TWI579091B - A method of manufacturing an optical micro-structure, the machine and the light guide plate - Google Patents

Description

Optical microstructure manufacturing method, machine and light guide plate thereof

The invention relates to the field of laser processing, in particular to a manufacturing method, a machine table and a light guide plate thereof for forming an optical microstructure by multi-mode laser processing.

The light guide plate is an element for guiding light in the backlight module, and transmits the light provided by the light source to the distal end of the light guide plate through the principle of total reflection, and destroys the light by using several optical structures disposed thereon. Reflecting to direct light to the exit surface to form a uniform surface source.

Conventionally, the light guide plate is formed into an optical structure by forming a well-designed optical structure pattern through a screen printing method directly to the light guide plate to form a dot, but this method is difficult to control due to ink viscosity during printing and is optical due to ink characteristics. The size of the structure is limited, which in turn affects the quality of the output and the uniformity of light output. Moreover, it is impossible to provide an optical structure when the light guide plate is formed, and secondary processing is required, which is inconsistent with the demand for mass production. In combination with the above disadvantages, the subsequent process is a method of manufacturing a non-printed light guide plate.

In order to bond the optical structure together on the light guide plate, the optical structure is directly processed by the mold, or the optical structure is formed on the surface of the mold by etching, so as to directly on the light guide plate. Directly produces an optical structure. However, the use of machining is extremely time consuming and the size of the optical structure is subject to errors or the required small size requirements. The etching method needs to pass through complicated processes such as coating, exposure and electroforming. The procedures, etc., also increase the time cost and difficulty of manufacturing the mold.

Therefore, in order to improve the manufacturing efficiency of the optical structure pattern on the mold core or the light guide plate, there is a light guide plate structure and a manufacturing method thereof disclosed in the Republic of China Application No. 93113610, which is irradiated to a substrate surface by using at least one laser. Different positions, and wrinkle dots are formed at each position to form a mold, and a light guide plate is formed by the mold. There is also a method of forming a plurality of micro-recessed holes by laser irradiation directly on a substrate according to a designed optical structure pattern, and making the substrate a light guide plate body or a metal substrate as a printing mold of the light guide plate. Thereby, the optical structure pattern is formed directly and directly on the surface of the light guide plate or the mold core quickly and accurately. However, under the high-temperature exposure of the laser, the phenomenon that the substrate or the substrate is caused to slag splashing cannot be effectively prevented, so that one or more protrusions are formed around the micro-recessed or wrinkled dots. The protrusions are easily collapsed or collapsed into the micro-recessed holes or wrinkle points, thereby affecting the shape of the optical structure pattern, resulting in the effect of uniform light and guiding light in practical applications.

In order to eliminate the protrusions produced when the optical structure pattern is produced by using a laser beam, a method for leveling a laser processing crater as described in the Republic of China Application No. 100103674 is suitable for making a An optical microstructure pattern is formed by laser processing a surface of an outer surface of a substrate according to a pattern such that the outer surface forms a plurality of micro recesses, wherein each of the micro recesses The periphery of the opening has at least one protrusion, and after the laser processing is completed, the protrusion of the periphery of each micro-recess hole is removed, so that the periphery of the micro-recess hole is planarized, so that the micro-recess hole forms the optical microstructure pattern . Further, it is further indicated in the patent of No. 100103674 that the protrusion may be cut by a cutter, or the high pressure grit may be sprayed to strike the surface of the substrate, or the outer surface of the substrate may be ground by an abrasive tool. To remove the protrusions and the like. However, regardless of the manner in which the protrusions are removed in the above manner, they are all processed in laser processing. After another processing process, the process steps of cutting, impacting, and grinding are quite complicated, and it takes a lot of time to make the optical microstructure pattern, and the effect of removing the protrusions is not good.

Next, the method of fabricating an optical microstructure pattern of a light guide plate disclosed in the Republic of China Application No. 100103673. The manufacturing method firstly bombards a surface of a substrate by a first laser beam, and after forming a plurality of protrusions of the micro concave hole and the periphery thereof, a clockwise direction along a circumference of each of the micro concave holes The protrusions are bombarded at intervals by a plurality of second laser beams to break the protrusions and form a plurality of recesses. When the protrusion is removed, the second laser beam is sequentially bombarded with the protrusion by moving a laser emitter in a clockwise or counterclockwise direction. Thereby, the crater shape formed by the micro-recess holes being affected by the protrusions is eliminated, the light guiding effect of the light guide plate is prevented from being lowered, or the guide die manufacturing with the micro-recess holes is formed. The optical pattern of the light plate produces an error.

However, although the above method can reduce the influence of the protrusion on the overall optical structure pattern, it must undergo secondary laser processing, and the distribution of the protrusion is not constant, so the second laser beam is also The bombardment position must be adjusted one by one according to the distribution of the protrusions. Moreover, it is necessary to illuminate at intervals along the circumference of the micro-recessed holes, which requires extremely long processing time. Furthermore, as the number of recessed holes included in the optical structure pattern increases, the processing time must also be lengthened.

Therefore, how to effectively reduce the processing time required to eliminate the projections while ensuring the integrity of the micro-recessed holes is an improvement in current laser processing. Therefore, the inventors conceived a multi-mode laser processing machine, method and light guide plate thereof to solve the above-mentioned shortcomings in the current light guide plate manufacturing method.

An object of the present invention is to provide a method for manufacturing an optical microstructure, a machine table and a light guide plate thereof, which can improve the ability of laser processing to manufacture an optical microstructure, and effectively save processing time and improve production efficiency.

In order to achieve the above object, the present invention provides an optical microstructure manufacturing method for a multi-mode laser processing machine in an embodiment, the method comprising: providing a substrate; illuminating a first laser beam and a second laser beam a beam splitter mirror, and the first laser beam and the second laser beam have different laser modes; and the first laser beam and the second through the beam combiner The laser beam is incident on the substrate, the first laser beam is formed on the substrate to form a micro recess, and at the same time, a splash zone is generated on the circumference of the micro recess, and the second laser beam is bombarded. The sputtering zone is formed and a recess is formed, and the depth of the recess is smaller than the depth of the micro recess. Thereby, the first laser beam and the second laser beam can be superposed through the beam combining mirror to form a flattened micro-recessed portion by a single bombardment, thereby greatly shortening the manufacturing of the optical microstructure. Time required. And the parameters of the first laser beam and the second laser beam can be independently adjusted according to the optical microstructure pattern to be formed. Further, the present invention inherits the technical features of the above-described embodiments in the following other embodiments, and further proposes an improvement.

Moreover, in one embodiment, the transverse mode image of the first laser beam and the second laser beam is designed to be rotationally symmetric, and the first laser is irradiated to the substrate. The electromagnetic field distribution states of the transverse mode image of the beam and the second laser beam are staggered from each other. Controlling and adjusting the transverse mode image of the first laser beam and the second laser beam to ensure that the second laser beam is accurately bombarded to the splash region when irradiated to the substrate, so as to be effective The recess is formed at the splash region.

In addition, in order to achieve the best effect of bombarding the splash zone, the micro recess The circumferential side remains flat, and the present invention further provides another embodiment for the transverse mode image of the second laser beam after the experiment. In an embodiment, the transverse mode image of the second laser beam is A ring, or in another embodiment, the transverse mode image of the second laser beam is a plurality of discrete petal-like array blocks.

The manufacturing method of the present invention provides another embodiment in which the substrate is a metal mold, and after the micro concave portion is formed on the substrate, one of the light guide plates that have been fabricated is pressed by the substrate. A micro concave hole is formed on the light guide plate. Or in another embodiment, the substrate is a light guide plate, and the optical microstructure manufacturing method of the present invention is directly processed for the light guide plate to form an optical microstructure composed of a plurality of micro recessed holes. Formed on the surface of the light guide plate.

The present invention further provides, in an embodiment, a multi-mode laser machine for performing the optical microstructure manufacturing method of the multi-mode laser processing machine as described in the foregoing embodiments, including: a first a laser cavity for generating the first laser beam; a second laser cavity for generating the second laser beam; a carrier platform for accommodating the substrate; and a processing The unit includes the beam combining mirror and a transmission member, wherein the transmission member is configured to distribute design data according to an optical microstructure, and process the first laser beam and the second laser beam by the combination of the beam combining mirrors. The substrate.

Based on the above embodiment, in order to optimize the process of the micro-recess, the transverse laser image of the first laser beam and the second laser beam is obtained in an embodiment. Rotatingly symmetrical, and when irradiating to the substrate, the electromagnetic field distribution states of the transverse mode images of the first laser beam and the second laser beam are shifted from each other to ensure that the second laser beam is irradiated to the substrate Accurately bombarding the splash zone to effectively form the shower zone Depression.

In addition, the present invention also discloses a light guide plate having a plurality of optical microstructures, and any optical microstructures are transmitted through the optical micros of the multimode laser processing machine as described in the previous embodiments. The structure manufacturing method is formed to have the micro recesses and the recesses arranged annularly in the splash zone, and the recesses are arranged in a non-contiguous petal shape.

In summary, the multi-mode laser processing machine and method of the present invention and the light guide plate thereof use the beam combining mirror to overlap the first laser beam and the second laser beam to make a single processing illumination. The micro concave portion and the concave portion can be formed on the substrate, thereby effectively shortening the processing time, thereby improving the production efficiency, and the substrate surface can have a better flattening effect than the conventional laser processing process. In addition, in the manufacturing method provided by the present invention, the parameters of the first laser beam and the second laser beam, such as modality, mutual spacing, and energy intensity, can be freely adjusted, except that the processing time can be shortened. The processed micro-recesses can also be made to conform to the designed optical microstructure design requirements.

[First Experimental Example]

10‧‧‧Substrate

101‧‧‧ miniature recess

102‧‧‧Protrusions

11‧‧‧First laser beam

12‧‧‧First optical lens

13‧‧‧second laser beam

14‧‧‧Second optical lens

S101~S103‧‧‧Steps

[Second Experimental Example]

20‧‧‧Substrate

201‧‧‧ miniature recess

202‧‧‧Depression

21‧‧‧First laser beam

S201~S202‧‧‧Steps

【this invention】

30‧‧‧Substrate

301‧‧‧ miniature recess

302‧‧‧Splash area

303‧‧‧Depression

31‧‧‧First laser beam

32‧‧‧second laser beam

4‧‧‧Multimode laser machine

40‧‧‧First laser cavity

41‧‧‧Second laser cavity

42‧‧‧Loading platform

43‧‧‧Processing unit

431‧‧ ‧ beam mirror

432‧‧‧ Transmission parts

5‧‧‧Light guide plate

50‧‧‧Optical microstructure

S301~S303‧‧‧Steps

Fig. 1 is a flow chart showing the method of the first experimental example of the present invention.

Fig. 2 is a schematic view showing the processing of the first experimental example of the present invention.

Fig. 3 is a flow chart showing the method of the second experimental example of the present invention.

Fig. 4 is a schematic view showing the processing state and micro-recessed holes of the second experimental example of the present invention.

Figure 5 is a diagram showing the steps of a method according to an embodiment of the present invention.

Figure 6 is a schematic view showing a transverse mode image of a first laser beam according to an embodiment of the present invention.

FIG. 7A is a schematic diagram (1) of a transverse laser image of a second laser beam according to an embodiment of the invention.

FIG. 7B is a schematic diagram (2) of a transverse mode image of a second laser beam according to an embodiment of the invention.

FIG. 7C is a schematic diagram (3) of a transverse mode image of a second laser beam according to an embodiment of the invention.

FIG. 8 is a schematic diagram showing a transverse mode after the first laser beam and the second laser beam are overlapped according to an embodiment of the invention.

Figure 9 is a schematic view (1) of a laser processing substrate according to an embodiment of the present invention.

Figure 10 is a schematic view (2) of a laser processing substrate according to an embodiment of the present invention.

Figure 11 is a schematic view of a machine table according to an embodiment of the present invention.

Figure 12 is a schematic view of a light guide plate according to an embodiment of the present invention.

Please refer to FIGS. 1 and 2, which are process diagrams and processing diagrams of the first experimental example of the present invention. In view of the lack of a conventional method for manufacturing an optical structure for a light guide plate by using a laser, the inventors can effectively solve the above-mentioned defects and improve the processing efficiency, and carry out many experiments in the field of laser processing to obtain optical microstructure processing through laser. One of the best ways. The following is a description of the first experimental example of one of the inventors.

A common laser beam output uses electromagnetic waves to transmit a gain medium to adjust the characteristics of the output laser beam. The gain medium can be enclosed in the optical resonant cavity to further enable the electromagnetic wave to generate a resonance phenomenon in the optical resonant cavity, so that the electromagnetic wave continuously passes through the gain medium during the round-trip process, and the laser can be output when the critical state is reached. The beam, but the operation of the electromagnetic wave in the optical cavity and the design of the optical cavity, has become a very common technology, and will not be described here. When the electromagnetic wave is transmitted in the optical cavity, the electromagnetic field is affected by the boundary condition of the optical cavity, so the electromagnetic field of the electromagnetic wave will be produced according to the different boundary conditions. Different distribution states occur, and the above state is the mode of the electromagnetic field, which is simply referred to as mode. The mode of the laser beam can be divided into a longitudinal mode and a transverse mode. The difference between the longitudinal mode and the transverse mode has a difference in frequency in addition to the difference in light intensity. For different transverse mode light intensity distributions, the image of the laser beam can be visually observed by the naked eye (Patten), and the longitudinal mode can not be seen by the naked eye. Further, when the electromagnetic wave is stably reflected back and forth in the optical cavity, it allows a stable lateral electromagnetic field distribution form, which is the above-mentioned transverse mode image. Common transverse mode images come in two forms, one is axisymmetric image, generally called Hermite-Gaussian Modes, and the other is rotationally symmetric, commonly known as Laguerre-Gaussian Modes.

Since the transverse mode pattern of the laser beam can be changed to the desired state according to the adjustment of the boundary conditions, the inventors have made the optical microstructure by changing the laser transverse mode pattern, and hope to reduce the processing time. . In the present experimental example, a method for manufacturing an optical microstructure is disclosed, the steps of which are: providing a substrate 10 (step S101); focusing and bombarding a first laser beam 11 through a first optical lens 12 The surface of the substrate 10 is such that a micro-recess 101 is formed on the substrate 10, and at least one protrusion 102 is formed on the periphery of the micro-recess 101 (step S102); then, a second optical lens 14 is replaced and A second laser beam 13 is focused through the second optical lens 14 to bombard the protrusion 102 to flatten the periphery of the micro recess 101 (step S103).

Compared with the method disclosed by the prior art, the experimental example is to replace the first optical lens 12 and the second optical lens 14 and further adjust the transverse mode image of the second laser beam 13 to conform to it. The aspect of the area to be bombarded to reduce the number of bombardment times of the second laser beam 13, thereby hoping to single-illuminate the second laser beam 13 while eliminating the protrusion 102, to achieve the purpose of shortening processing time. However, since the position of the second laser beam 13 needs to be accurately irradiated on the circumferential side of the micro concave portion 101 during the second laser processing, the second laser beam 13 is bombarded by a single shot. The protrusions 102 can be eliminated. Therefore, when the second optical lens 14 is replaced, position correction is performed on the illumination center point of the first laser beam 11 and the collocation of the first optical lens 12, so that the first laser beam 11 is The same as the illumination center point of the second laser beam 13 to avoid an offset when the final bombardment to the substrate 10 is made, and the protrusion 102 cannot be effectively eliminated. However, in actual implementation, after the second optical lens 14 is replaced, it is extremely difficult to calibrate the irradiation position, and it is easy to generate a center error on the substrate 10 after bombardment. Therefore, although the time required for processing can be reduced, the reduction is eliminated. The effectiveness and accuracy of the protrusions 102, as well as the difficulty in improving the process.

In view of the absence of the first experimental example, the inventors conceived another processing mode, as described in the second experimental example below. Please refer to FIGS. 3 and 4, which are process diagrams, processing states and micro-recessed holes of the second experimental example of the present invention. In a second experimental example, a method of fabricating an optical microstructure is provided, the steps of: providing a substrate 20 (step S201); and illuminating a first laser beam 21 having a concentric circular transverse mode image to the substrate 20, The substrate 20 is formed with a micro recess 201 and a recess 202, and the recess 202 is located on the circumferential side of the micro recess 201 (step S202).

As shown in FIG. 4, the micro-recess 201 and the recess 202 formed on the substrate 20 after being bombarded by the first laser beam of the concentric circular mode image. As shown, the first laser beam 21 can be used to form the micro recess 201 directly on the substrate 20, and the laser energy distributed in the outer ring in the concentric circular mode can eliminate the original split firing. A projection that is produced when a laser beam is emitted. This method is a concentric circle using a single laser beam The transverse mode image directly forms the micro concave portion 201 and the concave portion 202, which can effectively reduce the time required for processing. However, it is difficult to achieve the inner and outer regions by adjusting and correcting the energy distribution of the first laser beam. It is difficult to adjust the interval between the inner and outer regions, and the crater is also likely to occur in the depressed portion 202.

Therefore, after many adjustments and experiments, the inventors have derived the optical microstructure manufacturing method of the multi-mode laser processing machine disclosed in the present invention, please refer to the 5th, 6th, 7th, 7th, 7th, 8th and 9th. FIG. 10 is a schematic diagram of a method according to an embodiment of the present invention, a schematic diagram of a transverse mode image of a first laser beam, a schematic diagram of a transverse mode image of each of the second laser beams, a first laser beam, and a second laser beam. A schematic diagram of a transverse mode after beam overlap and a schematic diagram of each laser processed substrate. The optical microstructure manufacturing method of the multi-mode laser processing machine includes the following steps.

A substrate 30 is provided (step S301), wherein the substrate 30 can be a metal mold or a light guide plate.

A first laser beam 31 and a second laser beam 32 are irradiated to a combination beam, and the first laser beam 31 and the second laser beam 32 have different laser modes (step S302). Preferably, the first laser beam 31 and the second laser beam 32 are gaseous lasers, solid lasers or fiber lasers.

The first laser beam 31 and the second laser beam 32 are superimposed and irradiated to the substrate 30 by the beam combining mirror, and the first laser beam 31 is formed on the substrate 30 to form a micro recess 301. At the same time, a splash zone 302 is formed on the circumference of the micro recess 301, and the second laser beam 32 bombards the splash zone 302 and forms a recess 303, and the depth of the recess 303 is smaller than The depth of the micro recess 301 is described (step S303). The recessed portion 303 may be in a single annular shape or in a manner in which a plurality of discontinuous rings are disposed on the circumferential side of the micro recess 301. Etc., it varies depending on the laser mode of the second laser beam 32.

Then, steps S301 to S303 are repeated to form a plurality of the micro recesses 301 on the substrate 30, and the micro recesses 301 are constructed into an optical microstructure pattern. As described above, the substrate 30 can be a metal mold or a light guide plate, that is, the method of the present invention can be directly processed on the light guide plate to form an optical microstructure, or can be processed on the metal mold to form an optical microstructure. After the micro recess 301 is patterned, the optical microstructure is extruded on the light guide plate by using a stamping method, or the mold is used as a mold for manufacturing the light guide plate, so as to form a light guide plate directly on the surface thereof when the light guide plate is formed and formed. Optical microstructure.

In the present invention, the first laser beam 31 and the second laser beam 32 having different laser modes are superimposed and irradiated onto the substrate 30 through the beam combining mirror, so that The transverse mode pattern and power of the first laser beam 31 and the second laser beam 32 are adjusted according to a predetermined optical microstructure, and the first laser beam 31 and the first beam are used by the beam combining mirror The two laser beams 32 are coincident so as to eliminate the crater pattern of the micro recess 301 by a single process, and reduce the time required to fabricate the optical microstructure. As described above, one of the first laser beam 31 and the second laser beam 32 may be changed by adjusting the boundary condition, and when the first laser beam 31 and the second laser beam 32 are The transverse mode image is beneficial to achieve the best processing effect under certain conditions, and conforms to the required optical microstructure. After the repeated experiment, the optical microstructure manufacturing method of the present invention is such that the transverse mode images of the first laser beam 31 and the second laser beam 32 are rotationally symmetric and are irradiated to the substrate 30. The transverse mode image electromagnetic field distribution states of the first laser beam 31 and the second laser beam 32 are shifted from each other, and the transverse mode image of the second laser beam 32 is preferably surrounded by The outside of the first laser beam 31, thereby ensuring that the bombardment region of the second laser beam 32 is attached to the periphery of the micro recess 301 Splash zone 302.

In this way, the parameters of the first laser beam 31 and the second laser beam 32, such as the first laser beam 31 and the second laser beam 32, can be adjusted more freely. The difference in energy intensity can make the energy intensity of the second laser beam 32 smaller than the energy intensity of the first laser beam 31, thereby making the recess 303 more flat, or even adjusted appropriately The recess 303 formed by the second laser beam 32 may have no crater appearance. Or adjusting the position and distance of the first laser beam 31 and the second laser beam 32 relative to the beam combining mirror to adjust the first laser beam 31 and the second laser beam after the coincidence. The distance between the beams 32. It can be seen that the present invention passes the first laser beam 31 and the second laser beam 32 through the combining mirror to recombine a single bombardment to the substrate 30, in addition to facilitating the first The laser beam 31 and the second laser beam 32 are individually adjusted, and the effect of forming the micro recess 301 in a single process can be simultaneously achieved to greatly shorten the processing time of the optical microstructure.

Referring to FIG. 6, in the embodiment, preferably, the transverse mode image of the first laser beam 31 is circular, and the transverse mode image of the second laser beam 32 is one. The ring may be a plurality of non-contiguous petal-like array blocks. As shown in FIG. 7A, the transverse mode image of the second laser beam 32 is annular, and the seventh embodiment is shown in FIGS. 7B and 7C. The transverse mode image of the two laser beams 32 is a plurality of non-contiguous petal-like array blocks. 8 is a transverse mode image formed by the first laser beam 31 and the second laser beam 32 superimposed on the substrate 30, and the transverse mode image of the second laser beam 32 is ring-shaped. On the outside of the transverse mode image of the first laser beam 31, when the micro-recess 301 is formed by the first laser beam 31, the second laser beam can bombard the micro-recess 301 The splash zone 302 on the side of the circumference to eliminate bumps generated by conventional processing methods The flatness of the peripheral side of the micro recess 301 is maintained.

In order to more clearly show the surface change of the substrate 30 during processing, the process of changing the substrate 30 during processing is disassembled and illustrated in FIGS. 9 and 10, but as described above, the method of the present invention will The first laser beam 31 and the second laser beam 32 are superimposed and irradiated to the substrate 30 for processing, when the first laser beam 31 is formed on the surface of the substrate 30 during processing. The micro-recess 301, while the peripheral side of the micro-recess 301 is irradiated by the high-temperature of the first laser beam 31 to form the splatter 302, as shown in FIG. 9, then the second laser beam 32, the splash zone 302 is subsequently bombarded to form the recess 303 having a depth smaller than that of the micro recess 301, as shown in FIG. In addition, the transverse mode images of the first laser beam 31 and the second laser beam 32 are only used in a preferred embodiment of the present invention, and the first laser beam 31 and the first embodiment of the present invention. The transverse mode image of the two laser beams 32 is not limited thereto.

Please refer to FIG. 11 , which is a schematic diagram of a machine platform according to an embodiment of the present invention. The present invention also discloses a multimode laser machine 4 for performing the optical microstructure manufacturing method as described above. The multi-mode laser machine 4 includes a first laser cavity 40, a second laser cavity 41, a carrier platform 42, and a processing unit 43.

The first laser cavity 40 is used to generate the first laser beam 31, and the second laser cavity 41 is used to generate the second laser beam 32. The carrying platform 42 is configured to receive and fix the substrate 30. The processing unit 43 includes the combining mirror 431 and a transmission member 432, and the transmission member 432 is designed to be distributed according to an optical microstructure. The first beam of laser light 31 and the second laser beam 32 that are superposed by the beam combining mirror 431 are processed, adjusted, and utilized to process the substrate 30. Wherein, and setting the first laser beam 31 and the transverse mode image of the second laser beam 32 are rotationally symmetric, and the electromagnetic field distribution state of the transverse mode image of the first laser beam 31 and the second laser beam 32 when irradiated to the substrate 30 To be staggered from each other, it is ensured that the second laser beam 32 is bombarded by the splash zone 302 to form the recess 303 having a depth smaller than that of the micro recess 301. For the detailed features of the remaining manufacturing methods, reference may be made to the foregoing.

Referring to FIG. 12 again, it is a schematic diagram of a light guide plate according to an embodiment of the invention. The present invention also provides a light guide plate 5, which is characterized by having a plurality of optical microstructures 50, which are made by the optical microstructure manufacturing method described above, and the second laser beam 32 The transverse mode image is a plurality of non-contiguous petal-like arrangement blocks, and has the micro recesses 301 and the recesses 303 annularly arranged in the splash zone 302, and the recesses 303 are disconnected. Petal-like arrangement. The optical microstructures 50 are disposed on one surface 51 of the light guide plate 5, and the surface 51 may be a light emitting surface, a light incident surface or a reflective surface of the light guide plate 50, etc., so as to be applied to, for example, a backlight mold. In the group, the light projected by the light source can be adjusted by the optical microstructure to adjust the light amount or uniformity of the light.

In the optical microstructure manufacturing method of the present invention, the first laser beam and the second laser beam are applied to the substrate by applying the combined beam to the substrate to form the substrate. Miniature recesses. In addition to the single processing, even if the micro recess and the recess are formed to greatly shorten the required processing time, the parameters of the first laser beam and the second laser beam can be more freely adjusted. For example, the transverse mode image and the energy intensity, and the distance between the first laser beam and the second laser beam are coincident to meet the requirements of various optical microstructure patterns.

However, the above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention; therefore, the equivalent changes are made without departing from the spirit and scope of the present invention. Both modifications and modifications are intended to be included within the scope of the invention.

S301~S303‧‧‧Steps

Claims (9)

A method for fabricating an optical microstructure of a multimode laser processing machine, the method comprising: providing a substrate; illuminating a first laser beam and a second laser beam to a combination beam, and the first laser beam Having a different laser mode from the second laser beam; and the first laser beam and the second laser beam passing through the beam combiner are incident on the substrate, the first laser beam being attached to the substrate Forming a micro recess in the substrate, and simultaneously forming a splash region on the periphery of the micro recess, the second laser beam bombards the splash region and forming a recess, and the depth of the recess is less than the depth of the micro recess . The optical microstructure manufacturing method of the multi-mode laser processing machine according to claim 1, wherein the transverse laser image of the first laser beam and the second laser beam is rotationally symmetric, and When irradiated to the substrate, the electromagnetic field distribution states of the transverse mode images of the first laser beam and the second laser beam are shifted from each other. The optical microstructure manufacturing method of the multi-mode laser processing machine according to claim 2, wherein the transverse mode image of the second laser beam is a ring. The optical microstructure manufacturing method of the multi-mode laser processing machine of claim 2, wherein the transverse mode image of the second laser beam is a plurality of non-contiguous petal-like arrangement blocks. The optical microstructure manufacturing method of the multi-mode laser processing machine according to the first aspect of the invention, wherein the substrate is a metal mold. The optical microstructure manufacturing method of the multi-mode laser processing machine according to the first aspect of the invention, wherein the substrate is a light guide plate. An optical micro for performing a multimode laser processing machine as described in claim 1 The multi-mode laser machine of the structural manufacturing method comprises: a first laser cavity for generating the first laser beam; and a second laser cavity for generating the second laser beam; a carrying platform for accommodating the substrate; and a processing unit including the beam combining mirror and a transmission member for distributing design data according to an optical microstructure, and using the same by the beam combining mirror A laser beam and the second laser beam are processed to the substrate. The multi-mode laser machine of claim 7, wherein the transverse laser image of the first laser beam and the second laser beam is rotationally symmetric, and when irradiated to the substrate, The electromagnetic field distribution states of the transverse mode images of the first laser beam and the second laser beam are shifted from each other. A light guide plate having a plurality of optical microstructures, any one of which is made by an optical microstructure manufacturing method of a multimode laser processing machine as described in claim 4 of the patent application. Therefore, the micro recesses and the recesses are annularly arranged in the splash zone, and the recesses are arranged in a non-contiguous petal shape.