 and described first optical lens 12 of arranging in pairs or groups thereof, make described first laser beam 11 identical with the irradiation central point of described second laser beam 13 to avoid final bombardment to offset to producing during described substrate 10, and effectively cannot eliminate described protrusion 102.But, during actual execution, after replacing second optical lens 14, in the calibration of irradiation position very not easily, easily produce errors of centration in substrate 10 after bombardment, though machining therefore can be reduced to take time, produce to reduce and eliminate the usefulness of described protrusion 102 and the degree of accuracy, and promote the problems such as degree of difficulty on processing procedure.
Experimental example 2
In view of the disappearance that experimental example 1 still has, the present inventor conceives and separately plants processing mode, and as described in following experimental example 2 content.Please refer to Fig. 3 and Fig. 4, it is the method step figure of experimental example 2 of the present invention and machining state and miniature shrinkage pool schematic diagram.Propose a kind of method manufacturing optical microstructures in experimental example 2, the steps include: step S201, a substrate 20 is provided; Step S202, and irradiation has one first laser beam 21 of concentric circles transverse mode image to described substrate 20, to form miniature recess 201 and a depressed part 202 in described substrate 20, described depressed part 202 is positioned at described miniature recess 201 weeks sides.
As shown in Figure 4, it is after the described first laser beam bombardment utilizing concentric circles transverse mode image, the described miniature recess 201 formed in described substrate 20 and the aspect of described depressed part 202.As shown in the figure, adopt described first laser beam 21 directly can form described miniature recess 201 in described substrate 20, and borrow the radium-shine energy being distributed in outer ring in concentric circles transverse mode, the protrusion that can produce when eliminating original gradation percussion laser beam.The method is the concentric circles transverse mode image utilizing single laser beam, described miniature recess 201 and depressed part 202 is directly made to be shaped, can effectively reduce machining to take time, but, Energy distribution adjustment and the correction of described first laser beam, more difficultly reach the aspect that inside and outside twoth district have the strong and weak difference of energy, and adjustment also belongs to difficulty, so more easily cause described depressed part 202 also to occur volcanic crater aspect in the interval of interior exterior domain.
Embodiment 1
Therefore, the present inventor is after repeatedly adjusting and testing, and then derive the optical microstructures manufacture method of disclosed multimode laser processing machine table, please refer to Fig. 5,6,7A ~ 7C, 8 and Fig. 9 ~ 10, the transverse mode aspect schematic diagram after it is the method step figure of the embodiment of the present invention 1, the first laser beam transverse mode image schematic diagram, each second laser beam transverse mode image schematic diagram, the first laser beam and the second laser beam overlap and the schematic diagram of each radium-shine substrate processing.The optical microstructures manufacture method of described multimode laser processing machine table, comprises the following steps.
Step S301, provides a substrate 30, and wherein said substrate 30 can be a metal die or is a light guide plate.
Step S302, irradiate one first laser beam 31 and one second laser beam 32 to light combination mirror, and described first laser beam 31 and the second laser beam 32 has different radium-shine mode.Wherein, to can be gaseous state radium-shine, solid-state radium-shine or optical fiber is radium-shine for preferably first laser beam 31 and described second laser beam 32.
Step S303, overlapped by described first laser beam 31 of described light combination mirror and the second laser beam 32 and expose to described substrate 30, described first laser beam 31 forms a miniature recess 301 in described substrate 30, and produce a splash zone 302 in described miniature recess 301 weeks sides simultaneously, the described second laser beam 32 described splash zone 302 of bombardment also forms a depressed part 303, and the degree of depth of described depressed part 303 is less than the degree of depth of described miniature recess 301.Wherein, described depressed part 303 can be the form of single ring-type, or for multiple discontinuous form etc. being located on described miniature recess 301 weeks sides, its radium-shine mode according to described second laser beam 32 different and with change.
Then and repeat step S301 ~ S303, to form several described miniature recess 301 on described substrate 30, miniature recess 301 is made to be built into optical microstructures pattern.As aforementioned, described substrate 30 can be a metal die or a light guide plate, that is method of the present invention can directly be processed in light guide plate to be formed outside optical microstructures, also after can carrying out being processed to form the described miniature recess 301 meeting optical microstructures pattern on metal die, the spreading on light guide plate of recycling coining mode goes out optical microstructures, or utilize metal die as manufacturing the die of light guide plate, directly to form optical microstructures in its surface when light guide plate injection molding.
In the present invention, adopt and will have described first laser beam 31 of different radium-shine mode and the second laser beam 32 through described light combination mirror and overlap and expose to described substrate 30, therefore can adjust according to predetermined optical microstructures aspect for the transverse mode pattern and power etc. of described first laser beam 31 and the second laser beam 32 respectively, recycle described light combination mirror described first laser beam 31 and the second laser beam 32 are overlapped, in order to reaching the volcanic crater aspect can eliminating described miniature recess 301 through single process, reduce the time made needed for optical microstructures.As aforementioned, boundary condition can be adjusted and changes a transverse mode image of described first laser beam 31 and the second laser beam 32 by mat, and when the transverse mode image of described first laser beam 31 and the second laser beam 32 is conducive to reaching optimal process effect under certain aspect, meet required optical microstructures form.After repeatedly testing, described optical microstructures manufacture method 3 of the present invention makes the transverse mode image of described first laser beam 31 and the second laser beam 32 be Rotational Symmetry, and when exposing to described substrate 30, the transverse mode image magnetic distribution state of described first laser beam 31 and the second laser beam 32 is for mutually to stagger, and the transverse mode image preferably of described second laser beam 32 is in being surrounded on outside described first laser beam 31, by this to guarantee that the bombardment region of the second laser beam 32 falls within the described splash zone 302 of described miniature recess 301 weeks sides.
And through this kind of mode, the parameters of described first laser beam 31 and the second laser beam 32 can be adjusted more freely respectively, as the first laser beam 31 and as described in the energy intensity difference of the second laser beam 32, the energy intensity of described second laser beam 32 can be made to be less than the energy intensity of described first laser beam 31, described depressed part 303 can be made by this more to tend to leveling, even through suitable adjustment, the described depressed part 303 that described second laser beam 32 is formed can not have a volcanic crater outward appearance.Or can by position or the distance directly adjusting described first laser beam 31 and the relatively described light combination mirror of the second laser beam 32, to adjust the spacing of described first laser beam 31 after coincidence and the second laser beam 32.It can thus be appreciated that, the present invention described first laser beam 31 and the second laser beam 32 are carried out overlapping through described light combination mirror and single bombardment to the mode of described substrate 30, except can being convenient to adjust individually for described first laser beam 31 and the second laser beam 32, also can reach effect that single process forms described miniature recess 301, significantly to shorten the process time of optical microstructures simultaneously.
Please refer to Fig. 6, in the present embodiment, described in preferably, the transverse mode image of the first laser beam 31 is rounded, and the transverse mode image of described second laser beam 32 is an annulus or can be several petal-shaped arrangement block that is not connected, the transverse mode image being described second laser beam 32 is as shown in Figure 7 A circular, and the transverse mode image then for described second laser beam 32 shown in Fig. 7 B and 7C is several petal-shaped arrangement blocks that are not connected.Fig. 8 is then the transverse mode image formed in described substrate 30 after described first laser beam 31 and the second laser beam 32 overlap, the transverse mode image of described second laser beam 32 is in outside the transverse mode image being located on described first laser beam 31, by this when described first laser beam 31 forms described miniature recess 301, described second laser beam can bombard the described splash zone 302 of described miniature recess 301 weeks sides, to eliminate the protrusion that can produce in known processing method, maintain the flatness of described miniature recess 301 weeks sides.
For the surface change adding substrate 30 described in man-hour more obviously can be shown in, therefore described substrate 30 disassembled in the change procedure adding man-hour and illustrate via Fig. 9 and 10, as above describe, expose to described substrate 30 to process after described first laser beam 31 and the second laser beam 32 overlap by method of the present invention, carry out adding man-hour, when described first laser beam 31 forms described miniature recess 301 in described substrate 30 surface, simultaneously described miniature recess 301 weeks sides by the high temperature of described first laser beam 31 irradiate form described splash zone 302 time, then as shown in Figure 9, then described second laser beam 32 namely with the described splash zone 302 of bombardment, the described depressed part 303 of described miniature recess 301 is less than with Formation Depth, and as shown in Figure 10.In addition, the first above-mentioned laser beam 31 and each transverse mode image of the second laser beam 32, be only and be applied to a preferred aspect of the present invention, and the transverse mode image of described first laser beam 31 of the present invention and the second laser beam 32, is not limited to this.
Please continue to refer to Figure 11, it is the board schematic diagram of one embodiment of the invention.The present invention also discloses a kind of multimode Laser machine stand 4 in order to perform optical microstructures manufacture method as the aforementioned.Described multimode Laser machine stand 4 comprises radium-shine resonant cavity 41, carrying platform 42 of one first radium-shine resonant cavity 40,1 second and a processing combination 43.
Described first radium-shine resonant cavity 40 is in order to produce described first laser beam 31, and described second radium-shine resonant cavity 41 is in order to produce described second laser beam 32.Described carrying platform 42 is provided with accommodating fixing described substrate 30, described processing combination 43 comprises described light combination mirror 431 and a driving member 432, described driving member 432 is in order to according to optical microstructures distribution design data, adjust and utilize described light combination mirror 431 to make described first laser beam 31 and the second laser beam 32 overlapped through described light combination mirror 431, to process described substrate 30.Wherein, and the transverse mode image setting described first laser beam 31 and the second laser beam 32 is Rotational Symmetry, and in time exposing to described substrate 30, the transverse mode image magnetic distribution state of described first laser beam 31 and the second laser beam 32, for mutually to stagger, is less than the described depressed part 303 of described miniature recess 301 in described splash zone 302 with Formation Depth to guarantee that described second laser beam 32 bombards.The detail characteristic of all the other manufacture methods, can refer to foregoing teachings.
Please refer to Figure 12 again, it is the light guide plate schematic diagram of the embodiment of the present invention 1.The present invention also provides a kind of light guide plate 5, the feature of described light guide plate 5 is to have multiple optical microstructures 50, arbitrary optical microstructures 50 is made through aforesaid optical microstructures manufacture method, and the transverse mode image of the second laser beam 32 is several petal-shaped arrangement blocks that are not connected, and have described miniature recess 301 and annular arrangement in the described depressed part 303 of described splash zone 302, and described depressed part 303 is in the petal-shaped arrangement that is not connected.Described optical microstructures 50 is also laid in a surface 51 of described light guide plate 5, and the exiting surface that described surperficial 51 can be described light guide plate 50, incidence surface or reflecting surface etc., in order to being applied to as can by important documents such as the amount of light of the light mat optical microstructures of light source projects adjustment light or the uniformitys in backlight module.
Described optical microstructures manufacture method of the present invention, applies described light combination mirror and makes it overlap and shine to establish to described substrate, to form described miniature recess in described substrate by described first laser beam and the second laser beam.Even if be shaped except the described miniature recess of single process and depressed part can be reached with except the advantage significantly shortening required process time, also the parameters of described first laser beam and the second laser beam can more freely be adjusted as transverse mode image and energy intensity, and described first laser beam and the second laser beam overlap after spacing, with the demand in response to all kinds of optical microstructures pattern.
Although the foregoing describe the specific embodiment of the present invention, it will be understood by those of skill in the art that this only illustrates, protection scope of the present invention is defined by the appended claims.Those skilled in the art, under the prerequisite not deviating from principle of the present invention and essence, can make various changes or modifications to these embodiments, but these change and amendment all falls into protection scope of the present invention.
Claims (7)
1. an optical microstructures manufacture method for multimode laser processing machine table, is characterized in that, its step comprises:
One substrate is provided;
Irradiate one first laser beam and one second laser beam to light combination mirror, and this first laser beam and this second laser beam has different radium-shine mode; And
Overlapped by this first laser beam of this light combination mirror and this second laser beam and expose to this substrate, this first laser beam forms a miniature recess in this substrate, and produce a splash zone in all sides of this miniature recess simultaneously, this second laser beam then bombards this splash zone and forms a depressed part, and the degree of depth of this depressed part is less than the degree of depth of this miniature recess.
2. the optical microstructures manufacture method of multimode laser processing machine table as claimed in claim 1, it is characterized in that, the transverse mode image of this first laser beam and this second laser beam is Rotational Symmetry, and when exposing to this substrate, the transverse mode image magnetic distribution state of this first laser beam and this second laser beam is for mutually to stagger.
3. the optical microstructures manufacture method of multimode laser processing machine table as claimed in claim 2, is characterized in that, the transverse mode image of this second laser beam is plural number connected petal-shaped arrangement block.
4. the optical microstructures manufacture method of multimode laser processing machine table as claimed in claim 1, it is characterized in that, this substrate is a metal die.
5., in order to perform a multimode Laser machine stand for the optical microstructures manufacture method of multimode laser processing machine table as claimed in claim 1, it is characterized in that, comprising:
One first radium-shine resonant cavity, in order to produce this first laser beam;
One second radium-shine resonant cavity, in order to produce this second laser beam;
One carrying platform, in order to this substrate accommodating; And
One processing combination, comprises this light combination mirror and a driving member, and this driving member, in order to according to optical microstructures distribution design data, utilizes this first laser beam and this second laser beam of overlapping through this light combination mirror, processes this substrate.
6. multimode Laser machine stand as claimed in claim 7, it is characterized in that, the transverse mode image of this first laser beam and this second laser beam is Rotational Symmetry, and in time exposing to this substrate, the transverse mode image magnetic distribution state of this first laser beam and this second laser beam is for mutually to stagger.
7. a light guide plate, is characterized in that:
There is a plurality of optical microstructures, these optical microstructures arbitrary are made through the optical microstructures manufacture method of multimode laser processing machine table as claimed in claim 4, thus there is this miniature recess, and annular arrangement is in those depressed parts of this splash zone, and those depressed parts are in the petal-shaped arrangement that is not connected.
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