CN104836102B - A kind of Gao Zhongying double-cavity excimer laser electric discharge synchronous control system and method - Google Patents
A kind of Gao Zhongying double-cavity excimer laser electric discharge synchronous control system and method Download PDFInfo
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Abstract
The invention discloses a kind of double-cavity excimer laser electric discharge synchronous control system and method, two Timing acquisition units to gather the pulsed discharge signal of MO chambers and PA chambers respectively；The pulsed discharge signal that delay measuring unit gathers according to two Timing acquisition units obtains the light extraction delay value between MO chambers and PA chambers；State acquisition unit gathers the status information of MO chambers and PA chambers；The status information that main control unit gathers according to light extraction delay value, delay adjustmentses value and state acquisition unit, closed loop control algorithm is performed, obtains the updated value of discharge lag, and give the value to delay output unit；Delay output unit receives the updated value of two-chamber discharge lag, while two pulses being divided into corresponding to the updated value of two-chamber discharge lag of trigger pulse are exported to two power supplys and second source to trigger electric discharge.The present invention can eliminate the influence that temperature drift and the change of intracavitary pressure are discharged line lock, realize that two-chamber electric discharge shake is less than ± 5ns.
Description
Technical field
The invention belongs to double-cavity excimer laser technical field, and in particular to a kind of double-cavity excimer laser electric discharge is same
Control system and method are walked, especially suitable for Gao Zhongying double-cavity excimer laser.
Background technology
Main oscillations chamber (MO chambers) is referred to as using a chamber in the excimer laser of double cavity structure, another is referred to as to put
Big chamber (PA chambers).Seed light caused by MO chambers needs accurately (to shake in sequential and be less than ± 5ns) to pass to PA chambers, now PA chambers
Discharge excitation amplifies the seed light energy for coming from MO chambers.Therefore this just needs to carry out essence to the electric discharge sequential of two enlarged cavities
Really control.For two-chamber PRK power supply, synchronous discharge is realized to cavity, it is desirable to two-chamber PRK
Two-chamber is discharged shake control within ± 5ns by device synchronous control technique.Double-cavity excimer laser electric discharge shake mainly by
(1) shake of two-chamber power-supply initial discharge voltage, the randomized jitter in (2) discharge cavity, (3) electric discharge when power supply intrinsic shake and
(4) shake of two-chamber power source temperature and the part of intracavitary air pressure fluctuation four composition.Wherein the solution of (4) subproblem depends on two-chamber
Quasi-molecule synchronous control technique.That is, it is necessary to using two-chamber quasi-molecule for the power supply of double-cavity excimer laser
Laser synchronisation technology can just realize two-chamber electric discharge shake control the synchronous discharge of two cavitys within ± 5ns.
Realize two-chamber electric discharge shake less than ± 5ns premise be two-chamber discharge power supply discharge in itself shake to have higher finger
Mark, otherwise control electric discharge sequential that power jitter index can not be made to reach electric discharge simply by synchronization control module and require.
The content of the invention
(1) technical problems to be solved
To be solved by this invention is that the two-chamber electric discharge shake for making double-cavity excimer laser is less than ± 5ns, to meet standard
The energy amplification of molecular laser requires.
(2) technical scheme
In order to solve the above technical problems, the present invention proposes a kind of double-cavity excimer laser electric discharge synchronous control system, institute
Stating laser includes MO chambers and PA chambers, and the MO chambers and PA chambers are respectively provided with the first power supply and second source, and the system includes prolonging
When measuring unit, main control unit delay output unit, the first Timing acquisition unit, the second Timing acquisition unit and state acquisition list
Member, wherein, the first Timing acquisition unit and the second Timing acquisition unit are respectively used to gather the arteries and veins of the MO chambers and PA chambers
Impulse electricity signal；The arteries and veins that the delay measuring unit gathers according to the first Timing acquisition unit and the second Timing acquisition unit
Impulse electricity signal obtains the light extraction delay value between the MO chambers and PA chambers；The state acquisition unit is used to gather the MO chambers
With the status information of PA chambers；The main control unit is used to be delayed according to the light extraction of the actual acquisition between the MO chambers and PA chambers
The status information of value, delay adjustmentses value and the collection of state acquisition unit, performs closed loop control algorithm, obtains two-chamber electric discharge and prolongs
When updated value, and give the value to the delay output unit；The delay output unit is used to receive the main control unit
The updated value for the two-chamber discharge lag sent, while the trigger pulse from host computer is divided into and put corresponding to the two-chamber
Two pulses of the updated value of electricity delay export is discharged to first power supply and second source with triggering two power supply.
According to the embodiment of the present invention, the delay measuring unit includes impedance matching module, integration and preposition
Amplification module, Time delay measurement module and delay output module, the impedance matching module receive the first Timing acquisition unit
With the pulsed discharge signal of the second Timing acquisition unit collection, for carrying out impedance matching to ensure signal integrity and to avoid letter
Number decay；The integration and pre-amplifying module are used to signal is integrated and amplified, and obtain the pulse side of two-way standard
Ripple signal, and it is output to the Time delay measurement module；Time delay measurement module is defeated for measuring the integration and pre-amplifying module
The delay value of the two-way pulse square wave signal gone out, then send the delay value to the delay output module；The delay is defeated
Go out module to be used to export the delay value to the main control unit 2.
According to the present invention embodiment, it is described delay output unit include a programmable delay module, two
Constant time lag module and two pulse-triggered output modules；The programmable delay module receives main control unit by serial ports and updated
Delay value and export two renewal after delay value two pulse signals, then send it to described two fixations respectively and prolong
When module；Described two constant time lag modules are used to correct the intrinsic delay time error of dual-cavity system；Described two pulse-triggereds are defeated
Go out the pulse output that module is used to receive constant time lag module respectively, electric pulse be converted into light pulse, the first power supply of triggering and
Second source discharges.
According to the embodiment of the present invention, the main control unit includes the first single-chip microcomputer and second singlechip, two
Communicated between single-chip microcomputer with dual port RAM；First single-chip microcomputer is mainly responsible for the output of time delayed signal and the realization of delays time to control algorithm；
Second singlechip is responsible for power state detection and and upper machine communication.
The present invention also proposes a kind of double-cavity excimer laser electric discharge synchronisation control means, the laser include MO chambers and
PA chambers, the MO chambers and PA chambers are respectively provided with the first power supply and second source, it is characterised in that methods described comprises the following steps：
S1, the pulsed discharge signal for being respectively used to gather the MO chambers and PA chambers；S2, the MO obtained according to the pulsed discharge signal
Light extraction delay value between chamber and PA chambers；S3, the state acquisition unit are used for the status information for gathering the MO chambers and PA chambers；
S4, the light extraction delay value according between the MO chambers and PA chambers, delay adjustmentses value and the state of state acquisition unit collection
Information, closed loop control algorithm is performed, obtain the updated value of two-chamber discharge lag；S5, the trigger pulse from host computer is divided into
Two pulses corresponding to the updated value of the two-chamber discharge lag are exported to first power supply and second source to trigger this
Two power supplys are discharged.
(3) beneficial effect
The change that the present invention can eliminate the intracavitary pressure of temperature drift and double-cavity excimer laser is put to line lock
The influence of electricity, realize that two-chamber electric discharge shake is less than ± 5ns.
Brief description of the drawings
Fig. 1 is the structural representation of the double-cavity excimer laser electric discharge synchronous control system of the present invention；
Fig. 2 is the theory diagram of the delay measuring unit of the present invention；
Fig. 3 is the logical schematic of the control algolithm of the main control unit of the present invention；
The schematic diagram of delay output unit 3 of Fig. 4 present invention；
Fig. 5 is the double-cavity excimer laser electric discharge synchronous control system structural representation of the specific embodiment of the present invention
Figure.
Embodiment
As it was previously stated, double-cavity excimer laser electric discharge shake mainly include (1) two-chamber power-supply initial discharge voltage shake,
(2) intrinsic shake, (4) two-chamber power source temperature and the intracavity gas pressure of power supply are trembled when the randomized jitter in discharge cavity, (3) electric discharge
It is dynamic.Wherein, the mode that the shake of two-chamber power-supply initial discharge voltage can share a high-power source power supply solves.Power supply during electric discharge
Intrinsic shake and discharge cavity in randomized jitter belong to uncontrollable factor, but shake of discharging is smaller.The present invention will will solve
Be that (4) part is shaken, i.e., shaken caused by the temperature drift of two-chamber power supply and intracavity gas pressure change.
The basic thought of two-chamber power supply low jitter design is：The discharge power supply of two chambers is all while is less than by precision
1 ‰ DC charging power supply charging.The open loop electric discharge timing jitter of two-chamber power supply is limited in the range of a very little.Lead to again
Cross two-chamber power supply synchronization method lifting electric discharge shake index.
The double-cavity excimer laser electric discharge synchronous control system of the present invention is applied to excimer laser, and laser includes
MO chambers and PA chambers, MO chambers and PA chambers are respectively provided with the first power supply and second source.Electric discharge synchronous control system includes Time delay measurement
Unit, main control unit, delay output unit, the first Timing acquisition unit, the second Timing acquisition unit and state acquisition unit, the
One sequential collecting unit and the second Timing acquisition unit are respectively used to gather the pulsed discharge signal of MO chambers and PA chambers；Time delay measurement
The pulsed discharge signal that unit gathers according to the first Timing acquisition unit and the second Timing acquisition unit obtain MO chambers and PA chambers it
Between light extraction delay value；State acquisition unit is used for the status information for gathering MO chambers and PA chambers；Main control unit is used for according to MO chambers
Light extraction delay value, delay adjustmentses value and the status information of state acquisition unit collection of actual acquisition between PA chambers, are performed
Closed loop control algorithm, obtains the updated value of two-chamber discharge lag, and gives the value to delay output unit；The output unit that is delayed is used
In receiving the updated value for the two-chamber discharge lag that main control unit is sent, while the trigger pulse from host computer is divided into and corresponded to
Two pulses of the updated value of two-chamber discharge lag export is discharged to the first power supply and second source with triggering two power supply.
Accordingly, double-cavity excimer laser electric discharge synchronisation control means proposed by the present invention comprises the following steps：S1, divide
The pulsed discharge signal of MO chambers and PA chambers Yong Yu not gathered；S2, going out between MO chambers and PA chambers obtained according to pulsed discharge signal
Light delay value；S3, state acquisition unit are used for the status information for gathering MO chambers and PA chambers；S4, according between MO chambers and PA chambers
The status information of light extraction delay value, delay adjustmentses value and the collection of state acquisition unit, performs closed loop control algorithm, obtains two-chamber and puts
The updated value of electricity delay；S5, the trigger pulse from host computer is divided into the updated value corresponding to two-chamber discharge lag two
Pulse exports is discharged to the first power supply and second source with triggering two power supply.
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in further detail.
Two-chamber PRK power supply is exported by high pressure fast pulse energizing gas discharge so as to produce laser emission.Each
For the excitation power supply power of cavity about all between 20-50kW, the electric discharge of such large power supply sheds hot heat to two-chamber
Corona discharge sequential has a great influence.From power initiation to steady operation, because the two-chamber delay that temperature influences and brings is up to several
Ten nanoseconds.
Fig. 1 is the structural representation of the double-cavity excimer laser electric discharge synchronous control system of the present invention.As shown in figure 1,
Laser includes MO chambers and PA chambers, and MO chambers and PA chambers are respectively provided with the first power supply and second source.Discharge synchronous control system bag
Include delay measuring unit 1, main control unit 2, delay output unit 3, the first Timing acquisition unit 4a, the second Timing acquisition unit 4b
With state acquisition unit 5.Above-mentioned each unit constitutes closed loop collection and the control system of electric discharge shake.
The pulse that first Timing acquisition unit 4a and the second Timing acquisition unit 4b is respectively used to gather MO chambers and PA chambers is put
Electric signal.
The discharge waveform that delay measuring unit 1 gathers according to the first Timing acquisition unit 4a and the second Timing acquisition unit 4b
And timing information obtains the light extraction delay value between MO chambers and PA chambers.
State acquisition unit 5 is used for the status information for gathering MO chambers and PA chambers.
Main control unit 2 can be by DSP or chip microcontroller, for the light extraction according to the actual acquisition between MO chambers and PA chambers
The MO chambers and the status information of PA chambers that delay value, delay adjustmentses value and state acquisition unit 5 are adopted, closed loop control algorithm is performed,
The updated value of two-chamber discharge lag is obtained, and gives the value to the delay output unit 3.
Delay output unit 3 receives the updated value that main control unit 2 sends two-chamber discharge lag in the form of 8 parallel ports, together
When two pulses that the trigger pulse from host computer is divided into corresponding to the updated value of the two-chamber discharge lag are exported to
One power supply and second source are to trigger two corona discharge.
Wherein, the first Timing acquisition unit 4a and the second Timing acquisition unit 4b can by the way of photodiode,
High voltage capacitive coupling can also be used.When by the way of photodiode, because going out light pulse signal and electric discharge
Do not shaken between signal, so the time delayses that the discharge signal of collection can reflect between the light pulse of MO chambers and PA chambers.
Fig. 2 is the theory diagram of delay measuring unit 1.As shown in Fig. 2 delay measuring unit 1 includes：Impedance matching module
11st, integration and pre-amplifying module 12, Time delay measurement module 13 and delay output module 14.Impedance matching module 11 passes through impedance
50 ohm of coaxial cable receives the pulsed discharge signal from two Timing acquisition unit 4a and 4b collections, two pulse letters
Number peak-to-peak value is less than 20V, and rising edge of a pulse is less than 100ns.Discharge signal trailing edge is less than 100ns, to first pass through impedance matching
Module 11 carries out impedance matching to ensure signal integrity and avoid signal from having larger decay.Integration and pre-amplifying module 12
Signal is integrated and amplified, obtains the pulse square wave signal of two-way standard, and two pulse signals are output to special
Time delay measurement module 13.Time delay measurement module 13 passes through the Time delay measurement chip measurement integration of high accuracy specialty and preposition amplification mould
The actual discharge lag of the delay value for the two-way pulse square wave signal that block 12 exports, i.e. MO and PA chambers, then by discharge lag value
Delay output module 14 is transmitted to serial ports.The delay value that delay output module 14 is used to that two-way pulse will to be collected is defeated by bus
Go out to main control unit 2.
Main control unit 2 gathers the actual time delay value of two-way pulse, and revised pulse delay value is exported after being handled.
Fig. 3 is the logical schematic of the control algolithm of main control unit 2.As shown in figure 3, TiDetected for ith discharge lag
The discharge lag value that unit collects.T0For the setting value of each discharge lag.Electric discharge all calculates actually prolonging for electric discharge every time
When and setting value difference | Ti-T0|, i.e. offset is shaken in electric discharge.Δ T is the peak excursion value that setting jitter range allows.Such as
Fruit | Ti-T0| ＜ Δs T then thinks electric discharge shake within the offset that can be born, then directly by TiOutput；If | Ti-T0| ＞ Δs
T then thinks that this electric discharge shake exceedes admissible offset, then adjusts T by algorithmiThe output of value.It is embodied in one kind
In mode, for 4kHz two-chambers electric discharge stationary problem, electric discharge every time will strictly control jitter range.And each inter-spike intervals are only
There are 250 μ s, the collection of signal, computing and output are completed in interval.So require that algorithm is simplified as far as possible in algorithm control unit,
To save operation time.The temperature and laser chamber internal pressure that delay value and state acquisition unit after combination algorithm adjustment collect
Intensity values, obtain final delay output valve.Final delay output valve is conveyed to by parallel port by delay output unit.
Fig. 4 is the delay schematic diagram of output unit 3, and delay output unit 3 is one of synchronization module important component.Due to
The difference of manufacturing process, the inherent delay of two cavity dischargings of various lasers is different, this difference about 100-
300ns.Delay output unit realizes that pulse delay should have larger dynamic range.On the other hand, two cavity dischargings are shaken again
Will be within ± 5ns, so requiring that delay output unit will have higher output resolution ratio (being less than 1ns) again.
The present invention proposes that delay output unit includes a programmable delay module (31), two constant time lag modules (32)
With two pulse-triggered output modules；The programmable delay module (31) receives the delay value of main control unit renewal by serial ports
(delay value is eight-digit binary number code), two pulse signals of delay value after two renewals are exported, are then sent it to respectively
Described two constant time lag modules；；Described two constant time lag modules (32) are used to correct due to the intrinsic delay of dual-cavity system
Error, system inherent delay error are generally ± 100ns to ± 200ns.Programmable delay module can also correct inherent delay
Error, but when programmable module output resolution ratio is 0.25ns, dynamic range only has 64ns, now must be by constant time lag
Module is corrected.Described two pulse-triggered output modules 33 are used for the pulse output for receiving constant time lag module respectively, by electricity
Pulses switch is light pulse, triggers the first power supply by optical fiber and second source discharges.On the one hand, using constant time lag module 32
Meet the requirement of delay output unit large dynamic range；On the other hand, high-resolution is met using programmable delay module 31
The requirement of rate output.Main control unit 2 controls time delay command parallel transmission to setting two-way output arteries and veins in programmable delay module 31
Rush revised two-way power supply Time delay value.This last two-way pulse-triggered power supply, completes the revised corona discharge of sequential.
Fig. 5 provides the structural representation of the specific embodiment of the present invention.As shown in figure 5, host computer uses common PC
Machine, because this circuit requires higher to realtime control, main control unit uses two single-chip microcomputers, and dual port RAM is used between single-chip microcomputer
Communication.First single-chip microcomputer is mainly responsible for the output of time delayed signal and the realization of delays time to control algorithm.Second singlechip is responsible for power supply
State-detection and and upper machine communication.Host computer output trigger signal (1-4KHz pulse), triggering programmable chip output two
Road pulse.Two-way pulse delay is controlled by the first single-chip microcomputer.Respectively after fixed delay line, triggering laser is electric for two-way delay
Source exports two-way laser.The actual signal delay of two-way laser is actually prolonged by constant fraction discriminator circuit and delay acquisition chip collection
When return to second singlechip controller new adjusted value provided after control algolithm adjusts, be output to programmable chip, complete
Control closed loop.In addition, the status signal of power supply such as temperature, voltage etc. are sent to single-chip microcomputer by A/D chip collection.Synchronization control circuit
It is high-frequency signal circuit, the circuit in the high pressure interference of electric discharge cavity discharging, has so synchronous circuit plate should be arranged on again
In the cabinet of shield effectiveness, power supply uses DC-DC insulating power supplies.
Particular embodiments described above, the purpose of the present invention, technical scheme and beneficial effect are carried out further in detail
Describe in detail bright, it should be understood that the foregoing is only the present invention specific embodiment, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., the protection of the present invention should be included in
Within the scope of.
Claims (4)
- The synchronous control system 1. a kind of double-cavity excimer laser is discharged, the laser include MO chambers and PA chambers, the MO chambers with PA chambers are respectively provided with the first power supply and second source, it is characterised in that the system includes delay measuring unit (1), master control list First (2), delay output unit (3), the first Timing acquisition unit (4a), the second Timing acquisition unit (4b) and state acquisition unit (5), wherein,The first Timing acquisition unit (4a) and the second Timing acquisition unit (4b) are respectively used to gather the MO chambers and PA chambers Pulsed discharge signal；The delay measuring unit (1) gathers according to the first Timing acquisition unit (4a) and the second Timing acquisition unit (4b) Pulsed discharge signal obtain light extraction delay value between the MO chambers and PA chambers；The state acquisition unit (5) is used for the status information for gathering the MO chambers and PA chambers；The main control unit (2) is used for light extraction delay value, delay adjustmentses according to the actual acquisition between the MO chambers and PA chambers Value and the status information of state acquisition unit (5) collection, perform closed loop control algorithm, obtain the renewal of two-chamber discharge lag Value, and give the value to the delay output unit (3)；The delay output unit (3) is used for the updated value for receiving the two-chamber discharge lag that the main control unit (2) is sent, Simultaneously two pulses that the trigger pulse from host computer is divided into corresponding to the updated value of the two-chamber discharge lag export to First power supply and second source are discharged with triggering two power supply；The delay output unit (3) includes a programmable delay module (31), two constant time lag modules (32) and two Pulse-triggered output module；The programmable delay module (31) is prolonged after two renewals of delay value and output of main control unit renewal are received by serial ports Two pulse signals of duration, then send it to described two constant time lag modules respectively；Described two constant time lag modules (32) are used to correct the intrinsic delay time error of dual-cavity system；Described two pulse-triggered output modules (33) are used for the pulse output for receiving constant time lag module respectively, and electric pulse is turned Light pulse is changed to, triggers the first power supply and second source electric discharge.
- The synchronous control system 2. double-cavity excimer laser as claimed in claim 1 is discharged, it is characterised in that the delay is surveyed Measuring unit (1) includes impedance matching module (11), integration and pre-amplifying module (12), Time delay measurement module (13) and is delayed defeated Go out module (14),The impedance matching module (11) receives the first Timing acquisition unit (4a) and the second Timing acquisition unit (4b) is adopted The pulsed discharge signal of collection, for the decay for carrying out impedance matching to ensure signal integrity He avoid signal；The integration and pre-amplifying module (12) are used to signal is integrated and amplified, and obtain the pulse square wave of two-way standard Signal, and it is output to the Time delay measurement module (13)；Time delay measurement module (13) is used for the two-way pulse square wave signal for measuring integration and pre-amplifying module (12) output Delay value, then by the delay value send to it is described delay output module (14)；The delay output module (14) is used to export the delay value to give the main control unit (2).
- The synchronous control system 3. double-cavity excimer laser as claimed in claim 1 or 2 is discharged, it is characterised in that the master Control unit (2) includes the first single-chip microcomputer and second singlechip, is communicated between two single-chip microcomputers with dual port RAM；First monolithic owner It is responsible for the output of time delayed signal and the realization of delays time to control algorithm；Second singlechip is responsible for power state detection and and host computer Communication.
- The synchronisation control means 4. a kind of double-cavity excimer laser using system any one of claim 1-3 is discharged, The laser includes MO chambers and PA chambers, and the MO chambers and PA chambers are respectively provided with the first power supply and second source, it is characterised in that institute The method of stating comprises the following steps：S1, the pulsed discharge signal for being respectively used to gather the MO chambers and PA chambers；S2, the light extraction delay value between the MO chambers and PA chambers obtained according to the pulsed discharge signal；S3, the state acquisition unit (5) are used for the status information for gathering the MO chambers and PA chambers；S4, the light extraction delay value according between the MO chambers and PA chambers, delay adjustmentses value and the institute of state acquisition unit (5) collection Status information is stated, performs closed loop control algorithm, obtains the updated value of two-chamber discharge lag；S5, the trigger pulse from host computer be divided into corresponding to the updated value of the two-chamber discharge lag two pulses output Discharged to first power supply and second source with triggering two power supply.
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| CN106300008B (en) * | 2016-08-30 | 2020-04-28 | 北京卓镭激光技术有限公司 | Method for regulating and controlling output frequency of laser |
| CN113783101B (en) * | 2021-07-28 | 2024-02-02 | 北京科益虹源光电技术有限公司 | Energy control method and device for dual-cavity excimer laser |
| CN116960712A (en) * | 2022-04-18 | 2023-10-27 | 北京科益虹源光电技术有限公司 | Method and device for detecting energy drop point of excimer laser |
| CN116960716B (en) * | 2022-04-18 | 2024-03-29 | 北京科益虹源光电技术有限公司 | Energy drop recovery method and device for excimer laser |
| CN117543324A (en) * | 2022-12-27 | 2024-02-09 | 北京科益虹源光电技术有限公司 | Synchronous control method and control equipment for dual-cavity excimer laser and laser |
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